skip to main content


This content will become publicly available on April 17, 2019

Title: Study of the Au-Cr bilayer system using X-ray reflectivity, GDOES, and ToF-SIMS

Here, we study a Au (25 nm)/Cr (10 nm) bilayer system as a model of mirror for the soft X–ray energy range. The Au and Cr thin films are a few nanometer thick and are deposited on a float glass substrate. The sample is characterized by using 3 complementary techniques: soft X–ray reflectivity, glow discharge optical emission spectrometry (GDOES), and time–of–flight secondary ion mass spectroscopy (ToF–SIMS). Soft X–ray reflectivity provides information about the thickness and roughness of the different layers, while GDOES is used to obtain the elemental depth profile of the stack and ToF–SIMS to obtain the elemental and chemical depth profiles. GDOES and ToF–SIMS have both a nanometer depth resolution. A coherent description of the bilayer stack is obtained through the combination of these techniques. It consists in 5 layers namely a surface contamination layer, a principal gold layer, a Au–Cr mixed layer, a Cr layer, and another contamination layer at the top of the substrate.
ORCiD logo [1] ;  [2] ;  [1] ;  [2] ;  [2] ;  [3] ;  [4] ;  [5]
  1. Sorbonne Univ., Paris cedex (France)
  2. Raja Ramanna Centre for Advanced Technology, Indore (India)
  3. Brookhaven National Lab. (BNL), Upton, NY (United States)
  4. HORIBA Scientific, Palaiseau (France)
  5. Institut de Recherche de Chimie Paris (IRCP), Paris (France)
Publication Date:
Report Number(s):
Journal ID: ISSN 0142-2421
Grant/Contract Number:
Accepted Manuscript
Journal Name:
Surface and Interface Analysis
Additional Journal Information:
Journal Name: Surface and Interface Analysis; Journal ID: ISSN 0142-2421
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
36 MATERIALS SCIENCE; chromium; GDOES; gold; ToF‐SIMS; X‐ray mirro; X‐ray reflectivity
OSTI Identifier: