Depth-graded Mo/Si multilayer coatings for hard x-rays

Burcklen, Catherine; Pardini, Tom; Alameda, Jennifer; Robinson, Jeff; Platonov, Yuriy; Walton, Chris; Soufli, Regina

doi:10.1364/OE.27.007291

Title: Depth-graded Mo/Si multilayer coatings for hard x-rays

Journal Article · 26 February 2019 · Optics Express

DOI: https://doi.org/10.1364/OE.27.007291 · OSTI ID:1496913

Burcklen, Catherine; Pardini, Tom; Alameda, Jennifer; Robinson, Jeff; Platonov, Yuriy; Walton, Chris; Soufli, Regina

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Research Organization:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Organization:: LLNL Laboratory Directed Research and Development (LDRD) Program; USDOE

Grant/Contract Number:: AC52-07NA27344

OSTI ID:: 1496913

Report Number(s):: LLNL-JRNL--760501

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 5 Vol. 27; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of AmericaCopyright Statement

Country of Publication:: United States

Language:: English

References (18)

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Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers Jonnard, Philippe; Maury, Hélène; Le Guen, Karine Surface Science, Vol. 604, Issue 11-12 https://doi.org/10.1016/j.susc.2010.03.012	journal	June 2010
IMD—Software for modeling the optical properties of multilayer films Windt, David L. Computers in Physics, Vol. 12, Issue 4 https://doi.org/10.1063/1.168689	journal	January 1998
Thermally induced structural modification of Mo‐Si multilayers Stearns, D. G.; Stearns, M. B.; Cheng, Y. Journal of Applied Physics, Vol. 67, Issue 5 https://doi.org/10.1063/1.345544	journal	March 1990
Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance Burcklen, C.; Soufli, R.; Dennetiere, D. Journal of Applied Physics, Vol. 119, Issue 12 https://doi.org/10.1063/1.4944723	journal	March 2016
Physics of Reflective Optics for the Soft Gamma-Ray Photon Energy Range Fernández-Perea, Mónica; Descalle, Marie-Anne; Soufli, Regina Physical Review Letters, Vol. 111, Issue 2 https://doi.org/10.1103/PhysRevLett.111.027404	journal	July 2013
The microstructure of sputter‐deposited coatings Thornton, John A. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 4, Issue 6 https://doi.org/10.1116/1.573628	journal	November 1986
Reduction of residual stress in extreme ultraviolet Mo/Si multilayer mirrors with postdeposition thermal treatments Montcalm, Claude Optical Engineering, Vol. 40, Issue 3 https://doi.org/10.1117/1.1346584	journal	March 2001
Improved reflectance and stability of Mo-Si multilayers Bajt, Sasˇa Optical Engineering, Vol. 41, Issue 8 https://doi.org/10.1117/1.1489426	journal	August 2002
Stress, reflectance, and temporal stability of sputter-deposited Mo/Si and Mo/Be multilayer films for extreme ultraviolet lithography Mirkarimi, Paul B. Optical Engineering, Vol. 38, Issue 7 https://doi.org/10.1117/1.602170	journal	July 1999
Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory Soufli, Regina; Windt, David L.; Robinson, Jeff C. Optics & Photonics 2005, SPIE Proceedings https://doi.org/10.1117/12.617370	conference	August 2005
Morphology, microstructure, stress and damage properties of thin film coatings for the LCLS x-ray mirrors Soufli, Regina; Baker, Sherry L.; Robinson, Jeff C. SPIE Europe Optics + Optoelectronics, SPIE Proceedings https://doi.org/10.1117/12.823836	conference	May 2009
Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors Braun, Stefan; Mai, Hermann; Moss, Matthew Japanese Journal of Applied Physics, Vol. 41, Issue Part 1, No. 6B https://doi.org/10.1143/JJAP.41.4074	journal	June 2002
Developments in realistic design for aperiodic Mo/Si multilayer mirrors Aquila, A. L.; Salmassi, F.; Dollar, F. Optics Express, Vol. 14, Issue 21 https://doi.org/10.1364/OE.14.010073	journal	January 2006
Demonstration of multilayer reflective optics at photon energies above 06 MeV Brejnholt, Nicolai F.; Soufli, Regina; Descalle, Marie-Anne Optics Express, Vol. 22, Issue 13 https://doi.org/10.1364/OE.22.015364	journal	January 2014
X-ray broadband Ni/SiC multilayers: improvement with W barrier layers Emprin, B.; Troussel, Ph.; Soullié, G. Optics Express, Vol. 22, Issue 21 https://doi.org/10.1364/OE.22.025853	journal	January 2014
Aperiodic Mo/Si multilayers for hard x-rays Pardini, Tom; Alameda, Jennifer; Platonov, Yuriy Optics Express, Vol. 24, Issue 16 https://doi.org/10.1364/OE.24.018642	journal	January 2016

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