More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy
Abstract
Fresnel zone plates used for X-ray nanofocusing face high-aspect-ratio nanofabrication challenges in combining narrow transverse features (for high spatial resolution) along with extended optical modulation along the X-ray beam direction (to improve efficiency). The stacking of multiple Fresnel zone plates along the beam direction has already been shown to offer improved characteristics of resolution and efficiency when compared with thin single zone plates. Using multislice wave propagation simulation methods, here a number of new schemes for the stacking of multiple Fresnel zone plates are considered. These include consideration of optimal thickness and spacing in the axial direction, and methods to capture a fraction of the light otherwise diffracted into unwanted orders, and instead bring it into the desired first-order focus. In conclusion, the alignment tolerances for stacking multiple Fresnel zone plates are also considered.
- Authors:
-
- Northwestern Univ., Evanston, IL (United States); Argonne National Lab. (ANL), Argonne, IL (United States); SLAC National Accelerator Lab., Menlo Park, CA (United States)
- Argonne National Lab. (ANL), Argonne, IL (United States); Northwestern Univ., Evanston, IL (United States)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division
- OSTI Identifier:
- 1454421
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Synchrotron Radiation (Online)
- Additional Journal Information:
- Journal Name: Journal of Synchrotron Radiation (Online); Journal Volume: 25; Journal Issue: 4; Journal ID: ISSN 1600-5775
- Publisher:
- International Union of Crystallography
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 73 NUCLEAR PHYSICS AND RADIATION PHYSICS; Fresnel zone plates; X-ray microscopy; X-ray optics
Citation Formats
Li, Kenan, and Jacobsen, Chris. More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy. United States: N. p., 2018.
Web. doi:10.1107/S1600577518007208.
Li, Kenan, & Jacobsen, Chris. More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy. United States. https://doi.org/10.1107/S1600577518007208
Li, Kenan, and Jacobsen, Chris. Sun .
"More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy". United States. https://doi.org/10.1107/S1600577518007208. https://www.osti.gov/servlets/purl/1454421.
@article{osti_1454421,
title = {More are better, but the details matter: combinations of multiple Fresnel zone plates for improved resolution and efficiency in X-ray microscopy},
author = {Li, Kenan and Jacobsen, Chris},
abstractNote = {Fresnel zone plates used for X-ray nanofocusing face high-aspect-ratio nanofabrication challenges in combining narrow transverse features (for high spatial resolution) along with extended optical modulation along the X-ray beam direction (to improve efficiency). The stacking of multiple Fresnel zone plates along the beam direction has already been shown to offer improved characteristics of resolution and efficiency when compared with thin single zone plates. Using multislice wave propagation simulation methods, here a number of new schemes for the stacking of multiple Fresnel zone plates are considered. These include consideration of optimal thickness and spacing in the axial direction, and methods to capture a fraction of the light otherwise diffracted into unwanted orders, and instead bring it into the desired first-order focus. In conclusion, the alignment tolerances for stacking multiple Fresnel zone plates are also considered.},
doi = {10.1107/S1600577518007208},
journal = {Journal of Synchrotron Radiation (Online)},
number = 4,
volume = 25,
place = {United States},
year = {Sun Jun 17 00:00:00 EDT 2018},
month = {Sun Jun 17 00:00:00 EDT 2018}
}
Web of Science
Works referenced in this record:
Development of zone plates with a blazed profile for hard x-ray applications
journal, September 1999
- Yun, W.; Lai, B.; Krasnoperova, A. A.
- Review of Scientific Instruments, Vol. 70, Issue 9
High-performance multilevel blazed x-ray microscopy Fresnel zone plates: Fabricated using x-ray lithography
journal, November 1994
- Di Fabrizio, E.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 12, Issue 6
Zone-Doubling Technique to Produce Ultrahigh-Resolution X-Ray Optics
journal, December 2007
- Jefimovs, K.; Vila-Comamala, J.; Pilvi, T.
- Physical Review Letters, Vol. 99, Issue 26
Interlaced zone plate optics for hard X-ray imaging in the 10 nm range
journal, March 2017
- Mohacsi, Istvan; Vartiainen, Ismo; Rösner, Benedikt
- Scientific Reports, Vol. 7, Issue 1
Soft X-ray microscopy with a cryo scanning transmission X-ray microscope: II. Tomography
journal, January 2000
- Wang,
- Journal of Microscopy, Vol. 197, Issue 1
Near field stacking of zone plates for reduction of their effective zone period
journal, January 2015
- Rehbein, Stefan; Lyon, Alan; Leung, Raymond
- Optics Express, Vol. 23, Issue 9
Focusing high energy X-rays with stacked Fresnel zone plates
journal, August 2007
- Snigireva, I.; Snigirev, A.; Kohn, V.
- physica status solidi (a), Vol. 204, Issue 8
Influence of random zone positioning errors on the resolving power of Fresnel zone plates
journal, January 2014
- Pratsch, Christoph; Rehbein, Stefan; Werner, Stephan
- Optics Express, Vol. 22, Issue 25
Tandem-Phase Zone-Plate Optics for High-Energy X-ray Focusing
journal, February 2011
- Kagoshima, Yasushi; Takano, Hidekazu; Koyama, Takahisa
- Japanese Journal of Applied Physics, Vol. 50, Issue 2R
Angular spectrum simulation of X-ray focusing by Fresnel zone plates
journal, March 2013
- Vila-Comamala, Joan; Wojcik, Michael; Diaz, Ana
- Journal of Synchrotron Radiation, Vol. 20, Issue 3
Multicolor Wavefront Reconstruction
journal, August 1965
- Pennington, K. S.; Lin, L. H.
- Applied Physics Letters, Vol. 7, Issue 3
Multislice does it all—calculating the performance of nanofocusing X-ray optics
journal, January 2017
- Li, Kenan; Wojcik, Michael; Jacobsen, Chris
- Optics Express, Vol. 25, Issue 3
Phase zone plates for x rays and the extreme uv
journal, January 1974
- Kirz, Janos
- Journal of the Optical Society of America, Vol. 64, Issue 3
Nanofabrication of high aspect ratio 24 nm x-ray zone plates for x-ray imaging applications
journal, January 2007
- Feng, Yan; Feser, Michael; Lyon, Alan
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 25, Issue 6
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92
journal, July 1993
- Henke, B. L.; Gullikson, E. M.; Davis, J. C.
- Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342
High-efficiency multilevel zone plates for keV X-rays
journal, October 1999
- Di Fabrizio, E.; Romanato, F.; Gentili, M.
- Nature, Vol. 401, Issue 6756
Near-field stacking of zone plates for hard x-ray range
conference, November 2002
- Maser, J÷rg; Lai, Barry P.; Yun, Wenbing
- International Symposium on Optical Science and Technology, SPIE Proceedings
Study of optical properties of X-ray system based on two zone plates
journal, May 2007
- Aristov, V.; Isoyan, A.; Kohn, V.
- Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 575, Issue 1-2
Zone plates with high efficiency in high orders of diffraction described by dynamical theory
journal, October 1997
- Schneider, G.
- Applied Physics Letters, Vol. 71, Issue 16
High-efficiency zone-plate optics for multi-keV X-ray focusing
journal, March 2014
- Mohacsi, Istvan; Karvinen, Petri; Vartiainen, Ismo
- Journal of Synchrotron Radiation, Vol. 21, Issue 3
The Effects of Manufacturing Inaccuracies on the Imaging Properties of Fresnel Zone Plates
journal, October 1983
- Simpson, M. J.; Michette, A. G.
- Optica Acta: International Journal of Optics, Vol. 30, Issue 10
Fabrication of hard x-ray phase zone plate by x-ray lithography
journal, November 1993
- Krasnoperova, A. A.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 11, Issue 6
Microfocusing of 50 keV undulator radiation with two stacked zone plates
journal, September 2001
- Shastri, S. D.; Maser, J. M.; Lai, B.
- Optics Communications, Vol. 197, Issue 1-3
Three-dimensional structured on-chip stacked zone plates for nanoscale X-ray imaging with high efficiency
journal, April 2014
- Werner, Stephan; Rehbein, Stefan; Guttmann, Peter
- Nano Research, Vol. 7, Issue 4
Process optimization for production of sub-20 nm soft x-ray zone plates
journal, November 1997
- Spector, S. J.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 6
Fabrication of hard x-ray zone plates with high aspect ratio using metal-assisted chemical etching
journal, November 2017
- Li, Kenan; Wojcik, Michael J.; Divan, Ralu
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue 6
Nanoscale X-ray imaging
journal, December 2010
- Sakdinawat, Anne; Attwood, David
- Nature Photonics, Vol. 4, Issue 12, p. 840-848
Cross-linked polymers for nanofabrication of high-resolution zone plates in nickel and germanium
journal, November 1995
- Schneider, G.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 13, Issue 6
Soft X-ray microscopy at a spatial resolution better than 15 nm
journal, June 2005
- Chao, Weilun; Harteneck, Bruce D.; Liddle, J. Alexander
- Nature, Vol. 435, Issue 7046
The scattering of electrons by atoms and crystals. I. A new theoretical approach
journal, October 1957
- Cowley, J. M.; Moodie, A. F.
- Acta Crystallographica, Vol. 10, Issue 10, p. 609-619
Coupled wave description of the diffraction by zone plates with high aspect ratios
journal, May 1992
- Maser, Jörg; Schmahl, Günter
- Optics Communications, Vol. 89, Issue 2-4
Coupled Wave Theory for Thick Hologram Gratings
journal, November 1969
- Kogelnik, Herwig
- Bell System Technical Journal, Vol. 48, Issue 9
Ultra-high aspect ratio high-resolution nanofabrication for hard X-ray diffractive optics
journal, June 2014
- Chang, Chieh; Sakdinawat, Anne
- Nature Communications, Vol. 5, Issue 1
Fresnel zone plate stacking in the intermediate field for high efficiency focusing in the hard X-ray regime
journal, January 2014
- Gleber, Sophie-Charlotte; Wojcik, Michael; Liu, Jie
- Optics Express, Vol. 22, Issue 23
Works referencing / citing this record:
Inverse-phase composite zone plate providing deeper focus than the normal diffraction-limited depth of X-ray microbeams
journal, January 2019
- Kagoshima, Yasushi; Takayama, Yuki
- Journal of Synchrotron Radiation, Vol. 26, Issue 1
Ultimate limitations in the performance of kinoform lenses for hard x-ray focusing
journal, January 2019
- Gorelick, S.; De Jonge, M. D.; Kewish, C. M.
- Optica, Vol. 6, Issue 6
X-ray microscopy
journal, July 1965
- Cosslett, V. E.
- Reports on Progress in Physics, Vol. 28, Issue 1