Lifetime Stability and Microstructure Properties of Cr/B₄ C X-ray Reflective Multilayer Coatings

Journal Article · 01 January 2019 · Journal of Nanoscience and Nanotechnology

DOI: https://doi.org/10.1166/jnn.2019.16480 · OSTI ID:1491661

Burcklen, Catherine ^[1]; Soufli, Regina ^[1]; Rebellato, Jennifer ^[2]; Walton, Christopher ^[1]; Meltchakov, Evgueni ^[2]; Rault, Julien E. ^[3]; Gullikson, Eric ^[4]; Delmotte, Franck ^[2]

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1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
2. Université Paris-Saclay (France)
3. Synchrotron SOLEIL, CNRS-CEA, L’Orme des Merisiers, Gif-sur-Yvette (France)
4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Here, this paper demonstrates that highly reflective Cr/B₄C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B₄C multilayers is also examined, with emphasis on the B₄C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B₄C layer. Lastly, multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B₄C layer structure.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• Sponsoring Organization: USDOE National Nuclear Security Administration (NNSA)
• Grant/Contract Number: AC52-07NA27344
• OSTI ID: 1491661
• Report Number(s): LLNL-JRNL-747456; 932205
• Journal Information: Journal of Nanoscience and Nanotechnology, Vol. 19, Issue 1; ISSN 1533-4880
• Publisher: American Scientific PublishersCopyright Statement
• Country of Publication: United States
• Language: English