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Title: Depth-graded Mo/Si multilayer coatings for hard x-rays

Journal Article · · Optics Express
 [1];  [1];  [1];  [1];  [2];  [1];  [1]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Rigaku Innovative Technologies, Inc., Auburn Hills, MI (United States)
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This manuscript presents the first systematic study of non-periodic, broadband Mo/Si multilayer coatings with and without B4C interface barrier layers for hard x-ray applications with large field of view. The photon energy of operation in this work is 17.4 keV, the Mo Kα emission line. The coatings involve layers with varying thicknesses in the nanometer scale and the behavior at the layer interfaces plays a crucial role in their performance. Reflectivity measurements and modeling at 8.05 keV and 17.4 keV, Transmission Electron Microscopy (TEM), as well as thin film stress measurements, are employed to examine and optimize the reflective performance of these coatings and the physics of their constituent layers and interfaces. Mo/Si with B4C barrier layers on the Mo-on-Si interface is shown to produce the highest reflectivity among all design configurations considered in this work.

Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE; LLNL Laboratory Directed Research and Development (LDRD) Program
Grant/Contract Number:
AC52-07NA27344
OSTI ID:
1496913
Alternate ID(s):
OSTI ID: 1513155
Report Number(s):
LLNL-JRNL-760501; 949088
Journal Information:
Optics Express, Vol. 27, Issue 5; ISSN 1094-4087
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 7 works
Citation information provided by
Web of Science

References (18)

Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors conference May 2009
Developments in realistic design for aperiodic Mo/Si multilayer mirrors journal January 2006
Reduction of residual stress in extreme ultraviolet Mo/Si multilayer mirrors with postdeposition thermal treatments journal March 2001
Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory conference August 2005
Aperiodic Mo/Si multilayers for hard x-rays journal January 2016
Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors journal June 2002
Improved reflectance and stability of Mo-Si multilayers journal August 2002
Demonstration of multilayer reflective optics at photon energies above 06 MeV journal January 2014
Physics of Reflective Optics for the Soft Gamma-Ray Photon Energy Range journal July 2013
The microstructure of sputter‐deposited coatings journal November 1986
Stress, reflectance, and temporal stability of sputter-deposited Mo/Si and Mo/Be multilayer films for extreme ultraviolet lithography journal July 1999
X-ray broadband Ni/SiC multilayers: improvement with W barrier layers journal January 2014
Initial performance results of the OMEGA laser system journal January 1997
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 journal July 1993
Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance journal March 2016
Thermally induced structural modification of Mo‐Si multilayers journal March 1990
IMD—Software for modeling the optical properties of multilayer films journal January 1998
Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers journal June 2010

Figures / Tables (13)

Figure 1(p. 7)figure Figure 1
Table 1(p. 7)table Table 1
Figure 2(p. 8)figure Figure 2
Table 2(p. 9)table Table 2
Figure 3(p. 10)figure Figure 3
Figure 4(p. 10)figure Figure 4
Figure 5(p. 11)figure Figure 5
Figure 6(p. 12)figure Figure 6
Figure 7(p. 13)figure Figure 7
Figure 8(p. 13)figure Figure 8
Table 3(p. 14)table Table 3
Figure 9(p. 15)figure Figure 9
Figure 10(p. 17)figure Figure 10

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