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This content will become publicly available on July 16, 2019

Title: Atomic layer deposition of CeO 2 using a heteroleptic cyclopentadienyl-amidinate precursor

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [2] ;  [2] ;  [1]
  1. Sonata LLC, 25 Francis J Clarke Circle, Bethel, Connecticut 06801
  2. Air Liquide, Yonsei Engineering Research Park, 50 Yonsei-ro, Seodaemun-gu, Seoul 03722, Korea
Publication Date:
Grant/Contract Number:
SC0013116
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Volume: 36; Journal Issue: 5; Related Information: CHORUS Timestamp: 2018-07-16 12:40:08; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1460497