Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope

Scholl, A.; Marcus, M. A.; Doran, A.; Nasiatka, J. R.; Young, A. T.; MacDowell, A. A.; Streubel, R.; Kent, N.; Feng, J.; Wan, W.; Padmore, H. A.

doi:10.1016/j.ultramic.2018.03.010

Title: Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope

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Abstract

Aberration correction by an electron mirror dramatically improves the spatial resolution and transmission of photoemission electron microscopes. We will review the performance of the recently installed aberration corrector of the X-ray Photoemission Electron Microscope PEEM-3 and show a large improvement in the efficiency of the electron optics. Hartmann testing is introduced as a quantitative method to measure the geometrical aberrations of a cathode lens electron microscope. Here, we find that aberration correction leads to an order of magnitude reduction of the spherical aberrations, suggesting that a spatial resolution of below 100 nm is possible at 100% transmission of the optics when using x-rays. We demonstrate this improved performance by imaging test patterns employing element and magnetic contrast.

Authors:

^[1];

^[1]; Doran, A. ^[1]; Nasiatka, J. R. ^[1]; Young, A. T. ^[1]; MacDowell, A. A. ^[1]; Streubel, R. ^[2]; Kent, N. ^[3];

^[1]; Wan, W. ^[1]; Padmore, H. A. ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Advanced Light Source (ALS)
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Materials Sciences Division; Univ. of California, Santa Cruz, CA (United States). Dept. of Physics

Publication Date:: Sat Mar 10 00:00:00 EST 2018

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1461143

Alternate Identifier(s):: OSTI ID: 1548615

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Accepted Manuscript

Journal Name:: Ultramicroscopy

Additional Journal Information:: Journal Volume: 188; Journal Issue: C; Journal ID: ISSN 0304-3991

Publisher:: Elsevier

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE

Citation Formats


                    Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., and Padmore, H. A. Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope.  United States: N. p., 2018. 
Web.  doi:10.1016/j.ultramic.2018.03.010.

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                    Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., & Padmore, H. A. Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope.  United States.  https://doi.org/10.1016/j.ultramic.2018.03.010

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                    Scholl, A., Marcus, M. A., Doran, A., Nasiatka, J. R., Young, A. T., MacDowell, A. A., Streubel, R., Kent, N., Feng, J., Wan, W., and Padmore, H. A. Sat .  
"Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope".  United States.  https://doi.org/10.1016/j.ultramic.2018.03.010.  https://www.osti.gov/servlets/purl/1461143.

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@article{osti_1461143,

  title        = {Hartmann characterization of the PEEM-3 aberration-corrected X-ray photoemission electron microscope},

  author       = {Scholl, A. and Marcus, M. A. and Doran, A. and Nasiatka, J. R. and Young, A. T. and MacDowell, A. A. and Streubel, R. and Kent, N. and Feng, J. and Wan, W. and Padmore, H. A.},

  abstractNote = {Aberration correction by an electron mirror dramatically improves the spatial resolution and transmission of photoemission electron microscopes. We will review the performance of the recently installed aberration corrector of the X-ray Photoemission Electron Microscope PEEM-3 and show a large improvement in the efficiency of the electron optics. Hartmann testing is introduced as a quantitative method to measure the geometrical aberrations of a cathode lens electron microscope. Here, we find that aberration correction leads to an order of magnitude reduction of the spherical aberrations, suggesting that a spatial resolution of below 100 nm is possible at 100% transmission of the optics when using x-rays. We demonstrate this improved performance by imaging test patterns employing element and magnetic contrast.},

  doi          = {10.1016/j.ultramic.2018.03.010},

  journal      = {Ultramicroscopy},

  number       = C,

  volume       = 188,

  place        = {United States},

  year         = {Sat Mar 10 00:00:00 EST 2018},

  month        = {Sat Mar 10 00:00:00 EST 2018}

}

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