Focussed helium ion channeling through Si nanomembranes

Wang, Jiaming; Huang, Symphony H. Y.; Herrmann, Christoph; Scott, Shelley A.; Schiettekatte, François; Kavanagh, Karen L.

doi:10.1116/1.5020667

Title: Focussed helium ion channeling through Si nanomembranes

Journal Article · 01 March 2018 · Journal of Vacuum Science and Technology B

DOI: https://doi.org/10.1116/1.5020667 · OSTI ID:1426006

Wang, Jiaming ^[1]; Huang, Symphony H. Y. ^[1]; Herrmann, Christoph ^[1]; Scott, Shelley A. ^[2]; Schiettekatte, François ^[3]; Kavanagh, Karen L. ^[1]

Department of Physics, Simon Fraser University, Burnaby, British Columbia V5A 1S6, Canada
Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
Department of Physics, University of Montreal, Montreal, Quebec, Canada H3T 1J4

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Sponsoring Organization:: USDOE

OSTI ID:: 1426006

Journal Information:: Journal of Vacuum Science and Technology B, Journal Name: Journal of Vacuum Science and Technology B Vol. 36 Journal Issue: 2; ISSN 2166-2746

Publisher:: American Vacuum SocietyCopyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 13 works

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References (9)

Channeling in helium ion microscopy: Mapping of crystal orientation Veligura, Vasilisa; Hlawacek, Gregor; van Gastel, Raoul Beilstein Journal of Nanotechnology, Vol. 3 https://doi.org/10.3762/bjnano.3.57	journal	January 2012
Fundamental limits to detection of low-energy ions using silicon solid-state detectors Funsten, H. O.; Ritzau, S. M.; Harper, R. W. Applied Physics Letters, Vol. 84, Issue 18 https://doi.org/10.1063/1.1719272	journal	May 2004
Dark-Field Scanning Transmission Ion Microscopy via Detection of Forward-Scattered Helium Ions with a Microchannel Plate Woehl, Taylor J.; White, Ryan M.; Keller, Robert R. Microscopy and Microanalysis, Vol. 22, Issue 3 https://doi.org/10.1017/S1431927616000775	journal	May 2016
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Livengood, Richard; Tan, Shida; Greenzweig, Yuval Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 27, Issue 6 https://doi.org/10.1116/1.3237101	journal	January 2009
Reduction in Modulus of Suspended Sub-2 nm Single Crystalline Silicon Nanomembranes Zhu, Xiaodong; Lu, Jiwu; Pan, Haihua Advanced Materials Interfaces, Vol. 4, Issue 19 https://doi.org/10.1002/admi.201700529	journal	July 2017
50 years of ion channeling in materials science Vantomme, André Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 371 https://doi.org/10.1016/j.nimb.2015.11.035	journal	March 2016
Capturing Structural Dynamics in Crystalline Silicon Using Chirped Electrons from a Laser Wakefield Accelerator He, Z. -H.; Beaurepaire, B.; Nees, J. A. Scientific Reports, Vol. 6, Issue 1 https://doi.org/10.1038/srep36224	journal	November 2016
Camera for transmission He⁺ ion microscopy Kavanagh, Karen L.; Herrmann, Christoph; Notte, John A. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 35, Issue 6 https://doi.org/10.1116/1.4991898	journal	November 2017
Edge-induced flattening in the fabrication of ultrathin freestanding crystalline silicon sheets Gopalakrishnan, Gokul; Czaplewski, David A.; McElhinny, Kyle M. Applied Physics Letters, Vol. 102, Issue 3 https://doi.org/10.1063/1.4789553	journal	January 2013

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