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Title: Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry

Abstract

Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.

Authors:
ORCiD logo; ORCiD logo;
Publication Date:
Research Org.:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
OSTI Identifier:
1461596
Alternate Identifier(s):
OSTI ID: 1469786
Report Number(s):
[BNL-209029-2018-JAAM]
[Journal ID: ISSN 1094-4087; OPEXFF]
Grant/Contract Number:  
[No. DE-SC0012704; SC0012704]
Resource Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
[Journal Name: Optics Express Journal Volume: 26 Journal Issue: 16]; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Huang, Lei, Nicolas, Josep, and Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States: N. p., 2018. Web. doi:10.1364/OE.26.020192.
Huang, Lei, Nicolas, Josep, & Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States. doi:10.1364/OE.26.020192.
Huang, Lei, Nicolas, Josep, and Idir, Mourad. Wed . "Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry". United States. doi:10.1364/OE.26.020192.
@article{osti_1461596,
title = {Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Nicolas, Josep and Idir, Mourad},
abstractNote = {Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.},
doi = {10.1364/OE.26.020192},
journal = {Optics Express},
number = [16],
volume = [26],
place = {United States},
year = {2018},
month = {7}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
DOI: 10.1364/OE.26.020192

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Cited by: 1 work
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