Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Subramanian, Ashwanth; Tiwale, Nikhil; Nam, Chang-Yong

doi:10.1007/s11837-018-3141-4

Title: Review of Recent Advances in Applications of Vapor-Phase Material Infiltration Based on Atomic Layer Deposition

Journal Article · 24 September 2018 · JOM. Journal of the Minerals, Metals & Materials Society

DOI: https://doi.org/10.1007/s11837-018-3141-4 · OSTI ID:1491681

Subramanian, Ashwanth ^[1]; Tiwale, Nikhil ^[2];

^[3]

Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering
Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials
Stony Brook Univ., NY (United States). Dept. of Materials Science and Chemical Engineering; Brookhaven National Lab. (BNL), Upton, NY (United States). Center for Functional Nanomaterials

Polymer–inorganic hybrid nanocomposites exhibit enhanced material properties, combining the advantages of both their organic and inorganic subcomponents. Extensive research is being carried out to functionalize polymers towards various improved physicochemical characteristics such as electrical, optical, and mechanical properties for various applications. Vapor-phase material infiltration is an emerging hybridization route, derived from atomic layer deposition, which facilitates uniform incorporation of inorganic entities into a polymer matrix, leading to novel applications in fields such as microelectronics, energy storage, smart coatings, and smart fabrics. Recent advances in employing vapor-phase material infiltration as a hybridization and nanopatterning technique for various application avenues are reviewed.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0012704

OSTI ID:: 1491681

Report Number(s):: BNL-210906-2019-JAAM

Journal Information:: JOM. Journal of the Minerals, Metals & Materials Society, Vol. 71, Issue 1; ISSN 1047-4838

Publisher:: SpringerCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 40 works

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References (55)

Self-assembled nanotextures impart broadband transparency to glass windows and solar cell encapsulants Liapis, Andreas C.; Rahman, Atikur; Black, Charles T. Applied Physics Letters, Vol. 111, Issue 18 https://doi.org/10.1063/1.5000965	journal	October 2017
Systematic study of trimethyl aluminum infiltration in polyethylene terephthalate and its effect on the mechanical properties of polyethylene terephthalate fibers Padbury, Richard P.; Jur, Jesse S. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 1 https://doi.org/10.1116/1.4898435	journal	January 2015
Infiltrated Zinc Oxide in Poly(methyl methacrylate): An Atomic Cycle Growth Study Ocola, Leonidas E.; Connolly, Aine; Gosztola, David J. The Journal of Physical Chemistry C, Vol. 121, Issue 3 https://doi.org/10.1021/acs.jpcc.6b08007	journal	December 2016
Fabrication of polymeric microparticles for drug delivery by soft lithography Guan, Jingjiao; Ferrell, Nicholas; James Lee, L. Biomaterials, Vol. 27, Issue 21 https://doi.org/10.1016/j.biomaterials.2006.03.011	journal	July 2006
Sequential Infiltration Synthesis of Doped Polymer Films with Tunable Electrical Properties for Efficient Triboelectric Nanogenerator Development Yu, Yanhao; Li, Zhaodong; Wang, Yunming Advanced Materials, Vol. 27, Issue 33 https://doi.org/10.1002/adma.201502546	journal	July 2015
In Situ Raman Spectroscopic Study of Al-Infiltrated Spider Dragline Silk under Tensile Deformation Lee, Seung-Mo; Pippel, Eckhard; Moutanabbir, Oussama ACS Applied Materials & Interfaces, Vol. 6, Issue 19 https://doi.org/10.1021/am5041797	journal	September 2014
Tuning the Tensile Strength of Cellulose through Vapor-Phase Metalation Gregorczyk, Keith E.; Pickup, David F.; Sanz, Miren Garcia Chemistry of Materials, Vol. 27, Issue 1 https://doi.org/10.1021/cm503724c	journal	December 2014
Hybrid nanomaterials through molecular and atomic layer deposition: Top down, bottom up, and in-between approaches to new materials Gregorczyk, Keith; Knez, Mato Progress in Materials Science, Vol. 75 https://doi.org/10.1016/j.pmatsci.2015.06.004	journal	January 2016
A Route to Nanoscopic Materials via Sequential Infiltration Synthesis on Block Copolymer Templates Peng, Qing; Tseng, Yu-Chih; Darling, Seth B. ACS Nano, Vol. 5, Issue 6, p. 4600-4606 https://doi.org/10.1021/nn2003234	journal	May 2011
Vapor phase infiltration (VPI) for transforming polymers into organic–inorganic hybrid materials: a critical review of current progress and future challenges Leng, Collen Z.; Losego, Mark D. Materials Horizons, Vol. 4, Issue 5 https://doi.org/10.1039/C7MH00196G	journal	January 2017
Patterning with block copolymer thin films Segalman, Rachel A. Materials Science and Engineering: R: Reports, Vol. 48, Issue 6, p. 191-226 https://doi.org/10.1016/j.mser.2004.12.003	journal	February 2005
Anodized Aluminum Oxide/Polydimethylsiloxane Hybrid Mold for Roll-to-Roll Nanoimprinting Kim, Sanghoon; Hyun, Seung; Lee, Jaeyong Advanced Functional Materials, Vol. 28, Issue 23 https://doi.org/10.1002/adfm.201800197	journal	April 2018
Electrical and structural properties of ZnO synthesized via infiltration of lithographically defined polymer templates Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim Applied Physics Letters, Vol. 107, Issue 20 https://doi.org/10.1063/1.4935793	journal	November 2015
Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition Gong, Bo; Spagnola, Joseph C.; Parsons, Gregory N. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 1 https://doi.org/10.1116/1.3670963	journal	January 2012
Polymer-ZnO nanocomposites foils and thin films for UV protection Shanshool, Haider Mohammed; Yahaya, Muhammad; Yunus, Wan Mahmood Mat THE 2014 UKM FST POSTGRADUATE COLLOQUIUM: Proceedings of the Universiti Kebangsaan Malaysia, Faculty of Science and Technology 2014 Postgraduate Colloquium, AIP Conference Proceedings https://doi.org/10.1063/1.4895185	conference	January 2014
Direct fabrication of high aspect-ratio metal oxide nanopatterns via sequential infiltration synthesis in lithographically defined SU-8 templates Nam, Chang-Yong; Stein, Aaron; Kisslinger, Kim Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 33, Issue 6 https://doi.org/10.1116/1.4929508	journal	November 2015
Greatly Increased Toughness of Infiltrated Spider Silk Lee, S. -M.; Pippel, E.; Gosele, U. Science, Vol. 324, Issue 5926 https://doi.org/10.1126/science.1168162	journal	April 2009
Silicon nanopillar anodes for lithium-ion batteries using nanoimprint lithography with flexible molds Mills, Eric; Cannarella, John; Zhang, Qi Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 32, Issue 6 https://doi.org/10.1116/1.4901878	journal	November 2014
A review on polymer nanofibers by electrospinning and their applications in nanocomposites Huang, Zheng-Ming; Zhang, Y.-Z.; Kotaki, M. Composites Science and Technology, Vol. 63, Issue 15, p. 2223-2253 https://doi.org/10.1016/S0266-3538(03)00178-7	journal	November 2003
Damping of Nanomechanical Resonators Unterreithmeier, Quirin P.; Faust, Thomas; Kotthaus, Jörg P. Physical Review Letters, Vol. 105, Issue 2 https://doi.org/10.1103/PhysRevLett.105.027205	journal	July 2010
Extreme Carrier Depletion and Superlinear Photoconductivity in Ultrathin Parallel-Aligned ZnO Nanowire Array Photodetectors Fabricated by Infiltration Synthesis Nam, Chang-Yong; Stein, Aaron Advanced Optical Materials, Vol. 5, Issue 24 https://doi.org/10.1002/adom.201700807	journal	November 2017
Collapse and Reversibility of the Superhydrophobic State on Nanotextured Surfaces Checco, Antonio; Ocko, Benjamin M.; Rahman, Atikur Physical Review Letters, Vol. 112, Issue 21 https://doi.org/10.1103/PhysRevLett.112.216101	journal	May 2014
Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates Dandley, Erinn C.; Lemaire, Paul C.; Zhu, Zhongwei Advanced Materials Interfaces, Vol. 4, Issue 4 https://doi.org/10.1002/admi.201601178	journal	December 2016
Fabrication of ZnO Nanowires Using Nanoscale Spacer Lithography for Gas Sensors Ra, Hyun-Wook; Choi, Kwang-Sung; Kim, Jin-Hwan Small, Vol. 4, Issue 8 https://doi.org/10.1002/smll.200700922	journal	August 2008
Nanofabrication by electron beam lithography and its applications: A review Chen, Yifang Microelectronic Engineering, Vol. 135 https://doi.org/10.1016/j.mee.2015.02.042	journal	March 2015
Ultrahigh Elastic Strain Energy Storage in Metal-Oxide-Infiltrated Patterned Hybrid Polymer Nanocomposites Dusoe, Keith J.; Ye, Xinyi; Kisslinger, Kim Nano Letters, Vol. 17, Issue 12 https://doi.org/10.1021/acs.nanolett.7b03238	journal	November 2017
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E. The Journal of Physical Chemistry C, Vol. 115, Issue 36, p. 17725-17729 https://doi.org/10.1021/jp205532e	journal	July 2011
Formation of novel photoluminescent hybrid materials by sequential vapor infiltration into polyethylene terephthalate fibers Akyildiz, Halil I.; Lo, Michael; Dillon, Eoghan Journal of Materials Research, Vol. 29, Issue 23 https://doi.org/10.1557/jmr.2014.333	journal	November 2014
Chemical modification of polymer surfaces for advanced triboelectric nanogenerator development Yu, Yanhao; Wang, Xudong Extreme Mechanics Letters, Vol. 9 https://doi.org/10.1016/j.eml.2016.02.019	journal	December 2016
Efficient and controllable vapor to solid doping of the polythiophene P3HT by low temperature vapor phase infiltration Wang, Weike; Chen, Chaoqiu; Tollan, Christopher Journal of Materials Chemistry C, Vol. 5, Issue 10 https://doi.org/10.1039/C6TC05544C	journal	January 2017
Temperature and Exposure Dependence of Hybrid Organic–Inorganic Layer Formation by Sequential Vapor Infiltration into Polymer Fibers Akyildiz, Halil I.; Padbury, Richard P.; Parsons, Gregory N. Langmuir, Vol. 28, Issue 44 https://doi.org/10.1021/la302991c	journal	October 2012
Advanced oil sorbents using sequential infiltration synthesis Barry, Edward; Mane, Anil U.; Libera, Joseph A. Journal of Materials Chemistry A, Vol. 5, Issue 6 https://doi.org/10.1039/C6TA09014A	journal	January 2017
Mesoporous Metal Oxides by Vapor Infiltration and Atomic Layer Deposition on Ordered Surfactant Polymer Films Gong, Bo; Kim, Do Han; Parsons, Gregory N. Langmuir, Vol. 28, Issue 32 https://doi.org/10.1021/la302027b	journal	July 2012
Non-native three-dimensional block copolymer morphologies Rahman, Atikur; Majewski, Pawel W.; Doerk, Gregory Nature Communications, Vol. 7, Issue 1 https://doi.org/10.1038/ncomms13988	journal	December 2016
Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells Rahman, Atikur; Ashraf, Ahsan; Xin, Huolin Nature Communications, Vol. 6, Issue 1 https://doi.org/10.1038/ncomms6963	journal	January 2015
Improved Mechanical Stability of Dried Collagen Membrane after Metal Infiltration Lee, Seung-Mo; Pippel, Eckhard; Moutanabbir, Oussama ACS Applied Materials & Interfaces, Vol. 2, Issue 8 https://doi.org/10.1021/am100438b	journal	July 2010
Synergistic effect of reduced graphene oxide, CNT and metal oxides on cellulose matrix for supercapacitor applications Ramesh, S.; Khandelwal, Saurabh; Rhee, Kyong Yop Composites Part B: Engineering, Vol. 138 https://doi.org/10.1016/j.compositesb.2017.11.024	journal	April 2018
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures Kamcev, Jovan; Germack, David S.; Nykypanchuk, Dmytro ACS Nano, Vol. 7, Issue 1 https://doi.org/10.1021/nn304122b	journal	December 2012
Hybrid photovoltaic devices of polymer and ZnO nanofiber composites Olson, Dana C.; Piris, Jorge; Collins, Reuben T. Thin Solid Films, Vol. 496, Issue 1 https://doi.org/10.1016/j.tsf.2005.08.179	journal	February 2006
Photoluminescence Mechanism and Photocatalytic Activity of Organic–Inorganic Hybrid Materials Formed by Sequential Vapor Infiltration Akyildiz, Halil I.; Stano, Kelly L.; Roberts, Adam T. Langmuir, Vol. 32, Issue 17 https://doi.org/10.1021/acs.langmuir.6b00285	journal	April 2016
Etch properties of resists modified by sequential infiltration synthesis Tseng, Yu-Chih; Peng, Qing; Ocola, Leonidas E. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 6, Article No. 06FG01 https://doi.org/10.1116/1.3640758	journal	November 2011
Directing Hybrid Structures by Combining Self-Assembly of Functional Block Copolymers and Atomic Layer Deposition: A Demonstration on Hybrid Photovoltaics Moshonov, Moshe; Frey, Gitti L. Langmuir, Vol. 31, Issue 46 https://doi.org/10.1021/acs.langmuir.5b03282	journal	November 2015
Mechanisms and reactions during atomic layer deposition on polymers Parsons, Gregory N.; Atanasov, Sarah E.; Dandley, Erinn C. Coordination Chemistry Reviews, Vol. 257, Issue 23-24 https://doi.org/10.1016/j.ccr.2013.07.001	journal	December 2013
Deterministic temporal chaos from a mid-infrared external cavity quantum cascade lasers Grillot, Frédéric; Jumpertz, Louise; Schires, Kevin SPIE OPTO, SPIE Proceedings https://doi.org/10.1117/12.2213434	conference	February 2016
π-Conjugated Polymers for Organic Electronics and Photovoltaic Cell Applications ^† Facchetti, Antonio Chemistry of Materials, Vol. 23, Issue 3 https://doi.org/10.1021/cm102419z	journal	February 2011
Mechanically robust and size-controlled MoS2/graphene hybrid aerogels as high-performance anodes for lithium-ion batteries He, Pingge; Zhao, Keren; Huang, Boyun Journal of Materials Science, Vol. 53, Issue 6 https://doi.org/10.1007/s10853-017-1853-4	journal	November 2017
Polymer self assembly in semiconductor microelectronics Black, C. T.; Ruiz, R.; Breyta, G. IBM Journal of Research and Development, Vol. 51, Issue 5 https://doi.org/10.1147/rd.515.0605	journal	September 2007
Transparent and UV-shielding ZnO@PMMA nanocomposite films Zhang, Yewei; Zhuang, Shendong; Xu, Xiaoyong Optical Materials, Vol. 36, Issue 2 https://doi.org/10.1016/j.optmat.2013.08.021	journal	December 2013
Robust Superhydrophobicity in Large-Area Nanostructured Surfaces Defined by Block-Copolymer Self Assembly Checco, Antonio; Rahman, Atikur; Black, Charles T. Advanced Materials, Vol. 26, Issue 6 https://doi.org/10.1002/adma.201304006	journal	October 2013
Review of photoluminescence performance of nano-sized semiconductor materials and its relationships with photocatalytic activity Liqiang, Jing; Yichun, Qu; Baiqi, Wang Solar Energy Materials and Solar Cells, Vol. 90, Issue 12 https://doi.org/10.1016/j.solmat.2005.11.007	journal	July 2006
Sequential Infiltration Synthesis for the Design of Low Refractive Index Surface Coatings with Controllable Thickness Berman, Diana; Guha, Supratik; Lee, Byeongdu ACS Nano, Vol. 11, Issue 3 https://doi.org/10.1021/acsnano.6b08361	journal	February 2017
Gas Transport Selectivity of Ultrathin, Nanoporous, Inorganic Membranes Made from Block Copolymer Templates Greil, Stefanie; Rahman, Atikur; Liu, Mingzhao Chemistry of Materials, Vol. 29, Issue 21 https://doi.org/10.1021/acs.chemmater.7b04174	journal	October 2017
Nanoscopic Patterned Materials with Tunable Dimensions via Atomic Layer Deposition on Block Copolymers Peng, Qing; Tseng, Yu-Chih; Darling, Seth B. Advanced Materials, Vol. 22, Issue 45, p. 5129-5133 https://doi.org/10.1002/adma.201002465	journal	September 2010
Wafer-Scale Selective-Area Deposition of Nanoscale Metal Oxide Features Using Vapor Saturation into Patterned Poly(methyl methacrylate) Templates Dandley, Erinn C.; Lemaire, Paul C.; Zhu, Zhongwei Advanced Materials Interfaces, Vol. 3, Issue 2 https://doi.org/10.1002/admi.201500431	journal	November 2015
Damping of Nanomechanical Resonators Unterreithmeier, Quirin P.; Faust, Thomas; Kotthaus, Jorg P. arXiv https://doi.org/10.48550/arxiv.1003.1868	text	January 2010

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