High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes
Abstract
The fabrication of high performance on-chip 3D micro-supercapacitors (MSCs) based on MnO2 pseudocapacitive binder-free thin film electrodes (< 500 nm thick) with interdigitated topology is reported. An original technological process easily scalable to pilot production line is proposed on 3-inch silicon wafers. High areal energy (> 10 μWh.cm-2) and power densities (> 10 mW.cm-2) are reached on small footprint micro-supercapacitors (4 mm2) tested in aqueous electrolyte (0.8 V). Furthermore, the cell voltage of such MSC can be increased up to 1.5 V with EMI TFSI ionic liquids but at the expense of the areal capacitance. The performance in ionic liquid is in the same order of magnitude than the one obtained for aqueous electrolyte. The benefit from the 3D topology is clearly demonstrated when the surface performance are normalized to the electrode thickness allowing to obtain an interesting energy vs power tradeoff (> 10 μWh.cm-2 μm-1 and > 1 mw.cm-2 μm-1). Here, this paper aims at improving the energy density of MSCs while keeping high power capability, by combining the use of ionic liquids and the deposition of MnO2 thin film onto robust and efficient 3D scaffolds.
- Authors:
-
- Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
- Univ. de Nantes, Nantes (France). Inst. des Materiaux Jean Rouxel (IMN); Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
- Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France); Univ. de Picardie Jules Verne, Amiens (France)
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Univ. de Lille, Lille (France). Inst. d'Electronique, de Microelectronique et de Nanotechnologies; Reseau sur le Stockage Electrochimique de l'Energie (RS2E), Amiens (France)
- Publication Date:
- Research Org.:
- Argonne National Lab. (ANL), Argonne, IL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1426213
- Alternate Identifier(s):
- OSTI ID: 1375651
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Advanced Materials Technologies
- Additional Journal Information:
- Journal Volume: 2; Journal Issue: 10; Journal ID: ISSN 2365-709X
- Publisher:
- Wiley
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 3D silicon microtubes; interdigitated electrodes; micro-supercapacitors; pseudocapacitance; X-ray nanotomography
Citation Formats
Eustache, Etienne, Douard, Camille, Demortière, Arnaud, De Andrade, Vincent, Brachet, Mylene, Le Bideau, Jean, Brousse, Thierry, and Lethien, Christophe. High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes. United States: N. p., 2017.
Web. doi:10.1002/admt.201700126.
Eustache, Etienne, Douard, Camille, Demortière, Arnaud, De Andrade, Vincent, Brachet, Mylene, Le Bideau, Jean, Brousse, Thierry, & Lethien, Christophe. High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes. United States. https://doi.org/10.1002/admt.201700126
Eustache, Etienne, Douard, Camille, Demortière, Arnaud, De Andrade, Vincent, Brachet, Mylene, Le Bideau, Jean, Brousse, Thierry, and Lethien, Christophe. Mon .
"High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes". United States. https://doi.org/10.1002/admt.201700126. https://www.osti.gov/servlets/purl/1426213.
@article{osti_1426213,
title = {High Areal Energy 3D-Interdigitated Micro-Supercapacitors in Aqueous and Ionic Liquid Electrolytes},
author = {Eustache, Etienne and Douard, Camille and Demortière, Arnaud and De Andrade, Vincent and Brachet, Mylene and Le Bideau, Jean and Brousse, Thierry and Lethien, Christophe},
abstractNote = {The fabrication of high performance on-chip 3D micro-supercapacitors (MSCs) based on MnO2 pseudocapacitive binder-free thin film electrodes (< 500 nm thick) with interdigitated topology is reported. An original technological process easily scalable to pilot production line is proposed on 3-inch silicon wafers. High areal energy (> 10 μWh.cm-2) and power densities (> 10 mW.cm-2) are reached on small footprint micro-supercapacitors (4 mm2) tested in aqueous electrolyte (0.8 V). Furthermore, the cell voltage of such MSC can be increased up to 1.5 V with EMI TFSI ionic liquids but at the expense of the areal capacitance. The performance in ionic liquid is in the same order of magnitude than the one obtained for aqueous electrolyte. The benefit from the 3D topology is clearly demonstrated when the surface performance are normalized to the electrode thickness allowing to obtain an interesting energy vs power tradeoff (> 10 μWh.cm-2 μm-1 and > 1 mw.cm-2 μm-1). Here, this paper aims at improving the energy density of MSCs while keeping high power capability, by combining the use of ionic liquids and the deposition of MnO2 thin film onto robust and efficient 3D scaffolds.},
doi = {10.1002/admt.201700126},
journal = {Advanced Materials Technologies},
number = 10,
volume = 2,
place = {United States},
year = {2017},
month = {8}
}
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