High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)
Abstract
Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing access to geometries for optoelectronic, plasmonic, and nanomagnetic applications that were previously unattainable due to the lack of a suitable method for synthesis. In conclusion, the CAD approach supplants trial and error toward more precise/accurate FEBID required for real applications/device prototyping.
- Authors:
-
[1];
[4];
[4];
[3];
[1];
[5]
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); The Univ. of Tennessee, Knoxville, TN (United States)
- Graz Centre for Electron Microscopy, Graz (Austria)
- The Univ. of Tennessee, Knoxville, TN (United States)
- Univ. of Cambridge, Cambridge (United Kingdom)
- Graz Centre for Electron Microscopy, Graz (Austria); Graz Univ. of Technology, Graz (Austria)
- Publication Date:
- Research Org.:
- Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1439952
- Grant/Contract Number:
- AC05-00OR22725
- Resource Type:
- Accepted Manuscript
- Journal Name:
- ACS Applied Nano Materials
- Additional Journal Information:
- Journal Volume: 1; Journal Issue: 3; Journal ID: ISSN 2574-0970
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 3D-nanoprinting; additive manufacturing; computer-aided design; direct write; focused electron beam induced deposition
Citation Formats
Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Fernandez-Pacheco, Amalio, Skoric, Luka, Sanz-Hernandez, Dodalo, Stanford, Michael G., Mutunga, Eva M., Rack, Philip D., and Plank, Harald. High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID). United States: N. p., 2018.
Web. doi:10.1021/acsanm.7b00342.
Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Fernandez-Pacheco, Amalio, Skoric, Luka, Sanz-Hernandez, Dodalo, Stanford, Michael G., Mutunga, Eva M., Rack, Philip D., & Plank, Harald. High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID). United States. https://doi.org/10.1021/acsanm.7b00342
Fowlkes, Jason D., Winkler, Robert, Lewis, Brett B., Fernandez-Pacheco, Amalio, Skoric, Luka, Sanz-Hernandez, Dodalo, Stanford, Michael G., Mutunga, Eva M., Rack, Philip D., and Plank, Harald. Wed .
"High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)". United States. https://doi.org/10.1021/acsanm.7b00342. https://www.osti.gov/servlets/purl/1439952.
@article{osti_1439952,
title = {High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Computer-Aided Design (3BID)},
author = {Fowlkes, Jason D. and Winkler, Robert and Lewis, Brett B. and Fernandez-Pacheco, Amalio and Skoric, Luka and Sanz-Hernandez, Dodalo and Stanford, Michael G. and Mutunga, Eva M. and Rack, Philip D. and Plank, Harald},
abstractNote = {Currently, there are few techniques that allow true 3D-printing on the nanoscale. The most promising candidate to fill this void is focused electron-beam-induced deposition (FEBID), a resist-free, nanofabrication compatible, direct-write method. The basic working principles of a computer-aided design (CAD) program (3BID) enabling 3D-FEBID is presented and simultaneously released for download. The 3BID capability significantly expands the currently limited toolbox for 3D-nanoprinting, providing access to geometries for optoelectronic, plasmonic, and nanomagnetic applications that were previously unattainable due to the lack of a suitable method for synthesis. In conclusion, the CAD approach supplants trial and error toward more precise/accurate FEBID required for real applications/device prototyping.},
doi = {10.1021/acsanm.7b00342},
journal = {ACS Applied Nano Materials},
number = 3,
volume = 1,
place = {United States},
year = {2018},
month = {2}
}
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