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This content will become publicly available on March 14, 2019

Title: Focussed helium ion channeling through Si nanomembranes

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [3] ;  [1]
  1. Department of Physics, Simon Fraser University, Burnaby, British Columbia V5A 1S6, Canada
  2. Department of Materials Science and Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706
  3. Department of Physics, University of Montreal, Montreal, Quebec, Canada H3T 1J4
Publication Date:
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. B, Nanotechnology and Microelectronics
Additional Journal Information:
Journal Volume: 36; Journal Issue: 2; Related Information: CHORUS Timestamp: 2018-03-14 09:55:33; Journal ID: ISSN 2166-2746
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1426006