Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer

Shi, Ling -Ying; Lee, Sangho; Cheng, Li -Chen; Huang, Hejin; Liao, Fen; Ran, Rong; Yager, Kevin G.; Ross, Caroline A.

doi:10.1021/acs.macromol.8b01938

Title: Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer

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Abstract

The long-range ordering and directed self-assembly of thin films of a high interaction parameter rod–coil liquid crystalline block copolymer (LC BCP), poly(dimethylsiloxane)-b-poly{2,5-bis[(4-methoxyphenyl)-oxycarbonyl]styrene} (PDMS-b-PMPCS, or DM), is described. The LC BCP was spin-coated on a polystyrene brush functionalized substrate and then thermally annealed at different temperatures with respect to the LC ordering temperature. The effects of the wetting behavior, commensurability between the film thickness and the periodicity, and the LC orientation on the ordering and orientation of the microdomains are described. A monolayer of in-plane cylinders with excellent long-range ordering was produced, and was transferred into SiO_x patterns with tunable sub-10 nm feature sizes. Well-ordered multilayer in-plane cylinders were produced in thicker films, and the correlation between microstructure evolution and the LC ordering process was studied by grazing-incidence small-angle X-ray scattering (GISAXS) and wide-angle X-ray scattering (GIWAXS). Finally, the cylindrical rod–coil BCP was directed into a novel ladder morphology within lithographically patterned substrate trenches, as well as into patterns of parallel or transverse cylinders. As a result, the ordering of cylinders, the ladder morphology, and the etch selectivity and thermal stability of this high-interaction parameter silicon-containing LC rod–coil BCP demonstrate its applicability to nanoscale lithography.

Authors:

^[1];

^[2];

^[2]; Huang, Hejin ^[2]; Liao, Fen ^[3]; Ran, Rong ^[3];

^[4];

^[2]

Sichuan Univ., Chengdu (China); Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sichuan Univ., Chengdu (China)
Brookhaven National Lab. (BNL), Upton, NY (United States)

Publication Date:: 2019-01-04

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1498278

Report Number(s):: BNL-211342-2019-JAAM
Journal ID: ISSN 0024-9297

Grant/Contract Number:: SC0012704

Resource Type:: Accepted Manuscript

Journal Name:: Macromolecules

Additional Journal Information:: Journal Volume: 52; Journal Issue: 2; Journal ID: ISSN 0024-9297

Publisher:: American Chemical Society

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY; block copolymer

Citation Formats


                    Shi, Ling -Ying, Lee, Sangho, Cheng, Li -Chen, Huang, Hejin, Liao, Fen, Ran, Rong, Yager, Kevin G., and Ross, Caroline A. Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer.  United States: N. p., 2019. 
Web.  doi:10.1021/acs.macromol.8b01938.

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                    Shi, Ling -Ying, Lee, Sangho, Cheng, Li -Chen, Huang, Hejin, Liao, Fen, Ran, Rong, Yager, Kevin G., & Ross, Caroline A. Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer.  United States.  https://doi.org/10.1021/acs.macromol.8b01938

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                    Shi, Ling -Ying, Lee, Sangho, Cheng, Li -Chen, Huang, Hejin, Liao, Fen, Ran, Rong, Yager, Kevin G., and Ross, Caroline A. Fri .  
"Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer".  United States.  https://doi.org/10.1021/acs.macromol.8b01938.  https://www.osti.gov/servlets/purl/1498278.

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@article{osti_1498278,

  title        = {Thin Film Self-Assembly of a Silicon-Containing Rod–Coil Liquid Crystalline Block Copolymer},

  author       = {Shi, Ling -Ying and Lee, Sangho and Cheng, Li -Chen and Huang, Hejin and Liao, Fen and Ran, Rong and Yager, Kevin G. and Ross, Caroline A.},

  abstractNote = {The long-range ordering and directed self-assembly of thin films of a high interaction parameter rod–coil liquid crystalline block copolymer (LC BCP), poly(dimethylsiloxane)-b-poly{2,5-bis[(4-methoxyphenyl)-oxycarbonyl]styrene} (PDMS-b-PMPCS, or DM), is described. The LC BCP was spin-coated on a polystyrene brush functionalized substrate and then thermally annealed at different temperatures with respect to the LC ordering temperature. The effects of the wetting behavior, commensurability between the film thickness and the periodicity, and the LC orientation on the ordering and orientation of the microdomains are described. A monolayer of in-plane cylinders with excellent long-range ordering was produced, and was transferred into SiOx patterns with tunable sub-10 nm feature sizes. Well-ordered multilayer in-plane cylinders were produced in thicker films, and the correlation between microstructure evolution and the LC ordering process was studied by grazing-incidence small-angle X-ray scattering (GISAXS) and wide-angle X-ray scattering (GIWAXS). Finally, the cylindrical rod–coil BCP was directed into a novel ladder morphology within lithographically patterned substrate trenches, as well as into patterns of parallel or transverse cylinders. As a result, the ordering of cylinders, the ladder morphology, and the etch selectivity and thermal stability of this high-interaction parameter silicon-containing LC rod–coil BCP demonstrate its applicability to nanoscale lithography.},

  doi          = {10.1021/acs.macromol.8b01938},

  journal      = {Macromolecules},

  number       = 2,

  volume       = 52,

  place        = {United States},

  year         = {2019},

  month        = {1}

}

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