Moderate pressure plasma source of nonthermal electrons

Gershman, S.; Raitses, Y.

doi:10.1088/1361-6463/aabfb1

Title: Moderate pressure plasma source of nonthermal electrons

Journal Article · 20 April 2018 · Journal of Physics. D, Applied Physics

DOI: https://doi.org/10.1088/1361-6463/aabfb1 · OSTI ID:1459552

^[1];

^[1]

Princeton Univ., Princeton, NJ (United States)

Plasma sources of electrons offer control of gas and surface chemistry without the need for complex vacuum systems. The plasma electron source presented here is based on a cold cathode glow discharge (GD) operating in a dc steady state mode in a moderate pressure range of 2–10 torr. Ion-induced secondary electron emission is the source of electrons accelerated to high energies in the cathode sheath potential. The source geometry is a key to the availability and the extraction of the nonthermal portion of the electron population. The source consists of a flat and a cylindrical electrode, 1 mm apart. Our estimates show that the length of the cathode sheath in the plasma source is commensurate (~0.5–1 mm) with the inter-electrode distance so the GD operates in an obstructed regime without a positive column. Estimations of the electron energy relaxation confirm the non-local nature of this GD, hence the nonthermal portion of the electron population is available for extraction outside of the source. The use of a cylindrical anode presents a simple and promising method of extracting the high energy portion of the electron population. Langmuir probe measurements and optical emission spectroscopy confirm the presence of electrons with energies ~15 eV outside of the source. These electrons become available for surface modification and radical production outside of the source. In conclusion, the extraction of the electrons of specific energies by varying the anode geometry opens exciting opportunities for future exploration.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Princeton Plasma Physics Laboratory (PPPL), Princeton, NJ (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Fusion Energy Sciences (FES)

Grant/Contract Number:: AC02-09CH11466; 201506340040

OSTI ID:: 1459552

Journal Information:: Journal of Physics. D, Applied Physics, Vol. 51, Issue 23; ISSN 0022-3727

Publisher:: IOP PublishingCopyright Statement

Country of Publication:: United States

Language:: English

References (40)

Cross Sections for Electron Collisions with Nitrogen Molecules Itikawa, Yukikazu Journal of Physical and Chemical Reference Data, Vol. 35, Issue 1 https://doi.org/10.1063/1.1937426	journal	March 2006
Experimental studies of anode sheath phenomena in a Hall thruster discharge Dorf, L.; Raitses, Y.; Fisch, N. J. Journal of Applied Physics, Vol. 97, Issue 10 https://doi.org/10.1063/1.1915516	journal	May 2005
Fully differential cross sections for low-energy electron-impact ionization of nitrogen molecules Gao, Junfang; Madison, D. H.; Peacher, J. L. Physical Review A, Vol. 72, Issue 2 https://doi.org/10.1103/physreva.72.020701	journal	August 2005
Influence of the transverse dimension on the structure and properties of dc glow discharges Bogdanov, E. A.; Adams, S. F.; Demidov, V. I. Physics of Plasmas, Vol. 17, Issue 10 https://doi.org/10.1063/1.3486525	journal	October 2010
Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: A mathematical simulation Bogaerts, A.; Gijbels, R. Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 53, Issue 3 https://doi.org/10.1016/s0584-8547(97)00148-1	journal	March 1998
The use of Langmuir probes in the study of high pressure plasmas Smy, P. R. Advances in Physics, Vol. 25, Issue 5 https://doi.org/10.1080/00018737600101442	journal	September 1976
Distribution of plasma parameters in the cathode region of a glow discharge in nitrogen Kudryavtsev, A. A.; Nisimov, S. U.; Prokhorova, E. I. Technical Physics, Vol. 57, Issue 9 https://doi.org/10.1134/s1063784212090162	journal	September 2012
20 years of microplasma research: a status report Schoenbach, Karl H.; Becker, Kurt The European Physical Journal D, Vol. 70, Issue 2 https://doi.org/10.1140/epjd/e2015-60618-1	journal	February 2016
Optimization of a low-pressure hollow-anode electrical discharge for generation of high-current electron beams Gleizer, J. Z.; Yarmolich, D.; Krokhmal, A. Journal of Physics D: Applied Physics, Vol. 38, Issue 2 https://doi.org/10.1088/0022-3727/38/2/013	journal	January 2005
Self-consistent Monte Carlo simulation of the cathode fall including treatment of negative-glow electrons Dalvie, Manoj; Hamaguchi, Satoshi; Farouki, Rida T. Physical Review A, Vol. 46, Issue 2 https://doi.org/10.1103/physreva.46.1066	journal	July 1992
Differential cross sections for electron elastic scattering and vibrational v = 1 excitation in nitrogen in the energy range from 5 to 20 eV measured over an angular range of 10°–180° Linert, Ireneusz; Zubek, Mariusz Journal of Physics B: Atomic, Molecular and Optical Physics, Vol. 42, Issue 8 https://doi.org/10.1088/0953-4075/42/8/085203	journal	April 2009
Validation and benchmarking of two particle-in-cell codes for a glow discharge Carlsson, Johan; Khrabrov, Alexander; Kaganovich, Igor Plasma Sources Science and Technology, Vol. 26, Issue 1 https://doi.org/10.1088/0963-0252/26/1/014003	journal	November 2016
Electron kinetics in non-uniform glow discharge plasmas Tsendin, L. D. Plasma Sources Science and Technology, Vol. 4, Issue 2 https://doi.org/10.1088/0963-0252/4/2/004	journal	May 1995
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results? Godyak, V. A.; Demidov, V. I. Journal of Physics D: Applied Physics, Vol. 44, Issue 23 https://doi.org/10.1088/0022-3727/44/23/233001	journal	May 2011
Analysis of continuous generation of electron beams in medium-pressure gases Bobrov, V. A.; Voiteshonok, V. S.; Golovin, A. I. Technical Physics, Vol. 58, Issue 8 https://doi.org/10.1134/s1063784213080069	journal	August 2013
Control of plasma properties in a short direct-current glow discharge with active boundaries Adams, S. F.; Demidov, V. I.; Bogdanov, E. A. Physics of Plasmas, Vol. 23, Issue 2 https://doi.org/10.1063/1.4941259	journal	February 2016
Design and operating characteristics of new type cold cathode ion source Hassan, A.; Bassal, N.; Zakhary, S. G. Review of Scientific Instruments, Vol. 78, Issue 12 https://doi.org/10.1063/1.2821236	journal	December 2007
A simple electron gun by obstructed discharge and its discharge-sustaining mechanism Fukao, Masayuki; Ishida, Masazumi; Ohtsuka, Yoshio Vacuum, Vol. 59, Issue 1 https://doi.org/10.1016/s0042-207x(00)00289-x	journal	October 2000
Determination of the electron temperature and density in the negative glow of a nitrogen pulsed discharge using optical emission spectroscopy Isola, L. M.; Gómez, B. J.; Guerra, V. Journal of Physics D: Applied Physics, Vol. 43, Issue 1 https://doi.org/10.1088/0022-3727/43/1/015202	journal	December 2009
Can the temperature of electrons in a high-pressure plasma be determined by means of an electrostatic probe? Benilov, M. S. Journal of Physics D: Applied Physics, Vol. 33, Issue 14 https://doi.org/10.1088/0022-3727/33/14/308	journal	July 2000
The dissociative electroionization of carbon dioxide by low-energy electron impact. The C+, O+ and CO+ dissociation channels Locht, R.; Davister, M. International Journal of Mass Spectrometry and Ion Processes, Vol. 144, Issue 1-2 https://doi.org/10.1016/0168-1176(95)04158-h	journal	May 1995
Highly efficient electron beam generation in a wide-aperture discharge in helium Belskaya, E. V.; Bokhan, P. A.; Zakrevsky, Dm. E. Applied Physics Letters, Vol. 93, Issue 9 https://doi.org/10.1063/1.2978350	journal	September 2008
Optical Emission Spectroscopy of Abnormal Glow Region in Nitrogen Plasma Qayyum, A.; Zeb, Shaista; Ali, Shujaat Plasma Chemistry and Plasma Processing, Vol. 25, Issue 5 https://doi.org/10.1007/s11090-005-4999-9	journal	October 2005
Surface Composition, Chemistry, and Structure of Polystyrene Modified by Electron-Beam-Generated Plasma Lock, Evgeniya H.; Petrovykh, Dmitri Y.; Mack, Paul Langmuir, Vol. 26, Issue 11 https://doi.org/10.1021/la9046337	journal	June 2010
Influence of the inter-electrode gap on the cathode sheath characteristics (voltage drop across it and its thickness) Lisovskiy, V. A.; Artushenko, K. P.; Yegorenkov, V. D. Physics of Plasmas, Vol. 24, Issue 5 https://doi.org/10.1063/1.4982211	journal	April 2017
Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons Phelps, A. V.; Petrovic, Z. Lj Plasma Sources Science and Technology, Vol. 8, Issue 3 https://doi.org/10.1088/0963-0252/8/3/201	journal	January 1999
Fundamental studies on a planar-cathode direct current glow discharge. Part II: numerical modeling and comparison with laser scattering experiments Bogaerts, Annemie; Gijbels, Renaat; Gamez, Gerardo Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 59, Issue 4 https://doi.org/10.1016/j.sab.2003.12.001	journal	April 2004
Fundamental studies on a planar-cathode direct current glow discharge. Part I: characterization via laser scattering techniques Gamez, Gerardo; Bogaerts, Annemie; Andrade, Francisco Spectrochimica Acta Part B: Atomic Spectroscopy, Vol. 59, Issue 4 https://doi.org/10.1016/j.sab.2003.12.002	journal	April 2004
Means for efficient electron beam generation in wide-aperture open-discharge light sources Bokhan, A. P.; Bokhan, P. A.; Zakrevsky, D. É. Plasma Physics Reports, Vol. 32, Issue 7 https://doi.org/10.1134/s1063780x06070038	journal	July 2006
Peculiarities of electron emission from the cathode in an abnormal glow discharge Bokhan, A. P.; Bokhan, P. A.; Zakrevsky, D. E. Applied Physics Letters, Vol. 86, Issue 15 https://doi.org/10.1063/1.1901819	journal	April 2005
A mechanism of electron emission in an open discharge Bokhan, A. P.; Bokhan, P. A. Technical Physics Letters, Vol. 27, Issue 3 https://doi.org/10.1134/1.1359833	journal	March 2001
The glow discharge: an exciting plasma! Bogaerts, Annemie Journal of Analytical Atomic Spectrometry, Vol. 14, Issue 9 https://doi.org/10.1039/a900772e	journal	January 1999
Electric field distribution in the cathode-fall region of an abnormal glow discharge in hydrogen: experiment and theory Spasojević, Dj; Steflekova, V.; Šišović, N. M. Plasma Sources Science and Technology, Vol. 21, Issue 2 https://doi.org/10.1088/0963-0252/21/2/025006	journal	March 2012
Suprathermal electron energy spectrum and nonlocally affected plasma-wall interaction in helium/air micro-plasma at atmospheric pressure Demidov, V. I.; Adams, S. F.; Miles, J. A. Physics of Plasmas, Vol. 23, Issue 10 https://doi.org/10.1063/1.4964721	journal	October 2016
Glow discharge plasma properties of gases of environmental interest Castell, R.; Iglesias, E. J.; Ruiz-Camacho, J. Brazilian Journal of Physics, Vol. 34, Issue 4b https://doi.org/10.1590/s0103-97332004000800040	journal	January 2004
Response of the plasma to the size of an anode electrode biased near the plasma potential Barnat, E. V.; Laity, G. R.; Baalrud, S. D. Physics of Plasmas, Vol. 21, Issue 10 https://doi.org/10.1063/1.4897927	journal	October 2014
Role of nonlocal ionization in formation of the short glow discharge Kudryavtsev, A. A.; Morin, A. V.; Tsendin, L. D. Technical Physics, Vol. 53, Issue 8 https://doi.org/10.1134/S1063784208080100	journal	August 2008
Anomalously High Near-Wall Sheath Potential Drop in a Plasma with Nonlocal Fast Electrons Demidov, V.; DeJoseph, C.; Kudryavtsev, A. Physical Review Letters, Vol. 95, Issue 21 https://doi.org/10.1103/PhysRevLett.95.215002	journal	November 2005
Validation and Benchmarking of Two Particle-in-Cell Codes for a Glow Discharge Carlsson, J.; Khrabrov, A.; Kaganovich, I. 2017 IEEE International Conference on Plasma Science (ICOPS) https://doi.org/10.1109/plasma.2017.8496256	conference	May 2017
Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results? Godyak, V. A.; Demidov, V. I. Journal of Physics D: Applied Physics, Vol. 44, Issue 26 https://doi.org/10.1088/0022-3727/44/26/269501	journal	June 2011

Similar Records

Micro-hollow cathode discharge arrays: high pressure, nonthermal plasma sources

Technical Report · 1999 · OSTI ID:765861

Schoenbach, Karl H

Magnetic dipole discharges. III. Instabilities

Journal Article · 2013 · Physics of Plasmas · OSTI ID:22220686

Stenzel, R. L.; Urrutia, J. M.; Ionita, C.; +1 more

Sheath transitions in a cylindrical filament discharge: Axisymmetric 1D3V PIC-MCC simulations

Journal Article · 2025 · Journal of Applied Physics · OSTI ID:2564283

Sengupta, M.; Campanell, M.

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
glow discharge
electron source
nonequilibrium plasma
nonlocal plasma
nonthermal electrons

Title: Moderate pressure plasma source of nonthermal electrons

Citation Formats

References (40)

Similar Records

Related Subjects