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Title: Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale


A new composite sample preparation method for high contrast cross-sectional SEM imaging.

ORCiD logo [1];  [2]; ORCiD logo [3]; ORCiD logo [2]
  1. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA, Ilmenau Univ. of Technology
  2. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA
  3. Ilmenau Univ. of Technology, Dept. of Micro- and Nanoelectronic Systems, 98684, Germany
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Additional Journal Information:
Journal Name: Nanoscale Journal Volume: 10 Journal Issue: 48; Journal ID: ISSN 2040-3364
Royal Society of Chemistry (RSC)
Country of Publication:
United Kingdom

Citation Formats

Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P.. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom: N. p., 2018. Web. doi:10.1039/C8NR06669H.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., & Altoe, M. Virginia P.. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P.. Thu . "Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale". United Kingdom.
title = {Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale},
author = {Staaks, Daniel and Olynick, Deirdre L. and Rangelow, Ivo W. and Altoe, M. Virginia P.},
abstractNote = {A new composite sample preparation method for high contrast cross-sectional SEM imaging.},
doi = {10.1039/C8NR06669H},
journal = {Nanoscale},
number = 48,
volume = 10,
place = {United Kingdom},
year = {2018},
month = {12}

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