Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions
- Authors:
-
- Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS; Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Center for X-ray Optics
- Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS; Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Universite Paris-Saclay (France). Laboratoire Charles Fabry, Institut d'Optique Graduate School, CNRS
- Institut des NanoSciences de Paris (France)
- Publication Date:
- Research Org.:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); USDOE National Nuclear Security Administration (NNSA)
- OSTI Identifier:
- 1482536
- Alternate Identifier(s):
- OSTI ID: 1527275
- Report Number(s):
- LLNL-JRNL-768637
Journal ID: ISSN 0021-8979; ark:/13030/qt0b28x4nt
- Grant/Contract Number:
- AC02-05CH11231; AC52-07NA27344
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Applied Physics
- Additional Journal Information:
- Journal Volume: 124; Journal Issue: 3; Journal ID: ISSN 0021-8979
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
Citation Formats
Delmotte, Franck, Meyer-Ilse, Julia, Salmassi, Farhad, Soufli, Regina, Burcklen, Catherine, Rebellato, Jennifer, Jérome, Arnaud, Vickridge, Ian, Briand, Emrick, and Gullikson, Eric. Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions. United States: N. p., 2018.
Web. doi:10.1063/1.5027488.
Delmotte, Franck, Meyer-Ilse, Julia, Salmassi, Farhad, Soufli, Regina, Burcklen, Catherine, Rebellato, Jennifer, Jérome, Arnaud, Vickridge, Ian, Briand, Emrick, & Gullikson, Eric. Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions. United States. https://doi.org/10.1063/1.5027488
Delmotte, Franck, Meyer-Ilse, Julia, Salmassi, Farhad, Soufli, Regina, Burcklen, Catherine, Rebellato, Jennifer, Jérome, Arnaud, Vickridge, Ian, Briand, Emrick, and Gullikson, Eric. Thu .
"Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions". United States. https://doi.org/10.1063/1.5027488. https://www.osti.gov/servlets/purl/1482536.
@article{osti_1482536,
title = {Soft x-ray optical constants of sputtered chromium thin films with improved accuracy in the L and M absorption edge regions},
author = {Delmotte, Franck and Meyer-Ilse, Julia and Salmassi, Farhad and Soufli, Regina and Burcklen, Catherine and Rebellato, Jennifer and Jérome, Arnaud and Vickridge, Ian and Briand, Emrick and Gullikson, Eric},
abstractNote = {},
doi = {10.1063/1.5027488},
journal = {Journal of Applied Physics},
number = 3,
volume = 124,
place = {United States},
year = {2018},
month = {7}
}
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Works referenced in this record:
Reflectance measurements on clean surfaces for the determination of optical constants of silicon in the extreme ultraviolet–soft-x-ray region
journal, January 1997
- Soufli, Regina; Gullikson, Eric M.
- Applied Optics, Vol. 36, Issue 22
Cr absorber mask for extreme-ultraviolet lithography
conference, January 2001
- Zhang, Guojing; Yan, Pei-yang; Liang, Ted
- Photomask Technology, SPIE Proceedings
Thermal stability studies of short period Sc/Cr and Sc/B 4 C/Cr multilayers
journal, January 2014
- Prasciolu, Mauro; Leontowich, Adam F. G.; Beyerlein, Kenneth R.
- Applied Optics, Vol. 53, Issue 10
Absorption Measurements of Copper, Silver, Tin, Gold, and Bismuth in the Far Ultraviolet
journal, January 1968
- Haensel, R.; Kunz, C.; Sasaki, T.
- Applied Optics, Vol. 7, Issue 2
Fabrication and evaluation of Cr-C multilayer mirrors for soft x rays
conference, October 1992
- Niibe, Masahito; Tsukamoto, Masami; Iizuka, Takashi
- International Symposium on Optical Fabrication, Testing, and Surface Evaluation, SPIE Proceedings
Optical properties of metallic films for vertical-cavity optoelectronic devices
journal, January 1998
- Rakić, Aleksandar D.; Djurišić, Aleksandra B.; Elazar, Jovan M.
- Applied Optics, Vol. 37, Issue 22, p. 5271-5283
Aperiodic CrSc multilayer mirrors for attosecond water window pulses
journal, January 2013
- Guggenmos, Alexander; Rauhut, Roman; Hofstetter, Michael
- Optics Express, Vol. 21, Issue 19
High-resolution, high-flux, user friendly VLS beamline at the ALS for the 50–1300eV energy region
journal, May 1998
- Underwood, J. H.; Gullikson, E. M.
- Journal of Electron Spectroscopy and Related Phenomena, Vol. 92, Issue 1-3
Cr/Sc multilayers for the soft-x-ray range
journal, January 1998
- Schäfers, Franz; Mertins, Hans-Christoph; Schmolla, Frank
- Applied Optics, Vol. 37, Issue 4
Multisegmented, multilayer-coated mirrors for the Solar Ultraviolet Imager
journal, September 2013
- Martínez-Galarce, Dennis; Soufli, Regina; Windt, David L.
- Optical Engineering, Vol. 52, Issue 9
Theoretical Form Factor, Attenuation, and Scattering Tabulation for Z =1–92 from E =1–10 eV to E =0.4–1.0 MeV
journal, January 1995
- Chantler, C. T.
- Journal of Physical and Chemical Reference Data, Vol. 24, Issue 1
Superconvergence and Sum Rules for the Optical Constants
journal, December 1972
- Altarelli, M.; Dexter, D. L.; Nussenzveig, H. M.
- Physical Review B, Vol. 6, Issue 12
Phase measurement of soft x-ray multilayer mirrors
journal, January 2015
- de Rossi, Sébastien; Bourassin-Bouchet, Charles; Meltchakov, Evgueni
- Optics Letters, Vol. 40, Issue 19
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
Cr/B4C multilayer mirrors: Study of interfaces and X-ray reflectance
journal, March 2016
- Burcklen, C.; Soufli, R.; Dennetiere, D.
- Journal of Applied Physics, Vol. 119, Issue 12
Interface engineered ultrashort period Cr-Ti multilayers as high reflectance mirrors and polarizers for soft x rays of lambda = 274 nm wavelength
journal, January 2006
- Ghafoor, Naureen; Persson, Per O. Å.; Birch, Jens
- Applied Optics, Vol. 45, Issue 1
IMD—Software for modeling the optical properties of multilayer films
journal, January 1998
- Windt, David L.
- Computers in Physics, Vol. 12, Issue 4
Iridium optical constants from synchrotron reflectance measurements over 0.05- to 12-keV x-ray energies
conference, October 2004
- Graessle, Dale E.; Soufli, Regina; Nelson, Art J.
- Optical Science and Technology, the SPIE 49th Annual Meeting, SPIE Proceedings
Recent developments in EUV reflectometry at the Advanced Light Source
conference, August 2001
- Gullikson, Eric M.; Mrowka, Stanley; Kaufmann, Benjamin B.
- 26th Annual International Symposium on Microlithography, SPIE Proceedings
Finite-energy -sum rules for valence electrons
journal, June 1978
- Smith, D. Y.; Shiles, E.
- Physical Review B, Vol. 17, Issue 12
Tuning sum rules with window functions for optical constant evaluation
journal, June 2016
- Rodríguez-de Marcos, Luis V.; Méndez, José A.; Larruquert, Juan I.
- Journal of Optics, Vol. 18, Issue 7
High reflectance Cr/C multilayer at 250eV for soft X-ray polarimetry
journal, October 2015
- Wen, Mingwu; Jiang, Li; Zhang, Zhong
- Thin Solid Films, Vol. 592
Experimental study of Cr∕Sc multilayer mirrors for the nitrogen Kα-emission line
journal, May 2008
- Hardouin, Aurélie; Delmotte, Franck; Ravet, Marie Françoise
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 26, Issue 3
Intercomparison of absolute standards for RBS studies
journal, December 1983
- Cohen, C.; Davies, J. A.; Drigo, A. V.
- Nuclear Instruments and Methods in Physics Research, Vol. 218, Issue 1-3
High-reflectivity Cr∕Sc multilayer condenser for compact soft x-ray microscopy
journal, December 2006
- Stollberg, H.; Yulin, S.; Takman, P. A. C.
- Review of Scientific Instruments, Vol. 77, Issue 12
Optical absorption measurements of the transition metals Ti, V, Cr, Mn, Fe, Co, Ni in the region of 3p electron transitions
journal, April 1969
- Sonntag, B.; Haensel, R.; Kunz, C.
- Solid State Communications, Vol. 7, Issue 8
Oxygen chemisorption and initial oxidation of Cr(110)
journal, August 1982
- Sakisaka, Y.; Kato, H.; Onchi, M.
- Surface Science, Vol. 120, Issue 1
Near‐edge x‐ray absorption fine structure characterization of compositions and reactivities of transition metal oxides
journal, May 1996
- Chen, J. G.; Frühberger, B.; Colaianni, M. L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 3
Enhanced reflectivity and stability of Sc/Si multilayers
conference, January 2004
- Yulin, Sergiy A.; Schaefers, Franz; Feigl, Torsten
- Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
Improved physics in SIMNRA 7
journal, August 2014
- Mayer, M.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 332
High reflectance Cr/V multilayer with B_4C barrier layer for water window wavelength region
journal, January 2016
- Huang, Qiushi; Fei, Jiani; Liu, Yang
- Optics Letters, Vol. 41, Issue 4
Oxide formation on chromium metal surfaces by low-energy oxygen implantation at room temperature
journal, August 2017
- Peter, Robert; Saric, Iva; Piltaver, Ivna Kavre
- Thin Solid Films, Vol. 636
Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
journal, January 2005
- Gautier, Julien; Delmotte, Franck; Roulliay, Marc
- Applied Optics, Vol. 44, Issue 3
X-ray Absorption Spectroscopy of Small Chromium Oxide Particles (Cr 2 O 3 , CrO 2 ) Supported on Titanium Dioxide
journal, January 1996
- Neisius, Th.; Simmons, C. T.; Köhler, K.
- Langmuir, Vol. 12, Issue 26
Oxygen chemisorption and initial oxidation of Cr(110)
journal, August 1982
- Sakisaka, Y.; Kato, H.; Onchi, M.
- Surface Science Letters, Vol. 120, Issue 1
Works referencing / citing this record:
Optical constants of magnetron sputtered Pt thin films with improved accuracy in the N- and O-electronic shell absorption regions
journal, February 2019
- Soufli, Regina; Delmotte, Franck; Meyer-Ilse, Julia
- Journal of Applied Physics, Vol. 125, Issue 8
Optical constants of sputtered beryllium thin films determined from photoabsorption measurements in the spectral range 20.4–250 eV
journal, January 2020
- Svechnikov, Mikhail; Chkhalo, Nikolay; Lopatin, Alexey
- Journal of Synchrotron Radiation, Vol. 27, Issue 1