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Title: Dedicated Co-deposition System for Metallic Paramagnetic Films

Abstract

Here, we describe a dedicated co-sputtering/ion-mill system developed to study metallic paramagnetic films for use in magnetic microcalorimetry. Small-diameter sputtering guns allow study of several precious-metal-based paramagnetic alloy systems within a reasonable budget. We demonstrated safe operation of a 1" sputtering gun at >5x the rated maximum power, achieving deposition rates up to ~900 Å/min/gun (Cu) in our co-sputtering geometry. Demonstrated co-sputtering deposition ratios up to 100:1 allow accurate tuning of magnetic dopant concentration and eliminate the difficulty of preparing homogeneous alloy targets of extreme dilution.

Authors:
ORCiD logo [1];  [1];  [2];  [2]; ORCiD logo [1]
  1. Univ. of New Mexico, Albuquerque, NM (United States)
  2. STAR Cryoelectronics, Santa Fe, NM (United States)
Publication Date:
Research Org.:
Univ. of New Mexico, Albuquerque, NM (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA), Office of Nonproliferation and Verification Research and Development (NA-22)
OSTI Identifier:
1441204
Grant/Contract Number:  
NA0000454
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Low Temperature Physics
Additional Journal Information:
Journal Volume: 167; Journal Issue: 3-4; Conference: 14th International Workshop on Low-Temperature Detectors (LTD14), Heidelberg (Germany), 1-5 Aug 2011; Journal ID: ISSN 0022-2291
Publisher:
Plenum Press
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 98 NUCLEAR DISARMAMENT, SAFEGUARDS, AND PHYSICAL PROTECTION; 73 NUCLEAR PHYSICS AND RADIATION PHYSICS; gamma ray spectroscopy; microcalorimeter; metallic magnetic calorimeter; MMC

Citation Formats

Jaeckel, F., Kotsubo, V., Hall, J. A., Cantor, R., and Boyd, S. T. P. Dedicated Co-deposition System for Metallic Paramagnetic Films. United States: N. p., 2012. Web. doi:10.1007/s10909-012-0564-0.
Jaeckel, F., Kotsubo, V., Hall, J. A., Cantor, R., & Boyd, S. T. P. Dedicated Co-deposition System for Metallic Paramagnetic Films. United States. doi:10.1007/s10909-012-0564-0.
Jaeckel, F., Kotsubo, V., Hall, J. A., Cantor, R., and Boyd, S. T. P. Fri . "Dedicated Co-deposition System for Metallic Paramagnetic Films". United States. doi:10.1007/s10909-012-0564-0. https://www.osti.gov/servlets/purl/1441204.
@article{osti_1441204,
title = {Dedicated Co-deposition System for Metallic Paramagnetic Films},
author = {Jaeckel, F. and Kotsubo, V. and Hall, J. A. and Cantor, R. and Boyd, S. T. P.},
abstractNote = {Here, we describe a dedicated co-sputtering/ion-mill system developed to study metallic paramagnetic films for use in magnetic microcalorimetry. Small-diameter sputtering guns allow study of several precious-metal-based paramagnetic alloy systems within a reasonable budget. We demonstrated safe operation of a 1" sputtering gun at >5x the rated maximum power, achieving deposition rates up to ~900 Å/min/gun (Cu) in our co-sputtering geometry. Demonstrated co-sputtering deposition ratios up to 100:1 allow accurate tuning of magnetic dopant concentration and eliminate the difficulty of preparing homogeneous alloy targets of extreme dilution.},
doi = {10.1007/s10909-012-0564-0},
journal = {Journal of Low Temperature Physics},
number = 3-4,
volume = 167,
place = {United States},
year = {2012},
month = {1}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 1 work
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Figures / Tables:

Fig. 1 Fig. 1: Cut-away view of the engineering model: (a) ion mill, (b) magnetron, (c) shutter, (d) rotating substrate holder.

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Works referenced in this record:

Specific Heats of Metals Below One Degree Absolute
journal, September 1954


Critical field for superconductivity and low-temperature normal-state heat capacity of tungsten
journal, September 1973

  • Triplett, B. B.; Phillips, N. E.; Thorp, T. L.
  • Journal of Low Temperature Physics, Vol. 12, Issue 5-6
  • DOI: 10.1007/BF00654953

    Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.