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Title: Two-dimensional stitching interferometry based on tilt measurement

In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.
Authors:
ORCiD logo [1] ;  [1] ; ORCiD logo [2] ;  [1] ;  [1] ;  [3]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Nanjing Univ. of Science and Technology, Jiangsu Province (China)
  3. Kornacker 4, Freistaat Bayern (Germany)
Publication Date:
Report Number(s):
BNL-209305-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:
SC0012704
Type:
Accepted Manuscript
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 26; Journal Issue: 18; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING
OSTI Identifier:
1478495

Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States: N. p., Web. doi:10.1364/OE.26.023278.
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, & Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States. doi:10.1364/OE.26.023278.
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. 2018. "Two-dimensional stitching interferometry based on tilt measurement". United States. doi:10.1364/OE.26.023278. https://www.osti.gov/servlets/purl/1478495.
@article{osti_1478495,
title = {Two-dimensional stitching interferometry based on tilt measurement},
author = {Huang, Lei and Idir, Mourad and Zuo, Chao and Wang, Tianyi and Tayabaly, Kashmira and Lippmann, Erich},
abstractNote = {In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.},
doi = {10.1364/OE.26.023278},
journal = {Optics Express},
number = 18,
volume = 26,
place = {United States},
year = {2018},
month = {8}
}