High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator
Abstract
Abstract Silicon‐organic hybrid integrated devices show great potential in high‐speed optical interconnects and sensors. In this paper, a high‐speed modulator based on an electro‐optic (EO) polymer (SEO125) infiltrated sub‐wavelength grating (SWG) waveguide ring resonator is presented. The core of the SWG waveguide consists of periodically arranged silicon pillars along the light propagation direction, which provides large mode volume overlap with EO polymer. The optimized SWG shows a mode volume overlap of 36.2% with a silicon duty cycle of 0.7. The 3‐dB modulation bandwidth of the fabricated modulator is measured to be larger than 40 GHz occupying an area of 70 μm x 29 μm, which is the largest bandwidth and the most compact footprint that has been demonstrated for ring resonators on the silicon‐organic hybrid platform.
- Authors:
-
- Department of Electrical and Computer Engineering The University of Texas at Austin 10100 Burnet Rd MER 160 Austin TX 78758 USA
- Department of Electrical and Computer Engineering The University of Texas at Austin 10100 Burnet Rd MER 160 Austin TX 78758 USA, Omega Optics Inc. 8500 Shoal Creek Blvd Austin TX 78757 USA
- Omega Optics Inc. 8500 Shoal Creek Blvd Austin TX 78757 USA
- Department of Mechanical Engineering The University of Texas at Austin Austin TX 78712 USA
- Centre for Micro‐Photonics Swinburne University of Technology John Street Hawthorn Victoria 3122 Australia
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1437499
- Grant/Contract Number:
- DE SC‐0013178
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Laser & Photonics Reviews
- Additional Journal Information:
- Journal Name: Laser & Photonics Reviews Journal Volume: 12 Journal Issue: 6; Journal ID: ISSN 1863-8880
- Publisher:
- Wiley Blackwell (John Wiley & Sons)
- Country of Publication:
- Germany
- Language:
- English
Citation Formats
Pan, Zeyu, Xu, Xiaochuan, Chung, Chi‐Jui, Dalir, Hamed, Yan, Hai, Chen, Ke, Wang, Yaguo, Jia, Baohua, and Chen, Ray T. High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator. Germany: N. p., 2018.
Web. doi:10.1002/lpor.201700300.
Pan, Zeyu, Xu, Xiaochuan, Chung, Chi‐Jui, Dalir, Hamed, Yan, Hai, Chen, Ke, Wang, Yaguo, Jia, Baohua, & Chen, Ray T. High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator. Germany. https://doi.org/10.1002/lpor.201700300
Pan, Zeyu, Xu, Xiaochuan, Chung, Chi‐Jui, Dalir, Hamed, Yan, Hai, Chen, Ke, Wang, Yaguo, Jia, Baohua, and Chen, Ray T. Thu .
"High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator". Germany. https://doi.org/10.1002/lpor.201700300.
@article{osti_1437499,
title = {High‐Speed Modulator Based on Electro‐Optic Polymer Infiltrated Subwavelength Grating Waveguide Ring Resonator},
author = {Pan, Zeyu and Xu, Xiaochuan and Chung, Chi‐Jui and Dalir, Hamed and Yan, Hai and Chen, Ke and Wang, Yaguo and Jia, Baohua and Chen, Ray T.},
abstractNote = {Abstract Silicon‐organic hybrid integrated devices show great potential in high‐speed optical interconnects and sensors. In this paper, a high‐speed modulator based on an electro‐optic (EO) polymer (SEO125) infiltrated sub‐wavelength grating (SWG) waveguide ring resonator is presented. The core of the SWG waveguide consists of periodically arranged silicon pillars along the light propagation direction, which provides large mode volume overlap with EO polymer. The optimized SWG shows a mode volume overlap of 36.2% with a silicon duty cycle of 0.7. The 3‐dB modulation bandwidth of the fabricated modulator is measured to be larger than 40 GHz occupying an area of 70 μm x 29 μm, which is the largest bandwidth and the most compact footprint that has been demonstrated for ring resonators on the silicon‐organic hybrid platform.},
doi = {10.1002/lpor.201700300},
journal = {Laser & Photonics Reviews},
number = 6,
volume = 12,
place = {Germany},
year = {Thu May 17 00:00:00 EDT 2018},
month = {Thu May 17 00:00:00 EDT 2018}
}
https://doi.org/10.1002/lpor.201700300
Web of Science
Works referenced in this record:
Geometrical tuning art for entirely subwavelength grating waveguide based integrated photonics circuits
journal, May 2016
- Wang, Zheng; Xu, Xiaochuan; Fan, Donglei
- Scientific Reports, Vol. 6, Issue 1
Silicon-based optoelectronics
journal, January 1993
- Soref, R. A.
- Proceedings of the IEEE, Vol. 81, Issue 12
High Extinction Ratio and Broadband Silicon TE-Pass Polarizer Using Subwavelength Grating Index Engineering
journal, October 2015
- Xiong, Yule; Xu, Dan-Xia; Schmid, Jens H.
- IEEE Photonics Journal, Vol. 7, Issue 5
Colorless grating couplers realized by interleaving dispersion engineered subwavelength structures
journal, January 2013
- Xu, Xiaochuan; Subbaraman, Harish; Covey, John
- Optics Letters, Vol. 38, Issue 18
Origin of the poling‐induced optical loss in a nonlinear optical polymeric waveguide
journal, February 1995
- Teng, C. C.; Mortazavi, M. A.; Boudoughian, G. K.
- Applied Physics Letters, Vol. 66, Issue 6
Nonlinearities of organic electro-optic materials in nanoscale slots and implications for the optimum modulator design
journal, January 2017
- Heni, Wolfgang; Haffner, Christian; Elder, Delwin L.
- Optics Express, Vol. 25, Issue 3
50-Gb/s ring-resonator-based silicon modulator
journal, January 2013
- Baba, Takeshi; Akiyama, Suguru; Imai, Masahiko
- Optics Express, Vol. 21, Issue 10
Double-Slot Hybrid Plasmonic Ring Resonator Used for Optical Sensors and Modulators
journal, November 2015
- Sun, Xu; Dai, Daoxin; Thylén, Lars
- Photonics, Vol. 2, Issue 4
Electro-optic polymer/silicon hybrid slow light modulator based on one-dimensional photonic crystal waveguides
journal, October 2013
- Inoue, Shin-ichiro; Otomo, Akira
- Applied Physics Letters, Vol. 103, Issue 17
Silicon-Organic Hybrid MZI Modulator Generating OOK, BPSK and 8-ASK Signals for Up to 84 Gbit/s
journal, April 2013
- Palmer, R.; Alloatti, L.; Korn, D.
- IEEE Photonics Journal, Vol. 5, Issue 2
Corrections to “On the Design and Optimization of Three-Terminal Light-Emitting Device in Silicon CMOS Technology” [Jul/Aug 14 8201208]
journal, July 2014
- Xu, Kaikai
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 20, Issue 4
One-dimensional photonic crystal slot waveguide for silicon-organic hybrid electro-optic modulators
journal, January 2016
- Yan, Hai; Xu, Xiaochuan; Chung, Chi-Jui
- Optics Letters, Vol. 41, Issue 23
Controlling leakage losses in subwavelength grating silicon metamaterial waveguides
journal, January 2016
- Sarmiento-Merenguel, J. Darío; Ortega-Moñux, Alejandro; Fédéli, Jean-Marc
- Optics Letters, Vol. 41, Issue 15
Unprecedented highest electro-optic coefficient of 226 pm/V for electro-optic polymer/TiO2 multilayer slot waveguide modulators
journal, January 2014
- Jouane, Y.; Chang, Y-C.; Zhang, D.
- Optics Express, Vol. 22, Issue 22
Record-High In-Device Electro-Optic Coefficient of 359 pm/V in a Silicon-Organic Hybrid (SOH) Modulator
conference, January 2017
- Kieninger, C.; Kutuvantavida, Y.; Zwickel, H.
- CLEO: Science and Innovations, Conference on Lasers and Electro-Optics
Low voltage 25Gbps silicon Mach-Zehnder modulator in the O-band
journal, January 2017
- Perez-Galacho, Diego; Baudot, Charles; Hirtzlin, Tifenn
- Optics Express, Vol. 25, Issue 10
High Performance Optical Modulator Based on Electro-Optic Polymer Filled Silicon Slot Photonic Crystal Waveguide
journal, June 2016
- Zhang, Xingyu; Chung, Chi-Jui; Hosseini, Amir
- Journal of Lightwave Technology, Vol. 34, Issue 12
Demonstration of a low V_πL modulator with GHz bandwidth based on electro-optic
polymer-clad silicon slot waveguides
journal, January 2010
- Ding, R.; Baehr-Jones, T.; Liu, Y.
- Optics Express, Vol. 18, Issue 15
Complementary metal–oxide–semiconductor compatible high efficiency subwavelength grating couplers for silicon integrated photonics
journal, July 2012
- Xu, Xiaochuan; Subbaraman, Harish; Covey, John
- Applied Physics Letters, Vol. 101, Issue 3
Sub-wavelength grating for enhanced ring resonator biosensor
journal, January 2016
- Flueckiger, Jonas; Schmidt, Shon; Donzella, Valentina
- Optics Express, Vol. 24, Issue 14
Temperature Dependence of Silicon Nanophotonic Ring Resonator With a Polymeric Overlayer
journal, August 2007
- Lee, Jong-Moo; Kim, Duk-Jun; Ahn, Hokyun
- Journal of Lightwave Technology, Vol. 25, Issue 8
Silicon-Organic Hybrid (SOH) and Plasmonic-Organic Hybrid (POH) Integration
journal, January 2016
- Koos, Christian; Leuthold, Juerg; Freude, Wolfgang
- Journal of Lightwave Technology, Vol. 34, Issue 2
High-speed low-voltage electro-optic modulator with a polymer-infiltrated silicon photonic crystal waveguide
journal, January 2008
- Brosi, Jan-Michael; Koos, Christian; Andreani, Lucio C.
- Optics Express, Vol. 16, Issue 6
Broadband electro-optic polymer modulators with high electro-optic activity and low poling induced optical loss
journal, July 2008
- Chen, H.; Chen, B.; Huang, D.
- Applied Physics Letters, Vol. 93, Issue 4
Physical Mechanism of p-i-n-Diode-Based Photonic Crystal Silicon Electrooptic Modulators for Gigahertz Operation
journal, January 2008
- Gu, Lanlan; Jiang, Wei; Chen, Xiaonan
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 14, Issue 4
Novel Ring Resonator Combining Strong Field Confinement With High Optical Quality Factor
journal, October 2015
- Steglich, Patrick; Mai, Christian; Stolarek, David
- IEEE Photonics Technology Letters, Vol. 27, Issue 20
Wide optical spectrum range, subvolt, compact modulator based on an electro-optic polymer refilled silicon slot photonic crystal waveguide
journal, January 2013
- Zhang, Xingyu; Hosseini, Amir; Chakravarty, Swapnajit
- Optics Letters, Vol. 38, Issue 22
Compact and broad band directional coupler for sub-wavelength grating SOI components
conference, December 2014
- Donzella, V.; Flueckiger, J.; Sherwali, A.
- 2014 IEEE Photonics Conference (IPC)
Low-power silicon-organic hybrid (SOH) modulators for advanced modulation formats
journal, January 2014
- Lauermann, M.; Palmer, R.; Koeber, S.
- Optics Express, Vol. 22, Issue 24
Silicon optical modulators
journal, July 2010
- Reed, G. T.; Mashanovich, G.; Gardes, F. Y.
- Nature Photonics, Vol. 4, Issue 8
High-speed plasmonic phase modulators
journal, February 2014
- Melikyan, A.; Alloatti, L.; Muslija, A.
- Nature Photonics, Vol. 8, Issue 3
Silicon-organic hybrid (SOH) modulators for intensity-modulation / direct-detection links with line rates of up to 120 Gbit/s
journal, January 2017
- Zwickel, Heiner; Wolf, Stefan; Kieninger, Clemens
- Optics Express, Vol. 25, Issue 20
Demonstration of 110 GHz electro-optic polymer modulators
journal, June 1997
- Chen, Datong; Fetterman, Harold R.; Chen, Antao
- Applied Physics Letters, Vol. 70, Issue 25
Electrooptical effects in silicon
journal, January 1987
- Soref, R.; Bennett, B.
- IEEE Journal of Quantum Electronics, Vol. 23, Issue 1
50-Gb/s Silicon Optical Modulator
journal, February 2012
- Thomson, David J.; Gardes, Frederic Y.; Fedeli, Jean-Marc
- IEEE Photonics Technology Letters, Vol. 24, Issue 4
Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide
journal, January 2010
- Bock, Przemek J.; Cheben, Pavel; Schmid, Jens H.
- Optics Express, Vol. 18, Issue 19
Silicon-polymer hybrid slot waveguide
ring-resonator modulator
journal, January 2011
- Gould, Michael; Baehr-Jones, Tom; Ding, Ran
- Optics Express, Vol. 19, Issue 5
High-Speed Silicon Modulator With Slow-Wave Electrodes and Fully Independent Differential Drive
journal, June 2014
- Ding, Ran; Liu, Yang; Ma, Yangjin
- Journal of Lightwave Technology, Vol. 32, Issue 12
High-Speed, Low Drive-Voltage Silicon-Organic Hybrid Modulator Based on a Binary-Chromophore Electro-Optic Material
journal, August 2014
- Palmer, Robert; Freude, Wolfgang; Leuthold, Juerg
- Journal of Lightwave Technology, Vol. 32, Issue 16
Roadmap on silicon photonics
journal, June 2016
- Thomson, David; Zilkie, Aaron; Bowers, John E.
- Journal of Optics, Vol. 18, Issue 7
Evanescent field waveguide sensing with subwavelength grating structures in silicon-on-insulator
journal, January 2014
- Gonzalo Wangüemert-Pérez, J.; Cheben, Pavel; Ortega-Moñux, Alejandro
- Optics Letters, Vol. 39, Issue 15
Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25V
journal, April 2008
- Baehr-Jones, Tom; Penkov, Boyan; Huang, Jingqing
- Applied Physics Letters, Vol. 92, Issue 16
100 GHz silicon–organic hybrid modulator
journal, May 2014
- Alloatti, Luca; Palmer, Robert; Diebold, Sebastian
- Light: Science & Applications, Vol. 3, Issue 5
A Hybrid Electrooptic Microring Resonator-Based $1 \times 4\times 1$ ROADM for Wafer Scale Optical Interconnects
journal, February 2009
- Takayesu, J.; Hochberg, M.; Baehr-Jones, T.
- Journal of Lightwave Technology, Vol. 27, Issue 4
Polymer micro-ring filters and modulators
journal, November 2002
- Rabiei, P.; Steier, W. H.
- Journal of Lightwave Technology, Vol. 20, Issue 11
Design and characterization of a 30-GHz bandwidth low-power silicon traveling-wave modulator
journal, June 2014
- Ding, Ran; Liu, Yang; Li, Qi
- Optics Communications, Vol. 321
Ultra-thin silicon/electro-optic polymer hybrid waveguide modulators
journal, September 2015
- Qiu, Feng; Sato, Hiromu; Spring, Andrew M.
- Applied Physics Letters, Vol. 107, Issue 12
Waveguide sub-wavelength structures: a review of principles and applications: Waveguide sub-wavelength structures
journal, September 2014
- Halir, Robert; Bock, Przemek J.; Cheben, Pavel
- Laser & Photonics Reviews, Vol. 9, Issue 1
Integrated Photonic Electromagnetic Field Sensor Based on Broadband Bowtie Antenna Coupled Silicon Organic Hybrid Modulator
journal, October 2014
- Zhang, Xingyu; Hosseini, Amir; Subbaraman, Harish
- Journal of Lightwave Technology, Vol. 32, Issue 20
Electro-optic effects in molecular crystals
journal, January 1993
- Bosshard, Ch.; Sutter, K.; Schlesser, R.
- Journal of the Optical Society of America B, Vol. 10, Issue 5
The Past, Present, and Future of Silicon Photonics
journal, January 2006
- Soref, Richard
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 12, Issue 6
Electrooptic Polymer Ring Resonator Modulation up to 165 GHz
journal, January 2007
- Bortnik, Bartosz; Hung, Yu-Chueh; Tazawa, Hidehisa
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 13, Issue 1
Femtojoule electro-optic modulation using a silicon–organic hybrid device
journal, February 2015
- Koeber, Sebastian; Palmer, Robert; Lauermann, Matthias
- Light: Science & Applications, Vol. 4, Issue 2