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Title: High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes

The fabrication of high performance on-chip 3D micro-supercapacitors (MSCs) based on MnO 2 pseudocapacitive binder-free thin film electrodes (< 500 nm thick) with interdigitated topology is reported. An original technological process easily scalable to pilot production line is proposed on 3-inch silicon wafers. High areal energy (> 10 μWh.cm -2) and power densities (> 10 mW.cm -2) are reached on small footprint micro-supercapacitors (4 mm 2) tested in aqueous electrolyte (0.8 V). Furthermore, the cell voltage of such MSC can be increased up to 1.5 V with EMI TFSI ionic liquids but at the expense of the areal capacitance. The performance in ionic liquid is in the same order of magnitude than the one obtained for aqueous electrolyte. The benefit from the 3D topology is clearly demonstrated when the surface performance are normalized to the electrode thickness allowing to obtain an interesting energy vs power tradeoff (> 10 μWh.cm -2 μm -1 and > 1 mw.cm -2 μm -1). Here, this paper aims at improving the energy density of MSCs while keeping high power capability, by combining the use of ionic liquids and the deposition of MnO 2 thin film onto robust and efficient 3D scaffolds.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [2] ;  [2] ;  [2] ;  [5]
  1. Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
  2. Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
  3. Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France); Univ. de Picardie Jules Verne, Amiens (France)
  4. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
  5. Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
Publication Date:
Grant/Contract Number:
AC02-06CH11357
Type:
Accepted Manuscript
Journal Name:
Advanced Materials Technologies
Additional Journal Information:
Journal Volume: 2; Journal Issue: 10; Journal ID: ISSN 2365-709X
Publisher:
Wiley
Research Org:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; 3D silicon microtubes; interdigitated electrodes; micro-supercapacitors; pseudocapacitance; X-ray nanotomography
OSTI Identifier:
1426213
Alternate Identifier(s):
OSTI ID: 1375651