MEMS-tunable dielectric metasurface lens
Abstract
Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.
- Authors:
-
- California Inst. of Technology (CalTech), Pasadena, CA (United States)
- California Inst. of Technology (CalTech), Pasadena, CA (United States); Univ. of Massachusetts, Amherst, MA (United States)
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1470397
- Grant/Contract Number:
- SC0001293
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Nature Communications
- Additional Journal Information:
- Journal Volume: 9; Journal Issue: 1; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; Journal ID: ISSN 2041-1723
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 42 ENGINEERING; solar (photovoltaic); solid state lighting; phonons; thermal conductivity; electrodes - solar; materials and chemistry by design; optics; synthesis (novel materials); synthesis (self-assembly)
Citation Formats
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States: N. p., 2018.
Web. doi:10.1038/s41467-018-03155-6.
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, & Faraon, Andrei. MEMS-tunable dielectric metasurface lens. United States. https://doi.org/10.1038/s41467-018-03155-6
Arbabi, Ehsan, Arbabi, Amir, Kamali, Seyedeh Mahsa, Horie, Yu, Faraji-Dana, Mohammad Sadegh, and Faraon, Andrei. Fri .
"MEMS-tunable dielectric metasurface lens". United States. https://doi.org/10.1038/s41467-018-03155-6. https://www.osti.gov/servlets/purl/1470397.
@article{osti_1470397,
title = {MEMS-tunable dielectric metasurface lens},
author = {Arbabi, Ehsan and Arbabi, Amir and Kamali, Seyedeh Mahsa and Horie, Yu and Faraji-Dana, Mohammad Sadegh and Faraon, Andrei},
abstractNote = {Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.},
doi = {10.1038/s41467-018-03155-6},
journal = {Nature Communications},
number = 1,
volume = 9,
place = {United States},
year = {2018},
month = {2}
}
Web of Science
Figures / Tables:

Works referenced in this record:
Invited Article: Broadband highly efficient dielectric metadevices for polarization control
journal, June 2016
- Kruk, Sergey; Hopkins, Ben; Kravchenko, Ivan I.
- APL Photonics, Vol. 1, Issue 3
Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations
text, January 2016
- Arbabi, Amir; Arbabi, Ehsan; Kamali, Seyedeh Mahsa
- arXiv
Liquid-Crystal Lens-Cells with Variable Focal Length
journal, September 1979
- Sato, Susumu
- Japanese Journal of Applied Physics, Vol. 18, Issue 9
Multiwavelength metasurfaces through spatial multiplexing
journal, September 2016
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- Scientific Reports, Vol. 6, Issue 1
Wide bandwidth and high resolution planar filter array based on DBR-metasurface-DBR structures
journal, January 2016
- Horie, Yu; Arbabi, Amir; Arbabi, Ehsan
- Optics Express, Vol. 24, Issue 11
Performing optical logic operations by a diffractive neural network
journal, April 2020
- Qian, Chao; Lin, Xiao; Lin, Xiaobin
- Light: Science & Applications, Vol. 9, Issue 1
Zoom microscope objective using electrowetting lenses
journal, January 2016
- Li, Lei; Wang, Di; Liu, Chao
- Optics Express, Vol. 24, Issue 3
Subwavelength-thick Lenses with High Numerical Apertures and Large Efficiency Based on High Contrast Transmitarrays
text, January 2014
- Arbabi, Amir; Horie, Yu; Ball, Alexander J.
- arXiv
Tunable metasurfaces via subwavelength phase shifters with uniform amplitude
text, January 2016
- Colburn, Shane; Zhan, Alan; Majumdar, Arka
- arXiv
Low-Contrast Dielectric Metasurface Optics
journal, January 2016
- Zhan, Alan; Colburn, Shane; Trivedi, Rahul
- ACS Photonics, Vol. 3, Issue 2
Large-Angle, Multifunctional Metagratings Based on Freeform Multimode Geometries
journal, May 2017
- Sell, David; Yang, Jianji; Doshay, Sage
- Nano Letters, Vol. 17, Issue 6
Metamaterial-inspired silicon nanophotonics
journal, April 2017
- Staude, Isabelle; Schilling, Jörg
- Nature Photonics, Vol. 11, Issue 5
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
journal, June 2016
- Khorasaninejad, Mohammadreza; Chen, Wei Ting; Devlin, Robert C.
- Science, Vol. 352, Issue 6290
Efficient Silicon Metasurfaces for Visible Light
journal, February 2017
- Zhou, Zhenpeng; Li, Juntao; Su, Rongbin
- ACS Photonics, Vol. 4, Issue 3
High efficiency double-wavelength dielectric metasurface lenses with dichroic birefringent meta-atoms
journal, January 2016
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- Optics Express, Vol. 24, Issue 16
Tunable Optical Filters Based on Silicon Nitride High Contrast Gratings
journal, July 2015
- Yue Wang, ; Stellinga, Daan; Klemm, Annett B.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 21, Issue 4
Multiwavelength Achromatic Metasurfaces by Dispersive Phase Compensation
text, January 2014
- Aieta, Francesco; Kats, Mikhail A.; Genevet, Patrice
- arXiv
Low Contrast Dielectric Metasurface Optics
conference, January 2016
- Zhan, Alan; Colburn, Shane; Trivedi, Rahul
- CLEO: Applications and Technology, Conference on Lasers and Electro-Optics
Multiwavelength polarization-insensitive lenses based on dielectric metasurfaces with meta-molecules
journal, January 2016
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- Optica, Vol. 3, Issue 6
Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission
journal, August 2015
- Arbabi, Amir; Horie, Yu; Bagheri, Mahmood
- Nature Nanotechnology, Vol. 10, Issue 11, p. 937-943
Tunable-focus flat liquid crystal spherical lens
journal, June 2004
- Ren, Hongwen; Fan, Yun-Hsing; Gauza, Sebastian
- Applied Physics Letters, Vol. 84, Issue 23
High resolution on-chip optical filter array based on double subwavelength grating reflectors
journal, January 2015
- Horie, Yu; Arbabi, Amir; Han, Seunghoon
- Optics Express, Vol. 23, Issue 23, p. 29848-29854
Dispersionless metasurfaces using dispersive meta-atoms
conference, January 2016
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- CLEO: QELS_Fundamental Science, Conference on Lasers and Electro-Optics
Visible Wavelength Color Filters Using Dielectric Subwavelength Gratings for Backside-Illuminated CMOS Image Sensor Technologies
journal, April 2017
- Horie, Yu; Han, Seunghoon; Lee, Jeong-Yub
- Nano Letters, Vol. 17, Issue 5
A MEMS-based variable micro-lens system
journal, May 2006
- Krogmann, F.; Mönch, W.; Zappe, H.
- Journal of Optics A: Pure and Applied Optics, Vol. 8, Issue 7
Broadband achromatic optical metasurface devices
journal, August 2017
- Wang, Shuming; Wu, Pin Chieh; Su, Vin-Cent
- Nature Communications, Vol. 8, Issue 1
Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces
text, January 2015
- Kamali, Seyedeh Mahsa; Arbabi, Amir; Arbabi, Ehsan
- arXiv
Photonic Multitasking Interleaved Si Nanoantenna Phased Array
journal, November 2016
- Lin, Dianmin; Holsteen, Aaron L.; Maguid, Elhanan
- Nano Letters, Vol. 16, Issue 12
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene-Gold Reconfigurable Mid-Infrared Metasurfaces
text, January 2017
- Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T.
- arXiv
Electrically tunable lens based on a dual-frequency nematic liquid crystal
journal, January 2006
- Pishnyak, Oleg; Sato, Susumu; Lavrentovich, Oleg D.
- Applied Optics, Vol. 45, Issue 19
High-Speed, Phase-Dominant Spatial Light Modulation with Silicon-Based Active Resonant Antennas
journal, November 2017
- Horie, Yu; Arbabi, Amir; Arbabi, Ehsan
- ACS Photonics, Vol. 5, Issue 5
Tunable Metasurface and Flat Optical Zoom Lens on a Stretchable Substrate
journal, March 2016
- Ee, Ho-Seok; Agarwal, Ritesh
- Nano Letters, Vol. 16, Issue 4
Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings
journal, January 2010
- Lu, Fanglu; Sedgwick, Forrest G.; Karagodsky, Vadim
- Optics Express, Vol. 18, Issue 12
Planar metasurface retroreflector
journal, June 2017
- Arbabi, Amir; Arbabi, Ehsan; Horie, Yu
- Nature Photonics, Vol. 11, Issue 7
Flat-top narrowband filters enabled by guided-mode resonance in two-level waveguides
journal, January 2017
- Yamada, Katsuaki; Lee, Kyu Jin; Ko, Yeong Hwan
- Optics Letters, Vol. 42, Issue 20
Fundamentals and Applications of Metasurfaces
journal, March 2017
- Hsiao, Hui-Hsin; Chu, Cheng Hung; Tsai, Din Ping
- Small Methods, Vol. 1, Issue 4
Dielectric gradient metasurface optical elements
journal, July 2014
- Lin, D.; Fan, P.; Hasman, E.
- Science, Vol. 345, Issue 6194, p. 298-302
Highly tunable elastic dielectric metasurface lenses (Laser Photonics Rev. 10(6)/2016)
journal, November 2016
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Laser & Photonics Reviews, Vol. 10, Issue 6
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
journal, June 2016
- Serra, E.; Bawaj, M.; Borrielli, A.
- AIP Advances, Vol. 6, Issue 6
Broadband achromatic optical metasurface devices
journal, August 2017
- Wang, Shuming; Wu, Pin Chieh; Su, Vin-Cent
- Nature Communications, Vol. 8, Issue 1
Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings
journal, January 1998
- Lalanne, Philippe; Astilean, Simion; Chavel, Pierre
- Optics Letters, Vol. 23, Issue 14
Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces
journal, August 2016
- Liu, Sheng; Sinclair, Michael B.; Saravi, Sina
- Nano Letters, Vol. 16, Issue 9, p. 5426-5432
Miniature optical planar camera based on a wide-angle metasurface doublet corrected for monochromatic aberrations
journal, November 2016
- Arbabi, Amir; Arbabi, Ehsan; Kamali, Seyedeh Mahsa
- Nature Communications, Vol. 7, Issue 1
Tunable microdoublet lens array
journal, January 2004
- Jeong, Ki-Hun; Liu, Gang L.; Chronis, Nikolas
- Optics Express, Vol. 12, Issue 11
Sub-Wavelength Grating Lenses With a Twist
journal, July 2014
- Vo, Sonny; Fattal, David; Sorin, Wayne V.
- IEEE Photonics Technology Letters, Vol. 26, Issue 13, p. 1375-1378
Flat Dielectric Grating Reflectors with High Focusing Power
text, January 2010
- Fattal, David; Li, Jingjing; Peng, Zhen
- arXiv
Efficient Second-Harmonic Generation in Nanocrystalline Silicon Nanoparticles
journal, April 2017
- Makarov, Sergey V.; Petrov, Mihail I.; Zywietz, Urs
- Nano Letters, Vol. 17, Issue 5
Tunable lenses using transparent dielectric elastomer actuators
journal, January 2013
- Shian, Samuel; Diebold, Roger M.; Clarke, David R.
- Optics Express, Vol. 21, Issue 7
All-dielectric ultrathin conformal metasurfaces: lensing and cloaking applications at 532 nm wavelength
journal, December 2016
- Cheng, Jierong; Jafar-Zanjani, Samad; Mosallaei, Hossein
- Scientific Reports, Vol. 6, Issue 1
Grayscale transparent metasurface holograms
journal, January 2016
- Wang, Lei; Kruk, Sergey; Tang, Hanzhi
- Optica, Vol. 3, Issue 12
Multiwavelength achromatic metasurfaces by dispersive phase compensation
journal, February 2015
- Aieta, F.; Kats, M. A.; Genevet, P.
- Science, Vol. 347, Issue 6228, p. 1342-1345
A nanoelectromechanical tunable laser
journal, February 2008
- Huang, Michael C. Y.; Zhou, Ye; Chang-Hasnain, Connie J.
- Nature Photonics, Vol. 2, Issue 3
Planar metasurface retroreflector
journal, June 2017
- Arbabi, Amir; Arbabi, Ehsan; Horie, Yu
- Nature Photonics, Vol. 11, Issue 7
Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces
text, January 2015
- Kamali, Seyedeh Mahsa; Arbabi, Amir; Arbabi, Ehsan
- arXiv
Tunable metasurfaces via subwavelength phase shifters with uniform amplitude
journal, January 2017
- Colburn, Shane; Zhan, Alan; Majumdar, Arka
- Scientific Reports, Vol. 7, Issue 1
Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications
journal, June 2016
- Serra, E.; Bawaj, M.; Borrielli, A.
- AIP Advances, Vol. 6, Issue 6
Orbital Angular Momentum-based Space Division Multiplexing for High-capacity Underwater Optical Communications
preprint, January 2016
- Ren, Yongxiong; Li, Long; Wang, Zhe
- arXiv
Miniature adjustable-focus endoscope with a solid electrically tunable lens
journal, January 2015
- Zou, Yongchao; Zhang, Wei; Chau, Fook Siong
- Optics Express, Vol. 23, Issue 16
Dielectric gradient metasurface optical elements
journal, July 2014
- Lin, D.; Fan, P.; Hasman, E.
- Science, Vol. 345, Issue 6194, p. 298-302
Large-displacement vertical microlens scanner with low driving voltage
journal, November 2002
- Kwon, S.; Milanovic, V.; Lee, L. P.
- IEEE Photonics Technology Letters, Vol. 14, Issue 11
Wavefront shaping with disorder-engineered metasurfaces
journal, January 2018
- Jang, Mooseok; Horie, Yu; Shibukawa, Atsushi
- Nature Photonics, Vol. 12, Issue 2
S4 : A free electromagnetic solver for layered periodic structures
journal, October 2012
- Liu, Victor; Fan, Shanhui
- Computer Physics Communications, Vol. 183, Issue 10, p. 2233-2244
Multiwavelength polarization insensitive lenses based on dielectric metasurfaces with meta-molecules
text, January 2016
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- arXiv
Focal tunable liquid lens integrated with an electromagnetic actuator
journal, March 2007
- Lee, Seok Woo; Lee, Seung S.
- Applied Physics Letters, Vol. 90, Issue 12
Tunable Metasurface and Flat Optical Zoom Lens on a Stretchable Substrate
journal, March 2016
- Ee, Ho-Seok; Agarwal, Ritesh
- Nano Letters, Vol. 16, Issue 4
A nanoelectromechanical tunable laser
journal, February 2008
- Huang, Michael C. Y.; Zhou, Ye; Chang-Hasnain, Connie J.
- Nature Photonics, Vol. 2, Issue 3
Flat dielectric grating reflectors with focusing abilities
journal, May 2010
- Fattal, David; Li, Jingjing; Peng, Zhen
- Nature Photonics, Vol. 4, Issue 7, p. 466-470
Invited Article: Broadband highly efficient dielectric metadevices for polarization control
journal, June 2016
- Kruk, Sergey; Hopkins, Ben; Kravchenko, Ivan I.
- APL Photonics, Vol. 1, Issue 3
Controlling the sign of chromatic dispersion in diffractive optics with dielectric metasurfaces
journal, January 2017
- Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa
- Optica, Vol. 4, Issue 6
Highly tunable elastic dielectric metasurface lenses (Laser Photonics Rev. 10(6)/2016)
journal, November 2016
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Laser & Photonics Reviews, Vol. 10, Issue 6
Multiwavelength achromatic metasurfaces by dispersive phase compensation
journal, February 2015
- Aieta, F.; Kats, M. A.; Genevet, P.
- Science, Vol. 347, Issue 6228, p. 1342-1345
Removing orientation-induced localization biases in single-molecule microscopy using a broadband metasurface mask
journal, May 2016
- Backlund, Mikael P.; Arbabi, Amir; Petrov, Petar N.
- Nature Photonics, Vol. 10, Issue 7
Fundamentals and Applications of Metasurfaces
journal, March 2017
- Hsiao, Hui-Hsin; Chu, Cheng Hung; Tsai, Din Ping
- Small Methods, Vol. 1, Issue 4
Nonlinear Generation of Vector Beams From AlGaAs Nanoantennas
journal, October 2016
- Camacho-Morales, Rocio; Rahmani, Mohsen; Kruk, Sergey
- Nano Letters, Vol. 16, Issue 11, p. 7191-7197
Centimeter-scale suspended photonic crystal mirrors
journal, January 2018
- Moura, João P.; Norte, Richard A.; Guo, Jingkun
- Optics Express, Vol. 26, Issue 2
Focal tunable liquid lens integrated with an electromagnetic actuator
journal, March 2007
- Lee, Seok Woo; Lee, Seung S.
- Applied Physics Letters, Vol. 90, Issue 12
Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays
journal, May 2015
- Arbabi, Amir; Horie, Yu; Ball, Alexander J.
- Nature Communications, Vol. 6, Article No. 7069
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene–Gold Reconfigurable Mid-Infrared Metasurfaces
journal, April 2017
- Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T.
- Nano Letters, Vol. 17, Issue 5
Metasurface Freeform Nanophotonics
journal, May 2017
- Zhan, Alan; Colburn, Shane; Dodson, Christopher M.
- Scientific Reports, Vol. 7, Issue 1
Metamaterial-inspired silicon nanophotonics
journal, April 2017
- Staude, Isabelle; Schilling, Jörg
- Nature Photonics, Vol. 11, Issue 5
Experimental Demonstration of >230° Phase Modulation in Gate-Tunable Graphene-Gold Reconfigurable Mid-Infrared Metasurfaces
text, January 2017
- Sherrott, Michelle C.; Hon, Philip W. C.; Fountaine, Katherine T.
- arXiv
Decoupling optical function and geometrical form using conformal flexible dielectric metasurfaces
journal, May 2016
- Kamali, Seyedeh Mahsa; Arbabi, Amir; Arbabi, Ehsan
- Nature Communications, Vol. 7, Issue 1
S4 : A free electromagnetic solver for layered periodic structures
journal, October 2012
- Liu, Victor; Fan, Shanhui
- Computer Physics Communications, Vol. 183, Issue 10, p. 2233-2244
Photonic Multitasking Interleaved Si Nanoantenna Phased Array
journal, November 2016
- Lin, Dianmin; Holsteen, Aaron L.; Maguid, Elhanan
- Nano Letters, Vol. 16, Issue 12
Dielectric Metasurfaces for Complete Control of Phase and Polarization with Subwavelength Spatial Resolution and High Transmission
text, January 2014
- Arbabi, Amir; Horie, Yu; Bagheri, Mahmood
- arXiv
Large Area Electrically Tunable Metasurface Lenses
conference, January 2017
- She, Alan; Zhang, Shuyan; Shian, Samuel
- CLEO: QELS_Fundamental Science, Conference on Lasers and Electro-Optics
Thermal Actuated Solid Tunable Lens
journal, November 2006
- Lee, Sz-yuan; Tung, Hsi-wen; Chen, Wen-chih
- IEEE Photonics Technology Letters, Vol. 18, Issue 21
All-dielectric ultrathin conformal metasurfaces: lensing and cloaking applications at 532 nm wavelength
journal, December 2016
- Cheng, Jierong; Jafar-Zanjani, Samad; Mosallaei, Hossein
- Scientific Reports, Vol. 6, Issue 1
Tunable-focus flat liquid crystal spherical lens
journal, June 2004
- Ren, Hongwen; Fan, Yun-Hsing; Gauza, Sebastian
- Applied Physics Letters, Vol. 84, Issue 23
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
journal, June 2016
- Khorasaninejad, Mohammadreza; Chen, Wei Ting; Devlin, Robert C.
- Science, Vol. 352, Issue 6290
Orbital Angular Momentum-based Space Division Multiplexing for High-capacity Underwater Optical Communications
journal, September 2016
- Ren, Yongxiong; Li, Long; Wang, Zhe
- Scientific Reports, Vol. 6, Issue 1
A 32 × 32 optical phased array using polysilicon sub-wavelength high-contrast-grating mirrors
journal, January 2014
- Yoo, Byung-Wook; Megens, Mischa; Sun, Tianbo
- Optics Express, Vol. 22, Issue 16
Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems
journal, January 2015
- Baranski, Maciej; Bargiel, Sylwester; Passilly, Nicolas
- Applied Optics, Vol. 54, Issue 22
Increasing efficiency of high-NA metasurface lenses (Conference Presentation)
conference, April 2017
- Arbabi, Amir; Arbabi, Ehsan; Kamali, Seyedeh Mahsa
- High Contrast Metastructures VI
Works referencing / citing this record:
Optical Metasurfaces: Evolving from Passive to Adaptive
journal, April 2019
- Hail, Claudio U.; Michel, Ann‐Katrin U.; Poulikakos, Dimos
- Advanced Optical Materials, Vol. 7, Issue 14
Recent advances in metasurface hologram technologies (Invited paper)
journal, February 2019
- Lee, Gun‐Yeal; Sung, Jangwoon; Lee, Byoungho
- ETRI Journal, Vol. 41, Issue 1
Demonstration of focal length tuning by rotational varifocal moiré metalens in an ir-A wavelength
journal, November 2020
- Iwami, Kentaro; Ogawa, Chikara; Nagase, Tomoyasu
- Optics Express, Vol. 28, Issue 24
Wide-band Beam-scanning by Surface Wave Confinement on Leaky Wave Holograms
journal, September 2019
- Moeini, Mohammad Moein; Oraizi, Homayoon; Amini, Amrollah
- Scientific Reports, Vol. 9, Issue 1
Extreme ultraviolet plasmonics and Cherenkov radiation in silicon
journal, January 2018
- Shekhar, Prashant; Pendharker, Sarang; Sahasrabudhe, Harshad
- Optica, Vol. 5, Issue 12
Spatiotemporal light control with active metasurfaces
journal, May 2019
- Shaltout, Amr M.; Shalaev, Vladimir M.; Brongersma, Mark L.
- Science, Vol. 364, Issue 6441
Varifocal zoom imaging with large area focal length adjustable metalenses
journal, January 2018
- Colburn, Shane; Zhan, Alan; Majumdar, Arka
- Optica, Vol. 5, Issue 7
Tunable metasurfaces for visible and SWIR applications
journal, January 2020
- Lee, Chang-Won; Choi, Hee Jin; Jeong, Heejeong
- Nano Convergence, Vol. 7, Issue 1
Metasurface-generated complex 3-dimensional optical fields for interference lithography
journal, October 2019
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Kwon, Hyounghan
- Proceedings of the National Academy of Sciences, Vol. 116, Issue 43
Metalenses: Advances and Applications
journal, July 2018
- Tseng, Ming Lun; Hsiao, Hui-Hsin; Chu, Cheng Hung
- Advanced Optical Materials, Vol. 6, Issue 18
Metasurface-enhanced optical lever sensitivity for atomic force microscopy
journal, June 2019
- Yao, Zan; Xia, Xicheng; Hou, Yaoping
- Nanotechnology, Vol. 30, Issue 36
High-Efficiency Metasurfaces with 2π Phase Control Based on Aperiodic Dielectric Nanoarrays
journal, January 2020
- Shang, Sihui; Tang, Feng; Ye, Xin
- Nanomaterials, Vol. 10, Issue 2
Low dissipation spectral filtering using a field-effect tunable III–V hybrid metasurface
journal, August 2018
- Sarma, Raktim; Campione, Salvatore; Goldflam, Michael
- Applied Physics Letters, Vol. 113, Issue 6
Tunable metasurfaces for visible and SWIR applications
journal, January 2020
- Lee, Chang-Won; Choi, Hee Jin; Jeong, Heejeong
- Nano Convergence, Vol. 7, Issue 1
A Zero‐Rank, Maximum Nullity Perfect Electromagnetic Wave Absorber
journal, January 2019
- Suen, Jonathan Y.; Fan, Kebin; Padilla, Willie J.
- Advanced Optical Materials, Vol. 7, Issue 8
A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures
journal, January 2019
- Chen, Wei Ting; Zhu, Alexander Y.; Sisler, Jared
- Nature Communications, Vol. 10, Issue 1
Graphene aperture-based metalens for dynamic focusing of terahertz waves
journal, January 2018
- Ding, Pei; Li, Yan; Shao, Li
- Optics Express, Vol. 26, Issue 21
Invited Article: Nano-kirigami metasurfaces by focused-ion-beam induced close-loop transformation
journal, October 2018
- Liu, Zhiguang; Du, Huifeng; Li, Zhi-Yuan
- APL Photonics, Vol. 3, Issue 10
Smart Table Based on a Metasurface for Wireless Power Transfer
journal, May 2019
- Song, Mingzhao; Baryshnikova, Kseniia; Markvart, Aleksandr
- Physical Review Applied, Vol. 11, Issue 5
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale
journal, February 2020
- Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N.
- Nanophotonics, Vol. 9, Issue 3
Electrically Programmable Terahertz Diatomic Metamolecules for Chiral Optical Control
journal, February 2019
- Cong, Longqing; Pitchappa, Prakash; Wang, Nan
- Research, Vol. 2019
Dynamic beam steering with all-dielectric electro-optic III–V multiple-quantum-well metasurfaces
journal, August 2019
- Wu, Pin Chieh; Pala, Ragip A.; Kafaie Shirmanesh, Ghazaleh
- Nature Communications, Vol. 10, Issue 1
Electrically Programmable Terahertz Diatomic Metamolecules for Chiral Optical Control
journal, February 2019
- Cong, Longqing; Pitchappa, Prakash; Wang, Nan
- Research, Vol. 2019
Efficient visible light modulation based on electrically tunable all dielectric metasurfaces embedded in thin-layer nematic liquid crystals
journal, June 2019
- Sun, Mingyu; Xu, Xuewu; Sun, Xiao Wei
- Scientific Reports, Vol. 9, Issue 1
Metasurfaces-based imaging and applications: from miniaturized optical components to functional imaging platforms
journal, January 2020
- Lee, Dasol; Gwak, Junho; Badloe, Trevon
- Nanoscale Advances, Vol. 2, Issue 2
Reconfigurable all-dielectric metalens with diffraction-limited performance
journal, February 2021
- Shalaginov, Mikhail Y.; An, Sensong; Zhang, Yifei
- Nature Communications, Vol. 12, Issue 1
Integrating microsystems with metamaterials towards metadevices
journal, January 2019
- Zhao, Xiaoguang; Duan, Guangwu; Li, Aobo
- Microsystems & Nanoengineering, Vol. 5, Issue 1
All-optical tuning of symmetry protected quasi bound states in the continuum
journal, September 2019
- Karl, Nicholas; Vabishchevich, Polina P.; Liu, Sheng
- Applied Physics Letters, Vol. 115, Issue 14
Metasurface-generated complex 3-dimensional optical fields for interference lithography
journal, October 2019
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Kwon, Hyounghan
- Proceedings of the National Academy of Sciences, Vol. 116, Issue 43
Control of LED Emission with Functional Dielectric Metasurfaces
journal, November 2019
- Khaidarov, Egor; Liu, Zhengtong; Paniagua‐Domínguez, Ramón
- Laser & Photonics Reviews, Vol. 14, Issue 1
Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer
journal, January 2018
- Hu, Ting; Tseng, Chih-Kuo; Fu, Yuan Hsing
- Optics Express, Vol. 26, Issue 15
Controls of transmitted electromagnetic waves for diverse functionalities using polarization-selective dual-band 2 bit coding metasurface
journal, December 2019
- Iqbal, Shahid; Liu, Shuo; Luo, Jun
- Journal of Optics, Vol. 22, Issue 1
Ultrathin Tunable Lens Based on Boundary Tension Effect
journal, September 2019
- Yang, Ao; Cao, Jie; Zhang, Fanghua
- Sensors, Vol. 19, Issue 18
A review of dielectric optical metasurfaces for wavefront control
journal, June 2018
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Nanophotonics, Vol. 7, Issue 6
All‐Dielectric Programmable Huygens' Metasurfaces
journal, March 2020
- Leitis, Aleksandrs; Heßler, Andreas; Wahl, Sophia
- Advanced Functional Materials, Vol. 30, Issue 19
A Dynamically Modulated All‐Dielectric Metasurface Doublet for Directional Harmonic Generation and Manipulation in Transmission
journal, September 2019
- Salary, Mohammad Mahdi; Farazi, Soheil; Mosallaei, Hossein
- Advanced Optical Materials, Vol. 7, Issue 23
Tunable beam deflector by mutual motion of cascaded bilayer metasurfaces
journal, October 2019
- Du, Zhiyuan; Hu, Bin; Liu, Weiguang
- Journal of Optics, Vol. 21, Issue 11
Integrating Microsystems with Metamaterials Towards Metadevices
conference, June 2019
- Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu
- 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Super-sensitive tunable planar lens based on graphene hyperbolic metamaterials
journal, January 2019
- Wang, Yu; Chen, Jianfeng; Liang, Wenyao
- Optics Express, Vol. 27, Issue 17
Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens
journal, November 2018
- Chen, Jian; Xiao, Jing; Lisevych, Danylo
- Nature Communications, Vol. 9, Issue 1
Experimental demonstration of a continuous varifocal metalens with large zoom range and high imaging resolution
journal, October 2019
- Guo, Yinghui; Pu, Mingbo; Ma, Xiaoliang
- Applied Physics Letters, Vol. 115, Issue 16
Three-Dimensional Aberration Analyses of Metasurface Flat Lenses
journal, September 2019
- Li, Ruifeng; Liu, Han; Fu, Yongqi
- Plasmonics, Vol. 15, Issue 1
High-efficiency, linear-polarization-multiplexing metalens for long-wavelength infrared light
journal, January 2018
- Fan, Qingbin; Wang, Yilin; Liu, Mingze
- Optics Letters, Vol. 43, Issue 24
Temporal color mixing and dynamic beam shaping with silicon metasurfaces
journal, July 2019
- Holsteen, Aaron L.; Cihan, Ahmet Fatih; Brongersma, Mark L.
- Science, Vol. 365, Issue 6450
All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry
journal, September 2019
- Shanei, Mohammad Mahdi; Fathi, Davood; Ghasemifard, Fatemeh
- Scientific Reports, Vol. 9, Issue 1
Resonant dielectric metasurfaces: active tuning and nonlinear effects
journal, July 2019
- Zou, Chengjun; Sautter, Jürgen; Setzpfandt, Frank
- Journal of Physics D: Applied Physics, Vol. 52, Issue 37
Electrical tuning of phase-change antennas and metasurfaces
journal, April 2021
- Wang, Yifei; Landreman, Patrick; Schoen, David
- Nature Nanotechnology, Vol. 16, Issue 6
Single-shot quantitative phase gradient microscopy using a system of multifunctional metasurfaces
journal, October 2019
- Kwon, Hyounghan; Arbabi, Ehsan; Kamali, Seyedeh Mahsa
- Nature Photonics, Vol. 14, Issue 2
Tunable Metasurfaces Based on Active Materials
journal, March 2019
- Cui, Tong; Bai, Benfeng; Sun, Hong‐Bo
- Advanced Functional Materials, Vol. 29, Issue 10
Control of LED Emission with Functional Dielectric Metasurfaces
text, January 2019
- Khaidarov, Egor; Liu, Zhengtong; Paniagua-Dominguez, Ramon
- arXiv
Recent Progress in Active Optical Metasurfaces
journal, April 2019
- Kang, Lei; Jenkins, Ronald P.; Werner, Douglas H.
- Advanced Optical Materials, Vol. 7, Issue 14
All-Dielectric Programmable Huygens' Metasurfaces
text, January 2020
- Leitis, Aleksandrs; Heßler, Andreas; Wahl, Sophia
- RWTH Aachen University
Spectral tomographic imaging with aplanatic metalens
journal, November 2019
- Chen, Chen; Song, Wange; Chen, Jia-Wern
- Light: Science & Applications, Vol. 8, Issue 1
Optical metasurfaces: new generation building blocks for multi-functional optics
journal, August 2018
- Neshev, Dragomir; Aharonovich, Igor
- Light: Science & Applications, Vol. 7, Issue 1
Active metamaterial nearly perfect light absorbers: a review [Invited]
journal, January 2019
- Hajian, Hodjat; Ghobadi, Amir; Butun, Bayram
- Journal of the Optical Society of America B, Vol. 36, Issue 8
Fano‐Enhanced Circular Dichroism in Deformable Stereo Metasurfaces
journal, January 2020
- Liu, Zhiguang; Xu, Yi; Ji, Chang‐Yin
- Advanced Materials, Vol. 32, Issue 8
Ultra-Wide Band and Multifunctional Polarization Converter Based on Dielectric Metamaterial
journal, November 2019
- Gao, Ju; Zhang, Yiming; Sun, Yang
- Materials, Vol. 12, Issue 23
Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material
journal, April 2021
- Zhang, Yifei; Fowler, Clayton; Liang, Junhao
- Nature Nanotechnology, Vol. 16, Issue 6
Metalens-Based Miniaturized Optical Systems
journal, May 2019
- Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
- Micromachines, Vol. 10, Issue 5
Reconfigurable metasurface with polarization-independent manipulation for reflection and transmission wavefronts
journal, November 2019
- Liu, Guangyao; Liu, Haixia; Han, Jiaqi
- Journal of Physics D: Applied Physics, Vol. 53, Issue 4
Metasurface-Assisted Passive Wireless Communication with Commodity Wi-Fi Signals
text, January 2020
- Zhao, Hanting; Shuang, Ya; Wei, Menglin
- arXiv
Chromatic Dispersion Manipulation Based on Metalenses
journal, December 2019
- Zang, Wenbo; Yuan, Quan; Chen, Run
- Advanced Materials
Metalens-Based Miniaturized Optical Systems
journal, May 2019
- Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen
- Micromachines, Vol. 10, Issue 5
Empowered Layer Effects and Prominent Properties in Few‐Layer Metasurfaces
journal, March 2019
- Chen, Shuqi; Zhang, Yuebian; Li, Zhi
- Advanced Optical Materials, Vol. 7, Issue 14
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale
text, January 2020
- Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N.
- RWTH Aachen University
Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications
journal, February 2020
- Engelberg, Jacob; Zhou, Chen; Mazurski, Noa
- Nanophotonics, Vol. 9, Issue 2
Spoof Plasmonic Metasurfaces with Catenary Dispersion for Two-Dimensional Wide-Angle Focusing and Imaging
journal, November 2019
- Guo, Yinghui; Zhang, Zuojun; Pu, Mingbo
- iScience, Vol. 21
Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
journal, July 2019
- He, Shaowei; Yang, Huimin; Jiang, Yunhui
- Micromachines, Vol. 10, Issue 8
Reconfigurable step-zoom metalens without optical and mechanical compensations
journal, January 2019
- Fu, Rao; Li, Zile; Zheng, Guoxing
- Optics Express, Vol. 27, Issue 9
All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry
journal, September 2019
- Shanei, Mohammad Mahdi; Fathi, Davood; Ghasemifard, Fatemeh
- Scientific Reports, Vol. 9, Issue 1
Metasurface-based focus-tunable mirror
journal, January 2019
- Wang, Zehao; Liao, Dashuang; Zhang, Ting
- Optics Express, Vol. 27, Issue 21
Fabrication and characterization of a binary diffractive lens for controlling focal distribution
journal, January 2020
- Motogaito, Atsushi; Iguchi, Yosuke; Kato, Shuji
- Applied Optics, Vol. 59, Issue 3
Polarization-enabled tunable focusing by visible-light metalenses with geometric and propagation phase
journal, October 2019
- Zhang, Jianlei; Zhang, Lei; Huang, Kun
- Journal of Optics, Vol. 21, Issue 11
Ultrathin Tunable Lens Based on Boundary Tension Effect
journal, September 2019
- Yang, Ao; Cao, Jie; Zhang, Fanghua
- Sensors, Vol. 19, Issue 18
Information metamaterials – from effective media to real-time information processing systems
journal, March 2019
- Li, Lianlin; Cui, Tie Jun
- Nanophotonics, Vol. 8, Issue 5
Dynamic beam steering with all-dielectric electro-optic III–V multiple-quantum-well metasurfaces
journal, August 2019
- Wu, Pin Chieh; Pala, Ragip A.; Kafaie Shirmanesh, Ghazaleh
- Nature Communications, Vol. 10, Issue 1
Polarization states synthesizer based on a thermo-optic dielectric metasurface
journal, August 2019
- Bosch, M.; Shcherbakov, M. R.; Fan, Z.
- Journal of Applied Physics, Vol. 126, Issue 7
Metasurface‐Empowered Optical Multiplexing and Multifunction
journal, October 2019
- Chen, Shuqi; Liu, Wenwei; Li, Zhancheng
- Advanced Materials, Vol. 32, Issue 3
Flexible focusing pattern realization of centimeter-scale planar super-oscillatory lenses in parallel fabrication
journal, January 2019
- Li, Wenli; Yu, Yiting; Yuan, Weizheng
- Nanoscale, Vol. 11, Issue 1
Rotationally tunable polarization-insensitive single and multifocal metasurface
journal, March 2019
- Yilmaz, Nazmi; Ozdemir, Aytekin; Ozer, Ahmet
- Journal of Optics, Vol. 21, Issue 4
Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
text, January 2019
- Li, Shi-Qiang; Xu, Xuewu; Veetil, Rasna Maruthiyodan
- arXiv
Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens
journal, November 2018
- Chen, Jian; Xiao, Jing; Lisevych, Danylo
- Nature Communications, Vol. 9, Issue 1
Thermal tuning capabilities of semiconductor metasurface resonators
journal, November 2018
- Lewi, Tomer; Butakov, Nikita A.; Schuller, Jon A.
- Nanophotonics, Vol. 8, Issue 2
Optical metasurfaces: new generation building blocks for multi-functional optics
journal, August 2018
- Neshev, Dragomir; Aharonovich, Igor
- Light: Science & Applications, Vol. 7, Issue 1
Spectral tomographic imaging with aplanatic metalens
journal, November 2019
- Chen, Chen; Song, Wange; Chen, Jia-Wern
- Light: Science & Applications, Vol. 8, Issue 1
A review of dielectric optical metasurfaces for wavefront control
journal, June 2018
- Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir
- Nanophotonics, Vol. 7, Issue 6
Holographic display system with adjustable viewing angle based on multi-focus optofluidic lens
journal, January 2019
- Liu, Chao; Wang, Di; Wang, Qiong-Hua
- Optics Express, Vol. 27, Issue 13
Optimized chemical potential graphene-based coding metasurface approach for dynamic manipulation of terahertz wavefront
journal, December 2019
- Fallah, Susan; Rouhi, Kasra; Abdolali, Ali
- Journal of Physics D: Applied Physics, Vol. 53, Issue 8
Efficient visible light modulation based on electrically tunable all dielectric metasurfaces embedded in thin-layer nematic liquid crystals
journal, June 2019
- Sun, Mingyu; Xu, Xuewu; Sun, Xiao Wei
- Scientific Reports, Vol. 9, Issue 1
Phase-only transmissive spatial light modulator based on tunable dielectric metasurface
journal, June 2019
- Li, Shi-Qiang; Xu, Xuewu; Maruthiyodan Veetil, Rasna
- Science, Vol. 364, Issue 6445
Mechanically tunable focusing metamirror in the visible
journal, January 2019
- Cheng, Fei; Qiu, Liangyu; Nikolov, Daniel
- Optics Express, Vol. 27, Issue 11
When metasurface meets hologram: principle and advances
journal, January 2019
- Jiang, Qiang; Jin, Guofan; Cao, Liangcai
- Advances in Optics and Photonics, Vol. 11, Issue 3
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