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Title: Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges

Abstract

In this paper, the radial distribution of the measured voltage drop across a sheath formed between a 300mm electrode and an argon plasma discharge is shown to depend on the excitation radio frequency, under constant power and pressure conditions. At a lower frequency of 13.56MHz, the voltage drop across the sheath is uniform across the 300mm electrode, while at higher frequencies of 60 and 162MHz the voltage drop becomes radially nonuniform. Finally, the magnitude and spatial extent of the nonuniformity become greater with increasing frequency.

Authors:
 [1];  [1];  [1];  [2];  [2];  [2];  [2]
  1. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
  2. Applied Materials, Sunnyvale, CA (United States)
Publication Date:
Research Org.:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Applied Materials, Sunnyvale, CA (United States)
Sponsoring Org.:
USDOE National Nuclear Security Administration (NNSA)
OSTI Identifier:
1426990
Report Number(s):
SAND2007-0647J
Journal ID: ISSN 0003-6951; 524095
Grant/Contract Number:  
AC04-94AL85000
Resource Type:
Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 90; Journal Issue: 20; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Citation Formats

Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, and Holland, J. Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges. United States: N. p., 2007. Web. doi:10.1063/1.2735934.
Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, & Holland, J. Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges. United States. doi:10.1063/1.2735934.
Barnat, E. V., Miller, P. A., Hebner, G. A., Paterson, A. M., Panagopoulos, Theodoros, Hammond, Edward, and Holland, J. Wed . "Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges". United States. doi:10.1063/1.2735934. https://www.osti.gov/servlets/purl/1426990.
@article{osti_1426990,
title = {Measured radial dependence of the peak sheath voltages present in very high frequency capacitive discharges},
author = {Barnat, E. V. and Miller, P. A. and Hebner, G. A. and Paterson, A. M. and Panagopoulos, Theodoros and Hammond, Edward and Holland, J.},
abstractNote = {In this paper, the radial distribution of the measured voltage drop across a sheath formed between a 300mm electrode and an argon plasma discharge is shown to depend on the excitation radio frequency, under constant power and pressure conditions. At a lower frequency of 13.56MHz, the voltage drop across the sheath is uniform across the 300mm electrode, while at higher frequencies of 60 and 162MHz the voltage drop becomes radially nonuniform. Finally, the magnitude and spatial extent of the nonuniformity become greater with increasing frequency.},
doi = {10.1063/1.2735934},
journal = {Applied Physics Letters},
number = 20,
volume = 90,
place = {United States},
year = {2007},
month = {5}
}

Journal Article:
Free Publicly Available Full Text
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Cited by: 13 works
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