Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry
Abstract
Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1461596
- Alternate Identifier(s):
- OSTI ID: 1469786
- Report Number(s):
- BNL-209029-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
- Grant/Contract Number:
- No. DE-SC0012704; SC0012704
- Resource Type:
- Published Article
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Name: Optics Express Journal Volume: 26 Journal Issue: 16; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Huang, Lei, Nicolas, Josep, and Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States: N. p., 2018.
Web. doi:10.1364/OE.26.020192.
Huang, Lei, Nicolas, Josep, & Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States. https://doi.org/10.1364/OE.26.020192
Huang, Lei, Nicolas, Josep, and Idir, Mourad. Wed .
"Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry". United States. https://doi.org/10.1364/OE.26.020192.
@article{osti_1461596,
title = {Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Nicolas, Josep and Idir, Mourad},
abstractNote = {Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.},
doi = {10.1364/OE.26.020192},
journal = {Optics Express},
number = 16,
volume = 26,
place = {United States},
year = {Wed Jul 25 00:00:00 EDT 2018},
month = {Wed Jul 25 00:00:00 EDT 2018}
}
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https://doi.org/10.1364/OE.26.020192
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Works referencing / citing this record:
Surface shape determination with a stitching Michelson interferometer and accuracy evaluation
journal, February 2019
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- Review of Scientific Instruments, Vol. 90, Issue 2