Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
Abstract
The issue of stress in thin films and functional coatings is a persistent problem in materials science and technology that has congregated many efforts, both from experimental and fundamental points of view, to get a better understanding on how to deal with, how to tailor, and how to manage stress in many areas of applications. With the miniaturization of device components, the quest for increasingly complex film architectures and multiphase systems and the continuous demands for enhanced performance, there is a need toward the reliable assessment of stress on a submicron scale from spatially resolved techniques. Also, the stress evolution during film and coating synthesis using physical vapor deposition (PVD), chemical vapor deposition, plasma enhanced chemical vapor deposition (PECVD), and related processes is the result of many interrelated factors and competing stress sources so that the task to provide a unified picture and a comprehensive model from the vast amount of stress data remains very challenging. This article summarizes the recent advances, challenges, and prospects of both fundamental and applied aspects of stress in thin films and engineering coatings and systems, based on recent achievements presented during the 2016 Stress Workshop entitled “Stress Evolution in Thin Films and Coatings: frommore »
- Authors:
-
- CNRS-Université de Poitiers-ENSMA (France)
- Brown Univ., Providence, RI (United States)
- Montanuniversität Leoben and Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Leoben (Austria)
- University of Rome “ROMA TRE,” (Italy)
- Univ. of Alabama, Tuscaloosa, AL (United States)
- PSL University, Sorbonne Université, CNRS, Paris (France)
- Univ. of Akron, OH (United States)
- IBM T.J. Watson Research Center, Yorktown Heights, NY (United States)
- Eastman Chemical Co., Palo Alto, CA (United States)
- Polytechnique Montréal, Montreal, Quebec (Canada)
- Publication Date:
- Research Org.:
- Brown Univ., Providence, RI (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1499940
- Alternate Identifier(s):
- OSTI ID: 1423721
- Grant/Contract Number:
- SC0008799
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Vacuum Science and Technology A
- Additional Journal Information:
- Journal Volume: 36; Journal Issue: 2; Journal ID: ISSN 0734-2101
- Publisher:
- American Vacuum Society
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE
Citation Formats
Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., and Martinu, Ludvik. Review Article: Stress in thin films and coatings: Current status, challenges, and prospects. United States: N. p., 2018.
Web. doi:10.1116/1.5011790.
Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., & Martinu, Ludvik. Review Article: Stress in thin films and coatings: Current status, challenges, and prospects. United States. https://doi.org/10.1116/1.5011790
Abadias, Grégory, Chason, Eric, Keckes, Jozef, Sebastiani, Marco, Thompson, Gregory B., Barthel, Etienne, Doll, Gary L., Murray, Conal E., Stoessel, Chris H., and Martinu, Ludvik. Mon .
"Review Article: Stress in thin films and coatings: Current status, challenges, and prospects". United States. https://doi.org/10.1116/1.5011790. https://www.osti.gov/servlets/purl/1499940.
@article{osti_1499940,
title = {Review Article: Stress in thin films and coatings: Current status, challenges, and prospects},
author = {Abadias, Grégory and Chason, Eric and Keckes, Jozef and Sebastiani, Marco and Thompson, Gregory B. and Barthel, Etienne and Doll, Gary L. and Murray, Conal E. and Stoessel, Chris H. and Martinu, Ludvik},
abstractNote = {The issue of stress in thin films and functional coatings is a persistent problem in materials science and technology that has congregated many efforts, both from experimental and fundamental points of view, to get a better understanding on how to deal with, how to tailor, and how to manage stress in many areas of applications. With the miniaturization of device components, the quest for increasingly complex film architectures and multiphase systems and the continuous demands for enhanced performance, there is a need toward the reliable assessment of stress on a submicron scale from spatially resolved techniques. Also, the stress evolution during film and coating synthesis using physical vapor deposition (PVD), chemical vapor deposition, plasma enhanced chemical vapor deposition (PECVD), and related processes is the result of many interrelated factors and competing stress sources so that the task to provide a unified picture and a comprehensive model from the vast amount of stress data remains very challenging. This article summarizes the recent advances, challenges, and prospects of both fundamental and applied aspects of stress in thin films and engineering coatings and systems, based on recent achievements presented during the 2016 Stress Workshop entitled “Stress Evolution in Thin Films and Coatings: from Fundamental Understanding to Control.” Evaluation methods, implying wafer curvature, x-ray diffraction, or focused ion beam removal techniques, are reviewed. Selected examples of stress evolution in elemental and alloyed systems, graded layers, and multilayer-stacks as well as amorphous films deposited using a variety of PVD and PECVD techniques are highlighted. Based on mechanisms uncovered by in situ and real-time diagnostics, a kinetic model is outlined that is capable of reproducing the dependence of intrinsic (growth) stress on the grain size, growth rate, and deposited energy. The problems and solutions related to stress in the context of optical coatings, inorganic coatings on plastic substrates, and tribological coatings for aerospace applications are critically examined. This review also suggests strategies to mitigate excessive stress levels from novel coating synthesis perspectives to microstructural design approaches, including the ability to empower crack-based fabrication processes, pathways leading to stress relaxation and compensation, as well as management of the film and coating growth conditions with respect to energetic ion bombardment. Future opportunities and challenges for stress engineering and stress modeling are considered and outlined.},
doi = {10.1116/1.5011790},
journal = {Journal of Vacuum Science and Technology A},
number = 2,
volume = 36,
place = {United States},
year = {Mon Mar 05 00:00:00 EST 2018},
month = {Mon Mar 05 00:00:00 EST 2018}
}
Web of Science
Works referenced in this record:
Mechanical behaviour of metallic thin films on polymeric substrates and the effect of ion beam assistance on crack propagation
journal, January 2005
- George, M.; Coupeau, C.; Colin, J.
- Acta Materialia, Vol. 53, Issue 2
The influence of a brittle Cr interlayer on the deformation behavior of thin Cu films on flexible substrates: Experiment and model
journal, May 2015
- Marx, Vera M.; Toth, Florian; Wiesinger, Andreas
- Acta Materialia, Vol. 89
Atomic force microscopy study of the morphological shape of thin film buckling
journal, March 2002
- Coupeau, C.
- Thin Solid Films, Vol. 406, Issue 1-2
An experimental study of the influence of imperfections on the buckling of compressed thin films
journal, March 2002
- Moon, M. -W.; Chung, J. -W.; Lee, K. -R.
- Acta Materialia, Vol. 50, Issue 5
How soft substrates affect the buckling delamination of thin films through crack front sink-in
journal, April 2017
- Boijoux, R.; Parry, G.; Faou, J. -Y.
- Applied Physics Letters, Vol. 110, Issue 14
From telephone cords to branched buckles: A phase diagram
journal, February 2017
- Faou, Jean-Yvon; Grachev, Sergey; Barthel, Etienne
- Acta Materialia, Vol. 125
Modelling, production and characterisation of duplex coatings (HVOF and PVD) on Ti–6Al–4V substrate for specific mechanical applications
journal, June 2007
- Bemporad, E.; Sebastiani, M.; Casadei, F.
- Surface and Coatings Technology, Vol. 201, Issue 18
SiN x coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress
journal, May 2017
- Schmidt, S.; Hänninen, T.; Wissting, J.
- Journal of Applied Physics, Vol. 121, Issue 17
Comparative study of the mechanical properties of nanostructured thin films on stretchable substrates
journal, September 2014
- Djaziri, S.; Renault, P. -O.; Le Bourhis, E.
- Journal of Applied Physics, Vol. 116, Issue 9
Making metallic glasses plastic by control of residual stress
journal, October 2006
- Zhang, Y.; Wang, W. H.; Greer, A. L.
- Nature Materials, Vol. 5, Issue 11
Stress analyses of high spatial resolution on TSV and BEoL structures
journal, September 2014
- Vogel, D.; Auerswald, E.; Auersperg, J.
- Microelectronics Reliability, Vol. 54, Issue 9-10
A methodology for determining mechanical properties of freestanding thin films and MEMS materials
journal, January 2003
- Espinosa, H. D.; Prorok, B. C.; Fischer, M.
- Journal of the Mechanics and Physics of Solids, Vol. 51, Issue 1
Electromigration in thin aluminum films on titanium nitride
journal, April 1976
- Blech, I. A.
- Journal of Applied Physics, Vol. 47, Issue 4, p. 1203-1208
Growth of whiskers from Sn surfaces: Driving forces and growth mechanisms
journal, May 2013
- Chason, Eric; Jadhav, Nitin; Pei, Fei
- Progress in Surface Science, Vol. 88, Issue 2
Direct measurement of residual stress in sub-micron interconnects
journal, August 2003
- Horsfall, A. B.; Santos, J. M. M. dos; Soare, S. M.
- Semiconductor Science and Technology, Vol. 18, Issue 11
Quantifying the Effect of Stress on Sn Whisker Nucleation Kinetics
journal, September 2017
- Chason, Eric; Vasquez, Justin; Pei, Fei
- Journal of Electronic Materials, Vol. 47, Issue 1
Enhanced Proton Conductivity in Y-Doped BaZrO 3 via Strain Engineering
journal, October 2017
- Fluri, Aline; Marcolongo, Aris; Roddatis, Vladimir
- Advanced Science, Vol. 4, Issue 12
Growth stress induced tunability of dielectric permittivity in thin films
journal, January 2016
- Narayanachari, K. V. L. V.; Chandrasekar, Hareesh; Banerjee, Amiya
- Journal of Applied Physics, Vol. 119, Issue 1
The correlation between mechanical stress and magnetic anisotropy in ultrathin films
journal, January 1999
- Sander, D.
- Reports on Progress in Physics, Vol. 62, Issue 5
The role of surface stress in structural transitions, epitaxial growth and magnetism on the nanoscale
journal, March 2009
- Sander, Dirk; Tian, Zhen; Kirschner, Jürgen
- Journal of Physics: Condensed Matter, Vol. 21, Issue 13
Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors
journal, January 2005
- Lee, Minjoo L.; Fitzgerald, Eugene A.; Bulsara, Mayank T.
- Journal of Applied Physics, Vol. 97, Issue 1
Tutorial: Understanding residual stress in polycrystalline thin films through real-time measurements and physical models
journal, May 2016
- Chason, Eric; Guduru, Pradeep R.
- Journal of Applied Physics, Vol. 119, Issue 19
Stress-related effects in thin films
journal, April 1989
- Thornton, John A.; Hoffman, D. W.
- Thin Solid Films, Vol. 171, Issue 1
The Tension of Metallic Films Deposited by Electrolysis
journal, May 1909
- Stoney, G. G.
- Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, Vol. 82, Issue 553
Intrinsic Stress in Evaporated Metal Films
journal, January 1968
- Klokholm, E.; Berry, B. S.
- Journal of The Electrochemical Society, Vol. 115, Issue 8
Aluminum films deposited by rf sputtering
journal, March 1970
- D’Heurle, F. M.
- Metallurgical and Materials Transactions B, Vol. 1, Issue 3
The origins of stress in thin nickel films
journal, September 1972
- Doljack, F. A.; Hoffman, R. W.
- Thin Solid Films, Vol. 12, Issue 1
Structure and internal stress in ultra-thin silver films deposited on MgF2 and SiO substrates
journal, July 1978
- Abermann, R.; Kramer, R.; Mäser, J.
- Thin Solid Films, Vol. 52, Issue 2
The dynamic competition between stress generation and relaxation mechanisms during coalescence of Volmer–Weber thin films
journal, May 2001
- Floro, J. A.; Hearne, S. J.; Hunter, J. A.
- Journal of Applied Physics, Vol. 89, Issue 9
Internal interfaces and intrinsic stress in thin amorphous Cu-Ti and Co-Tb films
journal, March 1998
- Geyer, U.; von Hülsen, U.; Kopf, H.
- Journal of Applied Physics, Vol. 83, Issue 6
Stress in Evaporated and Sputtered Thin Films – A Comparison
journal, March 2010
- Koch, R.
- Surface and Coatings Technology, Vol. 204, Issue 12-13
Real-time stress evolution during early growth stages of sputter-deposited metal films: Influence of adatom mobility
journal, February 2014
- Abadias, G.; Fillon, A.; Colin, J. J.
- Vacuum, Vol. 100
Quantitative correlation between intrinsic stress and microstructure of thin films
journal, April 2016
- Depla, D.; Braeckman, B. R.
- Thin Solid Films, Vol. 604
Role of atomic migration in nanocrystalline stability: Grain size and thin film stress states
journal, April 2015
- Kapoor, Monica; Thompson, Gregory B.
- Current Opinion in Solid State and Materials Science, Vol. 19, Issue 2
Intrinsic stress response of low and high mobility solute additions to Cu thin films
journal, December 2017
- Kaub, Tyler; Anthony, Ryan; Thompson, Gregory B.
- Journal of Applied Physics, Vol. 122, Issue 22
In Situ Thin Film Growth Stresses during Chemical Ordering
journal, August 2010
- Fu, B.; An, W.; Turner, C. H.
- Physical Review Letters, Vol. 105, Issue 9
Influence of Phase Transformation on Stress Evolution during Growth of Metal Thin Films on Silicon
journal, March 2010
- Fillon, A.; Abadias, G.; Michel, A.
- Physical Review Letters, Vol. 104, Issue 9
Epitaxial growth of Cu(001) thin films onto Si(001) using a single-step HiPIMS process
journal, May 2017
- Cemin, Felipe; Lundin, Daniel; Furgeaud, Clarisse
- Scientific Reports, Vol. 7, Issue 1
A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering
journal, October 2014
- Greczynski, G.; Lu, J.; Jensen, J.
- Surface and Coatings Technology, Vol. 257
Extended metastable Al solubility in cubic VAlN by metal-ion bombardment during pulsed magnetron sputtering: film stress vs subplantation
journal, July 2017
- Greczynski, G.; Mráz, S.; Ruess, H.
- Journal of Applied Physics, Vol. 122, Issue 2
Critical ion energy and ion flux in the growth of films by plasma‐enhanced chemical‐vapor deposition
journal, July 1994
- Martinu, L.; Klemberg‐Sapieha, J. E.; Küttel, O. M.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 12, Issue 4
Microstructure-controlled depth gradients of mechanical properties in thin nanocrystalline films: Towards structure-property gradient functionalization
journal, June 2015
- Daniel, R.; Zeilinger, A.; Schöberl, T.
- Journal of Applied Physics, Vol. 117, Issue 23
Nanoscale holographic interferometry for strain measurements in electronic devices
journal, June 2008
- Hÿtch, Martin; Houdellier, Florent; Hüe, Florian
- Nature, Vol. 453, Issue 7198
Stress evolution and cracking of crystalline diamond thin films on ductile titanium substrate: Analysis by micro-Raman spectroscopy and analytical modelling
journal, August 2011
- Ahmed, F.; Bayerlein, K.; Rosiwal, S. M.
- Acta Materialia, Vol. 59, Issue 14
High-resolution elastic strain measurement from electron backscatter diffraction patterns: New levels of sensitivity
journal, March 2006
- Wilkinson, Angus J.; Meaden, Graham; Dingley, David J.
- Ultramicroscopy, Vol. 106, Issue 4-5
Erratum to: “The role of surface stress in reconstruction, epitaxial growth and stabilization of mesoscopic structures” [Surf. Sci. Rep. 29 (1997) 193]
journal, October 1999
- Ibach, Harald
- Surface Science Reports, Vol. 35, Issue 1-2
Effect of mesoscopic misfit on growth, morphology, electronic properties and magnetism of nanostructures at metallic surfaces
journal, December 2014
- Brovko, Oleg O.; Bazhanov, Dmitry I.; Meyerheim, Holger L.
- Surface Science Reports, Vol. 69, Issue 4
Plasma deposition of optical films and coatings: A review
journal, November 2000
- Martinu, Ludvik; Poitras, Daniel
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 18, Issue 6
Stresses and deformation processes in thin films on substrates
journal, January 1988
- Doerner, Mary F.; Nix, William D.
- Critical Reviews in Solid State and Materials Sciences, Vol. 14, Issue 3
The intrinsic stress of polycrystalline and epitaxial thin metal films
journal, November 1994
- Koch, R.
- Journal of Physics: Condensed Matter, Vol. 6, Issue 45
Intrinsic Compressive Stress in Polycrystalline Films is Localized at Edges of the Grain Boundaries
journal, December 2017
- Vasco, Enrique; Polop, Celia
- Physical Review Letters, Vol. 119, Issue 25
Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers
journal, August 1996
- Shen, Y. ‐L.; Suresh, S.; Blech, I. A.
- Journal of Applied Physics, Vol. 80, Issue 3
Surface and interface stress effects in thin films
journal, May 1994
- Cammarata, Robert C.
- Progress in Surface Science, Vol. 46, Issue 1, p. 1-38
Measuring Ge segregation by real‐time stress monitoring during Si 1− x Ge x molecular beam epitaxy
journal, December 1996
- Floro, J. A.; Chason, E.
- Applied Physics Letters, Vol. 69, Issue 25
Influence of segregation on the measurement of stress in thin films
journal, March 2002
- Thomas, O.; Müller, P.; Gergaud, P.
- Journal of Applied Physics, Vol. 91, Issue 5
Origin of Compressive Residual Stress in Polycrystalline Thin Films
journal, March 2002
- Chason, E.; Sheldon, B. W.; Freund, L. B.
- Physical Review Letters, Vol. 88, Issue 15, Article No. 156103
A UHV‐compatible thin‐film stress‐measuring apparatus based on the cantilever beam principle
journal, December 1990
- Koch, R.; Leonhard, H.; Thurner, G.
- Review of Scientific Instruments, Vol. 61, Issue 12
Reversible Stress Relaxation during Precoalescence Interruptions of Volmer-Weber Thin Film Growth
journal, September 2002
- Friesen, C.; Thompson, C. V.
- Physical Review Letters, Vol. 89, Issue 12
Effect of ion bombardment on stress in thin metal films
journal, December 2003
- Mayr, S. G.; Averback, R. S.
- Physical Review B, Vol. 68, Issue 21
An Apparatus for Measuring Stress in Thin Films
journal, August 1969
- Klokholm, E.
- Review of Scientific Instruments, Vol. 40, Issue 8
Full field measurements of curvature using coherent gradient sensing: application to thin film characterization
journal, July 1998
- Rosakis, A. J.; Singh, R. P.; Tsuji, Y.
- Thin Solid Films, Vol. 325, Issue 1-2
In Situ Stress Measurements during Copper Electrodeposition on (111)-Textured Au
journal, January 2005
- Kongstein, O. E.; Bertocci, U.; Stafford, G. R.
- Journal of The Electrochemical Society, Vol. 152, Issue 3
Mechanical stresses in (sub)monolayer epitaxial films
journal, February 1990
- Schell-Sorokin, A.; Tromp, R.
- Physical Review Letters, Vol. 64, Issue 9
Real-time stress evolution during Si1-xGex Heteroepitaxy: Dislocations, islanding, and segregation
journal, September 1997
- Floro, J. A.; Chason, E.; Lee, S. R.
- Journal of Electronic Materials, Vol. 26, Issue 9
On the use of a multiple beam optical sensor for in situ curvature monitoring in liquids
journal, April 2010
- Van Overmeere, Q.; Vanhumbeeck, J. -F.; Proost, J.
- Review of Scientific Instruments, Vol. 81, Issue 4
Measurements of the Phase and Stress Evolution during Initial Lithiation of Sn Electrodes
journal, January 2017
- Chen, Chun-Hao; Chason, Eric; Guduru, Pradeep R.
- Journal of The Electrochemical Society, Vol. 164, Issue 4
Simultaneous determination of experimental elastic and thermal strains in thin films
journal, March 2005
- Keckes, Jozef
- Journal of Applied Crystallography, Vol. 38, Issue 2
The determination of stresses in thin films; modelling elastic grain interaction
journal, January 2003
- Welzel, U.; Leoni, M.; Mittemeijer, E. J.
- Philosophical Magazine, Vol. 83, Issue 5
Berechnung der Fließgrenze von Mischkristallen auf Grund der Plastizitätsbedingung für Einkristalle .
journal, January 1929
- Reuss, A.
- ZAMM - Zeitschrift für Angewandte Mathematik und Mechanik, Vol. 9, Issue 1
The Elastic Behaviour of a Crystalline Aggregate
journal, May 1952
- Hill, R.
- Proceedings of the Physical Society. Section A, Vol. 65, Issue 5
An analysis technique for extraction of thin film stresses from x-ray data
journal, November 1997
- Cornella, Guido; Lee, Seok-Hee; Nix, William D.
- Applied Physics Letters, Vol. 71, Issue 20
Stress field in sputtered thin films: Ion irradiation as a tool to induce relaxation and investigate the origin of growth stress
journal, June 2004
- Debelle, A.; Abadias, G.; Michel, A.
- Applied Physics Letters, Vol. 84, Issue 24
Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction
journal, January 2005
- Welzel, U.; Ligot, J.; Lamparter, P.
- Journal of Applied Crystallography, Vol. 38, Issue 1
X-Ray Stress Gradient Analysis in Thin Layers — Problems and Attempts at Their Solution
journal, February 1997
- Genzel, Ch.
- physica status solidi (a), Vol. 159, Issue 2
X-ray residual stress measurements on cold-drawn steel wire
journal, October 1982
- Willemse, P. F.; Naughton, B. P.; Verbraak, C. A.
- Materials Science and Engineering, Vol. 56, Issue 1
Directed sputter deposition of AlCu: Film microstructure and microchemistry
journal, November 1994
- Kim, Y. ‐W.; Moser, J.; Petrov, I.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 12, Issue 6
X-ray residual stress analysis in thin films under grazing incidence – basic aspects and applications
journal, January 2005
- Genzel, Ch.
- Materials Science and Technology, Vol. 21, Issue 1
X-ray nanodiffraction reveals strain and microstructure evolution in nanocrystalline thin films
journal, November 2012
- Keckes, J.; Bartosik, M.; Daniel, R.
- Scripta Materialia, Vol. 67, Issue 9
X-ray analysis of residual stress gradients in TiN coatings by a Laplace space approach and cross-sectional nanodiffraction: a critical comparison
journal, August 2013
- Stefenelli, Mario; Todt, Juraj; Riedl, Angelika
- Journal of Applied Crystallography, Vol. 46, Issue 5
In-situ Observation of Cross-Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation
journal, March 2016
- Zeilinger, Angelika; Todt, Juraj; Krywka, Christina
- Scientific Reports, Vol. 6, Issue 1
Implementation and Development of the Incremental Hole Drilling Method for the Measurement of Residual Stress in Thermal Spray Coatings
journal, December 2005
- Valente, T.; Bartuli, C.; Sebastiani, M.
- Journal of Thermal Spray Technology, Vol. 14, Issue 4
A method for in situ measurement of the residual stress in thin films by using the focused ion beam
journal, October 2003
- Kang, K. J.; Yao, N.; He, M. Y.
- Thin Solid Films, Vol. 443, Issue 1-2
Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution
journal, April 2007
- Sabate, Neus; Vogel, Dietmar; Gollhardt, Astrid
- Journal of Microelectromechanical Systems, Vol. 16, Issue 2
Focused ion beam ring drilling for residual stress evaluation
journal, September 2009
- Korsunsky, Alexander M.; Sebastiani, Marco; Bemporad, Edoardo
- Materials Letters, Vol. 63, Issue 22
Residual stress evaluation at the micrometer scale: Analysis of thin coatings by FIB milling and digital image correlation
journal, December 2010
- Korsunsky, Alexander M.; Sebastiani, Marco; Bemporad, Edoardo
- Surface and Coatings Technology, Vol. 205, Issue 7
Depth-resolved residual stress analysis of thin coatings by a new FIB–DIC method
journal, October 2011
- Sebastiani, Marco; Eberl, Christoph; Bemporad, Edoardo
- Materials Science and Engineering: A, Vol. 528, Issue 27
Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging
journal, January 2012
- Song, Xu; Yeap, Kong Boon; Zhu, Jing
- Thin Solid Films, Vol. 520, Issue 6
High resolution residual stress measurement on amorphous and crystalline plasma-sprayed single-splats
journal, July 2012
- Sebastiani, M.; Bolelli, G.; Lusvarghi, L.
- Surface and Coatings Technology, Vol. 206, Issue 23
A New Methodology For In-Situ Residual Stress Measurement In MEMS Structures
conference, January 2010
- Sebastiani, M.; Bemporad, E.; Melone, G.
- STRESS-INDUCED PHENOMENA IN METALLIZATION: 11th International Workshop, AIP Conference Proceedings
Residual micro-stress distributions in heat-pressed ceramic on zirconia and porcelain-fused to metal systems: Analysis by FIB–DIC ring-core method and correlation with fracture toughness
journal, November 2015
- Sebastiani, M.; Massimi, F.; Merlati, G.
- Dental Materials, Vol. 31, Issue 11
Micron-Scale Residual Stress Measurement by Micro-Hole Drilling and Digital Image Correlation
journal, May 2011
- Winiarski, B.; Withers, P. J.
- Experimental Mechanics, Vol. 52, Issue 4
A simple method for residual stress measurements in thin films by means of focused ion beam milling and digital image correlation
journal, January 2013
- Krottenthaler, M.; Schmid, C.; Schaufler, J.
- Surface and Coatings Technology, Vol. 215
A critical comparison between XRD and FIB residual stress measurement techniques in thin films
journal, December 2014
- Bemporad, E.; Brisotto, M.; Depero, L. E.
- Thin Solid Films, Vol. 572
Focused ion beam four-slot milling for Poisson's ratio and residual stress evaluation at the micron scale
journal, July 2014
- Sebastiani, M.; Eberl, C.; Bemporad, E.
- Surface and Coatings Technology, Vol. 251
A New Methodology to Analyze Instabilities in SEM Imaging
journal, October 2014
- Mansilla, Catalina; Ocelík, Václav; De Hosson, Jeff T. M.
- Microscopy and Microanalysis, Vol. 20, Issue 6
A state-of-the-art review of micron-scale spatially resolved residual stress analysis by FIB-DIC ring-core milling and other techniques
journal, August 2015
- Lunt, Alexander JG; Baimpas, Nikolaos; Salvati, Enrico
- The Journal of Strain Analysis for Engineering Design, Vol. 50, Issue 7
Nano-scale mapping of lattice strain and orientation inside carbon core SiC fibres by synchrotron X-ray diffraction
journal, November 2014
- Baimpas, Nikolaos; Lunt, Alexander J. G.; Dolbnya, Igor P.
- Carbon, Vol. 79
A review of micro-scale focused ion beam milling and digital image correlation analysis for residual stress evaluation and error estimation
journal, December 2015
- Lunt, Alexander J. G.; Korsunsky, Alexander M.
- Surface and Coatings Technology, Vol. 283
A novel pillar indentation splitting test for measuring fracture toughness of thin ceramic coatings
journal, May 2014
- Sebastiani, M.; Johanns, K. E.; Herbert, E. G.
- Philosophical Magazine, Vol. 95, Issue 16-18
Measurement of fracture toughness by nanoindentation methods: Recent advances and future challenges
journal, December 2015
- Sebastiani, M.; Johanns, K. E.; Herbert, E. G.
- Current Opinion in Solid State and Materials Science, Vol. 19, Issue 6
Design, fabrication and characterization of multilayer Cr-CrN thin coatings with tailored residual stress profiles
journal, December 2016
- Renzelli, Marco; Mughal, Muhammad Zeeshan; Sebastiani, Marco
- Materials & Design, Vol. 112
Nanoscale residual stress depth profiling by Focused Ion Beam milling and eigenstrain analysis
journal, May 2018
- Korsunsky, A. M.; Salvati, E.; Lunt, A. G. J.
- Materials & Design, Vol. 145
Variational eigenstrain analysis of synchrotron diffraction measurements of residual elastic strain in a bent titanium alloy bar
journal, January 2006
- Korsunsky, Alexander
- Journal of Mechanics of Materials and Structures, Vol. 1, Issue 2
Uncertainty quantification of residual stress evaluation by the FIB–DIC ring-core method due to elastic anisotropy effects
journal, June 2016
- Salvati, Enrico; Sui, Tan; Korsunsky, Alexander M.
- International Journal of Solids and Structures, Vol. 87
Quantifying eigenstrain distributions induced by focused ion beam damage in silicon
journal, December 2016
- Korsunsky, Alexander M.; Guénolé, Julien; Salvati, Enrico
- Materials Letters, Vol. 185
Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
journal, January 2009
- Janssen, G. C. A. M.; Abdalla, M. M.; van Keulen, F.
- Thin Solid Films, Vol. 517, Issue 6
Determination of the elastic moduli and residual stresses of freestanding Au-TiW bilayer thin films by nanoindentation
journal, September 2016
- Ghidelli, Matteo; Sebastiani, Marco; Collet, Christian
- Materials & Design, Vol. 106
Microstructural evolution during film growth
journal, September 2003
- Petrov, I.; Barna, P. B.; Hultman, L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 21, Issue 5
Volmer-Weber growth stages of polycrystalline metal films probed by in situ and real-time optical diagnostics
journal, November 2015
- Abadias, G.; Simonot, L.; Colin, J. J.
- Applied Physics Letters, Vol. 107, Issue 18
Measurements of the intrinsic stress in thin metal films
journal, January 1990
- Abermann, R.
- Vacuum, Vol. 41, Issue 4-6
Compressive Stress in Polycrystalline Volmer-Weber Films
journal, April 2005
- Koch, R.; Hu, Dongzhi; Das, A. K.
- Physical Review Letters, Vol. 94, Issue 14
Origins of residual stress in thin films: Interaction between microstructure and growth kinetics
journal, November 2016
- Engwall, A. M.; Rao, Z.; Chason, E.
- Materials & Design, Vol. 110
Measurements of stress during vapor deposition of copper and silver thin films and multilayers
journal, December 1996
- Shull, Alison L.; Spaepen, Frans
- Journal of Applied Physics, Vol. 80, Issue 11
Reversible stress changes at all stages of Volmer–Weber film growth
journal, February 2004
- Friesen, C.; Seel, S. C.; Thompson, C. V.
- Journal of Applied Physics, Vol. 95, Issue 3
Weak temperature dependence of stress relaxation in as-deposited polycrystalline gold films
journal, September 2010
- Leib, J.; Thompson, C. V.
- Physical Review B, Vol. 82, Issue 12
Fast and slow stress evolution mechanisms during interruptions of Volmer-Weber growth
journal, January 2014
- Yu, Hang Z.; Leib, Jeffrey S.; Boles, Steven T.
- Journal of Applied Physics, Vol. 115, Issue 4
Direct Evidence for Effects of Grain Structure on Reversible Compressive Deposition Stresses in Polycrystalline Gold Films
journal, June 2009
- Leib, J.; Mönig, R.; Thompson, C. V.
- Physical Review Letters, Vol. 102, Issue 25
Stresses in thin films: The relevance of grain boundaries and impurities
journal, May 1976
- Hoffman, R. W.
- Thin Solid Films, Vol. 34, Issue 2
Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films
journal, August 1999
- Nix, W. D.; Clemens, B. M.
- Journal of Materials Research, Vol. 14, Issue 8
Model for stress generated upon contact of neighboring islands on the surface of a substrate
journal, May 2001
- Freund, L. B.; Chason, Eric
- Journal of Applied Physics, Vol. 89, Issue 9
Interfaces and stresses in thin films
journal, January 2000
- Spaepen, F.
- Acta Materialia, Vol. 48, Issue 1
Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure
journal, April 2012
- Chason, E.; Shin, J. W.; Hearne, S. J.
- Journal of Applied Physics, Vol. 111, Issue 8
A kinetic analysis of residual stress evolution in polycrystalline thin films
journal, December 2012
- Chason, Eric
- Thin Solid Films, Vol. 526
Growth of patterned island arrays to identify origins of thin film stress
journal, March 2014
- Chason, E.; Shin, J. W.; Chen, C. -H.
- Journal of Applied Physics, Vol. 115, Issue 12
Stress evolution during growth of 1-D island arrays: Kinetics and length scaling
journal, March 2015
- Chason, E.; Engwall, A. M.; Miller, C. M.
- Scripta Materialia, Vol. 97
Grain growth and complex stress evolution during Volmer–Weber growth of polycrystalline thin films
journal, April 2014
- Yu, Hang Z.; Thompson, Carl V.
- Acta Materialia, Vol. 67
Grain Growth and Stress Relief in Thin Films
journal, January 1972
- Chaudhari, P.
- Journal of Vacuum Science and Technology, Vol. 9, Issue 1
Intrinsic stress in sputter-deposited thin films
journal, January 1992
- Windischmann, Henry
- Critical Reviews in Solid State and Materials Sciences, Vol. 17, Issue 6
Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering
journal, January 1977
- Thornton, John A.; Hoffman, David W.
- Journal of Vacuum Science and Technology, Vol. 14, Issue 1
The influence of bias sputter parameters on thick copper coatings deposited using a hollow cathode
journal, January 1977
- Thornton, John A.
- Thin Solid Films, Vol. 40
The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures
journal, September 1977
- Hoffman, D. W.; Thornton, John A.
- Thin Solid Films, Vol. 45, Issue 2
Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source
journal, March 1982
- Hoffman, D. W.; Thornton, John A.
- Journal of Vacuum Science and Technology, Vol. 20, Issue 3
The influence of discharge current on the intrinsic stress in Mo films deposited using cylindrical and planar magnetron sputtering sources
journal, May 1985
- Thornton, John A.; Hoffman, D. W.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 3, Issue 3
Compressive stress and inert gas in Mo films sputtered from a cylindrical‐post magnetron with Ne, Ar, Kr, and Xe
journal, January 1980
- Hoffman, D. W.; Thornton, John A.
- Journal of Vacuum Science and Technology, Vol. 17, Issue 1
Internal stresses in metallic films deposited by cylindrical magnetron sputtering
journal, November 1979
- Thornton, John A.; Tabock, Jack; Hoffman, D. W.
- Thin Solid Films, Vol. 64, Issue 1
Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering
journal, April 1989
- D'Heurle, F. M.; Harper, J. M. E.
- Thin Solid Films, Vol. 171, Issue 1
Microstructure of thin tantalum films sputtered onto inclined substrates: Experiments and atomistic simulations
journal, July 2003
- Dalla Torre, J.; Gilmer, G. H.; Windt, D. L.
- Journal of Applied Physics, Vol. 94, Issue 1
A simple model for the formation of compressive stress in thin films by ion bombardment
journal, April 1993
- Davis, C. A.
- Thin Solid Films, Vol. 226, Issue 1
On the origin of the metastable β-Ta phase stabilization in tantalum sputtered thin films
journal, March 2017
- Colin, Jonathan J.; Abadias, Grégory; Michel, Anny
- Acta Materialia, Vol. 126
The metal flux from a rotating cylindrical magnetron: a Monte Carlo simulation
journal, October 2008
- Van Aeken, K.; Mahieu, S.; Depla, D.
- Journal of Physics D: Applied Physics, Vol. 41, Issue 20
A novel pulsed magnetron sputter technique utilizing very high target power densities
journal, December 1999
- Kouznetsov, Vladimir; Macák, Karol; Schneider, Jochen M.
- Surface and Coatings Technology, Vol. 122, Issue 2-3
High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
journal, February 2010
- Sarakinos, K.; Alami, J.; Konstantinidis, S.
- Surface and Coatings Technology, Vol. 204, Issue 11
Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)
journal, March 2017
- Anders, André
- Journal of Applied Physics, Vol. 121, Issue 17
The Stopping and Range of Ions in Matter
book, January 1985
- Ziegler, James F.; Biersack, Jochen P.
- Treatise on Heavy-Ion Science
On the origin of stress in magnetron sputtered TiN layers
journal, December 2000
- Kamminga, J. -D.; de Keijser, Th. H.; Delhez, R.
- Journal of Applied Physics, Vol. 88, Issue 11
Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions
journal, December 2010
- Fillon, A.; Abadias, G.; Michel, A.
- Thin Solid Films, Vol. 519, Issue 5
Atom insertion into grain boundaries and stress generation in physically vapor deposited films
journal, July 2013
- Magnfält, D.; Abadias, G.; Sarakinos, K.
- Applied Physics Letters, Vol. 103, Issue 5
Diffraction stress analysis in fiber-textured TiN thin films grown by ion-beam sputtering: Application to (001) and mixed (001)+(111) texture
journal, March 2004
- Abadias, G.; Tse, Y. Y.
- Journal of Applied Physics, Vol. 95, Issue 5
A kinetic model for stress generation in thin films grown from energetic vapor fluxes
journal, April 2016
- Chason, E.; Karlson, M.; Colin, J. J.
- Journal of Applied Physics, Vol. 119, Issue 14
Compositional dependent thin film stress states
journal, August 2010
- Fu, B.; Thompson, G. B.
- Journal of Applied Physics, Vol. 108, Issue 4
Stress evolution in magnetron sputtered Ti–Zr–N and Ti–Ta–N films studied by in situ wafer curvature: Role of energetic particles
journal, December 2009
- Abadias, G.; Koutsokeras, L. E.; Guerin, Ph.
- Thin Solid Films, Vol. 518, Issue 5
Thin film deposition: fundamentals and modeling
journal, November 1998
- Gilmer, G. H.; Huang, Hanchen; Roland, Christopher
- Computational Materials Science, Vol. 12, Issue 4
Effect of adatom surface diffusivity on microstructure and intrinsic stress evolutions during Ag film growth
journal, August 2012
- Flötotto, D.; Wang, Z. M.; Jeurgens, L. P. H.
- Journal of Applied Physics, Vol. 112, Issue 4
Stress evolution during and after sputter deposition of thin Cu–Al alloy films
journal, May 2008
- Pletea, M.; Wendrock, H.; Kaltofen, R.
- Journal of Physics: Condensed Matter, Vol. 20, Issue 25
Influence of Ni Solute segregation on the intrinsic growth stresses in Cu(Ni) thin films
journal, March 2016
- Kaub, T. M.; Felfer, P.; Cairney, J. M.
- Scripta Materialia, Vol. 113
Stress engineering using low oxygen background pressures during Volmer–Weber growth of polycrystalline nickel films
journal, March 2015
- Yu, Hang Z.; Thompson, Carl V.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 2
Influence of Fe(Cr) miscibility on thin film grain size and stress
journal, August 2016
- Zhou, Xuyang; Kaub, Tyler; Martens, Richard L.
- Thin Solid Films, Vol. 612
Grain Boundary Specific Segregation in Nanocrystalline Fe(Cr)
journal, October 2016
- Zhou, Xuyang; Yu, Xiao-xiang; Kaub, Tyler
- Scientific Reports, Vol. 6, Issue 1
In situ growth stresses during the phase separation of immiscible FeCu thin films
journal, December 2010
- Fu, B.; Thompson, G. B.
- Applied Surface Science, Vol. 257, Issue 5
Phase stability and in situ growth stresses in Ti/Nb thin films
journal, November 2014
- Wan, Li; Yu, Xiao-xiang; Thompson, Gregory B.
- Acta Materialia, Vol. 80
Interrelationship of in situ growth stress evolution and phase transformations in Ti/W multilayered thin films
journal, June 2016
- Wan, Li; Yu, Xiao-xiang; Zhou, Xuyang
- Journal of Applied Physics, Vol. 119, Issue 24
Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers
journal, July 2001
- Bajt, Saša; Stearns, Daniel G.; Kearney, Patrick A.
- Journal of Applied Physics, Vol. 90, Issue 2
Polymorphic phase stability in thin multilayers
journal, June 1998
- Dregia, S. A.; Banerjee, R.; Fraser, H. L.
- Scripta Materialia, Vol. 39, Issue 2
Direct Observation of the Thickness-Induced Crystallization and Stress Build-Up during Sputter-Deposition of Nanoscale Silicide Films
journal, December 2016
- Krause, Bärbel; Abadias, Gregory; Michel, Anny
- ACS Applied Materials & Interfaces, Vol. 8, Issue 50
Velocity of propagation in the shock-crystallization of sputtered amorphous germanium
journal, August 1973
- Mineo, A.; Matsuda, A.; Kurosu, T.
- Solid State Communications, Vol. 13, Issue 3
Crystallization‐front velocity during scanned laser crystallization of amorphous Ge films
journal, August 1980
- Chapman, Ralph L.; Fan, John C. C.; Zeiger, Herbert J.
- Applied Physics Letters, Vol. 37, Issue 3
Liquid-phase explosive crystallization of electron-beam-evaporated a-Si films induced by flash lamp annealing
journal, January 2013
- Ohdaira, Keisuke; Matsumura, Hideki
- Journal of Crystal Growth, Vol. 362
Mechanical stresses upon crystallization in phase change materials
journal, November 2001
- Pedersen, T. P. Leervad; Kalb, J.; Njoroge, W. K.
- Applied Physics Letters, Vol. 79, Issue 22
The relationship between deposition conditions, the beta to alpha phase transformation, and stress relaxation in tantalum thin films
journal, November 1992
- Clevenger, L. A.; Mutscheller, A.; Harper, J. M. E.
- Journal of Applied Physics, Vol. 72, Issue 10
Sputtering deposited TiNi films: relationship among processing, stress evolution and phase transformation behaviors
journal, April 2003
- Fu, Yongqing; Du, Hejun; Zhang, Sam
- Surface and Coatings Technology, Vol. 167, Issue 2-3
Composition, residual stress, and structural properties of thin tungsten nitride films deposited by reactive magnetron sputtering
journal, August 2000
- Shen, Y. G.; Mai, Y. W.; McKenzie, D. R.
- Journal of Applied Physics, Vol. 88, Issue 3
Phase transformation of thin sputter-deposited tungsten films at room temperature
journal, January 2002
- Rossnagel, S. M.; Noyan, I. C.; Cabral, C.
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 20, Issue 5
Phase transformation of sputter deposited tungsten thin films with A‐15 structure
journal, June 1996
- O’Keefe, M. J.; Grant, J. T.
- Journal of Applied Physics, Vol. 79, Issue 12
Growth and characterization of α and β -phase tungsten films on various substrates
journal, March 2016
- Lee, Jeong-Seop; Cho, Jaehun; You, Chun-Yeol
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 34, Issue 2
Ti segregation in regulating the stress and microstructure evolution in W-Ti nanocrystalline films
journal, August 2017
- Kaub, Tyler; Thompson, Gregory B.
- Journal of Applied Physics, Vol. 122, Issue 8
Past achievements and future challenges in the development of three-dimensional photonic metamaterials
journal, July 2011
- Soukoulis, Costas M.; Wegener, Martin
- Nature Photonics, Vol. 5, Issue 9, p. 523-530
FinFET-a self-aligned double-gate MOSFET scalable to 20 nm
journal, January 2000
- Chenming Hu, ; Bokor, J.
- IEEE Transactions on Electron Devices, Vol. 47, Issue 12
Electromigration-induced stress in aluminum conductor lines measured by x-ray microdiffraction
journal, March 1998
- Wang, P. -C.; Cargill, G. S.; Noyan, I. C.
- Applied Physics Letters, Vol. 72, Issue 11
Deformation Potentials and Mobilities in Non-Polar Crystals
journal, October 1950
- Bardeen, J.; Shockley, W.
- Physical Review, Vol. 80, Issue 1
Piezoresistance Effect in Germanium and Silicon
journal, April 1954
- Smith, Charles S.
- Physical Review, Vol. 94, Issue 1
A Logic Nanotechnology Featuring Strained-Silicon
journal, April 2004
- Thompson, S. E.; Armstrong, M.; Auth, C.
- IEEE Electron Device Letters, Vol. 25, Issue 4
Lattice strain analysis of transistor structures with silicon–germanium and silicon–carbon source∕drain stressors
journal, February 2005
- Ang, Kah-Wee; Chui, King-Jien; Bliznetsov, Vladimir
- Applied Physics Letters, Vol. 86, Issue 9
Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance
journal, February 2002
- Ito, Shinya; Namba, Hiroaki; Hirata, Tsuyoshi
- Microelectronics Reliability, Vol. 42, Issue 2
Analysis of Bi-Metal Thermostats
journal, January 1925
- Timoshenko, S.
- Journal of the Optical Society of America, Vol. 11, Issue 3
Systematic Characterization of Pseudomorphic (110) Intrinsic SiGe Epitaxial Films for Hybrid Orientation Technology with Embedded SiGe Source/Drain
journal, January 2006
- Ouyang, Christine; Madan, Anita; Klymko, Nancy
- MRS Proceedings, Vol. 913
Impact of Fin Doping and Gate Stack on FinFET (110) and (100) Electron and Hole Mobilities
journal, March 2012
- Akarvardar, Kerem; Young, Chadwin D.; Baykan, Mehmet O.
- IEEE Electron Device Letters, Vol. 33, Issue 3
Mechanical behavior of stressed films on anisotropic substrates
journal, November 2008
- Murray, Conal E.; Saenger, K. L.
- Journal of Applied Physics, Vol. 104, Issue 10
Process‐induced mechanical stress in isolation structures studied by micro‐Raman spectroscopy
journal, October 1993
- De Wolf, I.; Norström, H.; Maes, H. E.
- Journal of Applied Physics, Vol. 74, Issue 7
Effects of laser-induced heating on Raman stress measurements of silicon and silicon-germanium structures
journal, June 2007
- Georgi, Carsten; Hecker, Michael; Zschech, Ehrenfried
- Journal of Applied Physics, Vol. 101, Issue 12
Direct Mapping of Strain in a Strained Silicon Transistor by High-Resolution Electron Microscopy
journal, April 2008
- Hüe, Florian; Hÿtch, Martin; Bender, Hugo
- Physical Review Letters, Vol. 100, Issue 15
Microfabricated strained substrates for Ge epitaxial growth
journal, May 2005
- Evans, P. G.; Rugheimer, P. P.; Lagally, M. G.
- Journal of Applied Physics, Vol. 97, Issue 10
High-resolution strain mapping in heteroepitaxial thin-film features
journal, July 2005
- Murray, C. E.; Yan, H. -F.; Noyan, I. C.
- Journal of Applied Physics, Vol. 98, Issue 1
Submicron mapping of silicon-on-insulator strain distributions induced by stressed liner structures
journal, July 2008
- Murray, Conal E.; Saenger, K. L.; Kalenci, O.
- Journal of Applied Physics, Vol. 104, Issue 1
Mechanics of edge effects in anisotropic thin film∕substrate systems
journal, November 2006
- Murray, Conal E.
- Journal of Applied Physics, Vol. 100, Issue 10
Probing strain at the nanoscale with X-ray diffraction in microelectronic materials induced by stressor elements
journal, March 2013
- Murray, Conal E.; Polvino, S. M.; Noyan, I. C.
- Thin Solid Films, Vol. 530
Strain measured in a silicon-on-insulator, complementary metal-oxide-semiconductor device channel induced by embedded silicon-carbon source/drain regions
journal, February 2009
- Murray, Conal E.; Ren, Z.; Ying, A.
- Applied Physics Letters, Vol. 94, Issue 6
Resistance Monitoring and Effects of Nonadhesion During Electromigration in Aluminum Films
journal, March 1968
- Rosenberg, R.; Berenbaum, L.
- Applied Physics Letters, Vol. 12, Issue 5
Effects of overlayers on electromigration reliability improvement for Cu/low K interconnects
conference, January 2004
- Hu, C. -K.; Canaperi, D.; Chen, S. T.
- 2004 IEEE International Reliability Physics Symposium. Proceedings
Electromigration Cu mass flow in Cu interconnections
journal, May 2006
- Hu, C. -K.; Canaperi, D.; Chen, S. T.
- Thin Solid Films, Vol. 504, Issue 1-2
Stress gradients induced in Cu films by capping layers
journal, December 2008
- Murray, Conal E.; Besser, Paul R.; Witt, Christian
- Applied Physics Letters, Vol. 93, Issue 22
Surface Studies of Solids by Total Reflection of X-Rays
journal, July 1954
- Parratt, L. G.
- Physical Review, Vol. 95, Issue 2
Evanescent absorption in kinematic surface Bragg diffraction
journal, February 1987
- Dosch, H.
- Physical Review B, Vol. 35, Issue 5
Strain distribution in thin aluminum films using x‐ray depth profiling
journal, January 1988
- Doerner, M. F.; Brennan, S.
- Journal of Applied Physics, Vol. 63, Issue 1
Origin of stress gradients induced in capped, copper metallization
journal, February 2014
- Murray, Conal E.
- Applied Physics Letters, Vol. 104, Issue 8
Evaluation of stress gradients ??ij(z) from their discrete laplace transforms ??ij(τk) obtained by x-ray diffraction performed in the scattered vector mode
journal, August 1996
- Genzel, Ch.
- Physica Status Solidi (a), Vol. 156, Issue 2
Optical and mechanical characterization of evaporated SiO_2 layers Long-term evolution
journal, January 1996
- Scherer, K.; Nouvelot, L.; Lacan, P.
- Applied Optics, Vol. 35, Issue 25
Stress in porous thin films through absorption of polar molecules (and relevance to optical coatings)
journal, November 1980
- Hirsch, E. H.
- Journal of Physics D: Applied Physics, Vol. 13, Issue 11
Mechanical Properties of Optical Dielectric Thin Films Deposited by the Ion Plating Technique
journal, January 1997
- Mahodaux, Christine; Rigneault, Hervé; Giovannini, Hugues
- Microscopy Microanalysis Microstructures, Vol. 8, Issue 4-5
The multilayer-modified Stoney’s formula for laminated polymer composites on a silicon substrate
journal, November 1999
- Kim, Jin S.; Paik, Kyung W.; Oh, Seung H.
- Journal of Applied Physics, Vol. 86, Issue 10
Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
journal, January 2002
- Thielsch, Roland; Gatto, Alexandre; Kaiser, Norbert
- Applied Optics, Vol. 41, Issue 16
Stability and performance of organic-inorganic thin films on polymer substrates
journal, March 2017
- Caron, Martin; Zabeida, Oleg; Klemberg-Sapieha, Jolanta Ewa
- Surface and Coatings Technology, Vol. 314
Influence of internal stress in optical thin films on their failure modes assessed by in situ real-time scratch analysis
journal, May 2017
- Poirié, Thomas; Schmitt, Thomas; Bousser, Etienne
- Tribology International, Vol. 109
The microstructure of sputter‐deposited coatings
journal, November 1986
- Thornton, John A.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 4, Issue 6
Revised structure zone model for thin film physical structure
journal, April 1984
- Messier, R.; Giri, A. P.; Roy, R. A.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 2, Issue 2
A structure zone diagram including plasma-based deposition and ion etching
journal, May 2010
- Anders, André
- Thin Solid Films, Vol. 518, Issue 15
Plasma deposition of low‐stress electret films for electroacoustic and solar cell applications
journal, September 1996
- Klemberg‐Sapieha, J. E.; Martinu, L.; Wertheimer, M. R.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 14, Issue 5
Interface engineering during plasma-enhanced chemical vapor deposition of porous/dense SiN1.3 optical multilayers
journal, December 2004
- Amassian, A.; Vernhes, R.; Klemberg-Sapieha, J. E.
- Thin Solid Films, Vol. 469-470
Fabrication and testing of nanoporous Si3N4 optical filters for gas sensing applications
journal, August 2013
- Vernhes, R.; Klemberg-Sapieha, J. E.; Martinu, L.
- Sensors and Actuators B: Chemical, Vol. 185
Properties and stability of diamond-like carbon films related to bonded and unbonded hydrogen
journal, April 1993
- Martinu, L.; Raveh, A.; Boutard, D.
- Diamond and Related Materials, Vol. 2, Issue 5-7
Formation and behavior of unbonded hydrogen in a-C:H of various compositions and densities
journal, September 2009
- Houska, J.; Klemberg-Sapieha, J. E.; Martinu, L.
- Surface and Coatings Technology, Vol. 203, Issue 24
Mechanical characteristics of optical coatings prepared by various techniques: a comparative study
journal, January 2004
- Klemberg-Sapieha, Jolanta E.; Oberste-Berghaus, Jörg; Martinu, Ludvik
- Applied Optics, Vol. 43, Issue 13
Reactive HiPIMS deposition of SiO 2 /Ta 2 O 5 optical interference filters
journal, December 2014
- Hála, Matěj; Vernhes, Richard; Zabeida, Oleg
- Journal of Applied Physics, Vol. 116, Issue 21
Growth and properties of high index Ta2O5 optical coatings prepared by HiPIMS and other methods
journal, February 2014
- Hála, M.; Vernhes, R.; Zabeida, O.
- Surface and Coatings Technology, Vol. 241
Design and fabrication of stress-compensated optical coatings: Fabry–Perot filters for astronomical applications
journal, January 2014
- de Denus-Baillargeon, Marie-Maude; Schmitt, Thomas; Larouche, Stéphane
- Applied Optics, Vol. 53, Issue 12
Ultra-low-stress thin-film interference filters
journal, January 2006
- Ockenfuss, Georg J.; Klinger, Robert E.
- Applied Optics, Vol. 45, Issue 7
Rapid flash annealing of thermally reactive copolymers in a roll-to-roll process for polymer solar cells
journal, January 2012
- Helgesen, Martin; Carlé, Jon Eggert; Andreasen, Birgitta
- Polymer Chemistry, Vol. 3, Issue 9
Thin-Film Permeation-Barrier Technology for Flexible Organic Light-Emitting Devices
journal, January 2004
- Lewis, J.S.; Weaver, M.S.
- IEEE Journal of Selected Topics in Quantum Electronics, Vol. 10, Issue 1, p. 45-57
Transparent thermoplastic polymers in plasma-assisted coating processes
journal, September 2003
- Munzert, Peter; Schulz, Ulrike; Kaiser, Norbert
- Surface and Coatings Technology, Vol. 174-175
Method for the Vacuum Deposition of Optical Coatings on Polymethyl Methacrylate
journal, April 2007
- Munzert, Peter; Schulz, Ulrike; Kaiser, Norbert
- Plasma Processes and Polymers, Vol. 4, Issue S1
Effect of process parameters on injection compression molding of pickup lens
journal, October 2005
- Young, Wen-Bin
- Applied Mathematical Modelling, Vol. 29, Issue 10
Comparative study of ALD SiO_2 thin films for optical applications
journal, January 2016
- Pfeiffer, Kristin; Shestaeva, Svetlana; Bingel, Astrid
- Optical Materials Express, Vol. 6, Issue 2
Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry
journal, November 1998
- Bergeron, A.; Klemberg-Sapieha, J. E.; Martinu, L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 6
Tailoring the adhesion of optical films on polymethyl-methacrylate by plasma-induced surface stabilization
journal, April 2005
- Klemberg-Sapieha, J. E.; Martinu, L.; Yamasaki, N. L. S.
- Thin Solid Films, Vol. 476, Issue 1
Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma
journal, May 1997
- Klemberg-Sapieha, J. E.; Poitras, D.; Martinu, L.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 15, Issue 3
Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering
journal, October 1993
- Monaghan, D. P.; Teer, D. G.; Logan, P. A.
- Surface and Coatings Technology, Vol. 60, Issue 1-3
Role of the Transfer Film on the Friction and Wear of Metal Carbide Reinforced Amorphous Carbon Coatings During Run-in
journal, May 2009
- Scharf, T. W.; Singer, I. L.
- Tribology Letters, Vol. 36, Issue 1
Tribology of diamond-like carbon films: recent progress and future prospects
journal, September 2006
- Erdemir, Ali; Donnet, Christophe
- Journal of Physics D: Applied Physics, Vol. 39, Issue 18
Tribological and electrical properties of metal‐containing hydrogenated carbon films
journal, April 1987
- Dimigen, H.; Hübsch, H.; Memming, R.
- Applied Physics Letters, Vol. 50, Issue 16
Attaining High Levels of Bearing Performance with a Nanocomposite Diamond-Like Carbon Coating
journal, May 2013
- Eckels, M.; Kotzalas, M. N.; Doll, G. L.
- Tribology Transactions, Vol. 56, Issue 3
Effects of normal and shear stresses in rolling and mixed mode contact on the micropitting wear of a WC/a-C:H tribological coating
journal, December 2015
- Mahmoudi, B.; Hager, C. H.; Doll, G. L.
- Surface and Coatings Technology, Vol. 283
Technical note: A gyro spin axis bearing performance using titanium carbide coated balls
journal, December 1987
- McKee, F. Brown
- Surface and Coatings Technology, Vol. 33
Estimation of the Molecular Junction Temperatures in Four-Ball Contacts by Chemical Reaction Rate Studies
journal, January 1978
- Hsu, Stephen M.; Klaus, E. Erwin
- A S L E Transactions, Vol. 21, Issue 3
Wear-resistant hard titanium carbide coatings for space applications
journal, April 1990
- Boving, H. J.; Hintermann, H. E.
- Tribology International, Vol. 23, Issue 2
Wear-resistant coatings for bearing applications
journal, June 1978
- Hintermann, H. E.; Boving, H.; Hänni, W.
- Wear, Vol. 48, Issue 2
Properties and performance of chemical-vapour- deposited TiC-coated ball-bearing components
journal, October 1987
- Boving, H. J.; Hintermann, H. E.
- Thin Solid Films, Vol. 153, Issue 1-3
Residual stress measurement of refractory coatings as a nondestructive evaluation
journal, March 1985
- Chollet, L.; Boving, H.; Hintermann, H. E.
- Journal of Materials for Energy Systems, Vol. 6, Issue 4
Thermodynamics of deposition flux-dependent intrinsic film stress
journal, February 2016
- Saedi, Amirmehdi; Rost, Marcel J.
- Nature Communications, Vol. 7, Issue 1
Correlation of shape changes of grain surfaces and reversible stress evolution during interruptions of polycrystalline film growth
journal, April 2014
- Yu, Hang Z.; Thompson, Carl V.
- Applied Physics Letters, Vol. 104, Issue 14
Size effect of thermal expansion and thermal/intrinsic stresses in nanostructured thin films: Experiment and model
journal, October 2011
- Daniel, R.; Holec, D.; Bartosik, M.
- Acta Materialia, Vol. 59, Issue 17
Effects of oblique-angle deposition on intrinsic stress evolution during polycrystalline film growth
journal, September 2014
- Yu, Hang Z.; Thompson, Carl V.
- Acta Materialia, Vol. 77
Compressive intrinsic stress originates in the grain boundaries of dense refractory polycrystalline thin films
journal, February 2016
- Magnfält, D.; Fillon, A.; Boyd, R. D.
- Journal of Applied Physics, Vol. 119, Issue 5
Influence of phase stability on the in situ growth stresses in Cu/Nb multilayered films
journal, June 2017
- Guo, Qianying; Wan, Li; Yu, Xiao-xiang
- Acta Materialia, Vol. 132
Investigations on macroscopic intrinsic stress in amorphous binary-alloy films
journal, January 1992
- Dina, S.; Geyer, U.; v. Minnigerode, G.
- Annalen der Physik, Vol. 504, Issue 3
A model for stress generation and stress relief mechanisms applied to as-deposited filtered cathodic vacuum arc amorphous carbon films
journal, June 2005
- Bilek, M. M. M.; Verdon, M.; Ryves, L.
- Thin Solid Films, Vol. 482, Issue 1-2
A comprehensive model of stress generation and relief processes in thin films deposited with energetic ions
journal, April 2006
- Bilek, M. M. M.; McKenzie, D. R.
- Surface and Coatings Technology, Vol. 200, Issue 14-15
Strain-free, single-phase metastable Ti0.38Al0.62N alloys with high hardness: metal-ion energy vs. momentum effects during film growth by hybrid high-power pulsed/dc magnetron cosputtering
journal, April 2014
- Greczynski, G.; Lu, J.; Jensen, J.
- Thin Solid Films, Vol. 556
Metal versus rare-gas ion irradiation during Ti 1− x Al x N film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias
journal, November 2012
- Greczynski, Grzegorz; Lu, Jun; Jensen, Jens
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 6
Benefits of energetic ion bombardment for tailoring stress and microstructural evolution during growth of Cu thin films
journal, December 2017
- Cemin, Felipe; Abadias, Gregory; Minea, Tiberiu
- Acta Materialia, Vol. 141
Self-Replicating Cracks: A Collaborative Fracture Mode in Thin Films
journal, August 2014
- Marthelot, Joël; Roman, Benoît; Bico, José
- Physical Review Letters, Vol. 113, Issue 8
Telephone cord buckles—A relation between wavelength and adhesion
journal, February 2015
- Faou, Jean-Yvon; Parry, Guillaume; Grachev, Sergey
- Journal of the Mechanics and Physics of Solids, Vol. 75
Mechanisms of reversible stretchability of thin metal films on elastomeric substrates
journal, May 2006
- Lacour, Stephanie P.; Chan, Donald; Wagner, Sigurd
- Applied Physics Letters, Vol. 88, Issue 20, Article No. 204103
Stretchable and Foldable Silicon Integrated Circuits
journal, April 2008
- Kim, D.-H.; Ahn, J.-H.; Choi, W. M.
- Science, Vol. 320, Issue 5875, p. 507-511
Cracking-assisted fabrication of nanoscale patterns for micro/nanotechnological applications
journal, January 2016
- Kim, Minseok; Kim, Dong-Joo; Ha, Dogyeong
- Nanoscale, Vol. 8, Issue 18
A new failure mechanism in thin film by collaborative fracture and delamination: Interacting duos of cracks
journal, November 2015
- Marthelot, Joël; Bico, José; Melo, Francisco
- Journal of the Mechanics and Physics of Solids, Vol. 84
Mixed Mode Cracking in Layered Materials
book, January 1991
- Hutchinson, J. W.; Suo, Z.
- Advances in Applied Mechanics, Vol. 29, p. 63-191
Growth and configurational stability of circular, buckling-driven film delaminations
journal, February 1992
- Hutchinson, J. W.; Thouless, M. D.; Liniger, E. G.
- Acta Metallurgica et Materialia, Vol. 40, Issue 2
How Does Adhesion Induce the Formation of Telephone Cord Buckles?
journal, March 2012
- Faou, Jean-Yvon; Parry, Guillaume; Grachev, Sergey
- Physical Review Letters, Vol. 108, Issue 11
Works referencing / citing this record:
Structural and Thermal Characterisation of Nanofilms by Time-Resolved X-ray Scattering
journal, April 2019
- Plech, Anton; Krause, Bärbel; Baumbach, Tilo
- Nanomaterials, Vol. 9, Issue 4
Studies of internal stress induced by solidification of menthol melt as temporary consolidant in archaeological excavations using resistance strain gauge method
journal, July 2020
- Chen, Xiuxiu; Xu, Yang; Chen, Ming
- Heritage Science, Vol. 8, Issue 1
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text, January 2019
- Plech, Anton; Krause, Bärbel; Baumbach, Tilo
- MDPI
The effect of kinetics on intrinsic stress generation and evolution in sputter-deposited films at conditions of high atomic mobility
journal, January 2020
- Jamnig, A.; Pliatsikas, N.; Sarakinos, K.
- Journal of Applied Physics, Vol. 127, Issue 4
Surface modification of Ti64-Alloy with silver silicon nitride thin films
journal, August 2019
- Zaidi, Umi Zalilah; Mahmoodian, Reza; Bushroa, Abd Razak
- Journal of Adhesion Science and Technology, Vol. 33, Issue 22
Stress-tailoring magnetic anisotropy of V$_2$O$_3$/Ni bilayers
text, January 2021
- Wolowiec, Christian T.; Ramírez, Juan Gabriel; Lee, Min-Han
- arXiv
2019 Topical Meeting on Optical Interference Coatings: Manufacturing Problem Contest [invited]
journal, December 2019
- Poitras, Daniel; Li, Li; Jacobson, Michael R.
- Applied Optics, Vol. 59, Issue 5
Biofilm Rupture by Laser-Induced Stress Waves Increases with Loading Amplitude, Independent of Location
journal, February 2020
- Kearns, Kaitlyn L.; Boyd, James D.; Grady, Martha E.
- ACS Applied Bio Materials, Vol. 3, Issue 3
Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films
journal, November 2019
- Fischer, Maria; Trant, Mathis; Thorwarth, Kerstin
- Science and Technology of Advanced Materials, Vol. 20, Issue 1
Thin-film coating; historical evolution, conventional deposition technologies, stress-state micro/nano-level measurement/models and prospects projection: a critical review
journal, November 2019
- Mbam, Stephen Ogbonna; Nwonu, Sunday Emmanuel; Orelaja, Oluseyi Adewale
- Materials Research Express, Vol. 6, Issue 12
Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films
text, January 2019
- Fischer, Maria; Trant, Mathis; Thorwarth, Kerstin
- Taylor & Francis
Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
journal, November 2018
- Ali, Rashid; Renzelli, Marco; Khan, M.
- Nanomaterials, Vol. 8, Issue 11
Effect of an electric field during the deposition of silicon dioxide thin films by plasma enhanced atomic layer deposition: an experimental and computational study
journal, January 2020
- Beladiya, Vivek; Becker, Martin; Faraz, Tahsin
- Nanoscale, Vol. 12, Issue 3
Adhesion properties of 2D materials
journal, July 2019
- Megra, Yonas Tsegaye; Suk, Ji Won
- Journal of Physics D: Applied Physics, Vol. 52, Issue 36
Cathode/Electrolyte Interface-Dependent Changes in Stress and Strain in Lithium Iron Phosphate Composite Cathodes
journal, January 2019
- Bassett, Kimberly L.; Özgür Çapraz, Ö.; Özdogru, Bertan
- Journal of The Electrochemical Society, Vol. 166, Issue 12
In situ XRD measurements to explore phase formation in the near surface region
journal, November 2019
- Manova, Darina; Mändl, Stephan
- Journal of Applied Physics, Vol. 126, Issue 20
Structural and Thermal Characterisation of Nanofilms by Time-Resolved X-ray Scattering
text, January 2019
- Plech, Anton; Krause, Bärbel; Baumbach, Tilo
- MDPI
High-performance thin-film optical filters with stress compensation
journal, January 2019
- Begou, Thomas; Lemarchand, Fabien; Lemarquis, Frédéric
- Journal of the Optical Society of America A, Vol. 36, Issue 11
Photoluminescence mapping of the strain induced in InP and GaAs substrates by SiN stripes etched from thin films grown under controlled mechanical stress
journal, July 2020
- Gérard, Solène; Mokhtari, Merwan; Landesman, Jean-Pierre
- Thin Solid Films, Vol. 706
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journal, February 2020
- Saladukhin, Ihar; Abadias, Gregory; Uglov, Vladimir
- Coatings, Vol. 10, Issue 2
In-situ studies of silicide formation during growth of molybdenum-silicon interfaces
journal, October 2019
- Reinink, J.; Zameshin, A.; van de Kruijs, R. W. E.
- Journal of Applied Physics, Vol. 126, Issue 13
Crystallization kinetics and role of stress in Al induced layer exchange crystallization process of amorphous SiGe thin film on glass
journal, September 2019
- Sain, Twisha; Singh, Ch. Kishan; Ilango, S.
- Journal of Applied Physics, Vol. 126, Issue 12
Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films
text, January 2019
- Fischer, Maria; Trant, Mathis; Thorwarth, Kerstin
- Taylor & Francis
Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering
journal, November 2019
- Ries, Stefan; Banko, Lars; Hans, Marcus
- Plasma Sources Science and Technology, Vol. 28, Issue 11
Effects of Residual Stress Distribution on Interfacial Adhesion of Magnetron Sputtered AlN and AlN/Al Nanostructured Coatings on a (100) Silicon Substrate
journal, November 2018
- Ali, Rashid; Renzelli, Marco; Khan, M.
- Nanomaterials, Vol. 8, Issue 11
Influence of the Thickness of a Nanolayer Composite Coating on Values of Residual Stress and the Nature of Coating Wear
journal, January 2020
- Vereschaka, Alexey; Volosova, Marina; Chigarev, Anatoli
- Coatings, Vol. 10, Issue 1
Amorphous Silicon Self‐Rolling Micro Electromechanical Systems: From Residual Stress Control to Complex 3D Structures
journal, August 2019
- Pinto, Rui M. R.; Chu, Virginia; Conde, João Pedro
- Advanced Engineering Materials, Vol. 21, Issue 9
Organ-on-e-chip: Three-dimensional self-rolled biosensor array for electrical interrogations of human electrogenic spheroids
journal, August 2019
- Kalmykov, Anna; Huang, Changjin; Bliley, Jacqueline
- Science Advances, Vol. 5, Issue 8
Ion energy control via the electrical asymmetry effect to tune coating properties in reactive radio frequency sputtering
text, January 2019
- Ries, Stefan; Banko, Lars; Hans, Marcus
- RWTH Aachen University
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journal, January 2020
- Go, Myeongjong; Alam, Asrar; Choie, Ho Kwang
- Coatings, Vol. 10, Issue 1