Highly parallel scanning tunneling microscope based hydrogen depassivation lithography

Randall, John N.; Owen, James H. G.; Lake, Joseph; Saini, Rahul; Fuchs, Ehud; Mahdavi, Mohammad; Moheimani, S. O. Reza; Schaefer, Benjamin Carrion

doi:10.1116/1.5047939

Title: Highly parallel scanning tunneling microscope based hydrogen depassivation lithography

Journal Article · 31 October 2018 · Journal of Vacuum Science and Technology B

DOI: https://doi.org/10.1116/1.5047939 · OSTI ID:1479598

Randall, John N. ^[1]; Owen, James H. G. ^[1]; Lake, Joseph ^[1]; Saini, Rahul ^[1]; Fuchs, Ehud ^[1]; Mahdavi, Mohammad ^[2]; Moheimani, S. O. Reza ^[2]; Schaefer, Benjamin Carrion ^[3]

Zyvex Labs, 1301 North Plano Road, Richardson, Texas 75081
Systems Engineering Department, University of Texas at Dallas, 800 W. Campbell Road, Richardson, Texas 75080
Electrical Engineering Department, University of Texas at Dallas, 800 W. Campbell Road, Richardson, Texas 75080

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Sponsoring Organization:: USDOE

Grant/Contract Number:: EE0008322

OSTI ID:: 1479598

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Journal Issue: 6 Vol. 36; ISSN 2166-2746

Publisher:: American Vacuum SocietyCopyright Statement

Country of Publication:: United States

Language:: English

References (15)

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Atomic precision patterning on Si: An opportunity for a digitized process Randall, J. N.; Ballard, J. B.; Lyding, J. W. Microelectronic Engineering, Vol. 87, Issue 5-8 https://doi.org/10.1016/j.mee.2009.11.143	journal	May 2010
Field-directed sputter sharpening for tailored probe materials and atomic-scale lithography Schmucker, S. W.; Kumar, N.; Abelson, J. R. Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1907	journal	January 2012
Tungsten nanotip fabrication by spatially controlled field-assisted reaction with nitrogen Rezeq, Moh’d; Pitters, Jason; Wolkow, Robert The Journal of Chemical Physics, Vol. 124, Issue 20 https://doi.org/10.1063/1.2198536	journal	May 2006
Scanning tunneling microscopy Hansma, Paul K.; Tersoff, Jerry Journal of Applied Physics, Vol. 61, Issue 2 https://doi.org/10.1063/1.338189	journal	January 1987
On the effect of local barrier height in scanning tunneling microscopy: Measurement methods and control implications Tajaddodianfar, Farid; Moheimani, S. O. Reza; Owen, James Review of Scientific Instruments, Vol. 89, Issue 1 https://doi.org/10.1063/1.5003851	journal	January 2018
Cryogenic UHV-STM Study of Hydrogen and Deuterium Desorption from Si(100) Foley, E. T.; Kam, A. F.; Lyding, J. W. Physical Review Letters, Vol. 80, Issue 6 https://doi.org/10.1103/PhysRevLett.80.1336	journal	February 1998
Quilt Packaging: High-Density, High-Speed Interchip Communications Bernstein, G. H. IEEE Transactions on Advanced Packaging, Vol. 30, Issue 4 https://doi.org/10.1109/TADVP.2007.901643	journal	November 2007
Scanning Tunneling Microscope Control: A Self-Tuning PI Controller Based on Online Local Barrier Height Estimation* Tajaddodianfar, Farid; Moheimani, S. O. Reza; Randall, John N. IEEE Transactions on Control Systems Technology, Vol. 27, Issue 5 https://doi.org/10.1109/TCST.2018.2844781	journal	September 2019
Atomic precision lithography on Si Randall, J. N.; Lyding, J. W.; Schmucker, S. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237096	journal	January 2009
Controlled formation of atomic step morphology on micropatterned Si (100) Li, K.; Pradeep, N.; Chikkamaranahalli, S. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 29, Issue 4 https://doi.org/10.1116/1.3610955	journal	July 2011
Progress and issues in e-beam and other top down nanolithography Tennant, Donald M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 31, Issue 5 https://doi.org/10.1116/1.4813761	journal	September 2013
Multimode hydrogen depassivation lithography: A method for optimizing atomically precise write times Ballard, Joshua B.; Sisson, Thomas W.; Owen, James H. G. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 6 https://doi.org/10.1116/1.4823756	journal	November 2013
Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics Kuo, Hong-Shi; Hwang, Ing-Shouh; Fu, Tsu-Yi Japanese Journal of Applied Physics, Vol. 45, Issue 11 https://doi.org/10.1143/JJAP.45.8972	journal	November 2006
Mono-atomic tips for scanning tunneling microscopy Fink, Hans-Werner IBM Journal of Research and Development, Vol. 30, Issue 5 https://doi.org/10.1147/rd.305.0460	journal	September 1986

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