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Title: One-dimensional angular-measurement-based stitching interferometry

In this paper, we present one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less.
Authors:
ORCiD logo [1] ;  [2] ;  [3] ;  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Sichuan Univ., Chengdu (China)
  3. Chinese Academy of Sciences, Shanghai (China); Univ. of Chinese Academy of Sciences, Beijing (China)
Publication Date:
Report Number(s):
BNL-205680-2018-JAAM
Journal ID: ISSN 1094-4087; OPEXFF
Grant/Contract Number:
SC0012704
Type:
Published Article
Journal Name:
Optics Express
Additional Journal Information:
Journal Volume: 26; Journal Issue: 8; Journal ID: ISSN 1094-4087
Publisher:
Optical Society of America (OSA)
Research Org:
Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; instrumentation, measurement, and metrology; metrology; mirrors; interferometry
OSTI Identifier:
1431400
Alternate Identifier(s):
OSTI ID: 1438320

Huang, Lei, Xue, Junpeng, Gao, Bo, and Idir, Mourad. One-dimensional angular-measurement-based stitching interferometry. United States: N. p., Web. doi:10.1364/OE.26.009882.
Huang, Lei, Xue, Junpeng, Gao, Bo, & Idir, Mourad. One-dimensional angular-measurement-based stitching interferometry. United States. doi:10.1364/OE.26.009882.
Huang, Lei, Xue, Junpeng, Gao, Bo, and Idir, Mourad. 2018. "One-dimensional angular-measurement-based stitching interferometry". United States. doi:10.1364/OE.26.009882.
@article{osti_1431400,
title = {One-dimensional angular-measurement-based stitching interferometry},
author = {Huang, Lei and Xue, Junpeng and Gao, Bo and Idir, Mourad},
abstractNote = {In this paper, we present one-dimensional stitching interferometry based on the angular measurement for high-precision mirror metrology. The tilt error introduced by the stage motion during the stitching process is measured by an extra angular measurement device. The local profile measured by the interferometer in a single field of view is corrected using the measured angle before the piston adjustment in the stitching process. Comparing to the classical software stitching technique, the angle measuring stitching technique is more reliable and accurate in profiling mirror surface at the nanometer level. Experimental results demonstrate the feasibility of the proposed stitching technique. Based on our measurements, the typical repeatability within 200 mm scanning range is 0.5 nm RMS or less.},
doi = {10.1364/OE.26.009882},
journal = {Optics Express},
number = 8,
volume = 26,
place = {United States},
year = {2018},
month = {4}
}