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Title: Unwarping GISAXS data

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. Furthermore, this new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.
Authors:
 [1] ; ORCiD logo [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
Publication Date:
Report Number(s):
BNL-209467-2018-JAAM
Journal ID: ISSN 2052-2525; IUCRAJ
Grant/Contract Number:
SC0012704
Type:
Published Article
Journal Name:
IUCrJ
Additional Journal Information:
Journal Volume: 5; Journal Issue: 6; Journal ID: ISSN 2052-2525
Publisher:
International Union of Crystallography
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; GISAXS; X-ray scattering; GTSAXS; image healing; reconstruction; distorted-wave Born approximation
OSTI Identifier:
1476690
Alternate Identifier(s):
OSTI ID: 1482567

Liu, Jiliang, and Yager, Kevin G. Unwarping GISAXS data. United States: N. p., Web. doi:10.1107/S2052252518012058.
Liu, Jiliang, & Yager, Kevin G. Unwarping GISAXS data. United States. doi:10.1107/S2052252518012058.
Liu, Jiliang, and Yager, Kevin G. 2018. "Unwarping GISAXS data". United States. doi:10.1107/S2052252518012058.
@article{osti_1476690,
title = {Unwarping GISAXS data},
author = {Liu, Jiliang and Yager, Kevin G.},
abstractNote = {Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. Furthermore, this new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.},
doi = {10.1107/S2052252518012058},
journal = {IUCrJ},
number = 6,
volume = 5,
place = {United States},
year = {2018},
month = {10}
}

Works referenced in this record:

Operational properties of fluctuation X-ray scattering data
journal, March 2015

Reduction and analysis of SANS and USANS data using IGOR Pro
journal, November 2006