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Title: Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale

A new composite sample preparation method for high contrast cross-sectional SEM imaging.
Authors:
ORCiD logo [1] ;  [2] ; ORCiD logo [3] ; ORCiD logo [2]
  1. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA, Ilmenau Univ. of Technology
  2. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA
  3. Ilmenau Univ. of Technology, Dept. of Micro- and Nanoelectronic Systems, 98684, Germany
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Nanoscale
Additional Journal Information:
Journal Name: Nanoscale Journal Volume: 10 Journal Issue: 48; Journal ID: ISSN 2040-3364
Publisher:
Royal Society of Chemistry (RSC)
Sponsoring Org:
USDOE
Country of Publication:
United Kingdom
Language:
English
OSTI Identifier:
1483903

Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P.. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom: N. p., Web. doi:10.1039/C8NR06669H.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., & Altoe, M. Virginia P.. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom. doi:10.1039/C8NR06669H.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P.. 2018. "Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale". United Kingdom. doi:10.1039/C8NR06669H.
@article{osti_1483903,
title = {Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale},
author = {Staaks, Daniel and Olynick, Deirdre L. and Rangelow, Ivo W. and Altoe, M. Virginia P.},
abstractNote = {A new composite sample preparation method for high contrast cross-sectional SEM imaging.},
doi = {10.1039/C8NR06669H},
journal = {Nanoscale},
number = 48,
volume = 10,
place = {United Kingdom},
year = {2018},
month = {12}
}

Works referenced in this record:

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Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
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  • Ouk Kim, Sang; Solak, Harun H.; Stoykovich, Mark P.
  • Nature, Vol. 424, Issue 6947, p. 411-414
  • DOI: 10.1038/nature01775

Triblock Copolymer Syntheses of Mesoporous Silica with Periodic 50 to 300 Angstrom Pores
journal, January 1998