skip to main content

DOE PAGESDOE PAGES

Title: Fabrication of Low Cost Surface Acoustic Wave Sensors Using Direct Printing by Aerosol Inkjet

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO 3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. In conclusion, the linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.
Authors:
ORCiD logo [1] ; ORCiD logo [1] ; ORCiD logo [1] ; ORCiD logo [1] ; ORCiD logo [1]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Publication Date:
Grant/Contract Number:
AC05-00OR22725
Type:
Published Article
Journal Name:
IEEE Access
Additional Journal Information:
Journal Volume: 6; Journal ID: ISSN 2169-3536
Publisher:
IEEE
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; additive manufacturing; aerosol inkjet; printed electronics; sensors; surface acoustic wave (SAW)
OSTI Identifier:
1436184
Alternate Identifier(s):
OSTI ID: 1436185; OSTI ID: 1454405