Unwarping GISAXS data

Liu, Jiliang; Yager, Kevin G.

doi:10.1107/S2052252518012058

Title: Unwarping GISAXS data

Journal Article · Mon Oct 08 00:00:00 UTC 2018 · IUCrJ

DOI: https://doi.org/10.1107/S2052252518012058 · OSTI ID:1476690

Liu, Jiliang; Yager, Kevin G.

Grazing-incidence small-angle X-ray scattering (GISAXS) is a powerful technique for measuring the nanostructure of coatings and thin films. However, GISAXS data are plagued by distortions that complicate data analysis. The detector image is a warped representation of reciprocal space because of refraction, and overlapping scattering patterns appear because of reflection. A method is presented to unwarp GISAXS data, recovering an estimate of the true undistorted scattering pattern. The method consists of first generating a guess for the structure of the reciprocal-space scattering by solving for a mutually consistent prediction from the transmission and reflection sub-components. This initial guess is then iteratively refined by fitting experimental GISAXS images at multiple incident angles, using the distorted-wave Born approximation (DWBA) to convert between reciprocal space and detector space. This method converges to a high-quality reconstruction for the undistorted scattering, as validated by comparing with grazing-transmission scattering data. This new method for unwarping GISAXS images will broaden the applicability of grazing-incidence techniques, allowing experimenters to inspect undistorted visualizations of their data and allowing a broader range of analysis methods to be applied to GI data.

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Research Organization:: Brookhaven National Laboratory (BNL), Upton, NY (United States)

Sponsoring Organization:: USDOE; USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: SC0012704

OSTI ID:: 1476690

Report Number(s):: BNL--209467-2018-JAAM; PII: S2052252518012058

Journal Information:: IUCrJ, Journal Name: IUCrJ Journal Issue: 6 Vol. 5; ISSN 2052-2525; ISSN IUCRAJ

Publisher:: International Union of Crystallography (IUCr)Copyright Statement

Country of Publication:: United Kingdom

Language:: English

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77 NANOSCIENCE AND NANOTECHNOLOGY
GISAXS
GTSAXS
X-ray scattering
distorted-wave Born approximation
image healing
reconstruction

Title: Unwarping GISAXS data

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