A 5-μ m pitch charge-coupled device optimized for resonant inelastic soft X-ray scattering

Andresen, N. C.; Denes, P.; Goldschmidt, A.; Joseph, J.; Karcher, A.; Tindall, C. S.

doi:10.1063/1.4997727

Title: A 5-μ m pitch charge-coupled device optimized for resonant inelastic soft X-ray scattering

Journal Article · 07 August 2017 · Review of Scientific Instruments

DOI: https://doi.org/10.1063/1.4997727 · OSTI ID:1436156

Andresen, N. C. ^[1]; Denes, P. ^[1]; Goldschmidt, A. ^[1]; Joseph, J. ^[1]; Karcher, A. ^[1]; Tindall, C. S. ^[1]

Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Here, we have developed a charge-coupled device (CCD) with 5 μm × 45 μm pixels on high-resistivity silicon. The fully depleted 200 μm-thick silicon detector is back-illuminated through a 10 nm-thick in situ doped polysilicon window and is thus highly efficient for soft through > 8 keV hard X-rays. The device described here is a 1.5 megapixel CCD with 2496 × 620 pixels. The pixel and camera geometry was optimized for Resonant Inelastic X-ray Scattering (RIXS) and is particularly advantageous for spectrometers with limited arm lengths. In this article, we describe the device architecture, construction and operation, and its performance during tests at the Advance Light Source (ALS) 8.0.1 RIXS beamline. The improved spectroscopic performance, when compared with a current standard commercial camera, is demonstrated with a ~280 eV (C_K) X-ray beam on a graphite sample. Readout noise is typically 3-6 electrons and the point spread function for soft C_K X-rays in the 5 μm direction is 4.0 μm ± 0.2 μm. Finally, the measured quantum efficiency of the CCD is greater than 75% in the range from 200 eV to 1 keV.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

Grant/Contract Number:: AC02-05CH11231; SC0011269

OSTI ID:: 1436156

Alternate ID(s):: OSTI ID: 1374227

Journal Information:: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 8 Vol. 88; ISSN 0034-6748

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (10)

Resonant inelastic x-ray scattering studies of elementary excitations Ament, Luuk J. P.; van Veenendaal, Michel; Devereaux, Thomas P. Reviews of Modern Physics, Vol. 83, Issue 2 https://doi.org/10.1103/revmodphys.83.705	journal	June 2011
X-Ray Interactions: Photoabsorption, Scattering, Transmission, and Reflection at E = 50-30,000 eV, Z = 1-92 Henke, B. L.; Gullikson, E. M.; Davis, J. C. Atomic Data and Nuclear Data Tables, Vol. 54, Issue 2, p. 181-342 https://doi.org/10.1006/adnd.1993.1013	journal	July 1993
Improving the spatial resolution of soft X-ray detection using an Electron-Multiplying Charge-Coupled Device Soman, M. R.; Hall, D. J.; Tutt, J. H. Journal of Instrumentation, Vol. 8, Issue 01 https://doi.org/10.1088/1748-0221/8/01/c01046	journal	January 2013
Calculations of mean free paths and stopping powers of low energy electrons (⩽ 10 keV) in solids using a statistical model Ashley, J. C.; Tung, C. J.; Ritchie, R. H. IEEE Transactions on Nuclear Science, Vol. 23, Issue 6 https://doi.org/10.1109/tns.1976.4328586	journal	December 1976
NIH Image to ImageJ: 25 years of image analysis Schneider, Caroline A.; Rasband, Wayne S.; Eliceiri, Kevin W. Nature Methods, Vol. 9, Issue 7 https://doi.org/10.1038/nmeth.2089	journal	June 2012
Development of a compact fast CCD camera and resonant soft x-ray scattering endstation for time-resolved pump-probe experiments Doering, D.; Chuang, Y. -D.; Andresen, N. Review of Scientific Instruments, Vol. 82, Issue 7 https://doi.org/10.1063/1.3609862	journal	July 2011
Definition of the Flexible Image Transport System (FITS) Hanisch, R. J.; Farris, A.; Greisen, E. W. Astronomy & Astrophysics, Vol. 376, Issue 1 https://doi.org/10.1051/0004-6361:20010923	journal	September 2001
Fully depleted, back-illuminated charge-coupled devices fabricated on high-resistivity silicon Holland, S. E.; Groom, D. E.; Palaio, N. P. IEEE Transactions on Electron Devices, Vol. 50, Issue 1 https://doi.org/10.1109/ted.2002.806476	journal	January 2003
Development of low noise, back-side illuminated silicon photodiode arrays Holland, S. E.; Wang, N. W.; Moses, W. W. IEEE Transactions on Nuclear Science, Vol. 44, Issue 3 https://doi.org/10.1109/23.603687	journal	June 1997
Developing a CCD camera with high spatial resolution for RIXS in the soft X-ray range Soman, M. R.; Hall, D. J.; Tutt, J. H. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 731 https://doi.org/10.1016/j.nima.2013.04.076	journal	December 2013

Similar Records

A low noise CMOS camera system for 2D resonant inelastic soft X-ray scattering

Journal Article · 2023 · Frontiers in Physics · OSTI ID:2350931

Andresen, Nord; Bakalis, Christos; Denes, Peter; +6 more

Flat Field Anomalies in an X-ray CCD Camera Measured Using a Manson X-ray Source

Conference · 2008 · Review of Scientific Instruments · OSTI ID:942227

Flat field anomalies in an x-ray charge coupled device camera measured using a Manson x-ray source

Journal Article · 2008 · Review of Scientific Instruments · OSTI ID:21266585

Haugh, M J; Schneider, M B

Related Subjects

36 MATERIALS SCIENCE

Title: A 5-μ m pitch charge-coupled device optimized for resonant inelastic soft X-ray scattering

Citation Formats

References (10)

Similar Records

Related Subjects