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Title: Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [5] ;  [6] ;  [7] ;  [8] ;  [9] ;  [10]
  1. Département de Physique et Mécanique des Matériaux, Institut Pprime, UPR 3346, CNRS-Université de Poitiers-ENSMA, SP2MI, Téléport 2, F86962 Futuroscope-Chasseneuil, France
  2. School of Engineering, Brown University, Providence, Rhode Island 02912-9104
  3. Department of Materials Physics, Montanuniversität Leoben and Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Leoben 8700, Austria
  4. Engineering Department, University of Rome “ROMA TRE,” Via della Vasca Navale 79, Rome 00147, Italy
  5. Department of Metallurgical and Materials Engineering, The University of Alabama, P.O. Box 870202, Tuscaloosa, Alabama 35487-0202
  6. Laboratoire Sciences et Ingénierie de la Matière Molle, ESPCI Paris, PSL University, Sorbonne Université, CNRS, F-75005 Paris, France
  7. Mechanical Engineering Department, The University of Akron, Akron, Ohio 44325-0406
  8. IBM T.J. Watson Research Center, Yorktown Heights, New York 10598
  9. Eastman Chemical Co., 3788 Fabian Way, Palo Alto, California 94303
  10. Department of Engineering Physics, Polytechnique Montréal, Montreal, Quebec H3T 1J4, Canada
Publication Date:
Grant/Contract Number:
SC0008799
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Additional Journal Information:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films Journal Volume: 36 Journal Issue: 2; Journal ID: ISSN 0734-2101
Publisher:
American Vacuum Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English
OSTI Identifier:
1423721

Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., and Martinu, Ludvik. Review Article: Stress in thin films and coatings: Current status, challenges, and prospects. United States: N. p., Web. doi:10.1116/1.5011790.
Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., & Martinu, Ludvik. Review Article: Stress in thin films and coatings: Current status, challenges, and prospects. United States. doi:10.1116/1.5011790.
Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., and Martinu, Ludvik. 2018. "Review Article: Stress in thin films and coatings: Current status, challenges, and prospects". United States. doi:10.1116/1.5011790.
@article{osti_1423721,
title = {Review Article: Stress in thin films and coatings: Current status, challenges, and prospects},
author = {Abadias, Grégory and Chason, Eric and Keckes, Jozef and Sebastiani, Marco and Thompson, Gregory B. and Barthel, Etienne and Doll, Gary L. and Murray, Conal E. and Stoessel, Chris H. and Martinu, Ludvik},
abstractNote = {},
doi = {10.1116/1.5011790},
journal = {Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films},
number = 2,
volume = 36,
place = {United States},
year = {2018},
month = {3}
}