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Title: MEMS-tunable dielectric metasurface lens

Abstract

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

Authors:
ORCiD logo [1];  [2];  [1]; ORCiD logo [1];  [1]; ORCiD logo [1]
  1. California Inst. of Technology (CalTech), Pasadena, CA (United States)
  2. California Inst. of Technology (CalTech), Pasadena, CA (United States); Univ. of Massachusetts, Amherst, MA (United States)
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1470397
Grant/Contract Number:  
SC0001293
Resource Type:
Accepted Manuscript
Journal Name:
Nature Communications
Additional Journal Information:
Journal Volume: 9; Journal Issue: 1; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; Journal ID: ISSN 2041-1723
Publisher:
Nature Publishing Group
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING; solar (photovoltaic); solid state lighting; phonons; thermal conductivity; electrodes - solar; materials and chemistry by design; optics; synthesis (novel materials); synthesis (self-assembly)

Citation Formats

Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States: N. p., 2018. Web. doi:10.1038/s41467-018-03155-6.
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, & Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States. https://doi.org/10.1038/s41467-018-03155-6
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. Fri . "MEMS-tunable dielectric metasurface lens". United States. https://doi.org/10.1038/s41467-018-03155-6. https://www.osti.gov/servlets/purl/1470397.
@article{osti_1470397,
title = {MEMS-tunable dielectric metasurface lens},
author = {Arbabi, Ehsan and Arbabi, Amir and Kamali, Seyedeh Mahsa and Horie, Yu and Faraji-Dana, Mohammad Sadegh and Faraon, Andrei},
abstractNote = {Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.},
doi = {10.1038/s41467-018-03155-6},
journal = {Nature Communications},
number = 1,
volume = 9,
place = {United States},
year = {Fri Feb 23 00:00:00 EST 2018},
month = {Fri Feb 23 00:00:00 EST 2018}
}

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Cited by: 385 works
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Figures / Tables:

Fig. 1 Fig. 1 : Schematic illustration of the tunable doublet and design graphs. a Schematic illustration of the proposed tunable lens, comprised of a stationary lens on a substrate, and a moving lens on a membrane. With the correct design, a small change in the distance between the two lenses (Δxmore » ~ 1 μm) results in a large change in the focal distance (Δf ~ 35 μm). (Insets: schematics of the moving and stationary lenses showing the electrostatic actuation contacts.) b The first and c second mechanical resonances of the membrane at frequencies of ~2.6 and ~5.6 kHz, respectively. The scale bars are 100 μm. d Simulated transmission amplitude and phase for a uniform array of α-Si nano-posts on a ~213-nm-thick SiNx membrane versus the nano-post width. The nano-posts are 530 nm tall and are placed on the vertices of a square lattice with a lattice constant of 320 nm. e Simulated transmission amplitude and phase for a uniform array of α-Si nano-posts on a glass substrate versus the nano-post width. The nano-posts are 615 nm tall and are placed on the vertices of a square lattice with a lattice constant of 320 nm. FS: Fused silica« less

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A Dynamically Modulated All‐Dielectric Metasurface Doublet for Directional Harmonic Generation and Manipulation in Transmission
journal, September 2019

  • Salary, Mohammad Mahdi; Farazi, Soheil; Mosallaei, Hossein
  • Advanced Optical Materials, Vol. 7, Issue 23
  • DOI: 10.1002/adom.201900843

Tunable beam deflector by mutual motion of cascaded bilayer metasurfaces
journal, October 2019


Integrating Microsystems with Metamaterials Towards Metadevices
conference, June 2019

  • Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu
  • 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
  • DOI: 10.1109/transducers.2019.8808812

Super-sensitive tunable planar lens based on graphene hyperbolic metamaterials
journal, January 2019

  • Wang, Yu; Chen, Jianfeng; Liang, Wenyao
  • Optics Express, Vol. 27, Issue 17
  • DOI: 10.1364/oe.27.024738

Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens
journal, November 2018


Experimental demonstration of a continuous varifocal metalens with large zoom range and high imaging resolution
journal, October 2019

  • Guo, Yinghui; Pu, Mingbo; Ma, Xiaoliang
  • Applied Physics Letters, Vol. 115, Issue 16
  • DOI: 10.1063/1.5123367

Three-Dimensional Aberration Analyses of Metasurface Flat Lenses
journal, September 2019


High-efficiency, linear-polarization-multiplexing metalens for long-wavelength infrared light
journal, January 2018

  • Fan, Qingbin; Wang, Yilin; Liu, Mingze
  • Optics Letters, Vol. 43, Issue 24
  • DOI: 10.1364/ol.43.006005

Temporal color mixing and dynamic beam shaping with silicon metasurfaces
journal, July 2019

  • Holsteen, Aaron L.; Cihan, Ahmet Fatih; Brongersma, Mark L.
  • Science, Vol. 365, Issue 6450
  • DOI: 10.1126/science.aax5961

All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry
journal, September 2019


Resonant dielectric metasurfaces: active tuning and nonlinear effects
journal, July 2019

  • Zou, Chengjun; Sautter, Jürgen; Setzpfandt, Frank
  • Journal of Physics D: Applied Physics, Vol. 52, Issue 37
  • DOI: 10.1088/1361-6463/ab25ff

Electrical tuning of phase-change antennas and metasurfaces
journal, April 2021


Single-shot quantitative phase gradient microscopy using a system of multifunctional metasurfaces
journal, October 2019


Tunable Metasurfaces Based on Active Materials
journal, March 2019

  • Cui, Tong; Bai, Benfeng; Sun, Hong‐Bo
  • Advanced Functional Materials, Vol. 29, Issue 10
  • DOI: 10.1002/adfm.201806692

Control of LED Emission with Functional Dielectric Metasurfaces
text, January 2019


Recent Progress in Active Optical Metasurfaces
journal, April 2019

  • Kang, Lei; Jenkins, Ronald P.; Werner, Douglas H.
  • Advanced Optical Materials, Vol. 7, Issue 14
  • DOI: 10.1002/adom.201801813

All-Dielectric Programmable Huygens' Metasurfaces
text, January 2020


Spectral tomographic imaging with aplanatic metalens
journal, November 2019


Optical metasurfaces: new generation building blocks for multi-functional optics
journal, August 2018


Active metamaterial nearly perfect light absorbers: a review [Invited]
journal, January 2019

  • Hajian, Hodjat; Ghobadi, Amir; Butun, Bayram
  • Journal of the Optical Society of America B, Vol. 36, Issue 8
  • DOI: 10.1364/josab.36.00f131

Fano‐Enhanced Circular Dichroism in Deformable Stereo Metasurfaces
journal, January 2020


Ultra-Wide Band and Multifunctional Polarization Converter Based on Dielectric Metamaterial
journal, November 2019


Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material
journal, April 2021


Metalens-Based Miniaturized Optical Systems
journal, May 2019

  • Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
  • Micromachines, Vol. 10, Issue 5
  • DOI: 10.3390/mi10050310

Reconfigurable metasurface with polarization-independent manipulation for reflection and transmission wavefronts
journal, November 2019

  • Liu, Guangyao; Liu, Haixia; Han, Jiaqi
  • Journal of Physics D: Applied Physics, Vol. 53, Issue 4
  • DOI: 10.1088/1361-6463/ab5253

Metasurface-Assisted Passive Wireless Communication with Commodity Wi-Fi Signals
text, January 2020


Chromatic Dispersion Manipulation Based on Metalenses
journal, December 2019


Metalens-Based Miniaturized Optical Systems
journal, May 2019

  • Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
  • Micromachines, Vol. 10, Issue 5
  • DOI: 10.3390/mi10050310

Empowered Layer Effects and Prominent Properties in Few‐Layer Metasurfaces
journal, March 2019

  • Chen, Shuqi; Zhang, Yuebian; Li, Zhi
  • Advanced Optical Materials, Vol. 7, Issue 14
  • DOI: 10.1002/adom.201801477

Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale
text, January 2020


Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications
journal, February 2020


Spoof Plasmonic Metasurfaces with Catenary Dispersion for Two-Dimensional Wide-Angle Focusing and Imaging
journal, November 2019


Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
journal, July 2019

  • He, Shaowei; Yang, Huimin; Jiang, Yunhui
  • Micromachines, Vol. 10, Issue 8
  • DOI: 10.3390/mi10080505

Reconfigurable step-zoom metalens without optical and mechanical compensations
journal, January 2019


All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry
journal, September 2019


Metasurface-based focus-tunable mirror
journal, January 2019

  • Wang, Zehao; Liao, Dashuang; Zhang, Ting
  • Optics Express, Vol. 27, Issue 21
  • DOI: 10.1364/oe.27.030332

Fabrication and characterization of a binary diffractive lens for controlling focal distribution
journal, January 2020

  • Motogaito, Atsushi; Iguchi, Yosuke; Kato, Shuji
  • Applied Optics, Vol. 59, Issue 3
  • DOI: 10.1364/ao.381139

Polarization-enabled tunable focusing by visible-light metalenses with geometric and propagation phase
journal, October 2019


Ultrathin Tunable Lens Based on Boundary Tension Effect
journal, September 2019

  • Yang, Ao; Cao, Jie; Zhang, Fanghua
  • Sensors, Vol. 19, Issue 18
  • DOI: 10.3390/s19184018

Information metamaterials – from effective media to real-time information processing systems
journal, March 2019


Dynamic beam steering with all-dielectric electro-optic III–V multiple-quantum-well metasurfaces
journal, August 2019

  • Wu, Pin Chieh; Pala, Ragip A.; Kafaie Shirmanesh, Ghazaleh
  • Nature Communications, Vol. 10, Issue 1
  • DOI: 10.1038/s41467-019-11598-8

Polarization states synthesizer based on a thermo-optic dielectric metasurface
journal, August 2019

  • Bosch, M.; Shcherbakov, M. R.; Fan, Z.
  • Journal of Applied Physics, Vol. 126, Issue 7
  • DOI: 10.1063/1.5094158

Metasurface‐Empowered Optical Multiplexing and Multifunction
journal, October 2019


Flexible focusing pattern realization of centimeter-scale planar super-oscillatory lenses in parallel fabrication
journal, January 2019

  • Li, Wenli; Yu, Yiting; Yuan, Weizheng
  • Nanoscale, Vol. 11, Issue 1
  • DOI: 10.1039/c8nr07985d

Rotationally tunable polarization-insensitive single and multifocal metasurface
journal, March 2019


Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
text, January 2019


Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens
journal, November 2018


Thermal tuning capabilities of semiconductor metasurface resonators
journal, November 2018


Optical metasurfaces: new generation building blocks for multi-functional optics
journal, August 2018


Spectral tomographic imaging with aplanatic metalens
journal, November 2019


A review of dielectric optical metasurfaces for wavefront control
journal, June 2018


Holographic display system with adjustable viewing angle based on multi-focus optofluidic lens
journal, January 2019


Optimized chemical potential graphene-based coding metasurface approach for dynamic manipulation of terahertz wavefront
journal, December 2019

  • Fallah, Susan; Rouhi, Kasra; Abdolali, Ali
  • Journal of Physics D: Applied Physics, Vol. 53, Issue 8
  • DOI: 10.1088/1361-6463/ab572f

Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
journal, June 2019


Mechanically tunable focusing metamirror in the visible
journal, January 2019

  • Cheng, Fei; Qiu, Liangyu; Nikolov, Daniel
  • Optics Express, Vol. 27, Issue 11
  • DOI: 10.1364/oe.27.015194

When metasurface meets hologram: principle and advances
journal, January 2019

  • Jiang, Qiang; Jin, Guofan; Cao, Liangcai
  • Advances in Optics and Photonics, Vol. 11, Issue 3
  • DOI: 10.1364/aop.11.000518

Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.