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Title: Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies

Abstract

A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. In conclusion, the high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO 3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.

Authors:
 [1];  [1]; ORCiD logo [2];  [2];  [3];  [4]
  1. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
  2. Argonne National Lab. (ANL), Argonne, IL (United States). Advanced Photon Source (APS)
  3. Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science and Engineering
  4. Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
Publication Date:
Research Org.:
Bettis Atomic Power Laboratory (BAPL), West Mifflin, PA (United States)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22). Materials Sciences & Engineering Division; USDOE
OSTI Identifier:
1425212
Alternate Identifier(s):
OSTI ID: 1424823
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 89; Journal Issue: 3; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE

Citation Formats

Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., and Fong, Dillon D. Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies. United States: N. p., 2018. Web. doi:10.1063/1.5008369.
Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., & Fong, Dillon D. Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies. United States. doi:10.1063/1.5008369.
Andersen, Tassie K., Cook, Seyoung, Benda, Erika, Hong, Hawoong, Marks, Laurence D., and Fong, Dillon D. Thu . "Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies". United States. doi:10.1063/1.5008369. https://www.osti.gov/servlets/purl/1425212.
@article{osti_1425212,
title = {Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies},
author = {Andersen, Tassie K. and Cook, Seyoung and Benda, Erika and Hong, Hawoong and Marks, Laurence D. and Fong, Dillon D.},
abstractNote = {A portable metalorganic gas delivery system designed and constructed to interface with an existing molecular beam epitaxy chamber at beamline 33-ID-E of the Advanced Photon Source is described. This system offers the ability to perform in situ X-ray measurements of complex oxide growth via hybrid molecular beam epitaxy. The performance of the hybrid molecular beam epitaxy system while delivering metalorganic source materials is described. In conclusion, the high-energy X-ray scattering capabilities of the hybrid molecular beam epitaxy system are demonstrated both on oxide films grown solely from the metalorganic source and ABO3 oxide perovskites containing elements from both the metalorganic source and a traditional effusion cell.},
doi = {10.1063/1.5008369},
journal = {Review of Scientific Instruments},
number = 3,
volume = 89,
place = {United States},
year = {2018},
month = {3}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Figures / Tables:

Figure 1 Figure 1: Schematic depiction of the in-situ X-ray system for hybrid MBE growth. The oxide MBE chamber is mounted on a sixcircle diffractometer with the axes of motion indicated.31

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    Figures/Tables have been extracted from DOE-funded journal article accepted manuscripts.