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Title: Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry

Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.
Authors:
ORCiD logo [1] ; ORCiD logo [2] ;  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. ALBA Synchrotron Light Source, Cerdanyola del Valles (Spain)
Publication Date:
Report Number(s):
BNL-209029-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:
SC0012704; No. DE-SC0012704
Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 26; Journal Issue: 16; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
Brookhaven National Lab. (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING
OSTI Identifier:
1461596
Alternate Identifier(s):
OSTI ID: 1469786

Huang, Lei, Nicolas, Josep, and Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States: N. p., Web. doi:10.1364/OE.26.020192.
Huang, Lei, Nicolas, Josep, & Idir, Mourad. Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry. United States. doi:10.1364/OE.26.020192.
Huang, Lei, Nicolas, Josep, and Idir, Mourad. 2018. "Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry". United States. doi:10.1364/OE.26.020192.
@article{osti_1461596,
title = {Repeatability analysis of one-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Nicolas, Josep and Idir, Mourad},
abstractNote = {Recently we presented one-dimensional Angular-measurement-based Stitching Interferometry (ASI) technique for synchrotron mirror metrology coupling an autocollimator and a white light interferometer. In this work, we conduct a further study on the measurement repeatability of this technique under different conditions, e.g. different scanning time or lengths with/without system drift. The similarity between the angle measuring stitching technique in ASI and the slope integration technique in deflectometry is addressed. The analytic expression of the height repeatability is derived while the slope noise is a zero-mean uncorrelated additive noise. In addition, we use a set of typical stationary signals from the autocollimator and the white light interferometer in a real experiment to simulate numerous virtual scans for the numerical calculation of the measurement repeatability under different measurement conditions. The simulation result predicts a link between the measurement repeatability and the scanning time with a constant speed. Moreover, it indicates that the major factor affecting the repeatability of our current ASI system is the system drift error.},
doi = {10.1364/OE.26.020192},
journal = {Optics Express},
number = 16,
volume = 26,
place = {United States},
year = {2018},
month = {7}
}