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Title: Two-dimensional stitching interferometry based on tilt measurement

Abstract

In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.

Authors:
ORCiD logo; ; ORCiD logo; ; ;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1467135
Alternate Identifier(s):
OSTI ID: 1478495
Report Number(s):
[BNL-209305-2018-JAAM]
[Journal ID: ISSN 1094-4087; OPEXFF]
Grant/Contract Number:  
[SC0012704]
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
[Journal Name: Optics Express Journal Volume: 26 Journal Issue: 18]; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States: N. p., 2018. Web. doi:10.1364/OE.26.023278.
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Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, & Lippmann, Erich. Two-dimensional stitching interferometry based on tilt measurement. United States. doi:10.1364/OE.26.023278.
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Huang, Lei, Idir, Mourad, Zuo, Chao, Wang, Tianyi, Tayabaly, Kashmira, and Lippmann, Erich. Mon . "Two-dimensional stitching interferometry based on tilt measurement". United States. doi:10.1364/OE.26.023278.
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@article{osti_1467135,
title = {Two-dimensional stitching interferometry based on tilt measurement},
author = {Huang, Lei and Idir, Mourad and Zuo, Chao and Wang, Tianyi and Tayabaly, Kashmira and Lippmann, Erich},
abstractNote = {In this study, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage where the surface under test is placed. The differences of the x- and y-tilt readings between these two tiltmeters are recorded as the relative tilt between interferometer and surface under test. The relative tilt in both x- and y-directions are used to correct the surface tip/tilt of each subset, and then the piston is adjusted to get the final stitching surface map. As an example, a stitching result of a 125mm-long mirror surface is presented. The repeatability of our current stitching system is about 1.48 nm RMS. The stitching result is compared to the result of a one-dimensional angular-measurement-based stitching method to discuss the merits and limitation of the proposed method.},
doi = {10.1364/OE.26.023278},
journal = {Optics Express},
number = [18],
volume = [26],
place = {United States},
year = {2018},
month = {8}
}
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DOI: 10.1364/OE.26.023278
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Works referenced in this record:

Stitching methods at the European Synchrotron Radiation Facility (ESRF)
journal, May 2016

  • Vivo, A.; Lantelme, B.; Baker, R.
  • Review of Scientific Instruments, Vol. 87, Issue 5
  • DOI: 10.1063/1.4950745

Framework for gradient integration by combining radial basis functions method and least-squares method
journal, January 2013

Modified stitching algorithm for annular subaperture stitching interferometry for aspheric surfaces
journal, January 2013

  • Wen, Yongfu; Cheng, Haobo; Tam, Hon-Yuen
  • Applied Optics, Vol. 52, Issue 23
  • DOI: 10.1364/AO.52.005686

Stitching Interferometry: A Flexible Solution for Surface Metrology
journal, January 2003

Low- and mid-spatial-frequency component measurement for aspheres
conference, November 2003

  • Schulz, Michael; Weingaertner, Ingolf; Elster, Clemens
  • Optical Science and Technology, SPIE's 48th Annual Meeting, SPIE Proceedings
  • DOI: 10.1117/12.503699

Relative angle determinable stitching interferometry for hard x-ray reflective optics
journal, April 2005

  • Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi
  • Review of Scientific Instruments, Vol. 76, Issue 4
  • DOI: 10.1063/1.1868472

Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature
journal, May 2010

  • Yumoto, Hirokatsu; Mimura, Hidekazu; Handa, Soichiro
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.11.073

Stitching interferometric metrology for steeply curved x-ray mirrors
journal, January 2008

  • Yumoto, Hirokatsu; Mimura, Hidekazu; Kimura, Takashi
  • Surface and Interface Analysis, Vol. 40, Issue 6-7
  • DOI: 10.1002/sia.2807

Measurement of large plane surface shapes by connecting small-aperture interferograms
journal, February 1994

Retrace error reconstruction based on point characteristic function
journal, January 2015

Microstitching interferometry for x-ray reflective optics
journal, May 2003

  • Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu
  • Review of Scientific Instruments, Vol. 74, Issue 5
  • DOI: 10.1063/1.1569405

Stitching interferometry of high numerical aperture cylindrical optics without using a fringe-nulling routine
journal, January 2015

  • Peng, Junzheng; Wang, Qingquan; Peng, Xiang
  • Journal of the Optical Society of America A, Vol. 32, Issue 11
  • DOI: 10.1364/JOSAA.32.001964

Retrace error: interferometry's dark little secret
conference, October 2013

A stitching figure profiler of large X-ray mirrors using RADSI for subaperture data acquisition
journal, May 2010

  • Kimura, Takashi; Ohashi, Haruhiko; Mimura, Hidekazu
  • Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 616, Issue 2-3
  • DOI: 10.1016/j.nima.2009.11.014

Flatness metrology based on small-angle deflectometric procedures with electronic tiltmeters
conference, June 2017

  • Ehret, G.; Laubach, S.; Schulz, M.
  • Fourth European Seminar on Precision Optics Manufacturing, SPIE Proceedings
  • DOI: 10.1117/12.2268288

Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors
journal, January 2006

One-dimensional stitching interferometry assisted by a triple-beam interferometer
journal, January 2017

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head
journal, January 2014

  • Idir, Mourad; Kaznatcheev, Konstantine; Dovillaire, Guillaume
  • Optics Express, Vol. 22, Issue 3
  • DOI: 10.1364/OE.22.002770

One-dimensional angular-measurement-based stitching interferometry
journal, January 2018

Stitching interferometry: how and why it works
conference, September 1999

  • Bray, Michael
  • Optical Systems Design and Production, SPIE Proceedings
  • DOI: 10.1117/12.360153
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