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Title: Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4

Abstract

Tailored voltage excitation waveforms provide an efficient control of the ion energy (through the electrical asymmetry effect) in capacitive plasmas by varying the 'amplitude' asymmetry of the waveform. In this work, the effect of a 'slope' asymmetry of the waveform is investigated by using sawtooth-like waveforms, through which the sheath dynamic can be manipulated. A remarkably different discharge dynamic is found for Ar, H2, and CF4 gases, which is explained by the different dominant electron heating mechanisms and plasma chemistries. In comparison to Argon we find that the electrical asymmetry can even be reversed by using an electronegative gas such as CF4. Phase resolved optical emission spectroscopy measurements, probing the spatiotemporal distribution of the excitation rate show excellent agreement with the results of particle-in-cell simulations, confirming the high degree of correlation between the excitation rates with the dominant heating mechanisms in the various gases. It is shown that, depending on the gas used, sawtooth-like voltage waveforms may cause a strong asymmetry.

Authors:
 [1];  [1];  [2];  [2];  [2];  [3];  [3];  [3];  [4];  [4]
+ Show Author Affiliations
  1. Ecole Polytechnique, Palaiseau (France)
  2. Univ. of York (United Kingdom). York Plasma Inst., Dept. of Physics
  3. Hungarian Academy of Sciences, Budapest (Hungary). Inst. for Solid State Physics and Optics, Wigner Research Centre for Physics
  4. West Virginia Univ., Morgantown, WV (United States). Dept. of Physics
Publication Date:
Research Org.:
Univ. of Michigan, Ann Arbor, MI (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Fusion Energy Sciences (FES)
OSTI Identifier:
1434931
Grant/Contract Number:  
SC0001939
Resource Type:
Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 25; Journal Issue: 1; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; Tailored voltage waveforms; electrical asymmetry effect; sawtooth waveforms; electron heating; PIC modeling PROES

Citation Formats

Bruneau, Bastien, Lafleur, T., Gans, T., 'Connell, D.O., Greb, A., Korolov, I., Derzsi, A., Donko, Z., Brandt, S., and Schungel, E. Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4. United States: N. p., 2015. Web. doi:10.1088/0963-0252/25/1/01LT02.
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Bruneau, Bastien, Lafleur, T., Gans, T., 'Connell, D.O., Greb, A., Korolov, I., Derzsi, A., Donko, Z., Brandt, S., & Schungel, E. Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4. United States. https://doi.org/10.1088/0963-0252/25/1/01LT02
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Bruneau, Bastien, Lafleur, T., Gans, T., 'Connell, D.O., Greb, A., Korolov, I., Derzsi, A., Donko, Z., Brandt, S., and Schungel, E. Tue . "Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4". United States. https://doi.org/10.1088/0963-0252/25/1/01LT02. https://www.osti.gov/servlets/purl/1434931.
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@article{osti_1434931,
title = {Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4},
author = {Bruneau, Bastien and Lafleur, T. and Gans, T. and 'Connell, D.O. and Greb, A. and Korolov, I. and Derzsi, A. and Donko, Z. and Brandt, S. and Schungel, E.},
abstractNote = {Tailored voltage excitation waveforms provide an efficient control of the ion energy (through the electrical asymmetry effect) in capacitive plasmas by varying the 'amplitude' asymmetry of the waveform. In this work, the effect of a 'slope' asymmetry of the waveform is investigated by using sawtooth-like waveforms, through which the sheath dynamic can be manipulated. A remarkably different discharge dynamic is found for Ar, H2, and CF4 gases, which is explained by the different dominant electron heating mechanisms and plasma chemistries. In comparison to Argon we find that the electrical asymmetry can even be reversed by using an electronegative gas such as CF4. Phase resolved optical emission spectroscopy measurements, probing the spatiotemporal distribution of the excitation rate show excellent agreement with the results of particle-in-cell simulations, confirming the high degree of correlation between the excitation rates with the dominant heating mechanisms in the various gases. It is shown that, depending on the gas used, sawtooth-like voltage waveforms may cause a strong asymmetry.},
doi = {10.1088/0963-0252/25/1/01LT02},
journal = {Plasma Sources Science and Technology},
number = 1,
volume = 25,
place = {United States},
year = {Tue Dec 01 00:00:00 EST 2015},
month = {Tue Dec 01 00:00:00 EST 2015}
}
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Publisher's Version of Record
https://doi.org/10.1088/0963-0252/25/1/01LT02
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    Works referencing / citing this record:

    Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges
    journal, January 2019

    • You, K. H.; Schulze, J.; Derzsi, A.
    • Physics of Plasmas, Vol. 26, Issue 1
    • DOI: 10.1063/1.5063543
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