High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)

Fowlkes, Jason D.; Winkler, Robert; Lewis, Brett B.; Fernandez-Pacheco, Amalio; Skoric, Luka; Sanz-Hernandez, Dodalo; Stanford, Michael G.; Mutunga, Eva M.; Rack, Philip D.; Plank, Harald

doi:10.1021/acsanm.7b00342

Title: High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)

Journal Article · 14 February 2018 · ACS Applied Nano Materials

DOI: https://doi.org/10.1021/acsanm.7b00342 · OSTI ID:1439952

^[1]; Winkler, Robert ^[2]; Lewis, Brett B. ^[3];

^[4]; Skoric, Luka ^[4];

^[4];

^[3]; Mutunga, Eva M. ^[3];

^[1];

^[5]

Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); The Univ. of Tennessee, Knoxville, TN (United States)
Graz Centre for Electron Microscopy, Graz (Austria)
The Univ. of Tennessee, Knoxville, TN (United States)
Univ. of Cambridge, Cambridge (United Kingdom)
Graz Centre for Electron Microscopy, Graz (Austria); Graz Univ. of Technology, Graz (Austria)

Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing access to geometries for optoelectronic, plasmonic, and nanomagnetic applications that were previously unattainable due to the lack of a suitable method for synthesis. In conclusion, the CAD approach supplants trial and error toward more precise/accurate FEBID required for real applications/device prototyping.

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Research Organization:: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC05-00OR22725

OSTI ID:: 1439952

Journal Information:: ACS Applied Nano Materials, Vol. 1, Issue 3; ISSN 2574-0970

Country of Publication:: United States

Language:: English

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Cited by: 51 works

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77 NANOSCIENCE AND NANOTECHNOLOGY
3D-nanoprinting
additive manufacturing
computer-aided design
direct write
focused electron beam induced deposition

Title: High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)

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