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Title: Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge

Abstract

In this paper, the spatial structure and temporal evolution of the electric fields in a sheath formed in a dual frequency, 300 mm capacitive argon discharge are measured as functions of relative mixing between a low frequency current and a high frequency current. It is found that the overall structure of the sheath (potential across the sheath and the thickness of the sheath) are dominated by the lower frequency component while (smaller) oscillations in these quantities are dictated by the higher frequency component. Finally, comparisons of the measured spatial and temporal profiles are made for Lieberman's and Robiche et al sheath model and with a particle in a cell calculation.

Authors:
 [1];  [1];  [1];  [2];  [2];  [2];  [2]
+ Show Author Affiliations
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Applied Materials, Sunnyvale, CA (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Applied Materials, Sunnyvale, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1426991
Report Number(s):
SAND2007-0646J
Journal ID: ISSN 0963-0252; 524094
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 16; Journal Issue: 2; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., and Holland, J. Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge. United States: N. p., 2007. Web. doi:10.1088/0963-0252/16/2/016.
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Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., & Holland, J. Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge. United States. https://doi.org/10.1088/0963-0252/16/2/016
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Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, T., Hammond, E., and Holland, J. Mon . "Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge". United States. https://doi.org/10.1088/0963-0252/16/2/016. https://www.osti.gov/servlets/purl/1426991.
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@article{osti_1426991,
title = {Electric fields in the sheath formed in a 300 mm, dual frequency capacitive argon discharge},
author = {Barnat, E. V. and Miller, P. A. and Hebner, G. A. and Paterson, A. M. and Panagopoulos, T. and Hammond, E. and Holland, J.},
abstractNote = {In this paper, the spatial structure and temporal evolution of the electric fields in a sheath formed in a dual frequency, 300 mm capacitive argon discharge are measured as functions of relative mixing between a low frequency current and a high frequency current. It is found that the overall structure of the sheath (potential across the sheath and the thickness of the sheath) are dominated by the lower frequency component while (smaller) oscillations in these quantities are dictated by the higher frequency component. Finally, comparisons of the measured spatial and temporal profiles are made for Lieberman's and Robiche et al sheath model and with a particle in a cell calculation.},
doi = {10.1088/0963-0252/16/2/016},
journal = {Plasma Sources Science and Technology},
number = 2,
volume = 16,
place = {United States},
year = {Mon Mar 12 00:00:00 EDT 2007},
month = {Mon Mar 12 00:00:00 EDT 2007}
}
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Journal Article:
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Publisher's Version of Record
https://doi.org/10.1088/0963-0252/16/2/016
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Cited by: 15 works
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Works referenced in this record:

Analytical solution for capacitive RF sheath
journal, January 1988

  • Lieberman, M. A.
  • IEEE Transactions on Plasma Science, Vol. 16, Issue 6
  • DOI: 10.1109/27.16552

Dynamics of a collisional, capacitive RF sheath
journal, April 1989

  • Lieberman, M. A.
  • IEEE Transactions on Plasma Science, Vol. 17, Issue 2
  • DOI: 10.1109/27.24645

Analytical model of a dual frequency capacitive sheath
journal, July 2003

Modelling of the dual frequency capacitive sheath in the intermediate pressure range
journal, April 2004

The dual frequency radio-frequency sheath revisited
journal, October 2003

Analytic model for a dual frequency capacitive discharge
journal, November 2003

  • Kim, H. C.; Lee, J. K.; Shon, J. W.
  • Physics of Plasmas, Vol. 10, Issue 11
  • DOI: 10.1063/1.1621000

Collisionless Heating in Capacitive Discharges Enhanced by Dual-Frequency Excitation
journal, May 2006

Stochastic heating in single and dual frequency capacitive discharges
journal, May 2006

  • Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.
  • Physics of Plasmas, Vol. 13, Issue 5
  • DOI: 10.1063/1.2203949

Sheath Model for Dual-Frequency Capacitively Coupled Plasmas
journal, August 2004

  • Denpoh, Kazuki; Wakayama, Go; Nanbu, Kenichi
  • Japanese Journal of Applied Physics, Vol. 43, Issue 8A
  • DOI: 10.1143/JJAP.43.5533

The impact of frequency mixing on sheath properties: Ion energy distribution and Vdc∕Vrf interaction
journal, May 2005

  • Shannon, Steven; Hoffman, Daniel; Yang, Jang-Gyoo
  • Journal of Applied Physics, Vol. 97, Issue 10
  • DOI: 10.1063/1.1905798

Spatial and frequency dependence of plasma currents in a 300 mm capacitively coupled plasma reactor
journal, October 2006

  • Miller, Paul A.; Barnat, Edward V.; Hebner, Gregory A.
  • Plasma Sources Science and Technology, Vol. 15, Issue 4
  • DOI: 10.1088/0963-0252/15/4/036

Frequency dependent plasma characteristics in a capacitively coupled 300 mm wafer plasma processing chamber
journal, October 2006

  • Hebner, Gregory A.; Barnat, Edward V.; Miller, Paul A.
  • Plasma Sources Science and Technology, Vol. 15, Issue 4
  • DOI: 10.1088/0963-0252/15/4/035

Electric fields in a sheath near a metal–dielectric interface
journal, October 2004

  • Barnat, E. V.; Hebner, G. A.
  • Applied Physics Letters, Vol. 85, Issue 16
  • DOI: 10.1063/1.1766075

Radiofrequency sheath fields above a metal-dielectric interface
journal, November 2004

  • Barnat, E. V.; Hebner, G. A.
  • Journal of Applied Physics, Vol. 96, Issue 9
  • DOI: 10.1063/1.1794901

Radio frequency sheath formation and excitation around a stepped electrode
journal, March 2005

  • Barnat, E. V.; Hebner, G. A.
  • Journal of Applied Physics, Vol. 97, Issue 6
  • DOI: 10.1063/1.1846939

Plasma nonuniformities induced by dissimilar electrode metals
journal, July 2005

  • Barnat, E. V.; Hebner, G. A.
  • Journal of Applied Physics, Vol. 98, Issue 1
  • DOI: 10.1063/1.1941481

Electric field profiles around an electrical probe immersed in a plasma
journal, January 2007

  • Barnat, E. V.; Hebner, G. A.
  • Journal of Applied Physics, Vol. 101, Issue 1
  • DOI: 10.1063/1.2404471
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    Works referencing / citing this record:

    A nonlinear electromagnetics model of an asymmetrically-driven, low pressure capacitive discharge
    journal, August 2017

    • Wen, De-Qi; Kawamura, E.; Lieberman, M. A.
    • Physics of Plasmas, Vol. 24, Issue 8
    • DOI: 10.1063/1.4993798

    Stochastic heating in asymmetric capacitively coupled RF discharges
    journal, September 2008

    Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges
    journal, August 2015

    Nonlinear series resonance and standing waves in dual-frequency capacitive discharges
    journal, November 2016

    Two-dimensional particle-in-cell simulations of standing waves and wave-induced hysteresis in asymmetric capacitive discharges
    journal, November 2017

    • Wen, De-Qi; Kawamura, E.; Lieberman, M. A.
    • Journal of Physics D: Applied Physics, Vol. 50, Issue 49
    • DOI: 10.1088/1361-6463/aa9627
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