Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong

doi:10.1007/s11837-018-3141-4

Title: Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Abstract

Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. Recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.

Authors:

Subramanian, Ashwanth ^[1]; Tiwale, Nikhil ^[2];

^[3]

Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials
Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering; Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials

Publication Date:: Mon Sep 24 00:00:00 EDT 2018

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1491681

Report Number(s):: BNL-210906-2019-JAAM
Journal ID: ISSN 1047-4838

Grant/Contract Number:: SC0012704

Resource Type:: Accepted Manuscript

Journal Name:: JOM. Journal of the Minerals, Metals & Materials Society

Additional Journal Information:: Journal Volume: 71; Journal Issue: 1; Journal ID: ISSN 1047-4838

Publisher:: Springer

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE

Citation Formats


                    Subramanian, Ashwanth, Tiwale, Nikhil, and Nam, Chang-Yong. Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition.  United States: N. p., 2018. 
Web.  doi:10.1007/s11837-018-3141-4.

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                    Subramanian, Ashwanth, Tiwale, Nikhil, & Nam, Chang-Yong. Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition.  United States.  https://doi.org/10.1007/s11837-018-3141-4

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                    Subramanian, Ashwanth, Tiwale, Nikhil, and Nam, Chang-Yong. Mon .  
"Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition".  United States.  https://doi.org/10.1007/s11837-018-3141-4.  https://www.osti.gov/servlets/purl/1491681.

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@article{osti_1491681,

  title        = {Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition},

  author       = {Subramanian, Ashwanth and Tiwale, Nikhil and Nam, Chang-Yong},

  abstractNote = {Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. Recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.},

  doi          = {10.1007/s11837-018-3141-4},

  journal      = {JOM. Journal of the Minerals, Metals & Materials Society},

  number       = 1,

  volume       = 71,

  place        = {United States},

  year         = {Mon Sep 24 00:00:00 EDT 2018},

  month        = {Mon Sep 24 00:00:00 EDT 2018}

}

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https://doi.org/10.1007/s11837-018-3141-4

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Cited by: 36 works

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Figures / Tables:

Fig. 1: Schematic descriptions of temporal pressure profiles comparing the normal ALD (top), SIS (Middle), and SVI processes (Bottom), respectively. A (red) and B (blue) denote organometallic precursors and counter reactants (e.g., oxidants), respectively.

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Works referencing / citing this record:

Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
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Tiwale, Nikhil; Subramanian, Ashwanth; Kisslinger, Kim
Journal of Materials Chemistry C, Vol. 7, Issue 29
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The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
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Waldman, Ruben Z.; Mandia, David J.; Yanguas-Gil, Angel
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Title: Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Abstract

Citation Formats

Figures / Tables:

Self-assembled nanotextures impart broadband transparency to glass windows and solar cell encapsulants journal, October 2017

Systematic study of trimethyl aluminum infiltration in polyethylene terephthalate and its effect on the mechanical properties of polyethylene terephthalate fibers journal, January 2015

Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study journal, December 2016

Fabrication of polymeric microparticles for drug delivery by soft lithography journal, July 2006

Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development journal, July 2015

In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation journal, September 2014

Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation journal, December 2014

Hybrid nanomaterials through molecular and atomic layer deposition: Top down, bottom up, and in-between approaches to new materials journal, January 2016

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates journal, May 2011

Patterning with block copolymer thin films journal, February 2005

Anodized Aluminum Oxide/Polydimethylsiloxane Hybrid Mold for Roll-to-Roll Nanoimprinting journal, April 2018

Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates journal, November 2015

Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition journal, January 2012

Polymer-ZnO nanocomposites foils and thin films for UV protection conference, January 2014

Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates journal, November 2015

Greatly Increased Toughness of Infiltrated Spider Silk journal, April 2009

Silicon nanopillar anodes for lithium-ion batteries using nanoimprint lithography with flexible molds journal, November 2014

A review on polymer nanofibers by electrospinning and their applications in nanocomposites journal, November 2003

Damping of Nanomechanical Resonators journal, July 2010

Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis journal, November 2017

Collapse and Reversibility of the Superhydrophobic State on Nanotextured Surfaces journal, May 2014

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates journal, December 2016

Fabrication of ZnO Nanowires Using Nanoscale Spacer Lithography for Gas Sensors journal, August 2008

Nanofabrication by electron beam lithography and its applications: A review journal, March 2015

Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites journal, November 2017

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis journal, July 2011

Formation of novel photoluminescent hybrid materials by sequential vapor infiltration into polyethylene terephthalate fibers journal, November 2014

Chemical modification of polymer surfaces for advanced triboelectric nanogenerator development journal, December 2016

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Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films journal, July 2012

Non-native three-dimensional block copolymer morphologies journal, December 2016

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Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration journal, April 2016

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Mechanically robust and size-controlled MoS2/graphene hybrid aerogels as high-performance anodes for lithium-ion batteries journal, November 2017

Polymer self assembly in semiconductor microelectronics journal, September 2007

Transparent and UV-shielding ZnO@PMMA nanocomposite films journal, December 2013

Robust Superhydrophobicity in Large-Area Nanostructured Surfaces Defined by Block-Copolymer Self Assembly journal, October 2013

Review of photoluminescence performance of nano-sized semiconductor materials and its relationships with photocatalytic activity journal, July 2006

Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness journal, February 2017

Gas Transport Selectivity of Ultrathin, Nanoporous, Inorganic Membranes Made from Block Copolymer Templates journal, October 2017

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers journal, September 2010

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates journal, November 2015

Damping of Nanomechanical Resonators text, January 2010

Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists journal, January 2019

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective journal, November 2019

Self-assembled nanotextures impart broadband transparency to glass windows and solar cell encapsulants
journal, October 2017

Systematic study of trimethyl aluminum infiltration in polyethylene terephthalate and its effect on the mechanical properties of polyethylene terephthalate fibers
journal, January 2015

Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study
journal, December 2016

Fabrication of polymeric microparticles for drug delivery by soft lithography
journal, July 2006

Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development
journal, July 2015

In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation
journal, September 2014

Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation
journal, December 2014

Hybrid nanomaterials through molecular and atomic layer deposition: Top down, bottom up, and in-between approaches to new materials
journal, January 2016

A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates
journal, May 2011

Patterning with block copolymer thin films
journal, February 2005

Anodized Aluminum Oxide/Polydimethylsiloxane Hybrid Mold for Roll-to-Roll Nanoimprinting
journal, April 2018

Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates
journal, November 2015

Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition
journal, January 2012

Polymer-ZnO nanocomposites foils and thin films for UV protection
conference, January 2014

Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates
journal, November 2015

Greatly Increased Toughness of Infiltrated Spider Silk
journal, April 2009

Silicon nanopillar anodes for lithium-ion batteries using nanoimprint lithography with flexible molds
journal, November 2014

A review on polymer nanofibers by electrospinning and their applications in nanocomposites
journal, November 2003

Damping of Nanomechanical Resonators
journal, July 2010

Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis
journal, November 2017

Collapse and Reversibility of the Superhydrophobic State on Nanotextured Surfaces
journal, May 2014

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
journal, December 2016

Fabrication of ZnO Nanowires Using Nanoscale Spacer Lithography for Gas Sensors
journal, August 2008

Nanofabrication by electron beam lithography and its applications: A review
journal, March 2015

Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites
journal, November 2017

Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
journal, July 2011

Formation of novel photoluminescent hybrid materials by sequential vapor infiltration into polyethylene terephthalate fibers
journal, November 2014

Chemical modification of polymer surfaces for advanced triboelectric nanogenerator development
journal, December 2016

Temperature and Exposure Dependence of Hybrid Organic–Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers
journal, October 2012

Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films
journal, July 2012

Non-native three-dimensional block copolymer morphologies
journal, December 2016

Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells
journal, January 2015

Improved Mechanical Stability of Dried Collagen Membrane after Metal Infiltration
journal, July 2010

Synergistic effect of reduced graphene oxide, CNT and metal oxides on cellulose matrix for supercapacitor applications
journal, April 2018

Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures
journal, December 2012

Hybrid photovoltaic devices of polymer and ZnO nanofiber composites
journal, February 2006

Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration
journal, April 2016

Etch properties of resists modified by sequential infiltration synthesis
journal, November 2011

Directing Hybrid Structures by Combining Self-Assembly of Functional Block Copolymers and Atomic Layer Deposition: A Demonstration on Hybrid Photovoltaics
journal, November 2015

Mechanisms and reactions during atomic layer deposition on polymers
journal, December 2013

Deterministic temporal chaos from a mid-infrared external cavity quantum cascade lasers
conference, February 2016

π-Conjugated Polymers for Organic Electronics and Photovoltaic Cell Applications ^†
journal, February 2011

Enhanced polymeric lithography resists via sequential infiltration synthesis
journal, July 2011

Mechanically robust and size-controlled MoS2/graphene hybrid aerogels as high-performance anodes for lithium-ion batteries
journal, November 2017

Polymer self assembly in semiconductor microelectronics
journal, September 2007

Transparent and UV-shielding ZnO@PMMA nanocomposite films
journal, December 2013

Robust Superhydrophobicity in Large-Area Nanostructured Surfaces Defined by Block-Copolymer Self Assembly
journal, October 2013

Review of photoluminescence performance of nano-sized semiconductor materials and its relationships with photocatalytic activity
journal, July 2006

Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness
journal, February 2017

Gas Transport Selectivity of Ultrathin, Nanoporous, Inorganic Membranes Made from Block Copolymer Templates
journal, October 2017

Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers
journal, September 2010

Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates
journal, November 2015

Damping of Nanomechanical Resonators
text, January 2010

Advancing next generation nanolithography with infiltration synthesis of hybrid nanocomposite resists
journal, January 2019

The chemical physics of sequential infiltration synthesis—A thermodynamic and kinetic perspective
journal, November 2019