skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: High-density electrical and optical probes for neural readout and light focusing in deep brain tissue

Abstract

To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.

Authors:
 [1];  [2];  [3];  [4];  [1];  [1];  [1];  [4];  [1];  [1]
+ Show Author Affiliations
  1. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility; Univ. of California, Berkeley, CA (United States)
  3. aBeam Technologies, Hayward, CA (United States)
  4. Univ. of California, Berkeley, CA (United States)
Publication Date:
Research Org.:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1490701
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Micro/Nanolithography, MEMS, and MOEMS
Additional Journal Information:
Journal Volume: 17; Journal Issue: 2; Journal ID: ISSN 1932-5150
Publisher:
SPIE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 59 BASIC BIOLOGICAL SCIENCES; neural probes; high density; light focusing; integration

Citation Formats

Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States: N. p., 2018. Web. doi:10.1117/1.JMM.17.2.025503.
Copy to clipboard
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, & Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States. doi:https://doi.org/10.1117/1.JMM.17.2.025503
Copy to clipboard
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. Sat . "High-density electrical and optical probes for neural readout and light focusing in deep brain tissue". United States. doi:https://doi.org/10.1117/1.JMM.17.2.025503. https://www.osti.gov/servlets/purl/1490701.
Copy to clipboard
@article{osti_1490701,
title = {High-density electrical and optical probes for neural readout and light focusing in deep brain tissue},
author = {Lanzio, Vittorino and West, Melanie and Koshelev, Alexander and Telian, Gregory and Micheletti, Paolo and Lambert, Raquel and Dhuey, Scott and Adesnik, Hillel and Sassolini, Simone and Cabrini, Stefano},
abstractNote = {To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.},
doi = {10.1117/1.JMM.17.2.025503},
journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
number = 2,
volume = 17,
place = {United States},
year = {2018},
month = {6}
}
Copy to clipboard
Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI:  https://doi.org/10.1117/1.JMM.17.2.025503
Copyright Statement
Other availability
Search WorldCat Search WorldCat to find libraries that may hold this journal
Citation Metrics:
Cited by: 2 works
Citation information provided by
Web of Science

Figures / Tables:

Fig. 1 Fig. 1: Neural probes with high-density array of electrodes. (a) SEM image showing a zoom on device shank (thickness: 16 μm and width: 47 μm) and the 64 electrodes. Scale bar: 20 μm. (b) Zoom on interconnections (120-nm wide and with 450-nm pitch), passivated with 75 nm of SiO2 (darkermore » edge around interconnections). Scale bar: 200 nm. (c) View of wires (65-nm wide and 240-nm pitch). A total of 128 electrodes are defined on a single layer. Scale bar: 10 μm.« less
All figures and tables (7 total)
Save / Share:
Export Metadata
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.

Works referenced in this record:

Integration of optogenetics with complementary methodologies in systems neuroscience
journal, March 2017

  • Kim, Christina K.; Adhikari, Avishek; Deisseroth, Karl
  • Nature Reviews Neuroscience, Vol. 18, Issue 4
  • DOI: 10.1038/nrn.2017.15

TriPleX™: The low loss passive photonics platform: Industrial applications through Multi Project Wafer runs
conference, December 2014

Recent advances in silicon-based neural microelectrodes and microsystems: a review
journal, August 2015

Memory retrieval by activating engram cells in mouse models of early Alzheimer’s disease
journal, March 2016

  • Roy, Dheeraj S.; Arons, Autumn; Mitchell, Teryn I.
  • Nature, Vol. 531, Issue 7595
  • DOI: 10.1038/nature17172

Millisecond-timescale, genetically targeted optical control of neural activity
journal, August 2005

  • Boyden, Edward S.; Zhang, Feng; Bamberg, Ernst
  • Nature Neuroscience, Vol. 8, Issue 9
  • DOI: 10.1038/nn1525

Tools for Probing Local Circuits: High-Density Silicon Probes Combined with Optogenetics
journal, April 2015

Modelling and analysis of local field potentials for studying the function of cortical circuits
journal, October 2013

  • Einevoll, Gaute T.; Kayser, Christoph; Logothetis, Nikos K.
  • Nature Reviews Neuroscience, Vol. 14, Issue 11
  • DOI: 10.1038/nrn3599

In Vivo Application of Optogenetics for Neural Circuit Analysis
journal, July 2012

Intersection of Microwire Electrodes With Proximal CA1 Stratum-Pyramidale Neurons at Insertion for Multiunit Recordings Predicted by a 3-D Computer Model
journal, December 2004

  • Claverol-Tinture, E.; Nadasdy, Z.
  • IEEE Transactions on Biomedical Engineering, Vol. 51, Issue 12
  • DOI: 10.1109/TBME.2004.834274

ProTEK PSB coating as an alternative polymeric protection mask for KOH bulk etching of silicon
journal, April 2013

  • Rahim, Rosminazuin Ab; Bais, Badariah; Majlis, Burhanuddin Yeop
  • Microsystem Technologies, Vol. 19, Issue 6
  • DOI: 10.1007/s00542-013-1794-z

Chirped‐grating output couplers in dielectric waveguides
journal, March 1977

  • Katzir, A.; Livanos, A. C.; Yariv, A.
  • Applied Physics Letters, Vol. 30, Issue 5
  • DOI: 10.1063/1.89358

CMOS-Based High-Density Neural Probes with Improved Scheme for Addressing Recording and Stimulation Channels
journal, January 2015

The Development and Application of Optogenetics
journal, July 2011

An implantable neural probe with monolithically integrated dielectric waveguide and recording electrodes for optogenetics applications
journal, August 2013

Electrophysiology in the age of light
journal, October 2009

Multisite silicon neural probes with integrated silicon nitride waveguides and gratings for optogenetic applications
journal, March 2016

  • Shim, Euijae; Chen, Yu; Masmanidis, Sotiris
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep22693

Cerebellar Directed Optogenetic Intervention Inhibits Spontaneous Hippocampal Seizures in a Mouse Model of Temporal Lobe Epilepsy
journal, November 2014

Spatially Selective Holographic Photoactivation and Functional Fluorescence Imaging in Freely Behaving Mice with a Fiberscope
journal, December 2014

Recent advances in patterned photostimulation for optogenetics
journal, October 2017

  • Ronzitti, Emiliano; Ventalon, Cathie; Canepari, Marco
  • Journal of Optics, Vol. 19, Issue 11
  • DOI: 10.1088/2040-8986/aa8299

A multichannel neural probe with embedded microfluidic channels for simultaneous in vivo neural recording and drug delivery
journal, January 2015

  • Lee, Hyunjoo J.; Son, Yoojin; Kim, Jeongyeon
  • Lab on a Chip, Vol. 15, Issue 6
  • DOI: 10.1039/C4LC01321B

Dynamic illumination of spatially restricted or large brain volumes via a single tapered optical fiber
journal, June 2017

  • Pisanello, Ferruccio; Mandelbaum, Gil; Pisanello, Marco
  • Nature Neuroscience, Vol. 20, Issue 8
  • DOI: 10.1038/nn.4591

In vivo optical modulation of neural signals using monolithically integrated two-dimensional neural probe arrays
journal, October 2015

  • Son, Yoojin; Jenny Lee, Hyunjoo; Kim, Jeongyeon
  • Scientific Reports, Vol. 5, Issue 1
  • DOI: 10.1038/srep15466

Patterned photostimulation via visible-wavelength photonic probes for deep brain optogenetics
journal, December 2016

An Implantable 455-Active-Electrode 52-Channel CMOS Neural Probe
journal, January 2014

  • Lopez, Carolina Mora; Andrei, Alexandru; Mitra, Srinjoy
  • IEEE Journal of Solid-State Circuits, Vol. 49, Issue 1
  • DOI: 10.1109/JSSC.2013.2284347

The BRAIN Initiative: developing technology to catalyse neuroscience discovery
journal, May 2015

  • Jorgenson, Lyric A.; Newsome, William T.; Anderson, David J.
  • Philosophical Transactions of the Royal Society B: Biological Sciences, Vol. 370, Issue 1668
  • DOI: 10.1098/rstb.2014.0164

Spike sorting for large, dense electrode arrays
journal, March 2016

  • Rossant, Cyrille; Kadir, Shabnam N.; Goodman, Dan F. M.
  • Nature Neuroscience, Vol. 19, Issue 4
  • DOI: 10.1038/nn.4268

Brain responses to micro-machined silicon devices
journal, September 2003

Depth-specific optogenetic control in vivo with a scalable, high-density μLED neural probe
journal, June 2016

  • Scharf, Robert; Tsunematsu, Tomomi; McAlinden, Niall
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep28381

Factors influencing the biocompatibility of insertable silicon microshafts in cerebral cortex
journal, June 1992

  • Edell, D. J.; Toi, V. V.; McNeil, V. M.
  • IEEE Transactions on Biomedical Engineering, Vol. 39, Issue 6
  • DOI: 10.1109/10.141202

Super-selective cryogenic etching for sub-10 nm features
journal, December 2012

Micro- and Nanotechnologies for Optical Neural Interfaces
journal, March 2016

  • Pisanello, Ferruccio; Sileo, Leonardo; De Vittorio, Massimo
  • Frontiers in Neuroscience, Vol. 10
  • DOI: 10.3389/fnins.2016.00070
    [ × clear filter / sort ]

    Works referencing / citing this record:

    Tapered Fibers Combined With a Multi-Electrode Array for Optogenetics in Mouse Medial Prefrontal Cortex
    journal, October 2018

    • Sileo, Leonardo; Bitzenhofer, Sebastian H.; Spagnolo, Barbara
    • Frontiers in Neuroscience, Vol. 12
    • DOI: 10.3389/fnins.2018.00771

    Recent Progress on Non-Conventional Microfabricated Probes for the Chronic Recording of Cortical Neural Activity
    journal, March 2019

    • Kim, Chaebin; Jeong, Joonsoo; Kim, Sung June
    • Sensors, Vol. 19, Issue 5
    • DOI: 10.3390/s19051069
      [ × clear filter / sort ]

      Figures / Tables found in this record:

      Fig. 1 (p. 4)figure
      Fig. 2 (p. 5)figure
      Fig. 3 (p. 5)figure
      Fig. 4 (p. 6)figure
      Fig. 5 (p. 7)figure
      Fig. 6 (p. 8)figure
      Fig. 7 (p. 8)figure
        [ × clear filter / sort ]
        Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.

        Similar Records in DOE PAGES and OSTI.GOV collections: