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Title: Two-dimensional stitching interferometry based on tilt measurement

Abstract

In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.

Authors:
ORCiD logo; ; ORCiD logo; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1467135
Alternate Identifier(s):
OSTI ID: 1478495
Report Number(s):
[BNL-209305-2018-JAAM]
[Journal ID: ISSN 1094-4087; OPEXFF]
Grant/Contract Number:  
[SC0012704]
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
[Journal Name: Optics Express Journal Volume: 26 Journal Issue: 18]; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States: N. p., 2018. Web. doi:10.1364/OE.26.023278.
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, & Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States. doi:10.1364/OE.26.023278.
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Mon . "Two-dimensional stitching interferometry based on tilt measurement". United States. doi:10.1364/OE.26.023278.
@article{osti_1467135,
title = {Two-dimensional stitching interferometry based on tilt measurement},
author = {Huang, Lei and Idir, Mourad and Zuo, Chao and Wang, Tianyi and Tayabaly, Kashmira and Lippmann, Erich},
abstractNote = {In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.},
doi = {10.1364/OE.26.023278},
journal = {Optics Express},
number = [18],
volume = [26],
place = {United States},
year = {2018},
month = {8}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1364/OE.26.023278

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Cited by: 3 works
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