Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS
Abstract
Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.
- Authors:
-
[1];
- Sorbonne Univ., Paris cedex (France)
- Raja Ramanna Centre for Advanced Technology, Indore (India)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- HORIBA Scientific, Palaiseau (France)
- Institut de Recherche de Chimie Paris (IRCP), Paris (France)
- Publication Date:
- Research Org.:
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1438325
- Report Number(s):
- BNL-205686-2018-JAAM
Journal ID: ISSN 0142-2421
- Grant/Contract Number:
- SC0012704
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Surface and Interface Analysis
- Additional Journal Information:
- Journal Volume: 50; Journal Issue: 11; Journal ID: ISSN 0142-2421
- Publisher:
- Wiley
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; chromium; GDOES; gold; ToF‐SIMS; X‐ray mirro; X‐ray reflectivity
Citation Formats
Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, and Galtayries, Anouk. Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS. United States: N. p., 2018.
Web. doi:10.1002/sia.6445.
Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, & Galtayries, Anouk. Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS. United States. https://doi.org/10.1002/sia.6445
Jonnard, Philippe, Modi, Mohammed H., Le Guen, Karine, Aneshwari, Nargish, Sinha, Mangalika, Idir, Mourad, Chapon, Patrick, and Galtayries, Anouk. Tue .
"Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS". United States. https://doi.org/10.1002/sia.6445. https://www.osti.gov/servlets/purl/1438325.
@article{osti_1438325,
title = {Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS},
author = {Jonnard, Philippe and Modi, Mohammed H. and Le Guen, Karine and Aneshwari, Nargish and Sinha, Mangalika and Idir, Mourad and Chapon, Patrick and Galtayries, Anouk},
abstractNote = {Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.},
doi = {10.1002/sia.6445},
journal = {Surface and Interface Analysis},
number = 11,
volume = 50,
place = {United States},
year = {Tue Apr 17 00:00:00 EDT 2018},
month = {Tue Apr 17 00:00:00 EDT 2018}
}
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