High-density electrical and optical probes for neural readout and light focusing in deep brain tissue
Abstract
To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.
- Authors:
-
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry. Nanofabrication Facility; Univ. of California, Berkeley, CA (United States)
- aBeam Technologies, Hayward, CA (United States)
- Univ. of California, Berkeley, CA (United States)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1490701
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Micro/Nanolithography, MEMS, and MOEMS
- Additional Journal Information:
- Journal Volume: 17; Journal Issue: 2; Journal ID: ISSN 1932-5150
- Publisher:
- SPIE
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 59 BASIC BIOLOGICAL SCIENCES; neural probes; high density; light focusing; integration
Citation Formats
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States: N. p., 2018.
Web. doi:10.1117/1.JMM.17.2.025503.
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, & Cabrini, Stefano. High-density electrical and optical probes for neural readout and light focusing in deep brain tissue. United States. doi:https://doi.org/10.1117/1.JMM.17.2.025503
Lanzio, Vittorino, West, Melanie, Koshelev, Alexander, Telian, Gregory, Micheletti, Paolo, Lambert, Raquel, Dhuey, Scott, Adesnik, Hillel, Sassolini, Simone, and Cabrini, Stefano. Sat .
"High-density electrical and optical probes for neural readout and light focusing in deep brain tissue". United States. doi:https://doi.org/10.1117/1.JMM.17.2.025503. https://www.osti.gov/servlets/purl/1490701.
@article{osti_1490701,
title = {High-density electrical and optical probes for neural readout and light focusing in deep brain tissue},
author = {Lanzio, Vittorino and West, Melanie and Koshelev, Alexander and Telian, Gregory and Micheletti, Paolo and Lambert, Raquel and Dhuey, Scott and Adesnik, Hillel and Sassolini, Simone and Cabrini, Stefano},
abstractNote = {To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width × 16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5 × 25 μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250 nm × 160 nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.},
doi = {10.1117/1.JMM.17.2.025503},
journal = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
number = 2,
volume = 17,
place = {United States},
year = {2018},
month = {6}
}
Web of Science
Figures / Tables:

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Figures / Tables found in this record: