Two-dimensional stitching interferometry based on tilt measurement
Abstract
In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.
- Authors:
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1467135
- Alternate Identifier(s):
- OSTI ID: 1478495
- Report Number(s):
- BNL-209305-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
- Grant/Contract Number:
- SC0012704
- Resource Type:
- Published Article
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Name: Optics Express Journal Volume: 26 Journal Issue: 18; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States: N. p., 2018.
Web. doi:10.1364/OE.26.023278.
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, & Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States. https://doi.org/10.1364/OE.26.023278
Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Mon .
"Two-dimensional stitching interferometry based on tilt measurement". United States. https://doi.org/10.1364/OE.26.023278.
@article{osti_1467135,
title = {Two-dimensional stitching interferometry based on tilt measurement},
author = {Huang, Lei and Idir, Mourad and Zuo, Chao and Wang, Tianyi and Tayabaly, Kashmira and Lippmann, Erich},
abstractNote = {In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.},
doi = {10.1364/OE.26.023278},
journal = {Optics Express},
number = 18,
volume = 26,
place = {United States},
year = {2018},
month = {8}
}
https://doi.org/10.1364/OE.26.023278
Web of Science
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