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Title: High-density electrical and optical probes for neural readout and light focusing in deep brain tissue

Abstract

To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.

Authors:
 [1];  [2];  [3];  [4];  [1];  [1];  [1];  [4];  [1];  [1]
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility; Univ. of California, Berkeley, CA (United States)
  3. aBeam Technologies, Hayward, CA (United States)
  4. Univ. of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1490701
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Micro/Nanolithography, MEMS, and MOEMS
Additional Journal Information:
Journal Volume: 17; Journal Issue: 2; Journal ID: ISSN 1932-5150
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 59 BASIC BIOLOGICAL SCIENCES; neural probes; high density; light focusing; integration

Citation Formats

Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States: N. p., 2018. Web. doi:10.1117/1.JMM.17.2.025503.
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, & Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States. doi:10.1117/1.JMM.17.2.025503.
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. Sat . "High-density electrical and optical probes for neural readout and light focusing in deep brain tissue". United States. doi:10.1117/1.JMM.17.2.025503. https://www.osti.gov/servlets/purl/1490701.
@article{osti_1490701,
title = {High-density electrical and optical probes for neural readout and light focusing in deep brain tissue},
author = {Lanzio, Vittorino and West, Melanie and Koshelev, Alexander and Telian, Gregory and Micheletti, Paolo and Lambert, Raquel and Dhuey, Scott and Adesnik, Hillel and Sassolini, Simone and Cabrini, Stefano},
abstractNote = {To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.},
doi = {10.1117/1.JMM.17.2.025503},
journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
number = 2,
volume = 17,
place = {United States},
year = {2018},
month = {6}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 2 works
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Figures / Tables:

Fig. 1 Fig. 1: Neural probes with high-density array of electrodes. (a) SEM image showing a zoom on device shank (thickness: 16 μm and width: 47 μm) and the 64 electrodes. Scale bar: 20 μm. (b) Zoom on interconnections (120-nm wide and with 450-nm pitch), passivated with 75 nm of SiO2 (darkermore » edge around interconnections). Scale bar: 200 nm. (c) View of wires (65-nm wide and 240-nm pitch). A total of 128 electrodes are defined on a single layer. Scale bar: 10 μm.« less

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    Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.