Electrostatically actuated encased cantilevers

Desbiolles, Benoit X. E.; Furlan, Gabriela; Schwartzberg, Adam M.; Ashby, Paul D.; Ziegler, Dominik

doi:10.3762/bjnano.9.130

Title: Electrostatically actuated encased cantilevers

Abstract

Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for exquisitely low tip–sample interaction forces even when immersed in a viscous fluid. Quantitative measurements of stiffness, energy dissipation and tip–sample interactions using dynamic force sensors remain challenging due to spurious resonances of the system. Results: We demonstrate for the first time electrostatic actuation with a built-in electrode. Solely actuating the cantilever results in a frequency response free of spurious peaks. We analyze static, harmonic, and sub-harmonic actuation modes. Sub-harmonic mode results in stable amplitudes unaffected by potential offsets or fluctuations of the electrical surface potential. We present a simple plate capacitor model to describe the electrostatic actuation. The predicted deflection and amplitudes match experimental results within a few percent. Consequently, target amplitudes can be set by the drive voltage without requiring calibration of optical lever sensitivity. Furthermore, the excitation bandwidth outperforms most other excitation methods. Conclusion: Compatible with any instrument using optical beam deflection detection electrostatic actuation in encased cantilevers combines ultra-low force noise with clean and stable excitation well-suited for quantitative measurements in liquid,more »« less

Authors:

^[1]; Furlan, Gabriela ^[1]; Schwartzberg, Adam M. ^[1];

^[1];

^[2]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). Molecular Foundry; Scuba Probe Technologies LLC, Alameda, CA (United States)

Publication Date:: Tue May 08 00:00:00 EDT 2018

Research Org.:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States); Scuba Probe Technologies LLC, Almeda, CA (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

OSTI Identifier:: 1460304

Alternate Identifier(s):: OSTI ID: 1460613

Grant/Contract Number:: AC02-05CH11231; SC0013212

Resource Type:: Accepted Manuscript

Journal Name:: Beilstein Journal of Nanotechnology

Additional Journal Information:: Journal Volume: 9; Journal Issue: 1; Journal ID: ISSN 2190-4286

Publisher:: Beilstein Institute

Country of Publication:: United States

Language:: English

Subject:: 42 ENGINEERING; 47 OTHER INSTRUMENTATION; amplitude calibration; atomic force microscopy; electrostatic excitation; encased cantilevers; liquid AFM; 77 NANOSCIENCE AND NANOTECHNOLOGY

Citation Formats


                    Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., and Ziegler, Dominik. Electrostatically actuated encased cantilevers.  United States: N. p., 2018. 
Web.  doi:10.3762/bjnano.9.130.

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                    Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., & Ziegler, Dominik. Electrostatically actuated encased cantilevers.  United States.  https://doi.org/10.3762/bjnano.9.130

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                    Desbiolles, Benoit X. E., Furlan, Gabriela, Schwartzberg, Adam M., Ashby, Paul D., and Ziegler, Dominik. Tue .  
"Electrostatically actuated encased cantilevers".  United States.  https://doi.org/10.3762/bjnano.9.130.  https://www.osti.gov/servlets/purl/1460304.

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@article{osti_1460304,

  title        = {Electrostatically actuated encased cantilevers},

  author       = {Desbiolles, Benoit X. E. and Furlan, Gabriela and Schwartzberg, Adam M. and Ashby, Paul D. and Ziegler, Dominik},

  abstractNote = {Background: Encased cantilevers are novel force sensors that overcome major limitations of liquid scanning probe microscopy. By trapping air inside an encasement around the cantilever, they provide low damping and maintain high resonance frequencies for exquisitely low tip–sample interaction forces even when immersed in a viscous fluid. Quantitative measurements of stiffness, energy dissipation and tip–sample interactions using dynamic force sensors remain challenging due to spurious resonances of the system. Results: We demonstrate for the first time electrostatic actuation with a built-in electrode. Solely actuating the cantilever results in a frequency response free of spurious peaks. We analyze static, harmonic, and sub-harmonic actuation modes. Sub-harmonic mode results in stable amplitudes unaffected by potential offsets or fluctuations of the electrical surface potential. We present a simple plate capacitor model to describe the electrostatic actuation. The predicted deflection and amplitudes match experimental results within a few percent. Consequently, target amplitudes can be set by the drive voltage without requiring calibration of optical lever sensitivity. Furthermore, the excitation bandwidth outperforms most other excitation methods. Conclusion: Compatible with any instrument using optical beam deflection detection electrostatic actuation in encased cantilevers combines ultra-low force noise with clean and stable excitation well-suited for quantitative measurements in liquid, compatible with air, or vacuum environments.},

  doi          = {10.3762/bjnano.9.130},

  journal      = {Beilstein Journal of Nanotechnology},

  number       = 1,

  volume       = 9,

  place        = {United States},

  year         = {Tue May 08 00:00:00 EDT 2018},

  month        = {Tue May 08 00:00:00 EDT 2018}

}

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Works referenced in this record:

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Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load
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Do, Cuong; Lishchynska, Maryna; Delaney, Kieran
Sensors and Actuators A: Physical, Vol. 185
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Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy
journal, May 2005

Ashby, Paul D.; Lieber, Charles M.
Journal of the American Chemical Society, Vol. 127, Issue 18
DOI: 10.1021/ja0453127

Micro‐fabricated piezoelectric cantilever for atomic force microscopy
journal, November 1996

Watanabe, Shunji; Fujii, Toru
Review of Scientific Instruments, Vol. 67, Issue 11
DOI: 10.1063/1.1147290

Optical excitation of nanoelectromechanical oscillators
journal, May 2005

Ilic, B.; Krylov, S.; Aubin, K.
Applied Physics Letters, Vol. 86, Issue 19
DOI: 10.1063/1.1919395

True atomic resolution in liquid by frequency-modulation atomic force microscopy
journal, July 2005

Fukuma, Takeshi; Kobayashi, Kei; Matsushige, Kazumi
Applied Physics Letters, Vol. 87, Issue 3
DOI: 10.1063/1.1999856

Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy
journal, July 2007

Kokavecz, J.; Mechler, A.
Applied Physics Letters, Vol. 91, Issue 2
DOI: 10.1063/1.2753104

Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid
journal, December 2008

Carrasco, C.; Ares, P.; de Pablo, P. J.
Review of Scientific Instruments, Vol. 79, Issue 12
DOI: 10.1063/1.3053369

Studies of vibrating atomic force microscope cantilevers in liquid
journal, October 1996

Schäffer, T. E.; Cleveland, J. P.; Ohnesorge, F.
Journal of Applied Physics, Vol. 80, Issue 7
DOI: 10.1063/1.363308

Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
journal, August 1997

Edwards, Hal; Taylor, Larry; Duncan, Walter
Journal of Applied Physics, Vol. 82, Issue 3
DOI: 10.1063/1.365936

A virtual instrument to standardise the calibration of atomic force microscope cantilevers
journal, September 2016

Sader, John E.; Borgani, Riccardo; Gibson, Christopher T.
Review of Scientific Instruments, Vol. 87, Issue 9
DOI: 10.1063/1.4962866

Single-chip mechatronic microsystem for surface imaging and force response studies
journal, November 2004

Hafizovic, S.; Barrettino, D.; Volden, T.
Proceedings of the National Academy of Sciences, Vol. 101, Issue 49
DOI: 10.1073/pnas.0405725101

Comparison of calibration methods for atomic-force microscopy cantilevers
journal, December 2002

Burnham, N. A.; Chen, X.; Hodges, C. S.
Nanotechnology, Vol. 14, Issue 1
DOI: 10.1088/0957-4484/14/1/301

High spatial resolution Kelvin probe force microscopy with coaxial probes
journal, February 2012

Brown, Keith A.; Satzinger, Kevin J.; Westervelt, Robert M.
Nanotechnology, Vol. 23, Issue 11
DOI: 10.1088/0957-4484/23/11/115703

A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
journal, February 2005

Chowdhury, S.; Ahmadi, M.; Miller, W. C.
Journal of Micromechanics and Microengineering, Vol. 15, Issue 4
DOI: 10.1088/0960-1317/15/4/012

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
journal, November 2009

Fantner, Georg E.; Burns, Daniel J.; Belcher, Angela M.
Journal of Dynamic Systems, Measurement, and Control, Vol. 131, Issue 6
DOI: 10.1115/1.4000378

Scanning attractive force microscope using photothermal vibration
journal, March 1991

Umeda, N.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 9, Issue 2
DOI: 10.1116/1.585187

In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude
journal, April 2016

de Laat, Marcel; Pérez Garza, Héctor; Ghatkesar, Murali
Sensors, Vol. 16, Issue 4
DOI: 10.3390/s16040523

Works referencing / citing this record:

Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency
journal, June 2020

Hirata, Kaito; Igarashi, Takumi; Suzuki, Keita
Scientific Reports, Vol. 10, Issue 1
DOI: 10.1038/s41598-020-65980-4

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Similar Records

Title: Electrostatically actuated encased cantilevers

Abstract

Citation Formats

Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy journal, July 2007

Studies of vibrating atomic force microscope cantilevers in liquid journal, October 1996

Influence of spurious resonances on the interaction force in dynamic AFM journal, January 2015

Comparison of photothermal and piezoacoustic excitation methods for frequency and phase modulation atomic force microscopy in liquid environments journal, January 2011

Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid journal, December 2008

Spurious-free cantilever excitation in liquid by piezoactuator with flexure drive mechanism journal, October 2009

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation journal, November 2009

Single-chip mechatronic microsystem for surface imaging and force response studies journal, November 2004

Micro‐fabricated piezoelectric cantilever for atomic force microscopy journal, November 1996

High spatial resolution Kelvin probe force microscopy with coaxial probes journal, February 2012

Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor journal, August 1997

Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature journal, March 2006

Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy journal, May 2005

A magnetically driven oscillating probe microscope for operation in liquids journal, December 1996

Active atomic force microscopy cantilevers for imaging in liquids journal, May 2001

Mechanical and thermal effects of laser irradiation on force microscope cantilevers journal, July 1992

Scanning attractive force microscope using photothermal vibration journal, March 1991

Photothermal modulation for oscillating mode atomic force microscopy in solution journal, April 1998

Optical excitation of nanoelectromechanical oscillators journal, May 2005

High-Resolution Frequency-Modulation Atomic Force Microscopy in Liquids Using Electrostatic Excitation Method journal, June 2010

Quantitative electrostatic force measurement in AFM journal, April 2000

Direct actuation of cantilever in aqueous solutions by electrostatic force using high-frequency electric fields journal, September 2012

Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers journal, July 2015

In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude journal, April 2016

Calibration of rectangular atomic force microscope cantilevers journal, October 1999

Encased cantilevers for low-noise force and mass sensing in liquids conference, January 2014

True atomic resolution in liquid by frequency-modulation atomic force microscopy journal, July 2005

What is the Young's Modulus of Silicon? journal, April 2010

Some design considerations on the electrostatically actuated microstructures journal, April 2004

Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load journal, October 2012

A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams journal, February 2005

Comparison of calibration methods for atomic-force microscopy cantilevers journal, December 2002

A virtual instrument to standardise the calibration of atomic force microscope cantilevers journal, September 2016

Some design considerations on the electrostatically actuated microstructures journal, April 2004

Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load journal, October 2012

Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy journal, May 2005

Micro‐fabricated piezoelectric cantilever for atomic force microscopy journal, November 1996

Optical excitation of nanoelectromechanical oscillators journal, May 2005

True atomic resolution in liquid by frequency-modulation atomic force microscopy journal, July 2005

Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy journal, July 2007

Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid journal, December 2008

Studies of vibrating atomic force microscope cantilevers in liquid journal, October 1996

Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor journal, August 1997

A virtual instrument to standardise the calibration of atomic force microscope cantilevers journal, September 2016

Single-chip mechatronic microsystem for surface imaging and force response studies journal, November 2004

Comparison of calibration methods for atomic-force microscopy cantilevers journal, December 2002

High spatial resolution Kelvin probe force microscopy with coaxial probes journal, February 2012

A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams journal, February 2005

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation journal, November 2009

Scanning attractive force microscope using photothermal vibration journal, March 1991

In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude journal, April 2016

Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency journal, June 2020

Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy
journal, July 2007

Studies of vibrating atomic force microscope cantilevers in liquid
journal, October 1996

Influence of spurious resonances on the interaction force in dynamic AFM
journal, January 2015

Comparison of photothermal and piezoacoustic excitation methods for frequency and phase modulation atomic force microscopy in liquid environments
journal, January 2011

Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid
journal, December 2008

Spurious-free cantilever excitation in liquid by piezoactuator with flexure drive mechanism
journal, October 2009

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
journal, November 2009

Single-chip mechatronic microsystem for surface imaging and force response studies
journal, November 2004

Micro‐fabricated piezoelectric cantilever for atomic force microscopy
journal, November 1996

High spatial resolution Kelvin probe force microscopy with coaxial probes
journal, February 2012

Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
journal, August 1997

Scanning Probe with Tuning Fork Sensor, Microfabricated Silicon Cantilever and Conductive Tip for Microscopy at Cryogenic Temperature
journal, March 2006

Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy
journal, May 2005

A magnetically driven oscillating probe microscope for operation in liquids
journal, December 1996

Active atomic force microscopy cantilevers for imaging in liquids
journal, May 2001

Mechanical and thermal effects of laser irradiation on force microscope cantilevers
journal, July 1992

Scanning attractive force microscope using photothermal vibration
journal, March 1991

Photothermal modulation for oscillating mode atomic force microscopy in solution
journal, April 1998

Optical excitation of nanoelectromechanical oscillators
journal, May 2005

High-Resolution Frequency-Modulation Atomic Force Microscopy in Liquids Using Electrostatic Excitation Method
journal, June 2010

Quantitative electrostatic force measurement in AFM
journal, April 2000

Direct actuation of cantilever in aqueous solutions by electrostatic force using high-frequency electric fields
journal, September 2012

Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers
journal, July 2015

In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude
journal, April 2016

Calibration of rectangular atomic force microscope cantilevers
journal, October 1999

Encased cantilevers for low-noise force and mass sensing in liquids
conference, January 2014

True atomic resolution in liquid by frequency-modulation atomic force microscopy
journal, July 2005

What is the Young's Modulus of Silicon?
journal, April 2010

Some design considerations on the electrostatically actuated microstructures
journal, April 2004

Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load
journal, October 2012

A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
journal, February 2005

Comparison of calibration methods for atomic-force microscopy cantilevers
journal, December 2002

A virtual instrument to standardise the calibration of atomic force microscope cantilevers
journal, September 2016

Some design considerations on the electrostatically actuated microstructures
journal, April 2004

Generalized closed-form models for pull-in analysis of micro cantilever beams subjected to partial electrostatic load
journal, October 2012

Ultra-Sensitive Imaging and Interfacial Analysis of Patterned Hydrophilic SAM Surfaces Using Energy Dissipation Chemical Force Microscopy
journal, May 2005

Micro‐fabricated piezoelectric cantilever for atomic force microscopy
journal, November 1996

Optical excitation of nanoelectromechanical oscillators
journal, May 2005

True atomic resolution in liquid by frequency-modulation atomic force microscopy
journal, July 2005

Investigation of fluid cell resonances in intermittent contact mode atomic force microscopy
journal, July 2007

Cutting down the forest of peaks in acoustic dynamic atomic force microscopy in liquid
journal, December 2008

Studies of vibrating atomic force microscope cantilevers in liquid
journal, October 1996

Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor
journal, August 1997

A virtual instrument to standardise the calibration of atomic force microscope cantilevers
journal, September 2016

Single-chip mechatronic microsystem for surface imaging and force response studies
journal, November 2004

Comparison of calibration methods for atomic-force microscopy cantilevers
journal, December 2002

High spatial resolution Kelvin probe force microscopy with coaxial probes
journal, February 2012

A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
journal, February 2005

DMCMN: In Depth Characterization and Control of AFM Cantilevers With Integrated Sensing and Actuation
journal, November 2009

Scanning attractive force microscope using photothermal vibration
journal, March 1991

In situ Stiffness Adjustment of AFM Probes by Two Orders of Magnitude
journal, April 2016

Wideband Magnetic Excitation System for Atomic Force Microscopy Cantilevers with Megahertz-Order Resonance Frequency
journal, June 2020