Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS

Jonnard, Philippe; Modi, Mohammed H.; Le Guen, Karine; Aneshwari, Nargish; Sinha, Mangalika; Idir, Mourad; Chapon, Patrick; Galtayries, Anouk

doi:10.1002/sia.6445

Title: Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS

Abstract

Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.

Authors:

^[1]; Modi, Mohammed H. ^[2]; Le Guen, Karine ^[1]; Aneshwari, Nargish ^[2]; Sinha, Mangalika ^[2]; Idir, Mourad ^[3]; Chapon, Patrick ^[4]; Galtayries, Anouk ^[5]

Sorbonne Univ., Paris cedex (France)
Raja Ramanna Centre for Advanced Technology, Indore (India)
Brookhaven National Lab. (BNL), Upton, NY (United States)
HORIBA Scientific, Palaiseau (France)
Institut de Recherche de Chimie Paris (IRCP), Paris (France)

Publication Date:: 2018-04-17

Research Org.:: Brookhaven National Lab. (BNL), Upton, NY (United States)

Sponsoring Org.:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

OSTI Identifier:: 1438325

Report Number(s):: BNL-205686-2018-JAAM
Journal ID: ISSN 0142-2421

Grant/Contract Number:: SC0012704

Resource Type:: Accepted Manuscript

Journal Name:: Surface and Interface Analysis

Additional Journal Information:: Journal Volume: 50; Journal Issue: 11; Journal ID: ISSN 0142-2421

Publisher:: Wiley

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; chromium; GDOES; gold; ToF‐SIMS; X‐ray mirro; X‐ray reflectivity

Citation Formats


                    Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, and Galtayries, Anouk. Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS.  United States: N. p., 2018. 
Web.  doi:10.1002/sia.6445.

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                    Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, & Galtayries, Anouk. Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS.  United States.  https://doi.org/10.1002/sia.6445

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                    Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, and Galtayries, Anouk. Tue .  
"Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS".  United States.  https://doi.org/10.1002/sia.6445.  https://www.osti.gov/servlets/purl/1438325.

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@article{osti_1438325,

  title        = {Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS},

  author       = {Jonnard, Philippe and Modi, Mohammed H. and Le Guen, Karine and Aneshwari, Nargish and Sinha, Mangalika and Idir, Mourad and Chapon, Patrick and Galtayries, Anouk},

  abstractNote = {Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.},

  doi          = {10.1002/sia.6445},

  journal      = {Surface and Interface Analysis},

  number       = 11,

  volume       = 50,

  place        = {United States},

  year         = {2018},

  month        = {4}

}

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Works referenced in this record:

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X-Ray Spectrometry, Vol. 40, Issue 5
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Towards nanometric resolution in multilayer depth profiling: a comparative study of RBS, SIMS, XPS and GDOES
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Surface and Interface Analysis, Vol. 42, Issue 6-7
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Title: Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS

Abstract

Citation Formats

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