Compressed Sensing of Scanning Transmission Electron Microscopy (STEM) With Nonrectangular Scans
Abstract
Scanning transmission electron microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In recent years, attention has focused on the potential of STEM to explore beam induced chemical processes and especially manipulating atomic motion, enabling atom-by-atom fabrication. These applications, as well as traditional imaging of beam sensitive materials, necessitate increasing the dynamic range of STEM in imaging and manipulation modes, and increasing the absolute scanning speed which can be achieved by combining sparse sensing methods with nonrectangular scanning trajectories. We have developed a general method for real-time reconstruction of sparsely sampled images from high-speed, noninvasive and diverse scanning pathways, including spiral scan and Lissajous scan. This approach is demonstrated on both the synthetic data and experimental STEM data on the beam sensitive material graphene. This work opens the door for comprehensive investigation and optimal design of dose efficient scanning strategies and real-time adaptive inference and control of e-beam induced atomic fabrication.
- Authors:
-
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences. Inst. for Functional Imaging of Materials; Florida State Univ., Tallahassee, FL (United States). Dept. of Industrial Engineering. Dept. of Statistics
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences. Inst. for Functional Imaging of Materials
- Publication Date:
- Research Org.:
- Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1491296
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Microscopy and Microanalysis
- Additional Journal Information:
- Journal Volume: 24; Journal Issue: 6; Journal ID: ISSN 1431-9276
- Publisher:
- Microscopy Society of America (MSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; STEM; compressed sensing; image inpainting; real-time; spiral scan; Lissajous scan; nonrectangular scan; GPU
Citation Formats
Li, Xin, Dyck, Ondrej, Kalinin, Sergei V., and Jesse, Stephen. Compressed Sensing of Scanning Transmission Electron Microscopy (STEM) With Nonrectangular Scans. United States: N. p., 2018.
Web. doi:10.1017/S143192761801543X.
Li, Xin, Dyck, Ondrej, Kalinin, Sergei V., & Jesse, Stephen. Compressed Sensing of Scanning Transmission Electron Microscopy (STEM) With Nonrectangular Scans. United States. https://doi.org/10.1017/S143192761801543X
Li, Xin, Dyck, Ondrej, Kalinin, Sergei V., and Jesse, Stephen. Thu .
"Compressed Sensing of Scanning Transmission Electron Microscopy (STEM) With Nonrectangular Scans". United States. https://doi.org/10.1017/S143192761801543X. https://www.osti.gov/servlets/purl/1491296.
@article{osti_1491296,
title = {Compressed Sensing of Scanning Transmission Electron Microscopy (STEM) With Nonrectangular Scans},
author = {Li, Xin and Dyck, Ondrej and Kalinin, Sergei V. and Jesse, Stephen},
abstractNote = {Scanning transmission electron microscopy (STEM) has become the main stay for materials characterization on atomic level, with applications ranging from visualization of localized and extended defects to mapping order parameter fields. In recent years, attention has focused on the potential of STEM to explore beam induced chemical processes and especially manipulating atomic motion, enabling atom-by-atom fabrication. These applications, as well as traditional imaging of beam sensitive materials, necessitate increasing the dynamic range of STEM in imaging and manipulation modes, and increasing the absolute scanning speed which can be achieved by combining sparse sensing methods with nonrectangular scanning trajectories. We have developed a general method for real-time reconstruction of sparsely sampled images from high-speed, noninvasive and diverse scanning pathways, including spiral scan and Lissajous scan. This approach is demonstrated on both the synthetic data and experimental STEM data on the beam sensitive material graphene. This work opens the door for comprehensive investigation and optimal design of dose efficient scanning strategies and real-time adaptive inference and control of e-beam induced atomic fabrication.},
doi = {10.1017/S143192761801543X},
journal = {Microscopy and Microanalysis},
number = 6,
volume = 24,
place = {United States},
year = {Thu Dec 27 00:00:00 EST 2018},
month = {Thu Dec 27 00:00:00 EST 2018}
}
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Tomographic Collection of Block-Based Sparse STEM Images: Practical Implementation and Impact on the Quality of the 3D Reconstructed Volume
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