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Title: Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Here, nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.
Authors:
ORCiD logo [1] ; ORCiD logo [1] ; ORCiD logo [2] ; ORCiD logo [3] ;  [4] ; ORCiD logo [3]
  1. Univ. of Tennessee, Knoxville, TN (United States)
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  3. Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
  4. Univ. of Tennessee, Knoxville, TN (United States); Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Texas A & M Univ., College Station, TX (United States)
Publication Date:
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Nanoscale
Additional Journal Information:
Journal Volume: 9; Journal Issue: 42; Journal ID: ISSN 2040-3364
Publisher:
Royal Society of Chemistry
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY
OSTI Identifier:
1440834

Lewis, Brett B., Mound, Brittnee A., Srijanto, Bernadeta, Fowlkes, Jason Davidson, Pharr, George Mathews, and Rack, Philip D.. Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition. United States: N. p., Web. doi:10.1039/c7nr05274j.
Lewis, Brett B., Mound, Brittnee A., Srijanto, Bernadeta, Fowlkes, Jason Davidson, Pharr, George Mathews, & Rack, Philip D.. Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition. United States. doi:10.1039/c7nr05274j.
Lewis, Brett B., Mound, Brittnee A., Srijanto, Bernadeta, Fowlkes, Jason Davidson, Pharr, George Mathews, and Rack, Philip D.. 2017. "Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition". United States. doi:10.1039/c7nr05274j. https://www.osti.gov/servlets/purl/1440834.
@article{osti_1440834,
title = {Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition},
author = {Lewis, Brett B. and Mound, Brittnee A. and Srijanto, Bernadeta and Fowlkes, Jason Davidson and Pharr, George Mathews and Rack, Philip D.},
abstractNote = {Here, nanomechanical measurements of platinum–carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging.},
doi = {10.1039/c7nr05274j},
journal = {Nanoscale},
number = 42,
volume = 9,
place = {United States},
year = {2017},
month = {10}
}

Works referenced in this record:

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
journal, June 1992
  • Oliver, W. C.; Pharr, G. M.
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Atomic Layer Deposition: An Overview
journal, January 2010
  • George, Steven M.
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