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Title: Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering

Abstract

We use room temperature ion beam assisted sputtering to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures, X-ray diffraction, and atomic force microscopy. Compared to reactive sputtering of niobium nitride, films sputtered in the presence of an ion beam show a remarkable increase in the superconducting critical temperature T c, while exhibiting lower sensitivity to nitrogen concentration during deposition. Thickness dependence of the superconducting critical temperature is comparable to films prepared by conventional methods at high substrate temperatures and is consistent with behavior driven by quantum size effects or weak localization.

Authors:
ORCiD logo [1]; ORCiD logo [2];  [2]; ORCiD logo [2];  [3]; ORCiD logo [3]; ORCiD logo [4];  [4]; ORCiD logo [5];  [6]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Physics Division; Drexel Univ., Philadelphia, PA (United States). Dept. of Physics
  2. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
  3. Argonne National Lab. (ANL), Argonne, IL (United States). High Energy Physics Division
  4. Argonne National Lab. (ANL), Argonne, IL (United States). Physics Division
  5. Drexel Univ., Philadelphia, PA (United States). Dept. of Physics. Dept. of Materials Science and Engineering
  6. Argonne National Lab. (ANL), Argonne, IL (United States). Physics Division. Materials Science Division
Publication Date:
Research Org.:
Energy Frontier Research Centers (EFRC) (United States). Center for Complex Materials from First Principles (CCM); Argonne National Lab. (ANL), Argonne, IL (United States); Drexel Univ., Philadelphia, PA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Nuclear Physics (NP) (SC-26); USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1466282
Alternate Identifier(s):
OSTI ID: 1461926
Grant/Contract Number:  
[AC02-06CH11357; SC0012575]
Resource Type:
Accepted Manuscript
Journal Name:
APL Materials
Additional Journal Information:
[ Journal Volume: 6; Journal Issue: 7]; Journal ID: ISSN 2166-532X
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; electrical resistivity; phase transitions; X-ray diffraction; thin films; sputter deposition; superconductivity

Citation Formats

Polakovic, Tomas, Lendinez, Sergi, Pearson, John E., Hoffmann, Axel, Yefremenko, Volodymyr, Chang, Clarence L., Armstrong, Whitney, Hafidi, Kawtar, Karapetrov, Goran, and Novosad, Valentine. Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering. United States: N. p., 2018. Web. doi:10.1063/1.5031904.
Polakovic, Tomas, Lendinez, Sergi, Pearson, John E., Hoffmann, Axel, Yefremenko, Volodymyr, Chang, Clarence L., Armstrong, Whitney, Hafidi, Kawtar, Karapetrov, Goran, & Novosad, Valentine. Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering. United States. doi:10.1063/1.5031904.
Polakovic, Tomas, Lendinez, Sergi, Pearson, John E., Hoffmann, Axel, Yefremenko, Volodymyr, Chang, Clarence L., Armstrong, Whitney, Hafidi, Kawtar, Karapetrov, Goran, and Novosad, Valentine. Fri . "Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering". United States. doi:10.1063/1.5031904. https://www.osti.gov/servlets/purl/1466282.
@article{osti_1466282,
title = {Room temperature deposition of superconducting niobium nitride films by ion beam assisted sputtering},
author = {Polakovic, Tomas and Lendinez, Sergi and Pearson, John E. and Hoffmann, Axel and Yefremenko, Volodymyr and Chang, Clarence L. and Armstrong, Whitney and Hafidi, Kawtar and Karapetrov, Goran and Novosad, Valentine},
abstractNote = {We use room temperature ion beam assisted sputtering to deposit niobium nitride thin films. Electrical and structural characterizations were performed by electric transport and magnetization measurements at variable temperatures, X-ray diffraction, and atomic force microscopy. Compared to reactive sputtering of niobium nitride, films sputtered in the presence of an ion beam show a remarkable increase in the superconducting critical temperature Tc, while exhibiting lower sensitivity to nitrogen concentration during deposition. Thickness dependence of the superconducting critical temperature is comparable to films prepared by conventional methods at high substrate temperatures and is consistent with behavior driven by quantum size effects or weak localization.},
doi = {10.1063/1.5031904},
journal = {APL Materials},
number = [7],
volume = [6],
place = {United States},
year = {2018},
month = {7}
}

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Works referenced in this record:

Thin film annealing by ion bombardment
journal, June 1980


Superconducting properties and normal‐state resistivity of single‐crystal NbN films prepared by a reactive rf‐magnetron sputtering method
journal, March 1992

  • Shoji, A.; Kiryu, S.; Kohjiro, S.
  • Applied Physics Letters, Vol. 60, Issue 13
  • DOI: 10.1063/1.107220

Critical current of Nb and NbN thin-film structures: The cross-section dependence: Critical current of Nb and NbN thin-film structures
journal, March 2005


Transition temperatures and crystal structures of single‐crystal and polycrystalline NbN x films
journal, March 1974

  • Oya, Gin‐ichiro; Onodera, Yutaka
  • Journal of Applied Physics, Vol. 45, Issue 3
  • DOI: 10.1063/1.1663418

Ion-beam-induced texture formation in vacuum-condensed thin metal films
journal, June 1982


Localization Effects in Two-Dimensional Superconductors
journal, May 1982

  • Maekawa, Sadamishi; Fukuyama, Hidetoshi
  • Journal of the Physical Society of Japan, Vol. 51, Issue 5
  • DOI: 10.1143/jpsj.51.1380

Superconductor–insulator transition in two-dimensional NbN/MgO and NbN/AlN/MgO films
journal, October 2015


Texture evolution of transition-metal nitride thin films by ion beam assisted deposition
journal, January 2004


The effects of methane in the deposition of superconducting niobium nitride thin films at ambient substrate temperature
journal, February 1983

  • Cukauskas, E. J.
  • Journal of Applied Physics, Vol. 54, Issue 2
  • DOI: 10.1063/1.332117

Grain boundary scattering in the normal state resistivity of superconducting NbN thin films
journal, January 1994

  • Tyan, Jyh‐Haur; Lue, Juh Tzeng
  • Journal of Applied Physics, Vol. 75, Issue 1
  • DOI: 10.1063/1.355853

Surface term in the superconductive Ginzburg-Landau free energy: Application to thin films
journal, June 1986


Properties of NbN thin films deposited on ambient temperature substrates
journal, November 1983

  • Bacon, D. D.; English, A. T.; Nakahara, S.
  • Journal of Applied Physics, Vol. 54, Issue 11
  • DOI: 10.1063/1.331881

Tunneling studies in a homogeneously disordered s -wave superconductor: NbN
journal, March 2009


Optical and transport properties of ultrathin NbN films and nanostructures
journal, August 2009


Effects of substrate temperature and substrate material on the structure of reactively sputtered TiN films
journal, December 1984


Tunneling, resistive and structural study of NbN and other superconducting nitrides
journal, March 1985


Fabrication and characterization of epitaxial NbN/MgO/NbN Josephson tunnel junctions
journal, November 2001

  • Kawakami, Akira; Wang, Zhen; Miki, Shigehito
  • Journal of Applied Physics, Vol. 90, Issue 9
  • DOI: 10.1063/1.1409583

Superconducting properties and crystal structures of single‐crystal niobium nitride thin films deposited at ambient substrate temperature
journal, May 1996

  • Wang, Zhen; Kawakami, Akira; Uzawa, Yoshinori
  • Journal of Applied Physics, Vol. 79, Issue 10
  • DOI: 10.1063/1.362392

Proximity effect in Nb Cu CoFe trilayers
journal, November 2006


Suppression of superconductivity in homogeneously disordered systems
journal, March 1994


Discovery of Superconductivity in Hard Hexagonal ε-NbN
journal, February 2016

  • Zou, Yongtao; Qi, Xintong; Zhang, Cheng
  • Scientific Reports, Vol. 6, Issue 1
  • DOI: 10.1038/srep22330

Picosecond superconducting single-photon optical detector
journal, August 2001

  • Gol’tsman, G. N.; Okunev, O.; Chulkova, G.
  • Applied Physics Letters, Vol. 79, Issue 6
  • DOI: 10.1063/1.1388868

Bias sputtered NbN and superconducting nanowire devices
journal, September 2017

  • Dane, Andrew E.; McCaughan, Adam N.; Zhu, Di
  • Applied Physics Letters, Vol. 111, Issue 12
  • DOI: 10.1063/1.4990066

Film nanostructure formation during low-temperature PVD deposition using partially ionized atomic fluxes
journal, May 2008


Fabrication of DC sputtered NbN thick film with high upper critical field of above 400 kOe
conference, January 2012

  • Jha, Rajveer; Kumar, Anuj; Awana, V. P. S.
  • SOLID STATE PHYSICS: Proceedings of the 56th DAE Solid State Physics Symposium 2011, AIP Conference Proceedings
  • DOI: 10.1063/1.4710277

Suppression of superconductivity in epitaxial NbN ultrathin films
journal, February 2011

  • Kang, L.; Jin, B. B.; Liu, X. Y.
  • Journal of Applied Physics, Vol. 109, Issue 3
  • DOI: 10.1063/1.3518037

Structural and mechanical properties of sputtered cubic and hexagonal NbNx thin films
journal, March 2004


End‐Hall ion source
journal, July 1987

  • Kaufman, Harold R.; Robinson, Raymond S.; Seddon, Richard Ian
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 5, Issue 4
  • DOI: 10.1116/1.574924

Niobium and niobium nitride SQUIDs based on anodized nanobridges made with an atomic force microscope
journal, March 2002


Proximity Effects in Superconductor/Insulating-Ferromagnet NbN/GdN Multilayers
journal, March 1996


Dependence of thin‐film microstructure on deposition rate by means of a computer simulation
journal, October 1985

  • Müller, Karl‐Heinz
  • Journal of Applied Physics, Vol. 58, Issue 7
  • DOI: 10.1063/1.335885

Superconductor-insulator transition in ultrathin Pb films: Localization and superconducting coherence
journal, February 1996


Upper critical field of niobium nitride thin films
journal, February 2016

  • Vasyutin, M. A.; Kuz’michev, N. D.; Shilkin, D. A.
  • Physics of the Solid State, Vol. 58, Issue 2
  • DOI: 10.1134/s1063783416020311

Localization and interaction effects in ultrathin epitaxial NbN superconducting films
journal, October 2012


Electrical resistivity of polycrystalline niobium nitride films
journal, March 1988


Superconducting Transition Temperature Modulation in NbN via EDL Gating
journal, December 2015

  • Piatti, E.; Sola, A.; Daghero, D.
  • Journal of Superconductivity and Novel Magnetism, Vol. 29, Issue 3
  • DOI: 10.1007/s10948-015-3306-0