Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings

Burcklen, Catherine; Soufli, Regina; Rebellato, Jennifer; Walton, Christopher; Meltchakov, Evgueni; Rault, Julien E.; Gullikson, Eric; Delmotte, Franck

doi:10.1166/jnn.2019.16480

Title: Lifetime Stability and Microstructure Properties of Cr/B₄ C X-ray Reflective Multilayer Coatings

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Abstract

Here, this paper demonstrates that highly reflective Cr/B₄C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B₄C multilayers is also examined, with emphasis on the B₄C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B₄C layer. Lastly, multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B₄C layer structure.

Authors:

Burcklen, Catherine ^[1]; Soufli, Regina ^[1]; Rebellato, Jennifer ^[2]; Walton, Christopher ^[1]; Meltchakov, Evgueni ^[2]; Rault, Julien E. ^[3]; Gullikson, Eric ^[4]; Delmotte, Franck ^[2]

Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Université Paris-Saclay (France)
Synchrotron SOLEIL, CNRS-CEA, L’Orme des Merisiers, Gif-sur-Yvette (France)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Publication Date:: 2019-01-01

Research Org.:: Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)

Sponsoring Org.:: USDOE National Nuclear Security Administration (NNSA)

OSTI Identifier:: 1491661

Report Number(s):: LLNL-JRNL-747456
Journal ID: ISSN 1533-4880; 932205

Grant/Contract Number:: AC52-07NA27344

Resource Type:: Accepted Manuscript

Journal Name:: Journal of Nanoscience and Nanotechnology

Additional Journal Information:: Journal Volume: 19; Journal Issue: 1; Journal ID: ISSN 1533-4880

Publisher:: American Scientific Publishers

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; Boron Carbide; Chrominum; Multilayers; Soft X-rays

Citation Formats


                    Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, and Delmotte, Franck. Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings.  United States: N. p., 2019. 
Web.  doi:10.1166/jnn.2019.16480.

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                    Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, & Delmotte, Franck. Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings.  United States.  https://doi.org/10.1166/jnn.2019.16480

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                    Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, and Delmotte, Franck. Tue .  
"Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings".  United States.  https://doi.org/10.1166/jnn.2019.16480.  https://www.osti.gov/servlets/purl/1491661.

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@article{osti_1491661,

  title        = {Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings},

  author       = {Burcklen, Catherine and Soufli, Regina and Rebellato, Jennifer and Walton, Christopher and Meltchakov, Evgueni and Rault, Julien E. and Gullikson, Eric and Delmotte, Franck},

  abstractNote = {Here, this paper demonstrates that highly reflective Cr/B4C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B4C multilayers is also examined, with emphasis on the B4C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B4C layer. Lastly, multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B4C layer structure.},

  doi          = {10.1166/jnn.2019.16480},

  journal      = {Journal of Nanoscience and Nanotechnology},

  number       = 1,

  volume       = 19,

  place        = {United States},

  year         = {2019},

  month        = {1}

}

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Title: Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings

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Title: Lifetime Stability and Microstructure Properties of Cr/B₄ C X-ray Reflective Multilayer Coatings