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Title: Lifetime Stability and Microstructure Properties of Cr/B 4 C X-ray Reflective Multilayer Coatings

Abstract

Here, this paper demonstrates that highly reflective Cr/B 4C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B 4C multilayers is also examined, with emphasis on the B 4C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B 4C layer. Lastly, multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B 4C layer structure.

Authors:
 [1];  [1];  [2];  [1];  [2];  [3];  [4];  [2]
  1. Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
  2. Université Paris-Saclay (France)
  3. Synchrotron SOLEIL, CNRS-CEA, L’Orme des Merisiers, Gif-sur-Yvette (France)
  4. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1491661
Report Number(s):
LLNL-JRNL-747456
Journal ID: ISSN 1533-4880; 932205
Grant/Contract Number:  
AC52-07NA27344
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Nanoscience and Nanotechnology
Additional Journal Information:
Journal Volume: 19; Journal Issue: 1; Journal ID: ISSN 1533-4880
Publisher:
American Scientific Publishers
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; Boron Carbide; Chrominum; Multilayers; Soft X-rays

Citation Formats

Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, and Delmotte, Franck. Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings. United States: N. p., 2019. Web. doi:10.1166/jnn.2019.16480.
Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, & Delmotte, Franck. Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings. United States. doi:10.1166/jnn.2019.16480.
Burcklen, Catherine, Soufli, Regina, Rebellato, Jennifer, Walton, Christopher, Meltchakov, Evgueni, Rault, Julien E., Gullikson, Eric, and Delmotte, Franck. Tue . "Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings". United States. doi:10.1166/jnn.2019.16480.
@article{osti_1491661,
title = {Lifetime Stability and Microstructure Properties of Cr/B4 C X-ray Reflective Multilayer Coatings},
author = {Burcklen, Catherine and Soufli, Regina and Rebellato, Jennifer and Walton, Christopher and Meltchakov, Evgueni and Rault, Julien E. and Gullikson, Eric and Delmotte, Franck},
abstractNote = {Here, this paper demonstrates that highly reflective Cr/B4C multilayer interference coatings with nanometric layer thicknesses, designed to operate in the soft X-ray photon energy range, have stable reflective performance for a period of 3 years after deposition. The microstructure and chemical composition of layers and interfaces within Cr/B4C multilayers is also examined, with emphasis on the B4C-on-Cr interface where a significant diffusion layer is formed and on the oxide in the top B4C layer. Lastly, multiple characterization techniques (X-ray reflectivity at different photon energies, X-ray photoelectron spectroscopy, transmission electron microscopy, electron diffraction and X-ray diffraction) are employed and the results reveal a consistent picture of the Cr/B4C layer structure.},
doi = {10.1166/jnn.2019.16480},
journal = {Journal of Nanoscience and Nanotechnology},
number = 1,
volume = 19,
place = {United States},
year = {2019},
month = {1}
}

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This content will become publicly available on January 1, 2020
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