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Title: Metrology Feasibility Study in Support of the National Direct-Drive Program

Abstract

The 100 Gbar Laser Direct Drive (LDD) program calls for ablator capsules with no defects larger than 0.5 μm in lateral dimension and fewer than ten defects with lateral dimensions between 0.1-0.5 μm. Comparing to Laser Indirect Drive (LID) capsules, this represents >10x reduction of defect length scale and >500x reduction in defect number density. This presents major challenges to both fabrication and metrology. In this paper, we will discuss the proof-of-principle work conducted at General Atomics to identify metrology techniques suitable for 100 Gbar target characterization. We present a detailed studies of dark-field imaging, laser scatterometry, and environmental scanning electron microscopes. We identify dark-field imaging as the best approach for meeting the 100 Gbar metrology needs.

Authors:
 [1];  [1];  [1];  [1];  [1];  [1];  [1];  [1]
  1. General Atomics, San Diego, CA (United States)
Publication Date:
Research Org.:
General Atomics, San Diego, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1463658
Grant/Contract Number:  
NA0001808
Resource Type:
Accepted Manuscript
Journal Name:
Fusion Science and Technology
Additional Journal Information:
Journal Volume: 73; Journal Issue: 2; Journal ID: ISSN 1536-1055
Publisher:
American Nuclear Society
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Laser direct drive; inertial confinement fusion; magnetized liner inertial fusion

Citation Formats

Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., and Farrell, M. Metrology Feasibility Study in Support of the National Direct-Drive Program. United States: N. p., 2018. Web. doi:10.1080/15361055.2017.1387460.
Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., & Farrell, M. Metrology Feasibility Study in Support of the National Direct-Drive Program. United States. doi:10.1080/15361055.2017.1387460.
Huang, H., Engelhorn, K., Sequoia, K., Greenwood, A., Sweet, W., Carlson, L., Elsner, F., and Farrell, M. Mon . "Metrology Feasibility Study in Support of the National Direct-Drive Program". United States. doi:10.1080/15361055.2017.1387460. https://www.osti.gov/servlets/purl/1463658.
@article{osti_1463658,
title = {Metrology Feasibility Study in Support of the National Direct-Drive Program},
author = {Huang, H. and Engelhorn, K. and Sequoia, K. and Greenwood, A. and Sweet, W. and Carlson, L. and Elsner, F. and Farrell, M.},
abstractNote = {The 100 Gbar Laser Direct Drive (LDD) program calls for ablator capsules with no defects larger than 0.5 μm in lateral dimension and fewer than ten defects with lateral dimensions between 0.1-0.5 μm. Comparing to Laser Indirect Drive (LID) capsules, this represents >10x reduction of defect length scale and >500x reduction in defect number density. This presents major challenges to both fabrication and metrology. In this paper, we will discuss the proof-of-principle work conducted at General Atomics to identify metrology techniques suitable for 100 Gbar target characterization. We present a detailed studies of dark-field imaging, laser scatterometry, and environmental scanning electron microscopes. We identify dark-field imaging as the best approach for meeting the 100 Gbar metrology needs.},
doi = {10.1080/15361055.2017.1387460},
journal = {Fusion Science and Technology},
number = 2,
volume = 73,
place = {United States},
year = {2018},
month = {1}
}

Journal Article:
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