MEMS-tunable dielectric metasurface lens
Abstract
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.
- Authors:
-
[1];
[1];
[1]
- California Inst. of Technology (CalTech), Pasadena, CA (United States)
- California Inst. of Technology (CalTech), Pasadena, CA (United States); Univ. of Massachusetts, Amherst, MA (United States)
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1470397
- Grant/Contract Number:
- SC0001293
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nature Communications
- Additional Journal Information:
- Journal Volume: 9; Journal Issue: 1; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; Journal ID: ISSN 2041-1723
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING; solar (photovoltaic); solid state lighting; phonons; thermal conductivity; electrodes - solar; materials and chemistry by design; optics; synthesis (novel materials); synthesis (self-assembly)
Citation Formats
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States: N. p., 2018.
Web. doi:10.1038/s41467-018-03155-6.
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, & Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States. https://doi.org/10.1038/s41467-018-03155-6
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. Fri .
"MEMS-tunable dielectric metasurface lens". United States. https://doi.org/10.1038/s41467-018-03155-6. https://www.osti.gov/servlets/purl/1470397.
@article{osti_1470397,
title = {MEMS-tunable dielectric metasurface lens},
author = {Arbabi, Ehsan and Arbabi, Amir and Kamali, Seyedeh Mahsa and Horie, Yu and Faraji-Dana, Mohammad Sadegh and Faraon, Andrei},
abstractNote = {Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.},
doi = {10.1038/s41467-018-03155-6},
journal = {Nature Communications},
number = 1,
volume = 9,
place = {United States},
year = {2018},
month = {2}
}
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Figures / Tables:
Fig. 1 : Schematic illustration of the tunable doublet and design graphs. a Schematic illustration of the proposed tunable lens, comprised of a stationary lens on a substrate, and a moving lens on a membrane. With the correct design, a small change in the distance between the two lenses (Δxmore »
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- Wang, Zehao; Liao, Dashuang; Zhang, Ting
- Optics Express, Vol. 27, Issue 21
High-efficiency, linear-polarization-multiplexing metalens for long-wavelength infrared light
journal, January 2018
- Fan, Qingbin; Wang, Yilin; Liu, Mingze
- Optics Letters, Vol. 43, Issue 24
Varifocal zoom imaging with large area focal length adjustable metalenses
journal, January 2018
- Colburn, Shane; Zhan, Alan; Majumdar, Arka
- Optica, Vol. 5, Issue 7
Extreme ultraviolet plasmonics and Cherenkov radiation in silicon
journal, January 2018
- Shekhar, Prashant; Pendharker, Sarang; Sahasrabudhe, Harshad
- Optica, Vol. 5, Issue 12
Thermal tuning capabilities of semiconductor metasurface resonators
journal, November 2018
- Lewi, Tomer; Butakov, Nikita A.; Schuller, Jon A.
- Nanophotonics, Vol. 8, Issue 2
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale
journal, February 2020
- Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N.
- Nanophotonics, Vol. 9, Issue 3
Metalens-Based Miniaturized Optical Systems
journal, May 2019
- Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
- Micromachines, Vol. 10, Issue 5
Ultrathin Tunable Lens Based on Boundary Tension Effect
journal, September 2019
- Yang, Ao; Cao, Jie; Zhang, Fanghua
- Sensors, Vol. 19, Issue 18
Electrically Programmable Terahertz Diatomic Metamolecules for Chiral Optical Control
journal, February 2019
- Cong, Longqing; Pitchappa, Prakash; Wang, Nan
- Research, Vol. 2019
Recent advances in metasurface hologram technologies (Invited paper)
journal, February 2019
- Lee, Gun‐Yeal; Sung, Jangwoon; Lee, Byoungho
- ETRI Journal, Vol. 41, Issue 1
Optical Metasurfaces: Evolving from Passive to Adaptive
journal, April 2019
- Hail, Claudio U.; Michel, Ann‐Katrin U.; Poulikakos, Dimos
- Advanced Optical Materials, Vol. 7, Issue 14
Recent Progress in Active Optical Metasurfaces
journal, April 2019
- Kang, Lei; Jenkins, Ronald P.; Werner, Douglas H.
- Advanced Optical Materials, Vol. 7, Issue 14
Control of LED Emission with Functional Dielectric Metasurfaces
journal, November 2019
- Khaidarov, Egor; Liu, Zhengtong; Paniagua‐Domínguez, Ramón
- Laser & Photonics Reviews, Vol. 14, Issue 1
A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures
journal, January 2019
- Chen, Wei Ting; Zhu, Alexander Y.; Sisler, Jared
- Nature Communications, Vol. 10, Issue 1
Flexible focusing pattern realization of centimeter-scale planar super-oscillatory lenses in parallel fabrication
journal, January 2019
- Li, Wenli; Yu, Yiting; Yuan, Weizheng
- Nanoscale, Vol. 11, Issue 1
Controls of transmitted electromagnetic waves for diverse functionalities using polarization-selective dual-band 2 bit coding metasurface
journal, December 2019
- Iqbal, Shahid; Liu, Shuo; Luo, Jun
- Journal of Optics, Vol. 22, Issue 1
Spatiotemporal light control with active metasurfaces
journal, May 2019
- Shaltout, Amr M.; Shalaev, Vladimir M.; Brongersma, Mark L.
- Science, Vol. 364, Issue 6441
When metasurface meets hologram: principle and advances
journal, January 2019
- Jiang, Qiang; Jin, Guofan; Cao, Liangcai
- Advances in Optics and Photonics, Vol. 11, Issue 3
Super-sensitive tunable planar lens based on graphene hyperbolic metamaterials
journal, January 2019
- Wang, Yu; Chen, Jianfeng; Liang, Wenyao
- Optics Express, Vol. 27, Issue 17
A review of dielectric optical metasurfaces for wavefront control
journal, June 2018
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Nanophotonics, Vol. 7, Issue 6
Information metamaterials – from effective media to real-time information processing systems
journal, March 2019
- Li, Lianlin; Cui, Tie Jun
- Nanophotonics, Vol. 8, Issue 5
Three-Dimensional Aberration Analyses of Metasurface Flat Lenses
journal, September 2019
- Li, Ruifeng; Liu, Han; Fu, Yongqi
- Plasmonics, Vol. 15, Issue 1
Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens
journal, November 2018
- Chen, Jian; Xiao, Jing; Lisevych, Danylo
- Nature Communications, Vol. 9, Issue 1
Integrating Microsystems with Metamaterials Towards Metadevices
conference, June 2019
- Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Holographic display system with adjustable viewing angle based on multi-focus optofluidic lens
journal, January 2019
- Liu, Chao; Wang, Di; Wang, Qiong-Hua
- Optics Express, Vol. 27, Issue 13
Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications
journal, February 2020
- Engelberg, Jacob; Zhou, Chen; Mazurski, Noa
- Nanophotonics, Vol. 9, Issue 2
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale
text, January 2020
- Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N.
- RWTH Aachen University
All-Dielectric Programmable Huygens' Metasurfaces
text, January 2020
- Leitis, Aleksandrs; Heßler, Andreas; Wahl, Sophia
- RWTH Aachen University
Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
text, January 2019
- Li, Shi-Qiang; Xu, Xuewu; Veetil, Rasna Maruthiyodan
- arXiv
Control of LED Emission with Functional Dielectric Metasurfaces
text, January 2019
- Khaidarov, Egor; Liu, Zhengtong; Paniagua-Dominguez, Ramon
- arXiv
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