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Title: Neutron reflectometry investigations of interfacial structures of Ti/TiN layers deposited by magnetron sputtering

We report that nanolayered metal-ceramic composite systems provide the possibility to produce new materials with exceptional strength, toughness, and radiation resistance not exhibited by their individual constituents. The unusual behaviors are frequently attributed to the high density of internal interfaces. Most layered structures studied to date contain sharp interfaces and the synthesis of more diffuse interfacial structures, where the interface is graded out of the interface plane, has not been deeply explored. Here we show how neutron reflectometry was used to study the structure of magnetron sputter deposited titanium and titanium nitride (Ti/TiN) layers as a function of deposition parameters: temperature, rate of N 2 flow or pressure, electrical bias applied to the sample, and orientation of the ion source relative to the sample. These different deposition and post-processing strategies resulted in profound changes in the structure of the interfacial region between the two components in Ti/TiN x bilayers. Finally, the results show that temperature and low step-wise N 2 flow rates, but not electrical bias, can form graded interfaces in a controlled manner.
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  1. Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
  2. Los Alamos National Lab. (LANL), Los Alamos, NM (United States); Univ. of California, Davis, CA (United States)
Publication Date:
Report Number(s):
Journal ID: ISSN 0040-6090
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 616; Journal Issue: C; Journal ID: ISSN 0040-6090
Research Org:
Los Alamos National Lab. (LANL), Los Alamos, NM (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22); USDOE National Nuclear Security Administration (NNSA); USDOE Laboratory Directed Research and Development (LDRD) Program
Country of Publication:
United States
36 MATERIALS SCIENCE; Titanium; Titanium nitride; Engineered interfaces; Composite materials; Neutron reflectivity
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1359952