Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography
Abstract
Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.
- Authors:
-
[1]
- Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Center for Bio-Inspired Energy Science (CBES)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1470549
- Grant/Contract Number:
- SC0000989
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Polymer Science. Part B, Polymer Physics
- Additional Journal Information:
- Journal Volume: 56; Journal Issue: 9; Related Information: CBES partners with Northwestern University (lead); Harvard University; New York University; Pennsylvania State University; University of Michigan; University of Pittsburgh; Journal ID: ISSN 0887-6266
- Publisher:
- Wiley
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; 77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE; catalysis (homogeneous); solar (photovoltaic); bio-inspired; charge transport; mesostructured materials; materials and chemistry by design; synthesis (novel materials); synthesis (self-assembly); contact surface; deformation; finite element analysis; nanopatterning; pyramid array; scanning probe lithography
Citation Formats
Liu, Shuangping, and Olvera de la Cruz, Monica. Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography. United States: N. p., 2018.
Web. doi:10.1002/polb.24585.
Liu, Shuangping, & Olvera de la Cruz, Monica. Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography. United States. doi:10.1002/polb.24585.
Liu, Shuangping, and Olvera de la Cruz, Monica. Tue .
"Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography". United States. doi:10.1002/polb.24585. https://www.osti.gov/servlets/purl/1470549.
@article{osti_1470549,
title = {Deformation of elastomeric pyramid pen arrays in cantilever-free scanning probe lithography},
author = {Liu, Shuangping and Olvera de la Cruz, Monica},
abstractNote = {Cantilever-free scanning probe lithography (SPL) employs soft elastomeric pen arrays to deliver material or energy to a surface to achieve a high-resolution, high-throughput, and low-cost nanopatterning. In particular, microscale elastomeric pyramid pen arrays are often adopted as the cantilever-free architecture owing to their distinct structural and mechanical properties. To better understand the mechanical behavior of the elastomeric pyramid pen array during the lithographic printing process, we numerically investigate the compression of an elastomeric pyramid array in a nonadhesive and frictionless contact with a rigid substrate. Simple scaling laws of the width of the contact surface with respect to the compression displacement and force are found and compared with previous models and experiments. By changing the interpyramid distance or the thickness of the base of the pyramid array, increasing deviations from the established scaling laws are observed and explained. Finally, we demonstrate that the unique morphology of a compressed pyramid primarily determines the unusual shape of the features fabricated by a specific cantilever-free SPL technique.},
doi = {10.1002/polb.24585},
journal = {Journal of Polymer Science. Part B, Polymer Physics},
number = 9,
volume = 56,
place = {United States},
year = {2018},
month = {2}
}
Other availability
Search WorldCat to find libraries that may hold this journal
Cited by: 2 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Solution-Phase Photochemical Nanopatterning Enabled by High-Refractive-Index Beam Pen Arrays
journal, June 2017
- Xie, Zhuang; Gordiichuk, Pavlo; Lin, Qing-Yuan
- ACS Nano, Vol. 11, Issue 8
Recent Advances in Cantilever-Free Scanning Probe Lithography: High-Throughput, Space-Confined Synthesis of Nanostructures and Beyond
journal, April 2017
- He, Qiyuan; Tan, Chaoliang; Zhang, Hua
- ACS Nano, Vol. 11, Issue 5
Highly Anisotropic Suspended Planar-Array Chips with Multidimensional Sub-Micrometric Biomolecular Patterns
journal, February 2017
- Agusil, Juan Pablo; Torras, Núria; Duch, Marta
- Advanced Functional Materials, Vol. 27, Issue 13
Microstructured Graphene Arrays for Highly Sensitive Flexible Tactile Sensors
journal, June 2014
- Zhu, Bowen; Niu, Zhiqiang; Wang, Hong
- Small, Vol. 10, Issue 18
Anisotropic etching of silicon
journal, October 1978
- Bean, K. E.
- IEEE Transactions on Electron Devices, Vol. 25, Issue 10
High Throughput Synthesis of Multifunctional Oxide Nanostructures within Nanoreactors Defined by Beam Pen Lithography
journal, March 2017
- Liao, Xing; Huang, Yi-kai; Mirkin, Chad A.
- ACS Nano, Vol. 11, Issue 5
Beam pen lithography
journal, August 2010
- Huo, Fengwei; Zheng, Gengfeng; Liao, Xing
- Nature Nanotechnology, Vol. 5, Issue 9
Apertureless Cantilever-Free Pen Arrays for Scanning Photochemical Printing
journal, October 2014
- Zhou, Yu; Xie, Zhuang; Brown, Keith A.
- Small, Vol. 11, Issue 8
Highly Stretchable Resistive Pressure Sensors Using a Conductive Elastomeric Composite on a Micropyramid Array
journal, February 2014
- Choong, Chwee-Lin; Shim, Mun-Bo; Lee, Byoung-Sun
- Advanced Materials, Vol. 26, Issue 21
Modeling and simulation of electromechanical-contact based elastomeric pressure sensor
conference, April 2016
- Chen, Zhibo; Huang, Wei; Zhang, Xinfeng
- 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Deformation of Pyramidal PDMS Stamps During Microcontact Printing
journal, May 2016
- Jin, Congrui; Qiao, Qichao
- Journal of Applied Mechanics, Vol. 83, Issue 7
Hard-tip, soft-spring lithography
journal, January 2011
- Shim, Wooyoung; Braunschweig, Adam B.; Liao, Xing
- Nature, Vol. 469, Issue 7331
Polymer Pen Lithography
journal, September 2008
- Huo, F.; Zheng, Z.; Zheng, G.
- Science, Vol. 321, Issue 5896
A flexible and biocompatible triboelectric nanogenerator with tunable internal resistance for powering wearable devices
journal, February 2016
- Zhu, Yanbo; Yang, Bin; Liu, Jingquan
- Scientific Reports, Vol. 6, Issue 1
Nanomanufacturing: A Perspective
journal, February 2016
- Liddle, J. Alexander; Gallatin, Gregg M.
- ACS Nano, Vol. 10, Issue 3
Soft Lithography
journal, August 1998
- Xia, Younan; Whitesides, George M.
- Annual Review of Materials Science, Vol. 28, Issue 1, p. 153-184
Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing
journal, September 2010
- Kim, S.; Wu, J.; Carlson, A.
- Proceedings of the National Academy of Sciences, Vol. 107, Issue 40, p. 17095-17100
A chameleon-inspired stretchable electronic skin with interactive colour changing controlled by tactile sensing
journal, August 2015
- Chou, Ho-Hsiu; Nguyen, Amanda; Chortos, Alex
- Nature Communications, Vol. 6, Issue 1
Cantilever-Free Scanning Probe Molecular Printing
journal, June 2011
- Giam, Louise R.; Mirkin, Chad A.
- Angewandte Chemie International Edition, Vol. 50, Issue 33
Transparent Triboelectric Nanogenerators and Self-Powered Pressure Sensors Based on Micropatterned Plastic Films
journal, May 2012
- Fan, Feng-Ru; Lin, Long; Zhu, Guang
- Nano Letters, Vol. 12, Issue 6
Force- and Time-Dependent Feature Size and Shape Control in Molecular Printing via Polymer-Pen Lithography
journal, October 2009
- Liao, Xing; Braunschweig, Adam B.; Zheng, Zijian
- Small, Vol. 6, Issue 10
Micropatterning: Interdigitated Multicolored Bioink Micropatterns by Multiplexed Polymer Pen Lithography (Small 19/2013)
journal, October 2013
- Brinkmann, Falko; Hirtz, Michael; Greiner, Alexandra M.
- Small, Vol. 9, Issue 19
Large-area molecular patterning with polymer pen lithography
journal, November 2013
- Eichelsdoerfer, Daniel J.; Liao, Xing; Cabezas, Maria D.
- Nature Protocols, Vol. 8, Issue 12
Protein patterning by microcontact printing using pyramidal PDMS stamps
journal, January 2016
- Filipponi, Luisa; Livingston, Peter; Kašpar, Ondřej
- Biomedical Microdevices, Vol. 18, Issue 1
A micromachined elastomeric tip array for contact printing with variable dot size and density
journal, November 2007
- Hong, Jung Moo; Ozkeskin, Fatih M.; Zou, Jun
- Journal of Micromechanics and Microengineering, Vol. 18, Issue 1
Beam pen lithography as a new tool for spatially controlled photochemistry, and its utilization in the synthesis of multivalent glycan arrays
journal, January 2014
- Bian, Shudan; Zieba, Sylwia B.; Morris, William
- Chemical Science, Vol. 5, Issue 5
Impact of contact pressure on output voltage of triboelectric nanogenerator based on deformation of interfacial structures
journal, October 2015
- Seol, Myeong-Lok; Lee, Sang-Han; Han, Jin-Woo
- Nano Energy, Vol. 17
Soft Lithography
journal, March 1998
- Xia, Younan; Whitesides, George M.
- Angewandte Chemie International Edition, Vol. 37, Issue 5