Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor
- Authors:
-
- Sonata LLC, 25 Francis J Clarke Circle, Bethel, Connecticut 06801
- Air Liquide, Yonsei Engineering Research Park, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Korea
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1460497
- Grant/Contract Number:
- SC0013116
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Name: Journal of Vacuum Science and Technology A Journal Volume: 36 Journal Issue: 5; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Golalikhani, Maryam, James, Trevor, Van Buskirk, Peter, Noh, Wontae, Lee, Jooho, Wang, Ziyun, and Roeder, Jeffrey F. Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor. United States: N. p., 2018.
Web. doi:10.1116/1.5026405.
Golalikhani, Maryam, James, Trevor, Van Buskirk, Peter, Noh, Wontae, Lee, Jooho, Wang, Ziyun, & Roeder, Jeffrey F. Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor. United States. https://doi.org/10.1116/1.5026405
Golalikhani, Maryam, James, Trevor, Van Buskirk, Peter, Noh, Wontae, Lee, Jooho, Wang, Ziyun, and Roeder, Jeffrey F. Sat .
"Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor". United States. https://doi.org/10.1116/1.5026405.
@article{osti_1460497,
title = {Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor},
author = {Golalikhani, Maryam and James, Trevor and Van Buskirk, Peter and Noh, Wontae and Lee, Jooho and Wang, Ziyun and Roeder, Jeffrey F.},
abstractNote = {},
doi = {10.1116/1.5026405},
journal = {Journal of Vacuum Science and Technology A},
number = 5,
volume = 36,
place = {United States},
year = {2018},
month = {9}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1116/1.5026405
https://doi.org/10.1116/1.5026405
Other availability
Cited by: 1 work
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