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Title: Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication

A Fresnel zoneplate is a diffractive optical element consisting of concentric rings (zones) for which the transmitted light produces a focal spot that is used in all wavelength regimes, including X-rays. The pattern of transmission openings determines the location of the spot and the sub-half wavelength size of the openings can adjust the intensity. Today, very general transmission zoneplate patterns are used for many special imaging and image compensation purposes. Manufacturing zoneplates require a zoneplate pattern file, which precisely describes the size, shape, and contour of the rings based on the desired optical properties of the lens. Generating such a pattern requires the delicate balance of achieving the required optical performance while maintaining manageable file sizes and computation times. Here we describe a new algorithm meeting these needs. In conclusion, by precisely controlling the number of shapes in each zone, the algorithm simultaneously optimizes the desired optical tolerances with the pattern file size.
Authors:
 [1] ;  [2] ;  [2] ;  [2]
  1. Univ. of California, Berkeley, CA (United States); Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Publication Date:
Grant/Contract Number:
AC02-05CH11231
Type:
Accepted Manuscript
Journal Name:
Optics Communications
Additional Journal Information:
Journal Volume: 402; Journal Issue: C; Related Information: © 2017 Elsevier B.V.; Journal ID: ISSN 0030-4018
Publisher:
Elsevier
Research Org:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; Fresnel zoneplate; Zoneplate pattern data preparation; X-ray; Extreme ultraviolet (EUV)
OSTI Identifier:
1466708

Wang, Yow -Gwo, Miyakawa, Ryan H., Chao, Weilun, and Naulleau, Patrick P.. Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication. United States: N. p., Web. doi:10.1016/j.optcom.2017.05.060.
Wang, Yow -Gwo, Miyakawa, Ryan H., Chao, Weilun, & Naulleau, Patrick P.. Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication. United States. doi:10.1016/j.optcom.2017.05.060.
Wang, Yow -Gwo, Miyakawa, Ryan H., Chao, Weilun, and Naulleau, Patrick P.. 2017. "Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication". United States. doi:10.1016/j.optcom.2017.05.060. https://www.osti.gov/servlets/purl/1466708.
@article{osti_1466708,
title = {Efficient Fresnel zoneplate pattern data preparation for high-resolution nanofabrication},
author = {Wang, Yow -Gwo and Miyakawa, Ryan H. and Chao, Weilun and Naulleau, Patrick P.},
abstractNote = {A Fresnel zoneplate is a diffractive optical element consisting of concentric rings (zones) for which the transmitted light produces a focal spot that is used in all wavelength regimes, including X-rays. The pattern of transmission openings determines the location of the spot and the sub-half wavelength size of the openings can adjust the intensity. Today, very general transmission zoneplate patterns are used for many special imaging and image compensation purposes. Manufacturing zoneplates require a zoneplate pattern file, which precisely describes the size, shape, and contour of the rings based on the desired optical properties of the lens. Generating such a pattern requires the delicate balance of achieving the required optical performance while maintaining manageable file sizes and computation times. Here we describe a new algorithm meeting these needs. In conclusion, by precisely controlling the number of shapes in each zone, the algorithm simultaneously optimizes the desired optical tolerances with the pattern file size.},
doi = {10.1016/j.optcom.2017.05.060},
journal = {Optics Communications},
number = C,
volume = 402,
place = {United States},
year = {2017},
month = {6}
}