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Title: Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography

Abstract

Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.

Authors:
 [1]; ORCiD logo [1]
  1. Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Center for Bio-Inspired Energy Science (CBES)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1470549
Grant/Contract Number:  
SC0000989
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Polymer Science. Part B, Polymer Physics
Additional Journal Information:
Journal Volume: 56; Journal Issue: 9; Related Information: CBES partners with Northwestern University (lead); Harvard University; New York University; Pennsylvania State University; University of Michigan; University of Pittsburgh; Journal ID: ISSN 0887-6266
Publisher:
Wiley
Country of Publication:
United States
Language:
English
Subject:
catalysis (homogeneous); solar (photovoltaic); bio-inspired; charge transport; mesostructured materials; materials and chemistry by design; synthesis (novel materials); synthesis (self-assembly); contact surface; deformation; finite element analysis; nanopatterning; pyramid array; scanning probe lithography

Citation Formats

Liu, Shuangping, and Olvera de la Cruz, Monica. Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography. United States: N. p., 2018. Web. doi:10.1002/polb.24585.
Liu, Shuangping, & Olvera de la Cruz, Monica. Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography. United States. doi:10.1002/polb.24585.
Liu, Shuangping, and Olvera de la Cruz, Monica. Tue . "Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography". United States. doi:10.1002/polb.24585. https://www.osti.gov/servlets/purl/1470549.
@article{osti_1470549,
title = {Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography},
author = {Liu, Shuangping and Olvera de la Cruz, Monica},
abstractNote = {Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.},
doi = {10.1002/polb.24585},
journal = {Journal of Polymer Science. Part B, Polymer Physics},
number = 9,
volume = 56,
place = {United States},
year = {2018},
month = {2}
}

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