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Title: Resolving 500 nm axial separation by multi-slice X-ray ptychography

Abstract

Multi-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. As a result, the enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.

Authors:
ORCiD logo [1];  [1];  [2];  [1];  [3];  [1];  [1];  [1];  [1];  [1];  [4];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States); Shanghai Synchrotron Radiation Facility, Shanghai (China)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States); Ozyegin Univ., Istanbul (Turkey)
  4. Brookhaven National Lab. (BNL), Upton, NY (United States); Univ. College London, London (United Kingdom)
Publication Date:
Research Org.:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1495009
Report Number(s):
BNL-211275-2019-JAAM
Journal ID: ISSN 2053-2733; ACSAD7
Grant/Contract Number:  
SC0012704
Resource Type:
Accepted Manuscript
Journal Name:
Acta Crystallographica. Section A, Foundations and Advances (Online)
Additional Journal Information:
Journal Name: Acta Crystallographica. Section A, Foundations and Advances (Online); Journal Volume: 75; Journal Issue: 2; Journal ID: ISSN 2053-2733
Publisher:
International Union of Crystallography
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; X-ray ptychography; multi-slice approach; nanostructures

Citation Formats

Huang, Xiaojing, Yan, Hanfei, He, Yan, Ge, Mingyuan, Öztürk, Hande, Fang, Yao-Lung L., Ha, Sungsoo, Lin, Meifeng, Lu, Ming, Nazaretski, Evgeny, Robinson, Ian K., and Chu, Yong S. Resolving 500 nm axial separation by multi-slice X-ray ptychography. United States: N. p., 2019. Web. doi:10.1107/S2053273318017229.
Huang, Xiaojing, Yan, Hanfei, He, Yan, Ge, Mingyuan, Öztürk, Hande, Fang, Yao-Lung L., Ha, Sungsoo, Lin, Meifeng, Lu, Ming, Nazaretski, Evgeny, Robinson, Ian K., & Chu, Yong S. Resolving 500 nm axial separation by multi-slice X-ray ptychography. United States. doi:10.1107/S2053273318017229.
Huang, Xiaojing, Yan, Hanfei, He, Yan, Ge, Mingyuan, Öztürk, Hande, Fang, Yao-Lung L., Ha, Sungsoo, Lin, Meifeng, Lu, Ming, Nazaretski, Evgeny, Robinson, Ian K., and Chu, Yong S. Tue . "Resolving 500 nm axial separation by multi-slice X-ray ptychography". United States. doi:10.1107/S2053273318017229. https://www.osti.gov/servlets/purl/1495009.
@article{osti_1495009,
title = {Resolving 500 nm axial separation by multi-slice X-ray ptychography},
author = {Huang, Xiaojing and Yan, Hanfei and He, Yan and Ge, Mingyuan and Öztürk, Hande and Fang, Yao-Lung L. and Ha, Sungsoo and Lin, Meifeng and Lu, Ming and Nazaretski, Evgeny and Robinson, Ian K. and Chu, Yong S.},
abstractNote = {Multi-slice X-ray ptychography offers an approach to achieve images with a nanometre-scale resolution from samples with thicknesses larger than the depth of field of the imaging system by modeling a thick sample as a set of thin slices and accounting for the wavefront propagation effects within the specimen. Here, we present an experimental demonstration that resolves two layers of nanostructures separated by 500 nm along the axial direction, with sub-10 nm and sub-20 nm resolutions on two layers, respectively. Fluorescence maps are simultaneously measured in the multi-modality imaging scheme to assist in decoupling the mixture of low-spatial-frequency features across different slices. As a result, the enhanced axial sectioning capability using correlative signals obtained from multi-modality measurements demonstrates the great potential of the multi-slice ptychography method for investigating specimens with extended dimensions in 3D with high resolution.},
doi = {10.1107/S2053273318017229},
journal = {Acta Crystallographica. Section A, Foundations and Advances (Online)},
number = 2,
volume = 75,
place = {United States},
year = {2019},
month = {2}
}

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