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Title: Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects

Abstract

Here, this study presents a detailed examination of the lattice distortions introduced by glancing incidence Focussed Ion Beam (FIB) milling. Using non-destructive multi-reflection Bragg coherent X-ray diffraction we probe damage formation in an initially pristine gold micro-crystal following several stages of FIB milling. These experiments allow access to the full lattice strain tensor in the micro-crystal with ~25 nm 3D spatial resolution, enabling a nano-scale analysis of residual lattice strains and defects formed. Our results show that 30 keV glancing incidence milling produces fewer large defects than normal incidence milling at the same energy. However the resulting residual lattice strains have similar magnitude and extend up to ~50 nm into the sample. At the edges of the milled surface, where the ion-beam tails impact the sample at near-normal incidence, large dislocation loops with a range of Burgers vectors are formed. Further glancing incidence FIB polishing with 5 keV ion energy removes these dislocation loops and reduces the lattice strains caused by higher energy FIB milling. However, even at the lower ion energy, damage-induced lattice strains are present within a ~20 nm thick surface layer. These results highlight the need for careful consideration and management of FIB damage. They also showmore » that low-energy FIB-milling is an effective tool for removing FIB-milling induced lattice strains. This is important for the preparation of micro-mechanical test specimens and strain microscopy samples.« less

Authors:
ORCiD logo [1];  [2];  [2];  [2]; ORCiD logo [3];  [1]
  1. Univ. of Oxford, Oxford (United Kingdom)
  2. Argonne National Lab. (ANL), Argonne, IL (United States)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States); Univ. College, London (United Kingdom)
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1475562
Alternate Identifier(s):
OSTI ID: 1438316; OSTI ID: 1548221
Report Number(s):
BNL-205674-2018-JAAM
Journal ID: ISSN 1359-6454
Grant/Contract Number:  
SC0012704; AC02-06CH11357; SC00112704
Resource Type:
Accepted Manuscript
Journal Name:
Acta Materialia
Additional Journal Information:
Journal Volume: 154; Journal Issue: C; Journal ID: ISSN 1359-6454
Publisher:
Elsevier
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; Focussed ion beam; Implantation damage; Coherent X-ray diffraction; Dislocations; Residual lattice strains

Citation Formats

Hofmann, Felix, Harder, Ross J., Liu, Wenjun, Liu, Yuzi, Robinson, Ian K., and Zayachuk, Yevhen. Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects. United States: N. p., 2018. Web. doi:10.1016/j.actamat.2018.05.018.
Hofmann, Felix, Harder, Ross J., Liu, Wenjun, Liu, Yuzi, Robinson, Ian K., & Zayachuk, Yevhen. Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects. United States. doi:10.1016/j.actamat.2018.05.018.
Hofmann, Felix, Harder, Ross J., Liu, Wenjun, Liu, Yuzi, Robinson, Ian K., and Zayachuk, Yevhen. Fri . "Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects". United States. doi:10.1016/j.actamat.2018.05.018. https://www.osti.gov/servlets/purl/1475562.
@article{osti_1475562,
title = {Glancing-incidence focussed ion beam milling: A coherent X-ray diffraction study of 3D nano-scale lattice strains and crystal defects},
author = {Hofmann, Felix and Harder, Ross J. and Liu, Wenjun and Liu, Yuzi and Robinson, Ian K. and Zayachuk, Yevhen},
abstractNote = {Here, this study presents a detailed examination of the lattice distortions introduced by glancing incidence Focussed Ion Beam (FIB) milling. Using non-destructive multi-reflection Bragg coherent X-ray diffraction we probe damage formation in an initially pristine gold micro-crystal following several stages of FIB milling. These experiments allow access to the full lattice strain tensor in the micro-crystal with ~25 nm 3D spatial resolution, enabling a nano-scale analysis of residual lattice strains and defects formed. Our results show that 30 keV glancing incidence milling produces fewer large defects than normal incidence milling at the same energy. However the resulting residual lattice strains have similar magnitude and extend up to ~50 nm into the sample. At the edges of the milled surface, where the ion-beam tails impact the sample at near-normal incidence, large dislocation loops with a range of Burgers vectors are formed. Further glancing incidence FIB polishing with 5 keV ion energy removes these dislocation loops and reduces the lattice strains caused by higher energy FIB milling. However, even at the lower ion energy, damage-induced lattice strains are present within a ~20 nm thick surface layer. These results highlight the need for careful consideration and management of FIB damage. They also show that low-energy FIB-milling is an effective tool for removing FIB-milling induced lattice strains. This is important for the preparation of micro-mechanical test specimens and strain microscopy samples.},
doi = {10.1016/j.actamat.2018.05.018},
journal = {Acta Materialia},
number = C,
volume = 154,
place = {United States},
year = {2018},
month = {5}
}

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