skip to main content

DOE PAGESDOE PAGES

This content will become publicly available on May 11, 2019

Title: Reactive sputter deposition of piezoelectric Sc 0.12 Al 0.88 N for contour mode resonators

Authors:
 [1] ;  [1] ;  [1] ;  [1]
  1. Sandia National Labs, MESA Fabrication Facility, P.O. Box 5800, MS 1084, Albuquerque, New Mexico 87185-1084
Publication Date:
Grant/Contract Number:
NA-0003525
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 36; Journal Issue: 3; Related Information: CHORUS Timestamp: 2018-05-11 12:02:29; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1436907