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Title: Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors

Abstract

Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks furthermore display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes suggest greater than six times sensitivity enhancement over fundamental mode operation.

Authors:
 [1];  [1];  [2];  [3];  [4];  [1]
  1. Stanford Univ., CA (United States)
  2. Purdue Univ., West Lafayette, IN (United States); Harvard Medical School, Boston, MA (United States)
  3. Purdue Univ., West Lafayette, IN (United States)
  4. Stanford Univ., CA (United States); Chung-Ang Univ., Seoul (Korea, Republic of)
Publication Date:
Research Org.:
SLAC National Accelerator Lab., Menlo Park, CA (United States)
Sponsoring Org.:
USDOE Office of Science (SC); National Science Foundation (NSF)
OSTI Identifier:
1443052
Report Number(s):
SLAC-PUB-13994
Journal ID: ISSN 0003-6951
Grant/Contract Number:  
AC02-76SF00515
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 91; Journal Issue: 17; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS

Citation Formats

Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., and Manoharan, H. C. Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors. United States: N. p., 2007. Web. doi:10.1063/1.2803774.
Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., & Manoharan, H. C. Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors. United States. doi:10.1063/1.2803774.
Zeltzer, G., Randel, J. C., Gupta, A. K., Bashir, R., Song, S. -H., and Manoharan, H. C. Fri . "Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors". United States. doi:10.1063/1.2803774. https://www.osti.gov/servlets/purl/1443052.
@article{osti_1443052,
title = {Scanning optical homodyne detection of high-frequency picoscale resonances in cantilever and tuning fork sensors},
author = {Zeltzer, G. and Randel, J. C. and Gupta, A. K. and Bashir, R. and Song, S. -H. and Manoharan, H. C.},
abstractNote = {Higher harmonic modes in nanoscale silicon cantilevers and microscale quartz tuning forks are detected and characterized using a custom scanning optical homodyne interferometer. Capable of both mass and force sensing, these resonators exhibit high-frequency harmonic motion content with picometer-scale amplitudes detected in a 2.5 MHz bandwidth, driven by ambient thermal radiation. Quartz tuning forks furthermore display both in-plane and out-of-plane harmonics. The first six electronically detected resonances are matched to optically detected and mapped fork eigenmodes. Mass sensing experiments utilizing higher tuning fork modes suggest greater than six times sensitivity enhancement over fundamental mode operation.},
doi = {10.1063/1.2803774},
journal = {Applied Physics Letters},
number = 17,
volume = 91,
place = {United States},
year = {2007},
month = {10}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 7 works
Citation information provided by
Web of Science

Figures / Tables:

Figure 1 Figure 1: (Color online) (a) Scanning Michelson interferometer including a beam expander (focal length f , diameter φ) and focusing lens. (b) SEM of 200-nm-thick Si cantilever. (c) High frequency cantilever free-end motion ASD. (Insets) Cantilever maps of ASD vs position for the first four flexural modes.

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