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Title: High-density electrical and optical probes for neural readout and light focusing in deep brain tissue

Abstract

To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.

Authors:
 [1];  [2];  [3];  [4];  [1];  [1];  [1];  [4];  [1];  [1]
+ Show Author Affiliations
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility; Univ. of California, Berkeley, CA (United States)
  3. aBeam Technologies, Hayward, CA (United States)
  4. Univ. of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1490701
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Micro/Nanolithography, MEMS, and MOEMS
Additional Journal Information:
Journal Volume: 17; Journal Issue: 2; Journal ID: ISSN 1932-5150
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 59 BASIC BIOLOGICAL SCIENCES; neural probes; high density; light focusing; integration

Citation Formats

Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States: N. p., 2018. Web. doi:10.1117/1.JMM.17.2.025503.
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Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, & Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States. doi:10.1117/1.JMM.17.2.025503.
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Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. Sat . "High-density electrical and optical probes for neural readout and light focusing in deep brain tissue". United States. doi:10.1117/1.JMM.17.2.025503. https://www.osti.gov/servlets/purl/1490701.
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@article{osti_1490701,
title = {High-density electrical and optical probes for neural readout and light focusing in deep brain tissue},
author = {Lanzio, Vittorino and West, Melanie and Koshelev, Alexander and Telian, Gregory and Micheletti, Paolo and Lambert, Raquel and Dhuey, Scott and Adesnik, Hillel and Sassolini, Simone and Cabrini, Stefano},
abstractNote = {To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.},
doi = {10.1117/1.JMM.17.2.025503},
journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
number = 2,
volume = 17,
place = {United States},
year = {2018},
month = {6}
}
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Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI:  10.1117/1.JMM.17.2.025503
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Figures / Tables:

Fig. 1 Fig. 1: Neural probes with high-density array of electrodes. (a) SEM image showing a zoom on device shank (thickness: 16 μm and width: 47 μm) and the 64 electrodes. Scale bar: 20 μm. (b) Zoom on interconnections (120-nm wide and with 450-nm pitch), passivated with 75 nm of SiO2 (darkermore » edge around interconnections). Scale bar: 200 nm. (c) View of wires (65-nm wide and 240-nm pitch). A total of 128 electrodes are defined on a single layer. Scale bar: 10 μm.« less
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