Analysis of nonequilibrium phenomena in inductively coupled plasma generators
This article addresses the modeling of nonequilibrium phenomena in inductively coupled plasma discharges. In the proposed computational model, the electromagnetic induction equation is solved together with the set of NavierStokes equations in order to compute the electromagnetic and flow fields, accounting for their mutual interaction. Semiclassical statistical thermodynamics is used to determine the plasma thermodynamic properties, while transport properties are obtained from kinetic principles, with the method of Chapman and Enskog. Particle ambipolar diffusive fluxes are found by solving the StefanMaxwell equations with a simple iterative method. Two physicomathematical formulations are used to model the chemical reaction processes: (1) A Local Thermodynamics Equilibrium (LTE) formulation and (2) a thermochemical nonequilibrium (TCNEQ) formulation. In the TCNEQ model, thermal nonequilibrium between the translational energy mode of the gas and the vibrational energy mode of individual molecules is accounted for. The electronic states of the chemical species are assumed in equilibrium with the vibrational temperature, whereas the rotational energy mode is assumed to be equilibrated with translation. Three different physical models are used to account for the coupling of chemistry and energy transfer processes. Numerical simulations obtained with the LTE and TCNEQ formulations are used to characterize the extent of nonequilibrium of themore »
 Authors:

^{[1]}
;
^{[2]};
^{[1]}
 Univ. of Illinois at UrbanaChampaign, IL (United States)
 Von Karman Inst. for Fluid Dynamics, RhodeSaintGenese (Belgium)
 Publication Date:
 Grant/Contract Number:
 NA0002374; FWO G.0729.11N
 Type:
 Accepted Manuscript
 Journal Name:
 Physics of Plasmas
 Additional Journal Information:
 Journal Volume: 23; Journal Issue: 7; Journal ID: ISSN 1070664X
 Publisher:
 American Institute of Physics (AIP)
 Research Org:
 Univ. of Illinois at UrbanaChampaign, IL (United States)
 Sponsoring Org:
 USDOE National Nuclear Security Administration (NNSA); Research FoundationFlanders (FWO)
 Country of Publication:
 United States
 Language:
 English
 Subject:
 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 97 MATHEMATICS AND COMPUTING; phase equilibria; Boltzmann equations; Maxwell equations; thermal models; chemically reactive flows; inductively coupled plasma; Navier Stokes equations; dissociation energies; reaction kinetics modeling
 OSTI Identifier:
 1467840
 Alternate Identifier(s):
 OSTI ID: 1263713
Zhang, W., Lani, A., and Panesi, M.. Analysis of nonequilibrium phenomena in inductively coupled plasma generators. United States: N. p.,
Web. doi:10.1063/1.4958326.
Zhang, W., Lani, A., & Panesi, M.. Analysis of nonequilibrium phenomena in inductively coupled plasma generators. United States. doi:10.1063/1.4958326.
Zhang, W., Lani, A., and Panesi, M.. 2016.
"Analysis of nonequilibrium phenomena in inductively coupled plasma generators". United States.
doi:10.1063/1.4958326. https://www.osti.gov/servlets/purl/1467840.
@article{osti_1467840,
title = {Analysis of nonequilibrium phenomena in inductively coupled plasma generators},
author = {Zhang, W. and Lani, A. and Panesi, M.},
abstractNote = {This article addresses the modeling of nonequilibrium phenomena in inductively coupled plasma discharges. In the proposed computational model, the electromagnetic induction equation is solved together with the set of NavierStokes equations in order to compute the electromagnetic and flow fields, accounting for their mutual interaction. Semiclassical statistical thermodynamics is used to determine the plasma thermodynamic properties, while transport properties are obtained from kinetic principles, with the method of Chapman and Enskog. Particle ambipolar diffusive fluxes are found by solving the StefanMaxwell equations with a simple iterative method. Two physicomathematical formulations are used to model the chemical reaction processes: (1) A Local Thermodynamics Equilibrium (LTE) formulation and (2) a thermochemical nonequilibrium (TCNEQ) formulation. In the TCNEQ model, thermal nonequilibrium between the translational energy mode of the gas and the vibrational energy mode of individual molecules is accounted for. The electronic states of the chemical species are assumed in equilibrium with the vibrational temperature, whereas the rotational energy mode is assumed to be equilibrated with translation. Three different physical models are used to account for the coupling of chemistry and energy transfer processes. Numerical simulations obtained with the LTE and TCNEQ formulations are used to characterize the extent of nonequilibrium of the flow inside the Plasmatron facility at the von Karman Institute. Each model was tested using different kinetic mechanisms to assess the sensitivity of the results to variations in the reaction parameters. A comparison of temperatures and composition profiles at the outlet of the torch demonstrates that the flow is in nonequilibrium for operating conditions characterized by pressures below 30 000 Pa, frequency 0.37 MHz, input power 80 kW, and mass flow 8 g/s.},
doi = {10.1063/1.4958326},
journal = {Physics of Plasmas},
number = 7,
volume = 23,
place = {United States},
year = {2016},
month = {7}
}