MEMS-tunable dielectric metasurface lens

Arbabi, Ehsan; Arbabi, Amir; Kamali, Seyedeh Mahsa; Horie, Yu; Faraji-Dana, Mohammad Sadegh; Faraon, Andrei

doi:10.1038/s41467-018-03155-6

Title: MEMS-tunable dielectric metasurface lens

Journal Article · 23 February 2018 · Nature Communications

DOI: https://doi.org/10.1038/s41467-018-03155-6 · OSTI ID:1470397

^[1]; Arbabi, Amir ^[2]; Kamali, Seyedeh Mahsa ^[1];

^[1]; Faraji-Dana, Mohammad Sadegh ^[1];

^[1]

California Inst. of Technology (CalTech), Pasadena, CA (United States)
California Inst. of Technology (CalTech), Pasadena, CA (United States); Univ. of Massachusetts, Amherst, MA (United States)

Varifocal lenses, conventionally implemented by changing the axial distance between multiple optical elements, have a wide range of applications in imaging and optical beam scanning. The use of conventional bulky refractive elements makes these varifocal lenses large, slow, and limits their tunability. Metasurfaces, a new category of lithographically defined diffractive devices, enable thin and lightweight optical elements with precisely engineered phase profiles. Here we demonstrate tunable metasurface doublets, based on microelectromechanical systems (MEMS), with more than 60 diopters (about 4%) change in the optical power upon a 1-μm movement of one metasurface, and a scanning frequency that can potentially reach a few kHz. They can also be integrated with a third metasurface to make compact microscopes (~1 mm thick) with a large corrected field of view (~500 μm or 40 degrees) and fast axial scanning for 3D imaging. This paves the way towards MEMS-integrated metasurfaces as a platform for tunable and reconfigurable optics.

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Research Organization:: Energy Frontier Research Centers (EFRC) (United States). Light-Material Interactions in Energy Conversion (LMI); Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States). National Energy Research Scientific Computing Center (NERSC)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: SC0001293

OSTI ID:: 1470397

Journal Information:: Nature Communications, Vol. 9, Issue 1; Related Information: LMI partners with California Institute of Technology (lead); Harvard University; University of Illinois, Urbana-Champaign; Lawrence Berkeley National Laboratory; ISSN 2041-1723

Publisher:: Nature Publishing GroupCopyright Statement

Country of Publication:: United States

Language:: English

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Metalenses: Advances and Applications Tseng, Ming Lun; Hsiao, Hui-Hsin; Chu, Cheng Hung Advanced Optical Materials, Vol. 6, Issue 18 https://doi.org/10.1002/adom.201800554	journal	July 2018
Metasurface-enhanced optical lever sensitivity for atomic force microscopy Yao, Zan; Xia, Xicheng; Hou, Yaoping Nanotechnology, Vol. 30, Issue 36 https://doi.org/10.1088/1361-6528/ab2435	journal	June 2019
High-Efficiency Metasurfaces with 2π Phase Control Based on Aperiodic Dielectric Nanoarrays Shang, Sihui; Tang, Feng; Ye, Xin Nanomaterials, Vol. 10, Issue 2 https://doi.org/10.3390/nano10020250	journal	January 2020
Low dissipation spectral filtering using a field-effect tunable III–V hybrid metasurface Sarma, Raktim; Campione, Salvatore; Goldflam, Michael Applied Physics Letters, Vol. 113, Issue 6 https://doi.org/10.1063/1.5042662	journal	August 2018
Tunable metasurfaces for visible and SWIR applications Lee, Chang-Won; Choi, Hee Jin; Jeong, Heejeong Nano Convergence, Vol. 7, Issue 1 https://doi.org/10.1186/s40580-019-0213-2	journal	January 2020
A Zero‐Rank, Maximum Nullity Perfect Electromagnetic Wave Absorber Suen, Jonathan Y.; Fan, Kebin; Padilla, Willie J. Advanced Optical Materials, Vol. 7, Issue 8 https://doi.org/10.1002/adom.201801632	journal	January 2019
A broadband achromatic polarization-insensitive metalens consisting of anisotropic nanostructures Chen, Wei Ting; Zhu, Alexander Y.; Sisler, Jared Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-08305-y	journal	January 2019
Graphene aperture-based metalens for dynamic focusing of terahertz waves Ding, Pei; Li, Yan; Shao, Li Optics Express, Vol. 26, Issue 21 https://doi.org/10.1364/oe.26.028038	journal	January 2018
Invited Article: Nano-kirigami metasurfaces by focused-ion-beam induced close-loop transformation Liu, Zhiguang; Du, Huifeng; Li, Zhi-Yuan APL Photonics, Vol. 3, Issue 10 https://doi.org/10.1063/1.5043065	journal	October 2018
Smart Table Based on a Metasurface for Wireless Power Transfer Song, Mingzhao; Baryshnikova, Kseniia; Markvart, Aleksandr Physical Review Applied, Vol. 11, Issue 5 https://doi.org/10.1103/physrevapplied.11.054046	journal	May 2019
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N. Nanophotonics, Vol. 9, Issue 3 https://doi.org/10.1515/nanoph-2019-0458	journal	February 2020
Electrically Programmable Terahertz Diatomic Metamolecules for Chiral Optical Control Cong, Longqing; Pitchappa, Prakash; Wang, Nan Research, Vol. 2019 https://doi.org/10.1155/2019/7084251	journal	February 2019
Dynamic beam steering with all-dielectric electro-optic III–V multiple-quantum-well metasurfaces Wu, Pin Chieh; Pala, Ragip A.; Kafaie Shirmanesh, Ghazaleh Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-11598-8	journal	August 2019
Electrically Programmable Terahertz Diatomic Metamolecules for Chiral Optical Control Cong, Longqing; Pitchappa, Prakash; Wang, Nan Research, Vol. 2019 https://doi.org/10.34133/2019/7084251	journal	February 2019
Efficient visible light modulation based on electrically tunable all dielectric metasurfaces embedded in thin-layer nematic liquid crystals Sun, Mingyu; Xu, Xuewu; Sun, Xiao Wei Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-45091-5	journal	June 2019
Metasurfaces-based imaging and applications: from miniaturized optical components to functional imaging platforms Lee, Dasol; Gwak, Junho; Badloe, Trevon Nanoscale Advances, Vol. 2, Issue 2 https://doi.org/10.1039/c9na00751b	journal	January 2020
Reconfigurable all-dielectric metalens with diffraction-limited performance Shalaginov, Mikhail Y.; An, Sensong; Zhang, Yifei Nature Communications, Vol. 12, Issue 1 https://doi.org/10.1038/s41467-021-21440-9	journal	February 2021
Integrating microsystems with metamaterials towards metadevices Zhao, Xiaoguang; Duan, Guangwu; Li, Aobo Microsystems & Nanoengineering, Vol. 5, Issue 1 https://doi.org/10.1038/s41378-018-0042-1	journal	January 2019
All-optical tuning of symmetry protected quasi bound states in the continuum Karl, Nicholas; Vabishchevich, Polina P.; Liu, Sheng Applied Physics Letters, Vol. 115, Issue 14 https://doi.org/10.1063/1.5116031	journal	September 2019
Metasurface-generated complex 3-dimensional optical fields for interference lithography Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Kwon, Hyounghan Proceedings of the National Academy of Sciences, Vol. 116, Issue 43 https://doi.org/10.1073/pnas.1908382116	journal	October 2019
Control of LED Emission with Functional Dielectric Metasurfaces Khaidarov, Egor; Liu, Zhengtong; Paniagua‐Domínguez, Ramón Laser & Photonics Reviews, Vol. 14, Issue 1 https://doi.org/10.1002/lpor.201900235	journal	November 2019
Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer Hu, Ting; Tseng, Chih-Kuo; Fu, Yuan Hsing Optics Express, Vol. 26, Issue 15 https://doi.org/10.1364/oe.26.019548	journal	January 2018
Controls of transmitted electromagnetic waves for diverse functionalities using polarization-selective dual-band 2 bit coding metasurface Iqbal, Shahid; Liu, Shuo; Luo, Jun Journal of Optics, Vol. 22, Issue 1 https://doi.org/10.1088/2040-8986/ab5e18	journal	December 2019
Ultrathin Tunable Lens Based on Boundary Tension Effect Yang, Ao; Cao, Jie; Zhang, Fanghua Sensors, Vol. 19, Issue 18 https://doi.org/10.3390/s19184018	journal	September 2019
A review of dielectric optical metasurfaces for wavefront control Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir Nanophotonics, Vol. 7, Issue 6 https://doi.org/10.1515/nanoph-2017-0129	journal	June 2018
All‐Dielectric Programmable Huygens' Metasurfaces Leitis, Aleksandrs; Heßler, Andreas; Wahl, Sophia Advanced Functional Materials, Vol. 30, Issue 19 https://doi.org/10.1002/adfm.201910259	journal	March 2020
A Dynamically Modulated All‐Dielectric Metasurface Doublet for Directional Harmonic Generation and Manipulation in Transmission Salary, Mohammad Mahdi; Farazi, Soheil; Mosallaei, Hossein Advanced Optical Materials, Vol. 7, Issue 23 https://doi.org/10.1002/adom.201900843	journal	September 2019
Tunable beam deflector by mutual motion of cascaded bilayer metasurfaces Du, Zhiyuan; Hu, Bin; Liu, Weiguang Journal of Optics, Vol. 21, Issue 11 https://doi.org/10.1088/2040-8986/ab3e7a	journal	October 2019
Integrating Microsystems with Metamaterials Towards Metadevices Zhao, Xiaoguang; Li, Aobo; Duan, Guangwu 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) https://doi.org/10.1109/transducers.2019.8808812	conference	June 2019
Super-sensitive tunable planar lens based on graphene hyperbolic metamaterials Wang, Yu; Chen, Jianfeng; Liang, Wenyao Optics Express, Vol. 27, Issue 17 https://doi.org/10.1364/oe.27.024738	journal	January 2019
Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens Chen, Jian; Xiao, Jing; Lisevych, Danylo Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-07315-6	journal	November 2018
Experimental demonstration of a continuous varifocal metalens with large zoom range and high imaging resolution Guo, Yinghui; Pu, Mingbo; Ma, Xiaoliang Applied Physics Letters, Vol. 115, Issue 16 https://doi.org/10.1063/1.5123367	journal	October 2019
Three-Dimensional Aberration Analyses of Metasurface Flat Lenses Li, Ruifeng; Liu, Han; Fu, Yongqi Plasmonics, Vol. 15, Issue 1 https://doi.org/10.1007/s11468-019-01024-6	journal	September 2019
High-efficiency, linear-polarization-multiplexing metalens for long-wavelength infrared light Fan, Qingbin; Wang, Yilin; Liu, Mingze Optics Letters, Vol. 43, Issue 24 https://doi.org/10.1364/ol.43.006005	journal	January 2018
Temporal color mixing and dynamic beam shaping with silicon metasurfaces Holsteen, Aaron L.; Cihan, Ahmet Fatih; Brongersma, Mark L. Science, Vol. 365, Issue 6450 https://doi.org/10.1126/science.aax5961	journal	July 2019
All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry Shanei, Mohammad Mahdi; Fathi, Davood; Ghasemifard, Fatemeh Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-49395-4	journal	September 2019
Resonant dielectric metasurfaces: active tuning and nonlinear effects Zou, Chengjun; Sautter, Jürgen; Setzpfandt, Frank Journal of Physics D: Applied Physics, Vol. 52, Issue 37 https://doi.org/10.1088/1361-6463/ab25ff	journal	July 2019
Electrical tuning of phase-change antennas and metasurfaces Wang, Yifei; Landreman, Patrick; Schoen, David Nature Nanotechnology, Vol. 16, Issue 6 https://doi.org/10.1038/s41565-021-00882-8	journal	April 2021
Single-shot quantitative phase gradient microscopy using a system of multifunctional metasurfaces Kwon, Hyounghan; Arbabi, Ehsan; Kamali, Seyedeh Mahsa Nature Photonics, Vol. 14, Issue 2 https://doi.org/10.1038/s41566-019-0536-x	journal	October 2019
Tunable Metasurfaces Based on Active Materials Cui, Tong; Bai, Benfeng; Sun, Hong‐Bo Advanced Functional Materials, Vol. 29, Issue 10 https://doi.org/10.1002/adfm.201806692	journal	March 2019
Control of LED Emission with Functional Dielectric Metasurfaces Khaidarov, Egor; Liu, Zhengtong; Paniagua-Dominguez, Ramon arXiv https://doi.org/10.48550/arxiv.1907.08329	text	January 2019
Recent Progress in Active Optical Metasurfaces Kang, Lei; Jenkins, Ronald P.; Werner, Douglas H. Advanced Optical Materials, Vol. 7, Issue 14 https://doi.org/10.1002/adom.201801813	journal	April 2019
All-Dielectric Programmable Huygens' Metasurfaces Leitis, Aleksandrs; Heßler, Andreas; Wahl, Sophia RWTH Aachen University https://doi.org/10.18154/rwth-2020-04496	text	January 2020
Spectral tomographic imaging with aplanatic metalens Chen, Chen; Song, Wange; Chen, Jia-Wern Light: Science & Applications, Vol. 8, Issue 1 https://doi.org/10.1038/s41377-019-0208-0	journal	November 2019
Optical metasurfaces: new generation building blocks for multi-functional optics Neshev, Dragomir; Aharonovich, Igor Light: Science & Applications, Vol. 7, Issue 1 https://doi.org/10.1038/s41377-018-0058-1	journal	August 2018
Active metamaterial nearly perfect light absorbers: a review [Invited] Hajian, Hodjat; Ghobadi, Amir; Butun, Bayram Journal of the Optical Society of America B, Vol. 36, Issue 8 https://doi.org/10.1364/josab.36.00f131	journal	January 2019
Fano‐Enhanced Circular Dichroism in Deformable Stereo Metasurfaces Liu, Zhiguang; Xu, Yi; Ji, Chang‐Yin Advanced Materials, Vol. 32, Issue 8 https://doi.org/10.1002/adma.201907077	journal	January 2020
Ultra-Wide Band and Multifunctional Polarization Converter Based on Dielectric Metamaterial Gao, Ju; Zhang, Yiming; Sun, Yang Materials, Vol. 12, Issue 23 https://doi.org/10.3390/ma12233857	journal	November 2019
Electrically reconfigurable non-volatile metasurface using low-loss optical phase-change material Zhang, Yifei; Fowler, Clayton; Liang, Junhao Nature Nanotechnology, Vol. 16, Issue 6 https://doi.org/10.1038/s41565-021-00881-9	journal	April 2021
Metalens-Based Miniaturized Optical Systems Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen Micromachines, Vol. 10, Issue 5 https://doi.org/10.3390/mi10050310	journal	May 2019
Reconfigurable metasurface with polarization-independent manipulation for reflection and transmission wavefronts Liu, Guangyao; Liu, Haixia; Han, Jiaqi Journal of Physics D: Applied Physics, Vol. 53, Issue 4 https://doi.org/10.1088/1361-6463/ab5253	journal	November 2019
Metasurface-Assisted Passive Wireless Communication with Commodity Wi-Fi Signals Zhao, Hanting; Shuang, Ya; Wei, Menglin arXiv https://doi.org/10.48550/arxiv.2001.09567	text	January 2020
Chromatic Dispersion Manipulation Based on Metalenses Zang, Wenbo; Yuan, Quan; Chen, Run Advanced Materials https://doi.org/10.1002/adma.201904935	journal	December 2019
Metalens-Based Miniaturized Optical Systems Li, Bo; Piyawattanametha, Wibool; Qiu, Zhen Micromachines, Vol. 10, Issue 5 https://doi.org/10.3390/mi10050310	journal	May 2019
Empowered Layer Effects and Prominent Properties in Few‐Layer Metasurfaces Chen, Shuqi; Zhang, Yuebian; Li, Zhi Advanced Optical Materials, Vol. 7, Issue 14 https://doi.org/10.1002/adom.201801477	journal	March 2019
Multiphysics simulations of adaptive metasurfaces at the meta-atom length scale Meyer, Sebastian; Tan, Zhi Yang; Chigrin, Dmitry N. RWTH Aachen University https://doi.org/10.18154/rwth-2020-03989	text	January 2020
Near-IR wide-field-of-view Huygens metalens for outdoor imaging applications Engelberg, Jacob; Zhou, Chen; Mazurski, Noa Nanophotonics, Vol. 9, Issue 2 https://doi.org/10.1515/nanoph-2019-0177	journal	February 2020
Spoof Plasmonic Metasurfaces with Catenary Dispersion for Two-Dimensional Wide-Angle Focusing and Imaging Guo, Yinghui; Zhang, Zuojun; Pu, Mingbo iScience, Vol. 21 https://doi.org/10.1016/j.isci.2019.10.019	journal	November 2019
Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens He, Shaowei; Yang, Huimin; Jiang, Yunhui Micromachines, Vol. 10, Issue 8 https://doi.org/10.3390/mi10080505	journal	July 2019
Reconfigurable step-zoom metalens without optical and mechanical compensations Fu, Rao; Li, Zile; Zheng, Guoxing Optics Express, Vol. 27, Issue 9 https://doi.org/10.1364/oe.27.012221	journal	January 2019
All-silicon reconfigurable metasurfaces for multifunction and tunable performance at optical frequencies based on glide symmetry Shanei, Mohammad Mahdi; Fathi, Davood; Ghasemifard, Fatemeh Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-49395-4	journal	September 2019
Metasurface-based focus-tunable mirror Wang, Zehao; Liao, Dashuang; Zhang, Ting Optics Express, Vol. 27, Issue 21 https://doi.org/10.1364/oe.27.030332	journal	January 2019
Fabrication and characterization of a binary diffractive lens for controlling focal distribution Motogaito, Atsushi; Iguchi, Yosuke; Kato, Shuji Applied Optics, Vol. 59, Issue 3 https://doi.org/10.1364/ao.381139	journal	January 2020
Polarization-enabled tunable focusing by visible-light metalenses with geometric and propagation phase Zhang, Jianlei; Zhang, Lei; Huang, Kun Journal of Optics, Vol. 21, Issue 11 https://doi.org/10.1088/2040-8986/ab48cf	journal	October 2019
Ultrathin Tunable Lens Based on Boundary Tension Effect Yang, Ao; Cao, Jie; Zhang, Fanghua Sensors, Vol. 19, Issue 18 https://doi.org/10.3390/s19184018	journal	September 2019
Information metamaterials – from effective media to real-time information processing systems Li, Lianlin; Cui, Tie Jun Nanophotonics, Vol. 8, Issue 5 https://doi.org/10.1515/nanoph-2019-0006	journal	March 2019
Dynamic beam steering with all-dielectric electro-optic III–V multiple-quantum-well metasurfaces Wu, Pin Chieh; Pala, Ragip A.; Kafaie Shirmanesh, Ghazaleh Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-11598-8	journal	August 2019
Polarization states synthesizer based on a thermo-optic dielectric metasurface Bosch, M.; Shcherbakov, M. R.; Fan, Z. Journal of Applied Physics, Vol. 126, Issue 7 https://doi.org/10.1063/1.5094158	journal	August 2019
Metasurface‐Empowered Optical Multiplexing and Multifunction Chen, Shuqi; Liu, Wenwei; Li, Zhancheng Advanced Materials, Vol. 32, Issue 3 https://doi.org/10.1002/adma.201805912	journal	October 2019
Flexible focusing pattern realization of centimeter-scale planar super-oscillatory lenses in parallel fabrication Li, Wenli; Yu, Yiting; Yuan, Weizheng Nanoscale, Vol. 11, Issue 1 https://doi.org/10.1039/c8nr07985d	journal	January 2019
Rotationally tunable polarization-insensitive single and multifocal metasurface Yilmaz, Nazmi; Ozdemir, Aytekin; Ozer, Ahmet Journal of Optics, Vol. 21, Issue 4 https://doi.org/10.1088/2040-8986/ab0d5f	journal	March 2019
Phase-only transmissive spatial light modulator based on tunable dielectric metasurface Li, Shi-Qiang; Xu, Xuewu; Veetil, Rasna Maruthiyodan arXiv https://doi.org/10.48550/arxiv.1901.07742	text	January 2019
Deep-subwavelength control of acoustic waves in an ultra-compact metasurface lens Chen, Jian; Xiao, Jing; Lisevych, Danylo Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-07315-6	journal	November 2018
Thermal tuning capabilities of semiconductor metasurface resonators Lewi, Tomer; Butakov, Nikita A.; Schuller, Jon A. Nanophotonics, Vol. 8, Issue 2 https://doi.org/10.1515/nanoph-2018-0178	journal	November 2018
Optical metasurfaces: new generation building blocks for multi-functional optics Neshev, Dragomir; Aharonovich, Igor Light: Science & Applications, Vol. 7, Issue 1 https://doi.org/10.1038/s41377-018-0058-1	journal	August 2018
Spectral tomographic imaging with aplanatic metalens Chen, Chen; Song, Wange; Chen, Jia-Wern Light: Science & Applications, Vol. 8, Issue 1 https://doi.org/10.1038/s41377-019-0208-0	journal	November 2019
A review of dielectric optical metasurfaces for wavefront control Kamali, Seyedeh Mahsa; Arbabi, Ehsan; Arbabi, Amir Nanophotonics, Vol. 7, Issue 6 https://doi.org/10.1515/nanoph-2017-0129	journal	June 2018
Holographic display system with adjustable viewing angle based on multi-focus optofluidic lens Liu, Chao; Wang, Di; Wang, Qiong-Hua Optics Express, Vol. 27, Issue 13 https://doi.org/10.1364/oe.27.018210	journal	January 2019
Optimized chemical potential graphene-based coding metasurface approach for dynamic manipulation of terahertz wavefront Fallah, Susan; Rouhi, Kasra; Abdolali, Ali Journal of Physics D: Applied Physics, Vol. 53, Issue 8 https://doi.org/10.1088/1361-6463/ab572f	journal	December 2019
Efficient visible light modulation based on electrically tunable all dielectric metasurfaces embedded in thin-layer nematic liquid crystals Sun, Mingyu; Xu, Xuewu; Sun, Xiao Wei Scientific Reports, Vol. 9, Issue 1 https://doi.org/10.1038/s41598-019-45091-5	journal	June 2019
Phase-only transmissive spatial light modulator based on tunable dielectric metasurface Li, Shi-Qiang; Xu, Xuewu; Maruthiyodan Veetil, Rasna Science, Vol. 364, Issue 6445 https://doi.org/10.1126/science.aaw6747	journal	June 2019
Mechanically tunable focusing metamirror in the visible Cheng, Fei; Qiu, Liangyu; Nikolov, Daniel Optics Express, Vol. 27, Issue 11 https://doi.org/10.1364/oe.27.015194	journal	January 2019
When metasurface meets hologram: principle and advances Jiang, Qiang; Jin, Guofan; Cao, Liangcai Advances in Optics and Photonics, Vol. 11, Issue 3 https://doi.org/10.1364/aop.11.000518	journal	January 2019

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