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Title: High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes

Journal Article · · Advanced Materials Technologies
 [1];  [2];  [3];  [4];  [2];  [2];  [2];  [5]
  1. Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
  2. Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
  3. Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France); Univ. de Picardie Jules Verne, Amiens (France)
  4. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
  5. Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
+ Show Author Affiliations

Abstract The fabrication of high‐performance on‐chip 3D micro‐supercapacitors (MSCs) based on MnO 2 pseudocapacitive binder‐free thin film electrodes (<500 nm thick) with interdigitated topology is reported. An original technological process easily scalable to pilot production line is proposed on 3 in. silicon wafers. High areal energy (>10 µW h cm −2 ) and power densities (>10 mW cm −2 ) are reached on small footprint micro‐supercapacitors (4 mm 2 ) tested in aqueous electrolyte (0.8 V). Furthermore, the cell voltage of such MSCs can be increased up to 1.5 V with 1‐ethyl‐3‐methylimidazolium bis(trifluoromethylsulfonyl)imide ionic liquids but at the expense of the areal capacitance. The performance in ionic liquid is in the same order of magnitude than the one obtained for aqueous electrolyte. The benefit from the 3D topology is clearly demonstrated when the surface performance is normalized to the electrode thickness allowing this study to obtain an interesting energy versus power tradeoff (>10 µW h cm −2 µm −1 and >1 mw cm −2 µm −1 ). This study aims at improving the energy density of MSCs while keeping high power capability, by combining the use of ionic liquids and the deposition of MnO 2 thin film onto robust and efficient 3D scaffolds.

Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1426213
Alternate ID(s):
OSTI ID: 1375651
Journal Information:
Advanced Materials Technologies, Vol. 2, Issue 10; ISSN 2365-709X
Publisher:
WileyCopyright Statement
Country of Publication:
United States
Language:
English
Citation Metrics:
Cited by: 72 works
Citation information provided by
Web of Science

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Cited By (12)

The Road Towards Planar Microbatteries and Micro‐Supercapacitors: From 2D to 3D Device Geometries journal June 2019
Graphene-Based Planar Microsupercapacitors: Recent Advances and Future Challenges journal October 2018
Aligned Ionogel Electrolytes for High-Temperature Supercapacitors journal January 2019
Water-Soluble Hybrid Graphene Ink for Gravure-Printed Planar Supercapacitors journal June 2018
Thick Binder-Free Electrodes for Li-Ion Battery Fabricated Using Templating Approach and Spark Plasma Sintering Reveals High Areal Capacity journal January 2018
Stretchable Supercapacitors as Emergent Energy Storage Units for Health Monitoring Bioelectronics journal December 2019
Advances on three‐dimensional electrodes for micro‐supercapacitors: A mini‐review journal March 2019
3D Interdigitated Microsupercapacitors with Record Areal Cell Capacitance journal April 2019
Recent Progress in Micro‐Supercapacitor Design, Integration, and Functionalization journal December 2018
Novel insights into the charge storage mechanism in pseudocapacitive vanadium nitride thick films for high-performance on-chip micro-supercapacitors journal January 2020
Photolithographic fabrication of graphene-based all-solid-state planar on-chip microsupercapacitors with ultrahigh power characteristics journal October 2019
Cation Molecular Structure Affects Mobility and Transport of Electrolytes in Porous Carbons journal January 2019

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77 NANOSCIENCE AND NANOTECHNOLOGY
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