skip to main content
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry

Abstract

Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.

Authors:
ORCiD logo; ORCiD logo;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1461596
Alternate Identifier(s):
OSTI ID: 1469786
Report Number(s):
[BNL-209029-2018-JAAM]
[Journal ID: ISSN 1094-4087; OPEXFF]
Grant/Contract Number:  
[No. DE-SC0012704; SC0012704]
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
[Journal Name: Optics Express Journal Volume: 26 Journal Issue: 16]; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Huang, Lei, Nicolas, Josep, and Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States: N. p., 2018. Web. doi:10.1364/OE.26.020192.
Copy to clipboard
Huang, Lei, Nicolas, Josep, & Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States. doi:10.1364/OE.26.020192.
Copy to clipboard
Huang, Lei, Nicolas, Josep, and Idir, Mourad. Wed . "Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry". United States. doi:10.1364/OE.26.020192.
Copy to clipboard
@article{osti_1461596,
title = {Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Nicolas, Josep and Idir, Mourad},
abstractNote = {Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.},
doi = {10.1364/OE.26.020192},
journal = {Optics Express},
number = [16],
volume = [26],
place = {United States},
year = {2018},
month = {7}
}
Copy to clipboard
Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1364/OE.26.020192
Copyright Statement
Other availability
Search WorldCat Search WorldCat to find libraries that may hold this journal
Citation Metrics:
Cited by: 1 work
Citation information provided by
Web of Science
Save / Share:
Export Metadata
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.

Works referenced in this record:

Stitching methods at the European Synchrotron Radiation Facility (ESRF)
journal, May 2016

  • Vivo, A.; Lantelme, B.; Baker, R.
  • Review of Scientific Instruments, Vol. 87, Issue 5
  • DOI: 10.1063/1.4950745

Zonal wavefront reconstruction in quadrilateral geometry for phase measuring deflectometry
journal, January 2017

Controlling X-ray deformable mirrors during inspection
journal, October 2016

Evaluation methods for gradient measurement techniques
conference, September 2004

  • Li, Wansong; Bothe, Thorsten; von Kopylow, Christoph
  • Photonics Europe, SPIE Proceedings
  • DOI: 10.1117/12.546002

Relative angle determinable stitching interferometry for hard x-ray reflective optics
journal, April 2005

  • Mimura, Hidekazu; Yumoto, Hirokatsu; Matsuyama, Satoshi
  • Review of Scientific Instruments, Vol. 76, Issue 4
  • DOI: 10.1063/1.1868472

Stitching interferometric metrology for steeply curved x-ray mirrors
journal, January 2008

  • Yumoto, Hirokatsu; Mimura, Hidekazu; Kimura, Takashi
  • Surface and Interface Analysis, Vol. 40, Issue 6-7
  • DOI: 10.1002/sia.2807

Wave-front estimation from wave-front slope measurements
journal, January 1980

Microstitching interferometry for x-ray reflective optics
journal, May 2003

  • Yamauchi, Kazuto; Yamamura, Kazuya; Mimura, Hidekazu
  • Review of Scientific Instruments, Vol. 74, Issue 5
  • DOI: 10.1063/1.1569405

Retrace error reconstruction based on point characteristic function
journal, January 2015

Design Of A Long Trace Surface Profiler
conference, April 1987

  • Takacs, Peter Z.; Qian, Shi-nan; Colbert, Jeffrey
  • OE LASE'87 and EO Imaging Symp (January 1987, Los Angeles), SPIE Proceedings
  • DOI: 10.1117/12.939842

Retrace error: interferometry's dark little secret
conference, October 2013

The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-ray Optics at BESSY
conference, January 2004

  • Siewert, Frank
  • SYNCHROTRON RADIATION INSTRUMENTATION: Eighth International Conference on Synchrotron Radiation Instrumentation, AIP Conference Proceedings
  • DOI: 10.1063/1.1757928

Nano-accuracy measurement technology of optical-surface profiles
conference, October 2016

  • Qian, Shinan; Gao, Bo
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • DOI: 10.1117/12.2247578

Innovative nano-accuracy surface profiler for sub-50 nrad rms mirror test
conference, October 2016

  • Qian, Shinan; Idir, Mourad
  • Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), SPIE Proceedings
  • DOI: 10.1117/12.2247575

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head
journal, January 2014

  • Idir, Mourad; Kaznatcheev, Konstantine; Dovillaire, Guillaume
  • Optics Express, Vol. 22, Issue 3
  • DOI: 10.1364/OE.22.002770

One-dimensional angular-measurement-based stitching interferometry
journal, January 2018

Comparison of two-dimensional integration methods for shape reconstruction from gradient data
journal, January 2015

    [ × clear filter / sort ]

    Similar Records in DOE PAGES and OSTI.GOV collections: