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Title: Two-dimensional stitching interferometry based on tilt measurement

Journal Article · · Optics Express
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Not Available

Sponsoring Organization:
USDOE
Grant/Contract Number:
SC0012704
OSTI ID:
1467135
Alternate ID(s):
OSTI ID: 1478495
Journal Information:
Optics Express, Journal Name: Optics Express Journal Issue: 18 Vol. 26; ISSN 1094-4087; ISSN OPEXFF
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English

References (20)

Modified stitching algorithm for annular subaperture stitching interferometry for aspheric surfaces journal January 2013
Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature
  • Yumoto, Hirokatsu; Mimura, Hidekazu; Handa, Soichiro
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.073
journal May 2010
Stitching methods at the European Synchrotron Radiation Facility (ESRF) journal May 2016
Relative angle determinable stitching interferometry for hard x-ray reflective optics journal April 2005
Framework for gradient integration by combining radial basis functions method and least-squares method journal January 2013
A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition
  • Kimura, Takashi; Ohashi, Haruhiko; Mimura, Hidekazu
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3 https://doi.org/10.1016/j.nima.2009.11.014
journal May 2010
Stitching interferometry: how and why it works conference September 1999
Stitching Interferometry: A Flexible Solution for Surface Metrology journal January 2003
One-dimensional stitching interferometry assisted by a triple-beam interferometer journal January 2017
Stitching interferometric metrology for steeply curved x-ray mirrors journal January 2008
Retrace error reconstruction based on point characteristic function journal January 2015
Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters conference June 2017
Measurement of large plane surface shapes by connecting small-aperture interferograms journal February 1994
Stitching interferometry of high numerical aperture cylindrical optics without using a fringe-nulling routine journal January 2015
Microstitching interferometry for x-ray reflective optics journal May 2003
Retrace error: interferometry's dark little secret conference October 2013
A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head journal January 2014
Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors journal January 2006
One-dimensional angular-measurement-based stitching interferometry journal January 2018
Low- and mid-spatial-frequency component measurement for aspheres
  • Schulz, Michael; Weingaertner, Ingolf; Elster, Clemens
  • Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings https://doi.org/10.1117/12.503699
conference November 2003

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