skip to main content


This content will become publicly available on March 15, 2019

Title: Tunable 3D Nanoresonators for Gas-Sensing Applications

Here, the detection of gas species with high sensitivity is a significant task for fundamental sciences as well as for industrial applications. Similarly, the ongoing trend for device miniaturization brings new challenges for advanced fabrication including on–demand functionality tuning. Following this motivation, here the additive, direct–write fabrication of freestanding 3D nanoarchitectures is introduced, which can be brought into mechanical resonance via electric AC fields. Specifically, this study focuses on the 3D nanostructure synthesis, the subsequent determination of Young's modulus, and demonstrates a postgrowth procedure, which can precisely tune the material modulus. As–fabricated resonators reveal a Young's modulus of 9–13 GPa, which can be increased by a factor greater than 5. Next, the electric readout of the resonance behavior is demonstrated via electric current measurement as an essential element for the resonance sensor applications. Finally, the implications of gas–physisorption and gas–chemisorption on the resonance frequencies are studied, representing a proof–of–principle for sensing applications by the here presented approach.
 [1] ;  [1] ;  [1] ;  [1] ;  [2] ; ORCiD logo [2] ;  [3] ;  [4] ; ORCiD logo [2] ; ORCiD logo [3]
  1. Graz Centre for Electron Microscopy, Graz (Austria)
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States); Univ. of Tennessee, Knoxville, TN (United States)
  3. Graz Centre for Electron Microscopy, Graz (Austria); Graz Univ. of Technology, Graz (Austria)
  4. Goethe Univ. Frankfurt, Frankfurt (Germany)
Publication Date:
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Advanced Functional Materials
Additional Journal Information:
Journal Volume: 28; Journal Issue: 19; Journal ID: ISSN 1616-301X
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
Country of Publication:
United States
47 OTHER INSTRUMENTATION; additive manufacturing; direct-write fabrication; focused electron beam induced deposition; gas sensors; nanogranular materials; resonators
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1426326