Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies
Abstract
A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. In conclusion, the high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.
- Authors:
-
- Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
- Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
- Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
- Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
- Publication Date:
- Research Org.:
- Bettis Atomic Power Lab. (BAPL), West Mifflin, PA (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; USDOE
- OSTI Identifier:
- 1425212
- Alternate Identifier(s):
- OSTI ID: 1424823
- Grant/Contract Number:
- AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 89; Journal Issue: 3; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., and Fong, Dillon D. Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies. United States: N. p., 2018.
Web. doi:10.1063/1.5008369.
Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., & Fong, Dillon D. Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies. United States. https://doi.org/10.1063/1.5008369
Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., and Fong, Dillon D. Thu .
"Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies". United States. https://doi.org/10.1063/1.5008369. https://www.osti.gov/servlets/purl/1425212.
@article{osti_1425212,
title = {Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies},
author = {Andersen, Tassie K. and Cook, Seyoung and Benda, Erika and Hong, Hawoong and Marks, Laurence D. and Fong, Dillon D.},
abstractNote = {A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. In conclusion, the high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.},
doi = {10.1063/1.5008369},
journal = {Review of Scientific Instruments},
number = 3,
volume = 89,
place = {United States},
year = {Thu Mar 08 00:00:00 EST 2018},
month = {Thu Mar 08 00:00:00 EST 2018}
}
Web of Science
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