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Title: Growth of strontium ruthenate films by hybrid molecular beam epitaxy

We report on the growth of epitaxial Sr 2RuO 4 films using a hybrid molecular beam epitaxy approach in which a volatile precursor containing RuO 4 is used to supply ruthenium and oxygen. The use of the precursor overcomes a number of issues encountered in traditional molecular beam epitaxy that uses elemental metal sources. Phase-pure, epitaxial thin films of Sr 2RuO 4 are obtained. At high substrate temperatures, growth proceeds in a layer-by-layer mode with intensity oscillations observed in reflection high-energy electron diffraction. Films are of high structural quality, as documented by x-ray diffraction, atomic force microscopy, and transmission electron microscopy. In conclusion, the method should be suitable for the growth of other complex oxides containing ruthenium, opening up opportunities to investigate thin films that host rich exotic ground states.
 [1] ;  [1] ;  [1] ;  [1]
  1. Univ. of California, Santa Barbara, CA (United States). Materials Dept.
Publication Date:
Grant/Contract Number:
FG02-02ER45994; W911NF-16-1-0361
Accepted Manuscript
Journal Name:
APL Materials
Additional Journal Information:
Journal Volume: 5; Journal Issue: 9; Journal ID: ISSN 2166-532X
American Institute of Physics (AIP)
Research Org:
Univ. of California, Santa Barbara, CA (United States)
Sponsoring Org:
USDOE; US Army Research Office (ARO); Defense Advanced Research Projects Agency (DARPA); Microelectronics Advanced Research Corporation (MARCO)
Country of Publication:
United States
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY; 36 MATERIALS SCIENCE; materials; metals; microscopy; diffraction optics; metallurgy; solid state chemistry; atomic force microscopy; light diffraction; chemical analysis; transition metals
OSTI Identifier:
Alternate Identifier(s):
OSTI ID: 1380001