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Title: Aberration corrected STEM by means of diffraction gratings

In the past 15 years, the advent of aberration correction technology in electron microscopy has enabled materials analysis on the atomic scale. This is made possible by precise arrangements of multipole electrodes and magnetic solenoids to compensate the aberrations inherent to any focusing element of an electron microscope. In this paper, we describe an alternative method to correct for the spherical aberration of the objective lens in scanning transmission electron microscopy (STEM) using a passive, nanofabricated diffractive optical element. This holographic device is installed in the probe forming aperture of a conventional electron microscope and can be designed to remove arbitrarily complex aberrations from the electron's wave front. In this work, we show a proof-of-principle experiment that demonstrates successful correction of the spherical aberration in STEM by means of such a grating corrector (GCOR). Our GCOR enables us to record aberration-corrected high-resolution high-angle annular dark field (HAADF-) STEM images, although yet without advancement in probe current and resolution. Finally, improvements in this technology could provide an economical solution for aberration-corrected high-resolution STEM in certain use scenarios.
 [1] ;  [2] ;  [3] ;  [3]
  1. Corrected Electron Optical Systems GmbH, Heidelberg (Germany)
  2. Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States). National Center for Electron Microscopy. Molecular Foundry
  3. Univ. of Oregon, Eugene, OR (United States). Dept. of Physics
Publication Date:
Grant/Contract Number:
AC02-05CH11231; SC0010466
Accepted Manuscript
Journal Name:
Additional Journal Information:
Journal Volume: 182; Journal ID: ISSN 0304-3991
Research Org:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States); Univ. of Oregon, Eugene, OR (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
47 OTHER INSTRUMENTATION; diffraction gratings; aberration correction; Cs-corrector; high-resolution STEM; Ronchigram
OSTI Identifier: