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Title: Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale

Abstract

A new composite sample preparation method for high contrast cross-sectional SEM imaging.

Authors:
ORCiD logo [1];  [2]; ORCiD logo [3]; ORCiD logo [2]
  1. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA, Ilmenau Univ. of Technology
  2. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, USA
  3. Ilmenau Univ. of Technology, Dept. of Micro- and Nanoelectronic Systems, 98684, Germany
Publication Date:
Sponsoring Org.:
USDOE
OSTI Identifier:
1483903
Grant/Contract Number:  
AC02-05CH11231
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Nanoscale
Additional Journal Information:
Journal Name: Nanoscale Journal Volume: 10 Journal Issue: 48; Journal ID: ISSN 2040-3364
Publisher:
Royal Society of Chemistry (RSC)
Country of Publication:
United Kingdom
Language:
English

Citation Formats

Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom: N. p., 2018. Web. doi:10.1039/C8NR06669H.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., & Altoe, M. Virginia P. Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale. United Kingdom. doi:10.1039/C8NR06669H.
Staaks, Daniel, Olynick, Deirdre L., Rangelow, Ivo W., and Altoe, M. Virginia P. Thu . "Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale". United Kingdom. doi:10.1039/C8NR06669H.
@article{osti_1483903,
title = {Polymer–metal coating for high contrast SEM cross sections at the deep nanoscale},
author = {Staaks, Daniel and Olynick, Deirdre L. and Rangelow, Ivo W. and Altoe, M. Virginia P.},
abstractNote = {A new composite sample preparation method for high contrast cross-sectional SEM imaging.},
doi = {10.1039/C8NR06669H},
journal = {Nanoscale},
number = 48,
volume = 10,
place = {United Kingdom},
year = {2018},
month = {12}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1039/C8NR06669H

Citation Metrics:
Cited by: 1 work
Citation information provided by
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